JP2012056178A5 - - Google Patents

Download PDF

Info

Publication number
JP2012056178A5
JP2012056178A5 JP2010201064A JP2010201064A JP2012056178A5 JP 2012056178 A5 JP2012056178 A5 JP 2012056178A5 JP 2010201064 A JP2010201064 A JP 2010201064A JP 2010201064 A JP2010201064 A JP 2010201064A JP 2012056178 A5 JP2012056178 A5 JP 2012056178A5
Authority
JP
Japan
Prior art keywords
resin layer
liquid
manufacturing
hole
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2010201064A
Other languages
English (en)
Japanese (ja)
Other versions
JP2012056178A (ja
JP5517848B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2010201064A priority Critical patent/JP5517848B2/ja
Priority claimed from JP2010201064A external-priority patent/JP5517848B2/ja
Priority to US13/223,066 priority patent/US8904639B2/en
Priority to CN201110262633.6A priority patent/CN102398423B/zh
Publication of JP2012056178A publication Critical patent/JP2012056178A/ja
Publication of JP2012056178A5 publication Critical patent/JP2012056178A5/ja
Application granted granted Critical
Publication of JP5517848B2 publication Critical patent/JP5517848B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2010201064A 2010-09-08 2010-09-08 液体吐出ヘッドの製造方法 Active JP5517848B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2010201064A JP5517848B2 (ja) 2010-09-08 2010-09-08 液体吐出ヘッドの製造方法
US13/223,066 US8904639B2 (en) 2010-09-08 2011-08-31 Method of producing liquid ejection head
CN201110262633.6A CN102398423B (zh) 2010-09-08 2011-09-07 液体喷射头的制造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010201064A JP5517848B2 (ja) 2010-09-08 2010-09-08 液体吐出ヘッドの製造方法

Publications (3)

Publication Number Publication Date
JP2012056178A JP2012056178A (ja) 2012-03-22
JP2012056178A5 true JP2012056178A5 (enExample) 2013-10-24
JP5517848B2 JP5517848B2 (ja) 2014-06-11

Family

ID=45769569

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010201064A Active JP5517848B2 (ja) 2010-09-08 2010-09-08 液体吐出ヘッドの製造方法

Country Status (3)

Country Link
US (1) US8904639B2 (enExample)
JP (1) JP5517848B2 (enExample)
CN (1) CN102398423B (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07122276B2 (ja) 1989-07-07 1995-12-25 油谷重工株式会社 建設機械の油圧ポンプ制御回路
US9232046B2 (en) 2010-07-21 2016-01-05 Tksn Holdings, Llc System and method for controlling mobile services using sensor information
US9210528B2 (en) 2010-07-21 2015-12-08 Tksn Holdings, Llc System and method for control and management of resources for consumers of information
US20120021770A1 (en) * 2010-07-21 2012-01-26 Naqvi Shamim A System and method for control and management of resources for consumers of information
US10390289B2 (en) 2014-07-11 2019-08-20 Sensoriant, Inc. Systems and methods for mediating representations allowing control of devices located in an environment having broadcasting devices
US20160012453A1 (en) 2014-07-11 2016-01-14 Shamim A. Naqvi System and Method for Inferring the Intent of a User While Receiving Signals On a Mobile Communication Device From a Broadcasting Device
US10824440B2 (en) 2014-08-22 2020-11-03 Sensoriant, Inc. Deriving personalized experiences of smart environments
JP6700977B2 (ja) * 2016-05-27 2020-05-27 キヤノン株式会社 構造体の製造方法
JP7023644B2 (ja) * 2017-09-13 2022-02-22 キヤノン株式会社 液体吐出ヘッドの製造方法
JP6950510B2 (ja) * 2017-12-15 2021-10-13 セイコーエプソン株式会社 流路部材、液体噴射装置及び流路部材の製造方法

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4370405A (en) * 1981-03-30 1983-01-25 Hewlett-Packard Company Multilayer photoresist process utilizing an absorbant dye
US4362809A (en) * 1981-03-30 1982-12-07 Hewlett-Packard Company Multilayer photoresist process utilizing an absorbant dye
JPS588661A (ja) 1981-07-09 1983-01-18 Canon Inc 液体噴射記録ヘツド
US4557797A (en) * 1984-06-01 1985-12-10 Texas Instruments Incorporated Resist process using anti-reflective coating
US4609614A (en) * 1985-06-24 1986-09-02 Rca Corporation Process of using absorptive layer in optical lithography with overlying photoresist layer to form relief pattern on substrate
ES2069699T3 (es) 1989-09-18 1995-05-16 Canon Kk Cabezal para la impresion por chorros de tinta, cartucho y aparato.
US5126289A (en) * 1990-07-20 1992-06-30 At&T Bell Laboratories Semiconductor lithography methods using an arc of organic material
JP3290495B2 (ja) * 1992-04-21 2002-06-10 キヤノン株式会社 インクジェット記録ヘッドの製造方法
US5607824A (en) * 1994-07-27 1997-03-04 International Business Machines Corporation Antireflective coating for microlithography
US6669995B1 (en) * 1994-10-12 2003-12-30 Linda Insalaco Method of treating an anti-reflective coating on a substrate
US5635333A (en) * 1994-12-28 1997-06-03 Shipley Company, L.L.C. Antireflective coating process
US6114085A (en) * 1998-11-18 2000-09-05 Clariant Finance (Bvi) Limited Antireflective composition for a deep ultraviolet photoresist
US7172960B2 (en) * 2000-12-27 2007-02-06 Intel Corporation Multi-layer film stack for extinction of substrate reflections during patterning
US7036910B2 (en) 2002-09-30 2006-05-02 Canon Kabushiki Kaisha Liquid ejection head, recording apparatus having same and manufacturing method therefor
JP2004177952A (ja) * 2002-11-20 2004-06-24 Rohm & Haas Electronic Materials Llc 多層フォトレジスト系
JP4455282B2 (ja) 2003-11-28 2010-04-21 キヤノン株式会社 インクジェットヘッドの製造方法、インクジェットヘッドおよびインクジェットカートリッジ
JP4274556B2 (ja) 2004-07-16 2009-06-10 キヤノン株式会社 液体吐出素子の製造方法
US7470505B2 (en) * 2005-09-23 2008-12-30 Lexmark International, Inc. Methods for making micro-fluid ejection head structures
JP2008119955A (ja) 2006-11-13 2008-05-29 Canon Inc インクジェット記録ヘッド及び該ヘッドの製造方法
JP5511191B2 (ja) 2008-01-28 2014-06-04 キヤノン株式会社 液体吐出ヘッド、液体吐出ヘッドの製造方法および構造体の形成方法

Similar Documents

Publication Publication Date Title
JP2012056178A5 (enExample)
US8091234B2 (en) Manufacturing method for liquid discharge head substrate
JP6598497B2 (ja) 液体吐出ヘッド及びその製造方法
KR20070079572A (ko) 잉크 제트 기록 헤드의 제조 방법
CN102398423B (zh) 液体喷射头的制造方法
JP5814747B2 (ja) 液体吐出ヘッドの製造方法
TW200402369A (en) Method of manufacturing microstructure, method of manufacturing liquid discharge head, and liquid discharge head
JP6229220B2 (ja) 液体噴射ヘッドの製造方法
JP2015009429A (ja) 液体吐出ヘッドの製造方法
JP2016221866A (ja) 液体吐出ヘッドの製造方法
JP2005212486A (ja) インクジェットプリントヘッドを作製する方法
JP6181572B2 (ja) 静電チャック用の接着シート及びその製造方法
JP7009225B2 (ja) 構造体の製造方法、液体吐出ヘッドの製造方法、保護部材、保護基板及び保護基板の製造方法
JP2006137065A (ja) 液体吐出ヘッドの製造方法
JP7134831B2 (ja) 液体吐出ヘッドの製造方法
KR20060025876A (ko) 잉크젯 프린터 헤드 및 그 제조방법
US11123987B2 (en) Liquid ejection head and method of manufacturing liquid ejection head
JP2006281715A (ja) 液体吐出ヘッドおよびその製造方法
KR100428650B1 (ko) 잉크젯 프린터의 헤드 제조방법
US20200139711A1 (en) Method of manufacturing liquid ejection head and method of forming resist
CN101005952B (zh) 液体排出装置及液体排出装置的制造方法
JP2000198204A (ja) 流体噴射装置の製造方法
JP3064439B2 (ja) インクジェットヘッドの製造方法
JP2013544363A (ja) 検査ストリップの製造方法
JP2008126481A (ja) インクジェット記録ヘッド用基板の製造方法、およびインクジェット記録ヘッドの製造方法