JP2012137303A - 光学分析装置 - Google Patents
光学分析装置 Download PDFInfo
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- JP2012137303A JP2012137303A JP2010287860A JP2010287860A JP2012137303A JP 2012137303 A JP2012137303 A JP 2012137303A JP 2010287860 A JP2010287860 A JP 2010287860A JP 2010287860 A JP2010287860 A JP 2010287860A JP 2012137303 A JP2012137303 A JP 2012137303A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 93
- 238000005259 measurement Methods 0.000 claims abstract description 91
- 238000005260 corrosion Methods 0.000 claims abstract description 40
- 230000007797 corrosion Effects 0.000 claims abstract description 40
- 239000000463 material Substances 0.000 claims abstract description 33
- 238000001514 detection method Methods 0.000 claims abstract description 22
- 239000005304 optical glass Substances 0.000 claims description 23
- 125000006850 spacer group Chemical group 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 230000000694 effects Effects 0.000 abstract description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 24
- 229910052594 sapphire Inorganic materials 0.000 description 18
- 239000010980 sapphire Substances 0.000 description 18
- 239000007789 gas Substances 0.000 description 17
- 239000000126 substance Substances 0.000 description 13
- 238000004611 spectroscopical analysis Methods 0.000 description 12
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 8
- 239000000243 solution Substances 0.000 description 8
- 239000007788 liquid Substances 0.000 description 6
- 238000000862 absorption spectrum Methods 0.000 description 5
- 230000004308 accommodation Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 238000011481 absorbance measurement Methods 0.000 description 2
- 238000004847 absorption spectroscopy Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 238000002835 absorbance Methods 0.000 description 1
- 238000011088 calibration curve Methods 0.000 description 1
- 238000009795 derivation Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 239000008155 medical solution Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 239000012488 sample solution Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0297—Constructional arrangements for removing other types of optical noise or for performing calibration
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/10—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void
- G01J1/12—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void using wholly visual means
- G01J1/122—Visual exposure meters for determining the exposure time in photographical recording or reproducing
- G01J1/124—Visual exposure meters for determining the exposure time in photographical recording or reproducing based on the comparison of the intensity of measured light with a comparison source or comparison illuminated surface
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/10—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void
- G01J1/16—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void using electric radiation detectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
- G01N21/274—Calibration, base line adjustment, drift correction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/10—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void
- G01J1/16—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void using electric radiation detectors
- G01J2001/161—Ratio method, i.e. Im/Ir
- G01J2001/1615—Computing a difference/sum ratio, i.e. (Im - Ir) / (Im + Ir)
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- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Optical Measuring Cells (AREA)
Abstract
【解決手段】集光光学系3及び検出光学系4の間における光路L上に位置するリファレンス位置R、及びこのリファレンス位置Rから退避した退避位置Sとの間で移動可能であり、リファレンス位置Rにおいて通過した光の焦点位置が測定位置Pにある測定セル5を通過した光の焦点位置と略同一となるように構成されたリファレンス補正部材6を備え、リファレンス補正部材6において、リファレンス位置Rで光路Lと交わる外面部分6Aが、腐食性ガスに対する耐腐食性を有する材料からなる。
【選択図】図3
Description
このように構成した本実施形態に係る分光分析装置100によれば、リファレンス測定においてリファレンス補正部材6が光路L上に設けられることから、測定セル5の有無による焦点位置の変化を補正して、測定結果の誤差を低減することができる。
なお、本発明は前記実施形態に限られるものではない。
さらにその上、前記実施形態では吸光度測定法を用いた分光分析装置について説明したが、その他のリファレンス光測定を行う光学分析装置にも適用可能である。
2 ・・・光源
3 ・・・集光レンズ(集光光学系)
4 ・・・検出光学系
P ・・・測定位置
Q ・・・退避位置
5 ・・・測定セル
R ・・・リファレンス位置
S ・・・退避位置
6 ・・・リファレンス補正部材
6A ・・・光路と交わる外面部分
61 ・・・光学ガラス
62 ・・・サファイア板材(耐腐食性板材)
63 ・・・シール部材
7 ・・・移動機構
Claims (4)
- 光源から出る光を集光する集光光学系と、
前記集光光学系により集光された光の光路上に設けられて、その光を検出する検出光学系と、
前記集光光学系及び前記検出光学系の間における光路上に位置する測定位置、及びこの測定位置から退避した退避位置の間で移動可能な測定セルと、
前記集光光学系及び前記検出光学系の間における光路上に位置するリファレンス位置、及びこのリファレンス位置から退避した退避位置との間で移動可能であり、前記リファレンス位置において通過した光の焦点位置が前記測定位置にある測定セルを通過した光の焦点位置と略同一となるように構成されたリファレンス補正部材と、
前記測定セル及び前記リファレンス補正部材を移動させて、選択的に前記測定セルを前記測定位置又は前記リファレンス補正部材を前記リファレンス位置とする移動機構とを備え、
前記リファレンス補正部材の少なくとも前記リファレンス位置で光路と交わる外面部分が、腐食性ガスに対して耐腐食性を有する耐腐食性材料から形成されている光学分析装置。 - 前記リファレンス補正部材が、光学ガラスと、当該光学ガラスの光入射面及び光射出面それぞれに対向して設けられた前記耐腐食性材料からなる耐腐食性板材と、前記光学ガラス及び前記耐腐食性板材の間を封止するシール部材とを有する請求項1記載の光学分析装置。
- 前記リファレンス補正部材が、光学ガラスを少なくとも光入射面及び光射出面に前記耐腐食性材料をコーティングすることによって構成されている請求項1記載の光学分析装置。
- 前記リファレンス補正部材が、前記耐腐食性材料からなる複数枚の耐腐食性板材をスペーサを介して重ね合わせることによって構成されている請求項1記載の光学分析装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010287860A JP5584109B2 (ja) | 2010-12-24 | 2010-12-24 | 光学分析装置 |
KR1020110137968A KR101814823B1 (ko) | 2010-12-24 | 2011-12-20 | 광학 분석 장치 |
CN201110432455.7A CN102608029B (zh) | 2010-12-24 | 2011-12-21 | 光学分析装置 |
TW100148283A TWI576573B (zh) | 2010-12-24 | 2011-12-23 | Optical analysis device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010287860A JP5584109B2 (ja) | 2010-12-24 | 2010-12-24 | 光学分析装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012137303A true JP2012137303A (ja) | 2012-07-19 |
JP5584109B2 JP5584109B2 (ja) | 2014-09-03 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2010287860A Active JP5584109B2 (ja) | 2010-12-24 | 2010-12-24 | 光学分析装置 |
Country Status (4)
Country | Link |
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JP (1) | JP5584109B2 (ja) |
KR (1) | KR101814823B1 (ja) |
CN (1) | CN102608029B (ja) |
TW (1) | TWI576573B (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014126529A (ja) * | 2012-12-27 | 2014-07-07 | Horiba Ltd | 分光分析方法及び分光分析装置 |
JP2016001135A (ja) * | 2014-06-11 | 2016-01-07 | 株式会社堀場製作所 | 光学測定セル及び光学分析計 |
KR20170070804A (ko) * | 2015-12-14 | 2017-06-22 | 가부시키가이샤 호리바 세이사꾸쇼 | 흡광도계 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5937956B2 (ja) * | 2012-11-28 | 2016-06-22 | 株式会社堀場製作所 | 光学分析装置 |
JP7229084B2 (ja) * | 2019-04-19 | 2023-02-27 | 株式会社 堀場アドバンスドテクノ | 光学分析装置 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03104857A (ja) * | 1989-09-18 | 1991-05-01 | Central Glass Co Ltd | 含フッ素樹脂被覆KBr板状体およびその製造法 |
JPH0798252A (ja) * | 1993-09-28 | 1995-04-11 | Jasco Corp | フーリエ変換赤外分光光度計 |
JPH0868746A (ja) * | 1994-08-29 | 1996-03-12 | Dainippon Screen Mfg Co Ltd | 透過光測定用フローセル |
JP2000046728A (ja) * | 1998-07-24 | 2000-02-18 | Apurikusu:Kk | 光学分析用耐蝕セル |
JP2002082050A (ja) * | 2000-09-08 | 2002-03-22 | Horiba Ltd | 分光分析装置 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN85202765U (zh) * | 1985-06-29 | 1986-04-30 | 上海自立仪器合作工厂 | 可直读浓度的双波长光度计 |
DE10204963A1 (de) * | 2002-02-06 | 2003-08-14 | Isco Inc | Fotometrische Sonde für Untersuchungen an Flüssigkeiten sowie Verfahren hierfür |
WO2006085646A1 (ja) * | 2005-02-14 | 2006-08-17 | Japan Science And Technology Agency | ガス相関法によるガス濃度測定装置 |
CN101324524B (zh) * | 2007-06-11 | 2010-10-27 | 财团法人工业技术研究院 | 测量装置 |
CN201335808Y (zh) * | 2009-01-05 | 2009-10-28 | 宇星科技发展(深圳)有限公司 | 双波长光学检测装置 |
JP5470276B2 (ja) * | 2009-01-16 | 2014-04-16 | 藤森工業株式会社 | 防食方法および防食構造 |
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2010
- 2010-12-24 JP JP2010287860A patent/JP5584109B2/ja active Active
-
2011
- 2011-12-20 KR KR1020110137968A patent/KR101814823B1/ko active IP Right Grant
- 2011-12-21 CN CN201110432455.7A patent/CN102608029B/zh active Active
- 2011-12-23 TW TW100148283A patent/TWI576573B/zh active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03104857A (ja) * | 1989-09-18 | 1991-05-01 | Central Glass Co Ltd | 含フッ素樹脂被覆KBr板状体およびその製造法 |
JPH0798252A (ja) * | 1993-09-28 | 1995-04-11 | Jasco Corp | フーリエ変換赤外分光光度計 |
JPH0868746A (ja) * | 1994-08-29 | 1996-03-12 | Dainippon Screen Mfg Co Ltd | 透過光測定用フローセル |
JP2000046728A (ja) * | 1998-07-24 | 2000-02-18 | Apurikusu:Kk | 光学分析用耐蝕セル |
JP2002082050A (ja) * | 2000-09-08 | 2002-03-22 | Horiba Ltd | 分光分析装置 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014126529A (ja) * | 2012-12-27 | 2014-07-07 | Horiba Ltd | 分光分析方法及び分光分析装置 |
US9557261B2 (en) | 2012-12-27 | 2017-01-31 | Horiba, Ltd. | Spectroscopic analysis method and spectroscopic analyzer |
JP2016001135A (ja) * | 2014-06-11 | 2016-01-07 | 株式会社堀場製作所 | 光学測定セル及び光学分析計 |
KR20170070804A (ko) * | 2015-12-14 | 2017-06-22 | 가부시키가이샤 호리바 세이사꾸쇼 | 흡광도계 |
JP2017110946A (ja) * | 2015-12-14 | 2017-06-22 | 株式会社堀場製作所 | 吸光度計 |
KR102555556B1 (ko) | 2015-12-14 | 2023-07-18 | 가부시키가이샤 호리바 세이사꾸쇼 | 흡광도계 |
Also Published As
Publication number | Publication date |
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CN102608029B (zh) | 2016-08-24 |
TWI576573B (zh) | 2017-04-01 |
TW201233991A (en) | 2012-08-16 |
JP5584109B2 (ja) | 2014-09-03 |
CN102608029A (zh) | 2012-07-25 |
KR101814823B1 (ko) | 2018-01-03 |
KR20120073108A (ko) | 2012-07-04 |
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