JP2015023032A5 - - Google Patents

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Publication number
JP2015023032A5
JP2015023032A5 JP2014147844A JP2014147844A JP2015023032A5 JP 2015023032 A5 JP2015023032 A5 JP 2015023032A5 JP 2014147844 A JP2014147844 A JP 2014147844A JP 2014147844 A JP2014147844 A JP 2014147844A JP 2015023032 A5 JP2015023032 A5 JP 2015023032A5
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JP
Japan
Prior art keywords
aperture
detection
signal beam
opening
type opening
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Application number
JP2014147844A
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English (en)
Japanese (ja)
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JP2015023032A (ja
JP5805831B2 (ja
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Priority claimed from EP13177207.1A external-priority patent/EP2827136B1/en
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Publication of JP2015023032A publication Critical patent/JP2015023032A/ja
Publication of JP2015023032A5 publication Critical patent/JP2015023032A5/ja
Application granted granted Critical
Publication of JP5805831B2 publication Critical patent/JP5805831B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2014147844A 2013-07-19 2014-07-18 切り換え型マルチパースペクティブ検出器、切り換え型マルチパースペクティブ検出器用光学系、及び切り換え型マルチパースペクティブ検出器の動作方法 Active JP5805831B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP13177207.1 2013-07-19
EP13177207.1A EP2827136B1 (en) 2013-07-19 2013-07-19 Switchable multi perspective detector, optics therefore and method of operating thereof

Publications (3)

Publication Number Publication Date
JP2015023032A JP2015023032A (ja) 2015-02-02
JP2015023032A5 true JP2015023032A5 (https=) 2015-04-30
JP5805831B2 JP5805831B2 (ja) 2015-11-10

Family

ID=48874128

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014147844A Active JP5805831B2 (ja) 2013-07-19 2014-07-18 切り換え型マルチパースペクティブ検出器、切り換え型マルチパースペクティブ検出器用光学系、及び切り換え型マルチパースペクティブ検出器の動作方法

Country Status (4)

Country Link
US (1) US8963083B2 (https=)
EP (1) EP2827136B1 (https=)
JP (1) JP5805831B2 (https=)
TW (1) TWI523064B (https=)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9805908B2 (en) * 2015-02-18 2017-10-31 Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Signal charged particle deflection device, signal charged particle detection system, charged particle beam device and method of detection of a signal charged particle beam
TWI722855B (zh) 2015-03-24 2021-03-21 美商克萊譚克公司 用於具有改良之影像光束穩定性及詢問之帶電粒子顯微鏡之方法及系統
KR102441581B1 (ko) 2015-06-03 2022-09-07 삼성전자주식회사 표면 검사 방법 및 이를 이용한 포토 마스크의 검사 방법
US10103004B2 (en) * 2015-07-02 2018-10-16 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH System and method for imaging a secondary charged particle beam with adaptive secondary charged particle optics
CN114420523B (zh) * 2015-11-30 2025-04-15 Asml荷兰有限公司 多个带电粒子束的设备
WO2019166331A2 (en) * 2018-02-27 2019-09-06 Carl Zeiss Microscopy Gmbh Charged particle beam system and method
JP7085258B2 (ja) * 2018-04-13 2022-06-16 株式会社ホロン 超高速電子検出器および該検出器を組み込んだ走査型電子ビーム検査装置
WO2021180745A1 (en) 2020-03-11 2021-09-16 Asml Netherlands B.V. Systems and methods for signal electron detection
CN111948697B (zh) * 2020-07-08 2022-11-08 中国科学院国家空间科学中心 一种星载中能电子探测器
CN116368597A (zh) * 2020-09-22 2023-06-30 Asml荷兰有限公司 具有多个束波的装置的次级电子投影成像系统的反扫描操作模式

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5818851A (ja) * 1981-07-24 1983-02-03 Hitachi Ltd 反射電子検出装置
JPH0614453B2 (ja) * 1983-06-30 1994-02-23 三菱電機株式会社 カラ−受像管
US4894212A (en) 1987-07-20 1990-01-16 Mobil Oil Corp. Synthesis of crystalline silicate ZSM-11
JPH0547334A (ja) * 1991-08-12 1993-02-26 Shimadzu Corp ２次元電子分光装置
US5892224A (en) * 1996-05-13 1999-04-06 Nikon Corporation Apparatus and methods for inspecting wafers and masks using multiple charged-particle beams
JP3767341B2 (ja) * 2000-07-21 2006-04-19 株式会社日立製作所 電子線を用いたパターン検査方法及びその装置
WO2002037526A1 (en) * 2000-11-02 2002-05-10 Ebara Corporation Electron beam apparatus and method for manufacturing semiconductor device comprising the apparatus
JP3906866B2 (ja) * 2005-08-18 2007-04-18 株式会社日立製作所 荷電粒子ビーム検査装置
EP2654069B1 (en) * 2012-04-16 2016-02-24 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Multi channel detector, optics therefore and method of operating thereof
EP2654068B1 (en) * 2012-04-16 2017-05-17 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Switchable multi perspective detector, optics therefore and method of operating thereof

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