JP2012078230A - Probing device, inspection apparatus, and connection switching method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To measure an electrical parameter accurately while reducing a manufacturing cost.SOLUTION: A first identification number applied to a probe (any one of probes from Pb1 to Pb10) probing at a measurement point (any one of measurement points from Pa1 to Pa10), where an electrical parameter is measured, is identified based on measurement procedure data D1, and a second identification number of a probe connection part (any one of connection parts from C1 to C10) connected to the probe of the identified first identification number is identified based on identification number data D2 correlating the first identification number with the second identification number mutually according to a connection relation of each of the probes to each of the probe connection parts. Then, a scanner 4 is controlled to allow the probe connected to the probe connection part of the identified second identification number to be connected to a measurement part 5.

Description

  The present invention relates to a probing device for probing each probe of a measurement jig in which a plurality of probes are arranged corresponding to a plurality of measurement points in an inspection object to each corresponding measurement point and connecting to the measurement device, and The present invention relates to an inspection apparatus provided with the probing apparatus and configured to be able to electrically inspect a measurement object, and a connection switching method for switching a connection mode between each probe and a measurement apparatus.

  Japanese Laid-Open Patent Publication No. 2010-169651 discloses a substrate inspection apparatus as an inspection apparatus provided with a probing apparatus that switches the connection mode between each probe and a measuring apparatus according to this type of connection switching method. This board inspection apparatus is an inspection jig in which a plurality of board inspection probes (hereinafter also simply referred to as “probes”) are arranged, and a control for electrically inspecting an inspection board using each probe of the inspection jig. The apparatus includes a scanner and a tester controller that switch a connection mode of each probe to the control device and control transmission and reception of signals between each probe and the control device. In this case, in the inspection jig (measurement jig), each probe is arranged corresponding to the positions of a plurality of inspection points (measurement points) defined on the inspection substrate (measurement object). Further, in this type of inspection apparatus, measurement procedure data that records which probe is connected to the control apparatus (measurement apparatus) when measuring electrical parameters between arbitrary inspection points during inspection of the inspection substrate is stored in advance. A configuration is adopted in which a probe probed at a desired inspection point is connected to the control device by controlling the scanner according to the measurement procedure data at the time of inspection.

  Specifically, in this type of inspection apparatus, for example, an identification number is individually assigned to each probe in order from the first, and a probe with an identification number of “1” (hereinafter, the identification number is “ “n” probe is also referred to as “n-th probe”) of the connection ports (each connection point) of the scanner, the connection number of which is “1” (connection point of the identification number “1”: In general, a connection port having a port number of “n” is also connected to “nth connection point” and a second probe is connected to a second connection point. When inspecting the inspection board, for example, when connecting the first probe and the second probe to the control device, the scanner is controlled according to the measurement procedure data to control the first connection point and the second connection point. Connect to the device. As a result, the first probe and the second probe are connected to the control device. Thereafter, on the basis of the electrical parameters measured through both probes, the quality between the inspection points where both probes are probed is inspected.

JP 2010-169651 A (pages 7-16, FIG. 1-13)

  However, the conventional board inspection apparatus has the following problems. That is, in the conventional board inspection apparatus, the first probe is connected to the first connection point in the scanner, and the second probe is connected to the second connection point in the scanner, so that the first probe in the scanner is connected. A configuration is adopted in which the first probe and the second probe are connected to the control device by connecting the connection point and the second connection point to the control device. In other words, in the conventional substrate inspection apparatus, by connecting each probe to the scanner so that the identification number assigned to each probe matches the port number (identification number) of each connection port (connection point) of the scanner, When a probe having a desired identification number is connected to the control device, simple control for connecting a connection port (connection point) having the same port number (identification number) as the identification number to the control device is possible.

  However, in the configuration in which each probe is connected to the scanner so that the identification number assigned to each probe matches the port number of each connection port of the scanner, the physical positional relationship between each probe and the connection port is irrelevant. In addition, it is necessary to connect the probe to the connection port having the same port number as the identification number assigned to the probe. For this reason, depending on the order in which the identification numbers are assigned to the probes, a long connection wiring may be required to connect the probe to the connection port, and the connection wiring routing work may be complicated. . As a result, the conventional inspection apparatus has a problem that it is difficult to reduce the manufacturing cost of the inspection apparatus (inspection jig).

  In addition, when long connection wiring is used, the wiring resistance increases, and when a flat cable is used as the connection wiring, measurement is performed using adjacent (or close) conductors. When the probe is connected to the apparatus, or when the connection wirings intersect or bind at random, the capacitance characteristics between the connection wirings may vary. For this reason, the conventional inspection apparatus has a problem that it is difficult to accurately measure electrical parameters for inspection due to variations in electrical characteristics between the probes and the scanner. is there.

  The present invention has been made in view of such problems, and has as its main object to provide a probing device, an inspection device, and a connection switching method capable of accurately measuring an electrical parameter while reducing the manufacturing cost. To do.

  In order to achieve the above object, the probing device according to claim 1 is configured such that N probes (N is a natural number of 3 or more) individually assigned with the first identification number are measured at N measurement points on the measurement object. Each of the measuring jig and the moving mechanism for moving at least one of the measurement objects relative to the other, and the N probe connecting portions individually assigned with the second identification numbers. Each of the probes is connected to each other via a connection wiring and connected to a measuring device to switch the connection mode of each of the probes to the measuring device, and the electrical parameter is measured by the measuring device Measurement procedure data capable of specifying the first identification number of the probe to be probed at a measurement point, and each probe for each probe connection A storage unit that stores identification number data in which the first identification number and the second identification number are associated with each other according to a connection relationship, and at least one of them is moved by controlling the moving mechanism, A probe is probed to each measurement point, and the first identification number of the probe probed to the measurement point for measuring the electrical parameter is specified based on the measurement procedure data, and the specified first The second identification number of the probe connection unit to which the probe having the identification number of 1 is connected is identified based on the identification number data, and the connection switching unit is controlled to identify the identified second identification A control unit that connects the probe connected to the probe connection unit of the number to the measurement device.

  The probing device according to claim 2 is the probing device according to claim 1, wherein the identification number data generated in an external device corresponding to the connection relation of the probes to the probe connection portions is input. The control unit stores the identification number data input from the data input unit in the storage unit.

  According to a third aspect of the present invention, there is provided the inspection apparatus according to the first or second aspect, between the measurement points based on the electrical parameter measured by the probing apparatus, the measurement jig, the measurement apparatus, and the measurement apparatus. And an inspection unit for inspecting the quality of the product.

  In the connection switching method according to claim 4, N probes (N is a natural number of 3 or more) individually assigned with the first identification number correspond to N measurement points on the measurement object, respectively. When measuring the electrical parameters between the respective measurement points using the arranged measuring jig, the N probe connection portions individually assigned with the second identification numbers are connected via the connection wiring. Probing at the measurement point at which the electrical parameter is measured by the measuring device when the probe is connected and the connection switching unit connected to the measuring device switches the connection mode of the probe to the measuring device. Measurement procedure data capable of specifying the first identification number of the probe to be made, and the connection relationship of the probes to the probe connection portions. Using the identification number data in which the identification number and the second identification number are associated with each other, the first identification number of the probe probed at the measurement point for measuring the electrical parameter is measured. Specifying based on the data, and specifying the second identification number of the probe connection unit to which the probe of the specified first identification number is connected based on the identification number data, and the connection switching unit And the probe connected to the probe connection part of the specified second identification number is connected to the measuring device.

  In the probing device according to claim 1, the moving mechanism is controlled to move at least one of the measurement jig and the measurement object so that each probe of the measurement jig is probed to each measurement point, and the electrical parameters are set. A probe connection in which a first identification number individually assigned to a probe probed at a measurement point to be measured is specified based on measurement procedure data, and a probe having the specified first identification number is connected A second identification number individually assigned to each part is specified based on the identification number data, the connection switching unit is controlled, and the probe connected to the probe connection part of the specified second identification number Is connected to the measuring device.

  In the connection switching method according to claim 4, the first identification number individually assigned to the probe probed to the measurement point for measuring the electrical parameter by the measuring device is specified based on the measurement procedure data. And identifying a second identification number individually assigned to the probe connection unit to which the probe of the identified first identification number is connected based on the identification number data, and controlling the connection switching unit. Then, the probe connected to the probe connection part of the specified second identification number is connected to the measuring device.

  Therefore, according to the probing device according to claim 1 and the connection switching method according to claim 4, the first identification number assigned to each probe and the connection switching unit when the measurement jig is manufactured. Based on the identification number data and the measurement procedure data, without performing wiring work to connect each connection wiring so as to match the second identification number assigned to each probe connection part Since the probe can be connected to the measuring apparatus, the manufacturing cost of the measuring jig can be sufficiently reduced by the amount that the complicated wiring work is not required. Also, when each probe is arbitrarily connected to each probe connection section avoiding routing that requires long connection wiring with high wiring resistance or routing that may cause variations in capacitance characteristics Based on the identification number data and the measurement procedure data, the desired probe can be connected to the measuring device, so that the electrical parameters can be accurately measured for the measuring device by manufacturing the measuring jig as such. Can be measured.

  According to the probing device of claim 2, the identification number data generated in the external device corresponding to the connection relation of each probe to each probe connection unit is input from the data input unit and stored in the storage unit. When a new measurement jig is replaced or a different type of measurement jig is attached, the connection relationship of each probe to each probe connection part in the measurement jig (the wiring state of the connection wiring) The desired probe can be connected to the measuring device based on the identification number data generated corresponding to ().

  Further, according to the inspection apparatus according to claim 3, the probing apparatus according to claim 1 or 2, the measurement jig, the measurement apparatus, and between the measurement points based on the electrical parameters measured by the measurement apparatus. By including an inspection unit for inspecting pass / fail, it is possible to reduce the manufacturing cost (that is, the inspection cost) of the inspection apparatus by the amount that the manufacturing cost of the measuring jig is reduced, and for measurement Since the electrical characteristics of the jig are sufficiently good, the quality of the inspection object can be accurately inspected.

1 is a configuration diagram showing a configuration of a substrate inspection apparatus 1. FIG. 4 is an explanatory diagram for explaining an example of a positional relationship between each measurement point Pa1 to Pa10 of the inspection target substrate 20 and each probe Pb1 to Pb10 of the measurement jig 100. FIG. Measurement points Pa1 to Pa10, probes Pb1 to Pb10, cables Aa1 to Aa10, connector 101 connection portions Ba1 to Ba10, connector 3 connection portions Bb1 to Bb10, cables Ab1 to Ab10, and scanner 4 connection portions C1 to C10 It is explanatory drawing for demonstrating an example. It is explanatory drawing for demonstrating an example of the measurement procedure data D1. It is explanatory drawing for demonstrating an example of the identification number data D2.

  Hereinafter, embodiments of a probing apparatus, an inspection apparatus, and a connection switching method will be described with reference to the accompanying drawings.

  First, the configuration of the substrate inspection apparatus 1 will be described with reference to the attached drawings.

  A board inspection apparatus 1 shown in FIG. 1 is an example of an “inspection apparatus”, and includes a moving mechanism 2, a connector 3, cables Ab1 to Ab10, a scanner 4, cables Ac1 and Ac2, a measurement unit 5, an operation unit 6, and a display unit. 7, the data input part 8, the control part 9, the memory | storage part 10, and the jig | tool 100 for a measurement are comprised, and the test | inspection board | substrate 20 is comprised so that electrical inspection is possible. In this case, in this board inspection apparatus 1, the moving mechanism 2, the connector 3, the cables Ab <b> 1 to Ab <b> 10, the scanner 4, the cables Ac <b> 1 and Ac <b> 2, the data input unit 8, the control unit 9, and the storage unit 10 constitute a “probing device”. To do. Further, the inspection target board 20 corresponds to a “measurement object”, and as shown in FIG. 2, as an example, mounting components 21a to 21l (hereinafter also referred to as “mounting component 21” when not distinguished) are mounted. In addition, ten measurement points Pa1 to Pa10 (hereinafter also referred to as “measurement points Pa” when not distinguished) for inspecting the quality of the mounted state of each mounted component 21 are defined (“N = 10”). Example). In order to facilitate understanding of the configuration and operation principle of the substrate inspection apparatus 1, an example will be described in which the inspection target substrate 20 is defined with N = 10 measurement points Pa1 to Pa10. A plurality of mounting parts are further mounted on the inspection target board 20, and hundreds to thousands of measurement points are defined.

  On the other hand, as shown in FIG. 1, the measurement jig 100 includes N = 10 probes Pb1 to Pb10 (hereinafter also referred to as “probe Pb” when not distinguished) and cables Aa1 to Aa10 (hereinafter not distinguished). 2 and a connector 101. As shown in FIG. 2, these probes Pb1 to Pb10 are arranged corresponding to the positions of 10 measurement points Pa1 to Pa10 on the inspection target board 20, respectively. ing. In this case, as shown in FIG. 3, each probe Pb1 to Pb10 has an identification number (pin number: “first identification number”) by the manufacturer of the measurement jig 100 as an example. Is an example). As shown in FIG. 1, each of the probes Pb1 to Pb10 includes cables Aa1 to Aa10, connectors 101 and 3, and cables Ab1 to Ab10 (for example, a flat cable (flat cable) in which the cables Ab1 to Ab10 are integrated): Hereinafter, when not distinguished, they are also connected to the scanner 4 via “cable Ab”). In the board inspection apparatus 1, the cables Aa1 to Aa10, the connectors 101 and 3 and the cables Ab1 to Ab10 are combined to form a “connection wiring”.

  In accordance with the control signal S2 from the control unit 9, the moving mechanism 2 moves the measuring jig 100 toward and away from the inspection target substrate 20 held at the inspection position by a holder (not shown), thereby moving each probe Pb. Are probed at each measurement point Pa of the inspection target substrate 20 (an example in which “at least one” is a “measurement jig”). Instead of moving the measurement jig 100 with respect to the inspection target substrate 20 by the moving mechanism 2, the inspection target substrate 20 is moved toward and away from the measurement jig 100 attached at a predetermined attachment position. A configuration in which the measurement jig 100 and the substrate to be inspected 20 are moved toward and away from each other (“at least one” is a “measurement treatment”). Examples of configurations of both “tool” and “measuring object” can also be employed.

  The connector 3 is provided for facilitating the cutting and connecting work between the probes Pb1 to Pb10 and the scanner 4 when the measuring jig 100 is replaced. The connector 3 is connected to the scanner 3 via the cables Ab1 to Ab10. 4 and the probe 101 of the measurement jig 100 are connected as described later, whereby the probes Pb1 to Pb10 of the measurement jig 100 are connected via the cables Aa1 to Aa10. The The scanner 4 corresponds to a “connection switching unit”, and as shown in FIG. 3, ten scanners to which identification numbers “1” to “10” (port numbers: examples of “second identification numbers”) are assigned. Connection parts C1 to C10 (an example of “probe connection part”: hereinafter, also referred to as “connection part C” when not distinguished from each other), and according to a control signal S4 from the control part 9, each probe of the measurement jig 100 Any two of Pb1 to Pb10 are connected to the measurement unit 5 (an example of a process of “switching the connection mode”). The connection relationship between each connection portion C of the scanner 4 and each probe Pb of the measurement jig 100 will be described in detail later.

  The measuring unit 5 constitutes a “measuring device” in combination with the control unit 9 and is connected to the scanner 4 via the cables Ac1 and Ac2 as shown in FIG. 1, and in accordance with a control signal S5 from the control unit 9, The electrical parameters (voltage value, current value, resistance value, capacitance value, etc.) between the pair of measurement points Pa, Pa on the inspection target substrate 20 are measured via the pair of probes Pb, Pb connected by the scanner 4. The measurement result data Ds is output to the control unit 9. The operation unit 6 includes a plurality of operation switches (not shown), and outputs an operation signal corresponding to the switch operation to the control unit 9. The display unit 7 displays inspection results and the like according to the control of the control unit 9. For example, the data input unit 8 includes a USB connection connector, and is configured to be connected to a storage device (such as a USB memory) in which various data are recorded. In place of the USB connector, a memory card slot that can accept various memory cards is provided, and a drive device that can read various data from optical disks such as CD and DVD and magneto-optical disks such as MO is provided. Thus, the data input unit 8 can be configured.

  The controller 9 controls the board inspection apparatus 1 as a whole. Specifically, the control unit 9 reads out the measurement procedure data D1, the identification number data D2, and the inspection reference data D3 from the storage device connected to the data input unit 8, and stores them in the storage unit 10. In addition, the control unit 9 outputs a control signal S2 to the moving mechanism 2 to move (move) the measurement jig 100 to and from the inspection target substrate 20. Further, the control unit 9 outputs a control signal S4 to the scanner 4, and causes the measurement unit 5 to provide probes Pb and Pb probed at the measurement points Pa and Pa to be measured by the measurement unit 5. Connect (switch the “connection mode”). Further, the control unit 9 outputs a control signal S5 to the measurement unit 5 to measure the electrical parameter. Further, the control unit 9 functions as an “inspection unit”, and based on the measurement result data Ds output from the measurement unit 5, the mounted component 21 mounted between the measurement points Pa and Pa of the measurement result data Ds. And the inspection result is displayed on the display unit 7.

  The storage unit 10 stores measurement procedure data D1, identification number data D2, reference data for inspection D3, and an operation program for the control unit 9. In this case, as shown in FIG. 4, the measurement procedure data D1 is obtained by measuring the identification numbers (pin numbers) of the probes Pb and Pb to be probed at the measurement points Pa and Pa where the measurement unit 5 measures the electrical parameters. It consists of data recorded in order (inspection step order). Further, as shown in FIG. 5, the identification number data D2 is an identification number (pin) assigned to each probe Pb1 to Pb10 according to the connection relationship of each probe Pb to each connection portion C1 to C10 of the scanner 4. Number) and identification numbers (port numbers) assigned to the connection portions C1 to C10. The inspection reference data D3 is configured by recording a reference value absorbed from a non-defective inspection target substrate 20 at each measurement point Pa for measuring an electrical parameter in accordance with the measurement procedure data D1 (not shown).

  Next, an example of a method for manufacturing the measurement jig 100 and a method for generating the identification number data D2 will be described.

  First, the measurement jig 100 is manufactured in correspondence with the measurement points Pa1 to Pa10 defined on the inspection target substrate 20. Specifically, in order to arrange the probes Pb1 to Pb10 corresponding to the positions of the measurement points Pa1 to Pa10 on the inspection target substrate 20, ten probe holding portions (one example) are provided on a probe holding plate (not shown). As shown in FIG. Next, the probes Pb1 to Pb10 are implanted in each formed probe holding portion. Subsequently, the probes Pb1 to Pb10 are connected to the connection portions Ba1 to Ba10 of the connector 101 (hereinafter also referred to as “connection portions Ba” when not distinguished from each other) via the cables Aa1 to Aa10.

  In this case, as shown in FIGS. 1 and 3, in this board inspection apparatus 1, the connection portions Bb1 to Bb10 of the connector 3 are connected to the connection portions C1 to C10 of the scanner 4 via the cables Ab1 to Ab10, respectively. ing. For this reason, in this board inspection apparatus 1, the connection portions Bb <b> 1 to Bb <b> 10 of the connector 3 (hereinafter also referred to as “connection portions Bb” when not distinguished) have a one-to-one relationship with each connection portion C of the scanner 4. Are connected to each other. Moreover, in this board | substrate inspection apparatus 1, when attaching the measurement jig | tool 100 with which manufacture was completed, each connection part Ba of the connector 101 is each joined to each connection part Bb of the connector 3 by joining the connectors 101 and 3 mutually. Connected. For this reason, in this board inspection apparatus 1, when the measuring jig 100 is attached, each connection portion Ba of the connector 101 is connected to each connection portion C of the scanner 4 in a one-to-one relationship. It becomes a state.

  Therefore, in wiring work for connecting each probe Pb to each connection portion Ba of the connector 101 via each cable Aa, each connection portion Bb of the connector 3 and each connection portion C of the scanner 4 are connected to each other. Considering that the cables Ab are connected by an integrated flat cable, the cables Aa and Aa for connecting the probes Pb and Pb whose capacity characteristics may become a problem are as follows. Without being connected to the adjacent connection portions Ba and Ba (connection portions Ba and Ba connected to adjacent or adjacent cables Ab and Ab), the connection portions Ba and Ba (a certain distance apart) Are connected to the connecting portions Ba, Ba) connected to the cables Ab, Ab. In this way, by avoiding connection to the connection portions Ba and Ba connected to adjacent or adjacent cables Ab and Ab, a situation in which the capacity between the cables Ab and Ab increases is avoided.

  In addition, the cable Aa for connecting the probe Pb whose capacity characteristics do not matter is easily connected so that the cable Aa is not entangled between the probe Pb and the connection portion Ba, and the routing is not complicated. Connect to any possible connection Ba. Thereby, the installation of the probe Pb to the probe holding plate and the connection work of each probe Pb to the connector 101 (each connecting portion Ba) are completed, and the measuring jig 100 is completed.

  Next, as an example, an identification number data creation device (not shown) (the probe Pb identification number (pin number) and each connection are checked while checking whether each probe Pb is normally connected to each connection portion Ba of the connector 101) The identification number (port number) of the part C is associated with each other and set in a device for storing the data, and the identification number data D2 is generated while checking the wiring state of each cable Aa. In this measurement jig 100, as shown in FIG. 2, identification numbers (pin numbers) of “1” to “10” are given according to the arrangement positions of the probes Pb. In this case, in the figure, the probe Pb with the identification number “1” is shown as the probe Pb1, and the probe Pb with the identification number “10” is shown as the probe Pb10. In the following description, the connection portion C to which “1” is assigned as the identification number (port number), the cable Ab connected to the connection portion C, and the connection portions Ba and Bb are referred to as the connection portion C1 and the cable Ab1. , Also referred to as connection portions Ba1 and Bb1, the connection portion C assigned with “10” as the identification number (port number), the cable Ab connected to the connection portion C, and the connection portions Ba and Bb are connected to the connection portion C10, Also referred to as cable Ab10 and connection portions Ba10 and Bb10.

  As an example, in the measurement jig 100, as shown in FIG. 3, in the wiring work using the cable Aa, the probe Pb1 is connected to the connection portion Ba1 of the connector 101 via the cable Aa1, and the probe Pb2 is connected. It is connected to the connection part Ba5 via the cable Aa2, the probe Pb3 is connected to the connection part Ba6 via the cable Aa3, the probe Pb4 is connected to the connection part Ba7 via the cable Aa4, and the probe Pb5 is connected via the cable Aa5. Connected to the connecting portion Ba8, the probe Pb6 is connected to the connecting portion Ba2 via the cable Aa6, the probe Pb7 is connected to the connecting portion Ba3 via the cable Aa7, and the probe Pb8 is connected to the connecting portion Ba9 via the cable Aa8 The probe Pb9 is connected to the connection portion Ba1 via the cable Aa9. It is connected to the probe Pb10 is connected to the connection portion Ba4 through the cable AA10.

  Therefore, by checking the connection state between each probe Pb and each connection part Ba by the identification number data creation device, as shown in FIG. 5, each connection part C of the scanner 4 is in a one-to-one relationship. Identification number data in which the identification number (pin number) of the probe Pb and the identification number (port number) of each connection C are associated with each other according to the connection relationship of each probe Pb to each connection portion Ba connected to D2 can be generated. Further, as an example, the identification number data D2 generated in the identification number data creation apparatus is stored in a USB memory (not shown) and delivered to the user of the board inspection apparatus 1 together with the measurement jig 100.

  Next, a method for inspecting the inspection target substrate 20 by the substrate inspection apparatus 1 will be described with reference to the accompanying drawings. Note that the measurement procedure data D1 and the identification number data D2 are generated in advance by the manufacturer of the measurement jig 100 or the user of the substrate inspection apparatus 1 and stored in the storage unit 10.

  When inspecting the inspection target substrate 20 by the substrate inspection apparatus 1, first, the measurement jig 100 is attached to the moving mechanism 2 and the connectors 101 and 3 are connected to each other as shown in FIG. Thereby, as shown in FIG. 3, each probe Pb of the measurement jig 100 is connected to each connection portion C of the scanner 4 via each cable Aa, the connectors 101 and 3, and each cable Ab. Next, the USB memory delivered together with the measuring jig 100 is connected to the data input unit 8, and the stored identification number data D <b> 2 is read and stored in the storage unit 10. Thereby, the preparation work for inspecting the inspection target substrate 20 is completed. Next, after setting the inspection target substrate 20 in a holder (not shown), the inspection start switch of the operation unit 6 is operated. At this time, the control unit 9 outputs a control signal S <b> 2 to the moving mechanism 2, and the moving mechanism 2 moves (approaches) the measurement jig 100 toward the inspection target substrate 20 in response thereto. Thereby, as shown in FIG. 2, each probe Pb of the measurement jig 100 is probed with respect to each measurement point Pa of the inspection target substrate 20.

  Subsequently, the control unit 9 specifies the identification numbers (pin numbers) of the probes Pb and Pb probed at the measurement points Pa and Pa at which the electrical parameter is measured by the measurement unit 5 based on the measurement procedure data D1. Specifically, the controller 9 specifies two numbers “1” and “2” (see FIG. 4) as the identification numbers (pin numbers) of the probes Pb and Pb used in the inspection step 1. Subsequently, the control unit 9 specifies an identification number (port number) given to the connection unit C to which the probe Pb having the specified identification number is connected based on the identification number data D2. Specifically, the identification number (port number) of the connection part C to which the probe Pb1 having the identification number (pin number) “1” is connected is “1”, and the identification number (pin number) is “2”. The identification number (port number) of the connection part C to which the probe Pb2 is connected is specified as “5” (see FIG. 5).

  Next, the control unit 9 outputs a control signal S4 to the scanner 4 to thereby connect the connection unit C1 with the identification number (port number) “1” and the connection unit with the identification number (port number) “5”. C5 is connected to the measurement unit 5 (cables Ac1, Ac2). Thereby, the probe Pb1 connected to the connection part C1 and the probe Pb2 connected to the connection part C5 are connected to the measurement part 5. Subsequently, the control unit 9 outputs a control signal S5 to the measurement unit 5, whereby the electrical parameter between the probes Pb1 and Pb2, that is, the measurement point Pa1 where the probe Pb1 is probed and the probe Pb2 Is measured with respect to the measurement point Pa9 where the probe is probed. Further, the control unit 9 determines whether the measurement points Pa1 and Pa9 are good or not based on the measurement result data Ds output from the measurement unit 5 and the inspection reference data D3 stored in the storage unit 10, that is, the mounted component 21a. And the inspection result is displayed on the display unit 7, and the inspection step 1 is completed.

  Further, the control unit 9 uses two numbers “3” and “2” (see FIG. 4) as the identification numbers (pin numbers) of the probes Pb and Pb used in the inspection step 2 based on the measurement procedure data D1. Identify. Next, based on the identification number data D2, the control unit 9 determines that the identification number (port number) of the connection unit C to which the probe Pb3 having the identification number (pin number) “3” is connected is “6” It is specified that the identification number (port number) of the connection part C to which the probe Pb2 whose (pin number) is “2” is connected is “5” (see FIG. 5). Subsequently, the control unit 9 outputs a control signal S4 to the scanner 4, thereby connecting the connection unit C6 with the identification number (port number) “6” and the connection with the identification number (port number) “5”. The part C5 is connected to the measuring part 5 (cables Ac1, Ac2). Thereby, the probe Pb3 connected to the connection part C6 and the probe Pb2 connected to the connection part C5 are connected to the measurement part 5.

  Subsequently, the control unit 9 outputs a control signal S5 to the measurement unit 5, thereby causing an electrical parameter between the probes Pb3 and Pb2, that is, a measurement point Pa8 where the probe Pb3 is probed, and the probe Pb2. Is measured with respect to the measurement point Pa9 where the probe is probed. Further, the control unit 9 determines whether or not the measurement points Pa8 and Pa9 are good based on the measurement result data Ds output from the measurement unit 5 and the inspection reference data D3 stored in the storage unit 10, that is, the mounted component 21b. And the inspection result is displayed on the display unit 7 and the inspection step 2 is completed. Thereafter, the control unit 9 also determines the quality between the measurement points Pa and Pa (good or bad of the mounted component 21) according to the same procedure as the above-described inspection steps 1 and 2 for each inspection step from the inspection step 3 to the inspection step 12. Inspect. Thereby, the quality of the inspection target substrate 20 is inspected.

  On the other hand, when each probe Pb of the measurement jig 100 is worn out by performing the inspection on the plurality of substrates 20 to be inspected, a new measurement is performed instead of the measurement jig 100 attached to the moving mechanism 2. The jig 100 is attached to the moving mechanism 2. At this time, the identification number data D2 stored in the USB memory delivered together with the measurement jig 100 attached to the moving mechanism 2 is stored in the storage unit 10 and used. Further, when performing an inspection on an inspection target substrate (not shown) of a type different from the inspection target substrate 20, it corresponds to the inspection target substrate instead of the measurement jig 100 attached to the moving mechanism 2. A measuring jig (not shown) manufactured in this manner is attached to the moving mechanism 2. Also in this case, the identification number data D2 stored in the USB memory delivered together with the measurement jig attached to the moving mechanism 2 is stored in the storage unit 10 and used. Accordingly, the connection state between each probe Pb in the measurement jig attached to the moving mechanism 2 and each connection portion Ba of the connector 101, that is, each probe Pb in the measurement jig attached to the moving mechanism 2. Using the identification number data D2 generated according to the connection state between the scanner 4 and each connection part C of the scanner 4, the same inspection process as that described above is executed.

  Thus, in this connection inspection method by the substrate inspection apparatus 1 and the substrate inspection apparatus 1, the moving mechanism 2 is controlled to control at least one of the measurement jig 100 and the inspection target substrate 20 (in this example, the measurement jig). 100) is moved to probe each probe Pb1 to Pb10 of the measurement jig 100 to each measurement point Pa1 to Pa10, and to the probe Pb probed to the measurement point Pa for measuring an electrical parameter by the measurement unit 5 The identification number (pin number) assigned individually is specified based on the measurement procedure data D1, and is assigned individually to the connection parts C1 to C10 to which the probe Pb having the specified identification number is connected. The identified identification number (port number) is identified based on the identification number data D2, and the scanner 4 is controlled to connect the identified identification number connection C1. C10 and the connected probes Pb is connected to the measuring section 5.

  Therefore, according to the board inspection apparatus 1 and the connection switching method by the board inspection apparatus 1, the identification number (pin number) given to each probe Pb and the scanner 4 when the measurement jig 100 is manufactured. Based on the identification number data D2 and the measurement procedure data D1, without performing the wiring work of connecting each cable Aa so as to match the identification number (port number) given to each connection portion C of Since the desired probe Pb can be connected to the measurement unit 5, the manufacturing cost of the measurement jig 100 can be sufficiently reduced to the extent that complicated wiring work is not required. Further, each probe Pb is connected to each connection portion C (in this example, each connection C) while avoiding routing that requires a long cable (connection wiring) with high wiring resistance and routing that may cause variations in capacitance characteristics. Even when arbitrarily connected to each connection portion Ba) connected to the connection portion C, the desired probe Pb can be connected to the measurement portion 5 based on the identification number data D2 and the measurement procedure data D1. Therefore, by manufacturing the measurement jig 100 as described above, it is possible to cause the measurement unit 5 to accurately measure the electrical parameters.

  Moreover, according to this board | substrate inspection apparatus 1 and the connection switching method by the board | substrate inspection apparatus 1, the identification number data D2 produced | generated in the external device corresponding to the connection relation of each probe Pb1-Pb10 with respect to each connection part C1-C10. Is input from the data input unit 8 and stored in the storage unit 10, so that when the measurement jig is replaced with a new one or a different type of measurement jig is attached, A desired probe Pb can be connected to the measurement unit 5 based on the identification number data D2 generated corresponding to the connection relationship (wiring state of the cable Aa) of each probe Pb to each connection unit C.

  Further, according to the board inspection apparatus 1 and the connection switching method by the board inspection apparatus 1, the “probing” configured to include the moving mechanism 2, the connector 3, the scanner 4, the data input unit 8, the control unit 9, and the storage unit 10. Apparatus ", measurement jig 100, measurement unit 5, and control unit 9 functioning as an inspection unit for inspecting pass / fail between each measurement point Pa based on the electrical parameters measured by measurement unit 5. By configuring, the manufacturing cost of the substrate inspection apparatus 1 (that is, the inspection cost of the inspection target substrate 20) can be reduced by the amount that the manufacturing cost of the measurement jig 100 is reduced, and the measurement jig is also measured. Since the electrical characteristics of 100 are sufficiently good, the quality of the inspection target substrate 20 can be accurately inspected.

  In addition, although the example which connected each probe Pb of the measurement jig | tool 100 to each connection part C of the scanner 4 via the connectors 101 and 3 was demonstrated, each cable Aa is connected without connecting the connectors 101 and 3, for example. A configuration in which the scanner 4 is directly connected to each connection portion C may be employed. Even when such a configuration is adopted, when the measurement jig 100 is manufactured, an identification number (pin number) given to each probe Pb and each connection portion C of the scanner 4 are given. The desired probe Pb is connected to the measuring unit 5 based on the identification number data D2 and the measurement procedure data D1, without performing a wiring operation for connecting each cable Aa so as to match the identification number (port number). Therefore, the manufacturing cost of the measurement jig 100 can be sufficiently reduced to the extent that complicated wiring work is not required. Further, each probe Pb is arbitrarily connected to each connection portion C while avoiding routing that requires a long cable (connection wiring) with high wiring resistance and routing that may cause variations in capacitance characteristics. Even in this case, since the desired probe Pb can be connected to the measurement unit 5 based on the identification number data D2 and the measurement procedure data D1, the measurement unit 100 can be manufactured by manufacturing the measurement jig 100 as described above. 5 can accurately measure the electrical parameters.

DESCRIPTION OF SYMBOLS 1 Board | substrate inspection apparatus 2, Moving mechanism 3,101 Connector 4 Scanner 5 Measuring part 8 Data input part 9 Control part 10 Storage part 20 Inspection object board | substrate 100 Measurement jig | tool Aa1-Aa10, Ab1-Ab10, Ac1, Ac2 Cable Ba1-Ba10 , Bb1 to Bb10, C1 to C10 Connection D1 Measurement procedure data D2 Identification number data D3 Inspection reference data Ds Measurement result data Pa1 to Pa10 Measurement points Pb1 to Pb10 Probes S2, S4, S5 Control signal

Claims (4)

A measurement jig in which N probes (N is a natural number of 3 or more) individually assigned with a first identification number are arranged corresponding to N measurement points in the measurement object, and the measurement A moving mechanism for moving at least one of the objects relative to the other;
Each probe is connected to each of N probe connection portions individually assigned with a second identification number via a connection wiring and connected to a measurement apparatus, and the connection mode of each probe to the measurement apparatus A connection switching unit for switching between,
According to the measurement procedure data capable of specifying the first identification number of the probe to be probed to the measurement point at which the electrical parameter is measured by the measurement device, and the connection relationship of the probe to the probe connection portion A storage unit for storing identification number data in which the first identification number and the second identification number are associated with each other;
The first identification number of the probe probed to the measurement point for measuring the electrical parameter while controlling the moving mechanism to move the at least one to probe the probe to the measurement point. Is specified based on the measurement procedure data, and the second identification number of the probe connection part to which the probe of the specified first identification number is connected is specified based on the identification number data, A probing apparatus comprising: a control unit that controls the connection switching unit to connect the probe connected to the probe connection unit of the specified second identification number to the measurement device. A data input unit for inputting the identification number data generated in an external device corresponding to the connection relationship of the probes to the probe connection units;
The probing apparatus according to claim 1, wherein the control unit stores the identification number data input from the data input unit in the storage unit.   The probing device according to claim 1, the measurement jig, the measurement device, and an inspection unit that inspects the quality between the measurement points based on the electrical parameters measured by the measurement device. Inspection equipment provided.   Using a measurement jig in which N probes (N is a natural number of 3 or more) individually assigned with the first identification number are arranged corresponding to N measurement points on the measurement object. When measuring the electrical parameters between the measurement points, the probes are connected to the N probe connection portions individually assigned with the second identification numbers via the connection wires. The first identification of the probe to be probed to the measurement point at which the electrical parameter is measured by the measurement device when the connection mode of the probe to the measurement device is switched by a connection switching unit connected to the device The first identification number and the second identification number according to the measurement procedure data that can specify the number and the connection relationship of the probes to the probe connection portions Identifying the first identification number of the probe probed to the measurement point for measuring the electrical parameter using the identification number data associated with each other based on the measurement procedure data, and The second identification number of the probe connection unit to which the probe of the identified first identification number is connected is identified based on the identification number data, the connection switching unit is controlled, and the identified first A connection switching method for connecting the probe connected to the probe connection portion having an identification number of 2 to the measuring device.

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