JP2012156160A - 液体噴射ヘッド及び液体噴射装置並びに圧電素子 - Google Patents
液体噴射ヘッド及び液体噴射装置並びに圧電素子 Download PDFInfo
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- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical group [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 7
- 230000010287 polarization Effects 0.000 description 7
- 239000002243 precursor Substances 0.000 description 7
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- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
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- VXUYXOFXAQZZMF-UHFFFAOYSA-N titanium(IV) isopropoxide Chemical compound CC(C)O[Ti](OC(C)C)(OC(C)C)OC(C)C VXUYXOFXAQZZMF-UHFFFAOYSA-N 0.000 description 2
- 229910052723 transition metal Inorganic materials 0.000 description 2
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Abstract
【解決手段】ノズル開口21に連通する圧力発生室12と、圧電体層70と該圧電体層に設けられた電極60、80とを備えた圧電素子300と、を具備し、前記圧電体層70は、鉛、ジルコニウム及びチタンを含むペロブスカイト型構造を有する複合酸化物からなり、酸素サイトに窒素を含む。
【選択図】図3
Description
かかる態様では、リーク電流が抑制されて高絶縁性となり、絶縁破壊が防止された圧電素子となって、耐久性に優れたものとすることができる。
図1は、本発明の実施形態1に係る液体噴射ヘッドの一例であるインクジェット式記録ヘッドの概略構成を示す分解斜視図であり、図2は、図1の平面図であり、図3は図2のA−A′線断面図である。図1〜図3に示すように、本実施形態の流路形成基板10は、シリコン単結晶基板からなり、その一方の面には二酸化シリコンからなる弾性膜50が形成されている。
以上、本発明の一実施形態を説明したが、本発明の基本的構成は上述したものに限定されるものではない。例えば、上述した実施形態では、流路形成基板10として、シリコン単結晶基板を例示したが、特にこれに限定されず、例えば、SOI基板、ガラス等の材料を用いるようにしてもよい。
Claims (8)
- ノズル開口に連通する圧力発生室と、
圧電体層と該圧電体層に設けられた電極とを備えた圧電素子と、を具備し、
前記圧電体層は、鉛、ジルコニウム及びチタンを含むペロブスカイト型構造を有する複合酸化物からなり、酸素サイトに窒素を含むことを特徴とする液体噴射ヘッド。 - 前記複合酸化物は、ペロブスカイト型構造の酸素サイトに空孔を有することを特徴とする請求項1に記載する液体噴射ヘッド。
- 前記複合酸化物は、ペロブスカイト型構造のAサイトの鉛が欠損した空孔を有することを特徴とする請求項1または2に記載する液体噴射ヘッド。
- 前記窒素が、モル比で、0.0001以上0.001以下含まれていることを特徴とする請求項1〜3のいずれか一項に記載する液体噴射ヘッド。
- 前記鉛の一部がBサイトに含まれていることを特徴とする請求項1〜4のいずれか一項に記載する液体噴射ヘッド。
- 前記複合酸化物は、Bサイトは、ジルコニウムとチタンと鉛の全量1モルに対して、0.01〜0.15モルの鉛が含有されていることを特徴とする請求項5に記載する液体噴射ヘッド。
- 請求項1〜6のいずれか一項に記載する液体噴射ヘッドを具備することを特徴とする液体噴射装置。
- 圧電体層と該圧電体層に設けられた電極とを備え、
前記圧電体層は、鉛、ジルコニウム及びチタンを含むペロブスカイト型構造を有する複合酸化物からなり、酸素サイトに窒素を含むことを特徴とする圧電素子。
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9385299B2 (en) | 2013-11-22 | 2016-07-05 | Seiko Epson Corporation | Liquid ejecting head, liquid ejecting apparatus, and piezoelectric element |
US20170098753A1 (en) * | 2015-10-05 | 2017-04-06 | Seiko Epson Corporation | Piezoelectric device and method of driving piezoelectric device |
US9865796B2 (en) | 2015-01-30 | 2018-01-09 | Seiko Epson Corporation | Method for driving piezoelectric element, piezoelectric element, and piezoelectric element applied device |
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