JP2012132717A - 検査用コンタクトプローブ - Google Patents
検査用コンタクトプローブ Download PDFInfo
- Publication number
- JP2012132717A JP2012132717A JP2010283342A JP2010283342A JP2012132717A JP 2012132717 A JP2012132717 A JP 2012132717A JP 2010283342 A JP2010283342 A JP 2010283342A JP 2010283342 A JP2010283342 A JP 2010283342A JP 2012132717 A JP2012132717 A JP 2012132717A
- Authority
- JP
- Japan
- Prior art keywords
- contact probe
- contact
- inspection
- cones
- solder ball
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000523 sample Substances 0.000 title claims abstract description 48
- 238000007689 inspection Methods 0.000 title claims abstract description 31
- 230000001154 acute effect Effects 0.000 claims description 3
- 229910000679 solder Inorganic materials 0.000 abstract description 34
- 238000011990 functional testing Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Landscapes
- Measuring Leads Or Probes (AREA)
Abstract
【解決手段】本発明に係る検査用コンタクトプローブは、検査対象素子の端子との接触面の内側に鋭角の頂部を有する複数の錐体が形成されているが、錐体の頂部を結ぶ面が凹面を成していてもよく、錐体の数が9以上であることおよび錐体の頂角が60度以下であることが望ましい。
【選択図】図3
Description
図1は本発明に係るコンタクトプローブを組み込んだ検査用ソケット1の部分断面図であって、コンタクトプローブ2はソケット本体10の中に格納されている。
(第2の実施形態)
図4は、本発明の第2の実施形態のコンタクトプローブの検査素子側導電部3の上面図(c)およびB−B断面図(d)である。
2…コンタクトプローブ
3…検査素子側導電部
4…プリント基板側導電部
5…ステム
6…バネ
10…ソケット本体
20…半田ボール
Claims (4)
- 検査対象素子の端子との接触面の内側に鋭角の頂部を有する複数の錐体が形成されている検査用コンタクトプローブ。
- 前記錐体の頂部を結ぶ面が凹面を成す請求項1に記載の検査用コンタクトプローブ。
- 前記錐体の数が、9以上である請求項1または請求項2に記載の検査用コンタクトプローブ。
- 前記錐体の頂角が60度以下である請求項1から請求項3のいずれか一項に記載の検査用コンタクトプローブ。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010283342A JP5783715B2 (ja) | 2010-12-20 | 2010-12-20 | 検査用コンタクトプローブ |
TW100140524A TWI529394B (zh) | 2010-12-20 | 2011-11-07 | Check the contact probe |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010283342A JP5783715B2 (ja) | 2010-12-20 | 2010-12-20 | 検査用コンタクトプローブ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012132717A true JP2012132717A (ja) | 2012-07-12 |
JP5783715B2 JP5783715B2 (ja) | 2015-09-24 |
Family
ID=46648491
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010283342A Active JP5783715B2 (ja) | 2010-12-20 | 2010-12-20 | 検査用コンタクトプローブ |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP5783715B2 (ja) |
TW (1) | TWI529394B (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101439343B1 (ko) * | 2013-04-18 | 2014-09-16 | 주식회사 아이에스시 | 포고핀용 탐침부재 |
KR101524471B1 (ko) * | 2013-12-12 | 2015-06-10 | 주식회사 아이에스시 | 포고핀용 탐침부재의 플런저 고정 방법 및 이러한 방법으로 제조된 포고핀 구조체 |
JP2016038207A (ja) * | 2014-08-05 | 2016-03-22 | 株式会社アイエスシーIsc Co., Ltd. | ポゴピン用プローブ部材 |
US9726693B2 (en) | 2013-04-18 | 2017-08-08 | Isc Co., Ltd. | Probe member for pogo pin |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6243584B1 (ja) | 2016-02-15 | 2017-12-06 | 日本発條株式会社 | 検査用導電性接触子、および半導体検査装置 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62140459U (ja) * | 1986-02-27 | 1987-09-04 | ||
US5929521A (en) * | 1997-03-26 | 1999-07-27 | Micron Technology, Inc. | Projected contact structure for bumped semiconductor device and resulting articles and assemblies |
JP2000329789A (ja) * | 1999-03-12 | 2000-11-30 | Sony Chem Corp | 針状接点プローブ |
JP2002014137A (ja) * | 2000-03-29 | 2002-01-18 | Micronics Japan Co Ltd | 半導体デバイス検査装置における電気的接触方法及び装置 |
JP2007218675A (ja) * | 2006-02-15 | 2007-08-30 | Fujitsu Ltd | プローブ及びプローブの製造方法 |
JP2009198238A (ja) * | 2008-02-20 | 2009-09-03 | Totoku Electric Co Ltd | プローブ針及びその製造方法 |
-
2010
- 2010-12-20 JP JP2010283342A patent/JP5783715B2/ja active Active
-
2011
- 2011-11-07 TW TW100140524A patent/TWI529394B/zh active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62140459U (ja) * | 1986-02-27 | 1987-09-04 | ||
US5929521A (en) * | 1997-03-26 | 1999-07-27 | Micron Technology, Inc. | Projected contact structure for bumped semiconductor device and resulting articles and assemblies |
JP2000329789A (ja) * | 1999-03-12 | 2000-11-30 | Sony Chem Corp | 針状接点プローブ |
JP2002014137A (ja) * | 2000-03-29 | 2002-01-18 | Micronics Japan Co Ltd | 半導体デバイス検査装置における電気的接触方法及び装置 |
JP2007218675A (ja) * | 2006-02-15 | 2007-08-30 | Fujitsu Ltd | プローブ及びプローブの製造方法 |
JP2009198238A (ja) * | 2008-02-20 | 2009-09-03 | Totoku Electric Co Ltd | プローブ針及びその製造方法 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101439343B1 (ko) * | 2013-04-18 | 2014-09-16 | 주식회사 아이에스시 | 포고핀용 탐침부재 |
US9310395B2 (en) | 2013-04-18 | 2016-04-12 | Isc Co., Ltd. | Probe member for pogo pin |
US9726693B2 (en) | 2013-04-18 | 2017-08-08 | Isc Co., Ltd. | Probe member for pogo pin |
KR101524471B1 (ko) * | 2013-12-12 | 2015-06-10 | 주식회사 아이에스시 | 포고핀용 탐침부재의 플런저 고정 방법 및 이러한 방법으로 제조된 포고핀 구조체 |
JP2016038207A (ja) * | 2014-08-05 | 2016-03-22 | 株式会社アイエスシーIsc Co., Ltd. | ポゴピン用プローブ部材 |
Also Published As
Publication number | Publication date |
---|---|
JP5783715B2 (ja) | 2015-09-24 |
TWI529394B (zh) | 2016-04-11 |
TW201237422A (en) | 2012-09-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7189080B2 (en) | Land grid array connector contact | |
JP5783715B2 (ja) | 検査用コンタクトプローブ | |
US6069481A (en) | Socket for measuring a ball grid array semiconductor | |
US20070007984A1 (en) | Socket for inspection apparatus | |
US9476912B2 (en) | Kelvin contact probe structure and a Kelvin inspection fixture provided with the same | |
JP2013217800A (ja) | コンタクト、コネクタ | |
US6942493B2 (en) | Connector structure for connecting electronic parts | |
JP2011122924A5 (ja) | ||
KR101932509B1 (ko) | 다 접점 에지 접촉으로 접촉 특성이 개선되는 fosp 핀, 및 이를 포함하는 테스트 소켓 | |
TWI479156B (zh) | 探針單元 | |
US20070155196A1 (en) | Land grid array connector contact | |
JPH11283713A (ja) | 集積回路素子用ソケット及び回路基板並びに補助回路基板 | |
JP7263060B2 (ja) | 電気的接続装置 | |
US20070148998A1 (en) | Land grid array connector contact | |
JP4917007B2 (ja) | 検査用ソケット | |
JP2008226881A (ja) | プリント基板検査用治具及びプリント基板検査装置 | |
US20130082728A1 (en) | Circuit-test probe card and probe substrate structure thereof | |
JP2005249447A (ja) | プローブピン | |
KR100609918B1 (ko) | 전자부품이 장착된 기판의 검사유닛 | |
JP2011227009A (ja) | プリント配線板用検査治具 | |
JP2016217856A (ja) | 電気的接触子 | |
JP4494396B2 (ja) | 接続部材 | |
KR200409372Y1 (ko) | 반도체 소자 테스트 소켓 | |
JP2011180019A (ja) | 半導体測定装置および半導体測定装置用ピッチ変換治具 | |
CN102386144A (zh) | 芯片 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20131122 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20140411 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140422 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140619 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20141216 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20150212 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20150714 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20150721 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5783715 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |