JP2012208360A5 - - Google Patents

Download PDF

Info

Publication number
JP2012208360A5
JP2012208360A5 JP2011074648A JP2011074648A JP2012208360A5 JP 2012208360 A5 JP2012208360 A5 JP 2012208360A5 JP 2011074648 A JP2011074648 A JP 2011074648A JP 2011074648 A JP2011074648 A JP 2011074648A JP 2012208360 A5 JP2012208360 A5 JP 2012208360A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011074648A
Other languages
English (en)
Japanese (ja)
Other versions
JP5742376B2 (ja
JP2012208360A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2011074648A priority Critical patent/JP5742376B2/ja
Priority claimed from JP2011074648A external-priority patent/JP5742376B2/ja
Publication of JP2012208360A publication Critical patent/JP2012208360A/ja
Publication of JP2012208360A5 publication Critical patent/JP2012208360A5/ja
Application granted granted Critical
Publication of JP5742376B2 publication Critical patent/JP5742376B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2011074648A 2011-03-30 2011-03-30 ポジ型感光性樹脂組成物 Active JP5742376B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011074648A JP5742376B2 (ja) 2011-03-30 2011-03-30 ポジ型感光性樹脂組成物

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011074648A JP5742376B2 (ja) 2011-03-30 2011-03-30 ポジ型感光性樹脂組成物

Publications (3)

Publication Number Publication Date
JP2012208360A JP2012208360A (ja) 2012-10-25
JP2012208360A5 true JP2012208360A5 (it) 2014-04-03
JP5742376B2 JP5742376B2 (ja) 2015-07-01

Family

ID=47188143

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011074648A Active JP5742376B2 (ja) 2011-03-30 2011-03-30 ポジ型感光性樹脂組成物

Country Status (1)

Country Link
JP (1) JP5742376B2 (it)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2902846B1 (en) * 2012-09-24 2019-11-20 Toray Industries, Inc. Positive photosensitive resin composition
KR102091496B1 (ko) * 2012-09-25 2020-03-20 도레이 카부시키가이샤 포지티브형 감광성 수지 조성물, 그것을 사용한 경화막을 포함하는 반도체 장치의 제조 방법
JP6358095B2 (ja) * 2013-01-09 2018-07-18 Jsr株式会社 感光性組成物、重合体、樹脂膜およびその製造方法ならびに電子部品
KR101720717B1 (ko) * 2014-04-10 2017-03-28 제일모직 주식회사 포지티브형 감광성 수지 조성물, 감광성 수지막, 및 이를 이용한 표시 소자
KR102445235B1 (ko) 2015-03-27 2022-09-20 도레이 카부시키가이샤 감광성 수지 조성물, 감광성 시트, 반도체 장치 및 반도체 장치의 제조 방법
WO2017043375A1 (ja) * 2015-09-08 2017-03-16 東レ株式会社 感光性樹脂組成物、感光性シート、半導体装置および半導体装置の製造方法
MY184067A (en) * 2015-09-28 2021-03-17 Toray Industries Cured film and method for manufacturing same
JPWO2017073481A1 (ja) * 2015-10-28 2018-08-16 東レ株式会社 ポジ型感光性樹脂組成物、感光性シート、硬化膜、層間絶縁膜、半導体保護膜、半導体装置の製造方法、半導体電子部品および半導体装置
KR102314567B1 (ko) * 2016-03-28 2021-10-19 도레이 카부시키가이샤 감광성 필름
KR102277707B1 (ko) * 2016-04-25 2021-07-16 도레이 카부시키가이샤 수지 조성물
WO2021020344A1 (ja) 2019-08-01 2021-02-04 東レ株式会社 感光性樹脂組成物、感光性シート、硬化膜、硬化膜の製造方法、層間絶縁膜および電子部品

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4957884B2 (ja) * 2005-03-24 2012-06-20 信越化学工業株式会社 エポキシ樹脂組成物及び半導体装置
JP4655757B2 (ja) * 2005-05-19 2011-03-23 住友電気工業株式会社 ポジ型感光性接着剤
JP5649118B2 (ja) * 2008-10-20 2015-01-07 日本化薬株式会社 ポリイミド樹脂及びその組成物

Similar Documents

Publication Publication Date Title
JP2013036205A5 (it)
JP2013209710A5 (it)
JP2011185429A5 (it)
JP2012247517A5 (it)
JP2012208360A5 (it)
JP2012201286A5 (it)
JP2014037914A5 (it)
JP2013249017A5 (it)
JP2014037207A5 (it)
JP2013036206A5 (it)
JP2014038139A5 (it)
JP2011183548A5 (it)
JP2013005265A5 (it)
JP2012136016A5 (it)
JP2013235142A5 (it)
JP2011230411A5 (it)
JP2013003639A5 (it)
JP2013001875A5 (it)
JP2012242337A5 (it)
JP2014042694A5 (it)
JP2012187751A5 (it)
JP2014019231A5 (it)
JP2013235318A5 (it)
JP2011182670A5 (it)
JP2013098097A5 (it)