JP2012159719A5 - - Google Patents

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Publication number
JP2012159719A5
JP2012159719A5 JP2011019706A JP2011019706A JP2012159719A5 JP 2012159719 A5 JP2012159719 A5 JP 2012159719A5 JP 2011019706 A JP2011019706 A JP 2011019706A JP 2011019706 A JP2011019706 A JP 2011019706A JP 2012159719 A5 JP2012159719 A5 JP 2012159719A5
Authority
JP
Japan
Prior art keywords
sin
rφc
rθc
command value
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2011019706A
Other languages
English (en)
Japanese (ja)
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JP2012159719A (ja
JP5530375B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2011019706A priority Critical patent/JP5530375B2/ja
Priority claimed from JP2011019706A external-priority patent/JP5530375B2/ja
Priority to PCT/JP2012/051858 priority patent/WO2012105455A1/ja
Publication of JP2012159719A publication Critical patent/JP2012159719A/ja
Priority to US13/955,658 priority patent/US9383596B2/en
Publication of JP2012159719A5 publication Critical patent/JP2012159719A5/ja
Application granted granted Critical
Publication of JP5530375B2 publication Critical patent/JP5530375B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2011019706A 2011-02-01 2011-02-01 可変分光素子 Expired - Fee Related JP5530375B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2011019706A JP5530375B2 (ja) 2011-02-01 2011-02-01 可変分光素子
PCT/JP2012/051858 WO2012105455A1 (ja) 2011-02-01 2012-01-27 可変分光素子
US13/955,658 US9383596B2 (en) 2011-02-01 2013-07-31 Variable spectrum element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011019706A JP5530375B2 (ja) 2011-02-01 2011-02-01 可変分光素子

Publications (3)

Publication Number Publication Date
JP2012159719A JP2012159719A (ja) 2012-08-23
JP2012159719A5 true JP2012159719A5 (enExample) 2014-02-06
JP5530375B2 JP5530375B2 (ja) 2014-06-25

Family

ID=46602671

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011019706A Expired - Fee Related JP5530375B2 (ja) 2011-02-01 2011-02-01 可変分光素子

Country Status (3)

Country Link
US (1) US9383596B2 (enExample)
JP (1) JP5530375B2 (enExample)
WO (1) WO2012105455A1 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10088670B1 (en) * 2015-03-20 2018-10-02 C. Anthony Hester Interference based spatial light modulator systems and methods

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06241899A (ja) 1993-01-29 1994-09-02 Shimadzu Corp エタロン駆動機構
JP3812550B2 (ja) * 2003-07-07 2006-08-23 セイコーエプソン株式会社 波長可変光フィルタ
JP5085101B2 (ja) * 2006-11-17 2012-11-28 オリンパス株式会社 可変分光素子
JP2008151544A (ja) * 2006-12-14 2008-07-03 Olympus Corp 可変分光素子、分光装置および内視鏡システム
JP2008183350A (ja) * 2007-01-31 2008-08-14 Olympus Corp 可変分光素子、分光装置および内視鏡システム
JP2008197362A (ja) * 2007-02-13 2008-08-28 Olympus Corp 可変分光素子
JP5798709B2 (ja) * 2009-03-04 2015-10-21 セイコーエプソン株式会社 光フィルター及びそれを備えた光モジュール
JP2010224011A (ja) * 2009-03-19 2010-10-07 Olympus Corp エタロン装置及びそれを備えた光学ユニット
JP5363393B2 (ja) * 2010-03-30 2013-12-11 オリンパス株式会社 可変分光素子
JP5363394B2 (ja) * 2010-03-30 2013-12-11 オリンパス株式会社 可変分光素子

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