JP2012080682A - 振動発電素子およびそれを用いた振動発電装置 - Google Patents
振動発電素子およびそれを用いた振動発電装置 Download PDFInfo
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- JP2012080682A JP2012080682A JP2010224154A JP2010224154A JP2012080682A JP 2012080682 A JP2012080682 A JP 2012080682A JP 2010224154 A JP2010224154 A JP 2010224154A JP 2010224154 A JP2010224154 A JP 2010224154A JP 2012080682 A JP2012080682 A JP 2012080682A
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/18—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
- H02N2/186—Vibration harvesters
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/18—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
- H10N30/304—Beam type
- H10N30/306—Cantilevers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/18—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
- H02N2/181—Circuits; Control arrangements or methods
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Micromachines (AREA)
Abstract
【解決手段】支持部2aと該支持部2aに揺動自在に支持されたカンチレバー部2bとを備えたベース基板1と、カンチレバー部2bに形成されカンチレバー部2bの振動に応じて交流電力を発生する発電部3とを備えた振動発電素子10であって、発電部3は、ベース基板1の一表面1b側においてカンチレバー部2bに重なる部位に形成された下部電極4aと、該下部電極4aにおけるカンチレバー部2b側とは反対側に形成された第1の圧電層5aと、該第1の圧電層5aにおける下部電極4a側とは反対側に形成された中間電極4bと、該中間電極4bにおける第1の圧電層5aとは反対側に形成された第2の圧電層5bと、該第2の圧電層5bにおける中間電極4bとは反対側に形成された上部電極4cとを有する。
【選択図】図1
Description
1b 一表面
2a 支持部
2b カンチレバー部
3 発電部
4a 下部電極
4b 中間電極
4c 上部電極
5a 第1の圧電層
5b 第2の圧電層
10 振動発電素子
20 振動発電装置
D2 整流器(二相全波整流回路部)
Claims (4)
- 支持部と該支持部に揺動自在に支持されたカンチレバー部とを備えたベース基板と、前記カンチレバー部に形成され前記カンチレバー部の振動に応じて交流電力を発生する発電部とを備えた振動発電素子であって、前記発電部は、前記ベース基板の一表面側において前記カンチレバー部に重なる部位に形成された下部電極と、該下部電極における前記カンチレバー部側とは反対側に形成された第1の圧電層と、該第1の圧電層における前記下部電極側とは反対側に形成された中間電極と、該中間電極における前記第1の圧電層とは反対側に形成された第2の圧電層と、該第2の圧電層における前記中間電極とは反対側に形成された上部電極とを有することを特徴とする振動発電素子。
- 前記第1の圧電層および前記第2の圧電層は、それぞれ強誘電体薄膜であることを特徴とする請求項1記載の振動発電素子。
- 前記第1の圧電層における分極の向きと、前記第2の圧電層における分極の向きとは、前記発電部の厚み方向において同一方向であることを特徴とする請求項1または請求項2に記載の振動発電素子。
- 請求項1ないし請求項3のいずれか1項に記載の振動発電素子と、該振動発電素子の前記中間電極を共通電極にして前記上部電極および前記下部電極から出力される二相交流を整流する二相全波整流回路部とを備えたことを特徴とする振動発電装置。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010224154A JP5685719B2 (ja) | 2010-10-01 | 2010-10-01 | 振動発電素子およびそれを用いた振動発電装置 |
KR1020137004347A KR101466781B1 (ko) | 2010-10-01 | 2011-09-28 | 진동 발전 소자 및 이를 구비한 진동 발전 장치 |
PCT/JP2011/072222 WO2012043644A1 (ja) | 2010-10-01 | 2011-09-28 | 振動発電素子およびそれを備えた振動発電装置 |
CN2011800406679A CN103081339A (zh) | 2010-10-01 | 2011-09-28 | 振动发电元件以及具备该元件的振动发电装置 |
EP11829197.0A EP2624434A4 (en) | 2010-10-01 | 2011-09-28 | ELEMENT FOR GENERATING A VIBRATING POWER AND DEVICE EQUIPPED THEREFOR FOR GENERATING A VIBRATION FORCE |
US13/820,849 US20130162106A1 (en) | 2010-10-01 | 2011-09-28 | Vibration power generation element and vibration power generation device including same |
TW100135568A TWI443959B (zh) | 2010-10-01 | 2011-09-30 | 振動發電元件及具備它之振動發電裝置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010224154A JP5685719B2 (ja) | 2010-10-01 | 2010-10-01 | 振動発電素子およびそれを用いた振動発電装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012080682A true JP2012080682A (ja) | 2012-04-19 |
JP5685719B2 JP5685719B2 (ja) | 2015-03-18 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010224154A Expired - Fee Related JP5685719B2 (ja) | 2010-10-01 | 2010-10-01 | 振動発電素子およびそれを用いた振動発電装置 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20130162106A1 (ja) |
EP (1) | EP2624434A4 (ja) |
JP (1) | JP5685719B2 (ja) |
KR (1) | KR101466781B1 (ja) |
CN (1) | CN103081339A (ja) |
TW (1) | TWI443959B (ja) |
WO (1) | WO2012043644A1 (ja) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20140073174A (ko) * | 2012-12-06 | 2014-06-16 | 한국전자통신연구원 | 충격 방식 압전 마이크로 발전기 |
WO2015136864A1 (ja) * | 2014-03-10 | 2015-09-17 | パナソニックIpマネジメント株式会社 | 発電装置 |
JP2016095201A (ja) * | 2014-11-13 | 2016-05-26 | 株式会社デンソー | 力学量センサ |
JP2016534563A (ja) * | 2013-08-21 | 2016-11-04 | フジフィルム ディマティックス, インコーポレイテッド | 多層薄膜圧電素子及びその製造方法 |
JP2020020865A (ja) * | 2018-07-30 | 2020-02-06 | 三菱電機株式会社 | 光走査装置およびその駆動方法 |
US10586912B2 (en) | 2013-12-11 | 2020-03-10 | Fujifilm Dimatix, Inc. | Method for fabricating flexible micromachined transducer device |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9716446B2 (en) | 2013-07-05 | 2017-07-25 | Texas Instruments Incorporated | Self-powered piezoelectric energy harvesting microsystem |
CN113156230B (zh) * | 2021-01-13 | 2022-10-14 | 西安理工大学 | 一种摩擦电能量采集器测试装置及测试方法 |
JP2023147857A (ja) * | 2022-03-30 | 2023-10-13 | 沖電気工業株式会社 | 圧電体フィルム接合基板及びその製造方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS62236362A (ja) * | 1986-04-07 | 1987-10-16 | Nec Corp | スイツチングレギユレ−タ回路 |
JPH11252945A (ja) * | 1998-03-06 | 1999-09-17 | Seiko Epson Corp | 発電装置及び電子機器 |
WO2006022084A1 (ja) * | 2004-08-24 | 2006-03-02 | Taiheiyo Cement Corporation | 圧電デバイスおよびこれを備える圧電スイッチ |
JP2010136542A (ja) * | 2008-12-05 | 2010-06-17 | Seiko Epson Corp | 圧電型発電機およびその製造方法 |
Family Cites Families (7)
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US3949247A (en) * | 1972-03-10 | 1976-04-06 | Siemens Aktiengesellschaft | Mounting arrangement for a piezoelectric element |
JP4053822B2 (ja) * | 2002-06-10 | 2008-02-27 | 日本碍子株式会社 | 圧電/電歪デバイスとその製造方法 |
JP3759945B2 (ja) * | 2004-02-25 | 2006-03-29 | 太平洋セメント株式会社 | 風力発電装置および風力発電システム |
CN100521274C (zh) * | 2004-04-27 | 2009-07-29 | 日本碍子株式会社 | 弹性体的检查方法、检查装置以及尺寸预测程序 |
JP3806724B1 (ja) * | 2005-05-16 | 2006-08-09 | 太平洋セメント株式会社 | 発光装置及びそれを用いた懐中電灯 |
JP2008244552A (ja) * | 2007-03-26 | 2008-10-09 | Seiko Epson Corp | 圧電振動子およびその製造方法並びに電子装置 |
KR101243868B1 (ko) * | 2009-12-14 | 2013-03-20 | 한국전자통신연구원 | 가변 축전층이 내장된 능동형 압전 에너지변환 소자 및 그 제조 방법 |
-
2010
- 2010-10-01 JP JP2010224154A patent/JP5685719B2/ja not_active Expired - Fee Related
-
2011
- 2011-09-28 US US13/820,849 patent/US20130162106A1/en not_active Abandoned
- 2011-09-28 EP EP11829197.0A patent/EP2624434A4/en not_active Withdrawn
- 2011-09-28 CN CN2011800406679A patent/CN103081339A/zh active Pending
- 2011-09-28 KR KR1020137004347A patent/KR101466781B1/ko not_active IP Right Cessation
- 2011-09-28 WO PCT/JP2011/072222 patent/WO2012043644A1/ja active Application Filing
- 2011-09-30 TW TW100135568A patent/TWI443959B/zh not_active IP Right Cessation
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62236362A (ja) * | 1986-04-07 | 1987-10-16 | Nec Corp | スイツチングレギユレ−タ回路 |
JPH11252945A (ja) * | 1998-03-06 | 1999-09-17 | Seiko Epson Corp | 発電装置及び電子機器 |
WO2006022084A1 (ja) * | 2004-08-24 | 2006-03-02 | Taiheiyo Cement Corporation | 圧電デバイスおよびこれを備える圧電スイッチ |
JP2010136542A (ja) * | 2008-12-05 | 2010-06-17 | Seiko Epson Corp | 圧電型発電機およびその製造方法 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20140073174A (ko) * | 2012-12-06 | 2014-06-16 | 한국전자통신연구원 | 충격 방식 압전 마이크로 발전기 |
KR101978495B1 (ko) | 2012-12-06 | 2019-05-14 | 한국전자통신연구원 | 충격 방식 압전 마이크로 발전기 |
JP2016534563A (ja) * | 2013-08-21 | 2016-11-04 | フジフィルム ディマティックス, インコーポレイテッド | 多層薄膜圧電素子及びその製造方法 |
US10586912B2 (en) | 2013-12-11 | 2020-03-10 | Fujifilm Dimatix, Inc. | Method for fabricating flexible micromachined transducer device |
WO2015136864A1 (ja) * | 2014-03-10 | 2015-09-17 | パナソニックIpマネジメント株式会社 | 発電装置 |
JP2016095201A (ja) * | 2014-11-13 | 2016-05-26 | 株式会社デンソー | 力学量センサ |
JP2020020865A (ja) * | 2018-07-30 | 2020-02-06 | 三菱電機株式会社 | 光走査装置およびその駆動方法 |
Also Published As
Publication number | Publication date |
---|---|
WO2012043644A1 (ja) | 2012-04-05 |
EP2624434A1 (en) | 2013-08-07 |
KR20130041958A (ko) | 2013-04-25 |
TWI443959B (zh) | 2014-07-01 |
TW201223117A (en) | 2012-06-01 |
US20130162106A1 (en) | 2013-06-27 |
JP5685719B2 (ja) | 2015-03-18 |
CN103081339A (zh) | 2013-05-01 |
KR101466781B1 (ko) | 2014-11-28 |
EP2624434A4 (en) | 2013-10-02 |
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