JP2012208360A5 - - Google Patents
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- JP2012208360A5 JP2012208360A5 JP2011074648A JP2011074648A JP2012208360A5 JP 2012208360 A5 JP2012208360 A5 JP 2012208360A5 JP 2011074648 A JP2011074648 A JP 2011074648A JP 2011074648 A JP2011074648 A JP 2011074648A JP 2012208360 A5 JP2012208360 A5 JP 2012208360A5
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011074648A JP5742376B2 (ja) | 2011-03-30 | 2011-03-30 | ポジ型感光性樹脂組成物 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011074648A JP5742376B2 (ja) | 2011-03-30 | 2011-03-30 | ポジ型感光性樹脂組成物 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012208360A JP2012208360A (ja) | 2012-10-25 |
| JP2012208360A5 true JP2012208360A5 (ru) | 2014-04-03 |
| JP5742376B2 JP5742376B2 (ja) | 2015-07-01 |
Family
ID=47188143
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011074648A Active JP5742376B2 (ja) | 2011-03-30 | 2011-03-30 | ポジ型感光性樹脂組成物 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5742376B2 (ru) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20150219991A1 (en) * | 2012-09-24 | 2015-08-06 | Toray Industries, Inc. | Positive-type photosensitive resin composition |
| SG11201501594UA (en) | 2012-09-25 | 2015-05-28 | Toray Industries | Positive photosensitive resin composition, and method for producing semiconductor device containing a cured film using said composition |
| JP6358095B2 (ja) * | 2013-01-09 | 2018-07-18 | Jsr株式会社 | 感光性組成物、重合体、樹脂膜およびその製造方法ならびに電子部品 |
| KR101720717B1 (ko) * | 2014-04-10 | 2017-03-28 | 제일모직 주식회사 | 포지티브형 감광성 수지 조성물, 감광성 수지막, 및 이를 이용한 표시 소자 |
| KR102445235B1 (ko) | 2015-03-27 | 2022-09-20 | 도레이 카부시키가이샤 | 감광성 수지 조성물, 감광성 시트, 반도체 장치 및 반도체 장치의 제조 방법 |
| JPWO2017043375A1 (ja) * | 2015-09-08 | 2018-06-21 | 東レ株式会社 | 感光性樹脂組成物、感光性シート、半導体装置および半導体装置の製造方法 |
| EP3358407A4 (en) | 2015-09-28 | 2019-05-22 | Toray Industries, Inc. | HARDENED FILM AND METHOD FOR THE PRODUCTION THEREOF |
| WO2017073481A1 (ja) * | 2015-10-28 | 2017-05-04 | 東レ株式会社 | ポジ型感光性樹脂組成物、感光性シート、硬化膜、層間絶縁膜、半導体保護膜、半導体装置の製造方法、半導体電子部品および半導体装置 |
| JP6982786B2 (ja) * | 2016-03-28 | 2021-12-17 | 東レ株式会社 | 感光性フィルム |
| KR102277707B1 (ko) * | 2016-04-25 | 2021-07-16 | 도레이 카부시키가이샤 | 수지 조성물 |
| JPWO2021020344A1 (ru) | 2019-08-01 | 2021-02-04 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4957884B2 (ja) * | 2005-03-24 | 2012-06-20 | 信越化学工業株式会社 | エポキシ樹脂組成物及び半導体装置 |
| JP4655757B2 (ja) * | 2005-05-19 | 2011-03-23 | 住友電気工業株式会社 | ポジ型感光性接着剤 |
| JP5649118B2 (ja) * | 2008-10-20 | 2015-01-07 | 日本化薬株式会社 | ポリイミド樹脂及びその組成物 |
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2011
- 2011-03-30 JP JP2011074648A patent/JP5742376B2/ja active Active