JP2012039226A - 音叉型の圧電振動片および圧電デバイス - Google Patents
音叉型の圧電振動片および圧電デバイス Download PDFInfo
- Publication number
- JP2012039226A JP2012039226A JP2010175320A JP2010175320A JP2012039226A JP 2012039226 A JP2012039226 A JP 2012039226A JP 2010175320 A JP2010175320 A JP 2010175320A JP 2010175320 A JP2010175320 A JP 2010175320A JP 2012039226 A JP2012039226 A JP 2012039226A
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- JP
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- Prior art keywords
- fork type
- vibrating piece
- type piezoelectric
- piezoelectric vibrating
- tuning fork
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
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- 239000000463 material Substances 0.000 claims abstract description 10
- 230000000149 penetrating effect Effects 0.000 claims abstract description 3
- 239000000853 adhesive Substances 0.000 claims description 37
- 230000001070 adhesive effect Effects 0.000 claims description 37
- 238000007789 sealing Methods 0.000 description 8
- 239000010931 gold Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- -1 direct joining Substances 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 239000006023 eutectic alloy Substances 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 230000012447 hatching Effects 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010175320A JP2012039226A (ja) | 2010-08-04 | 2010-08-04 | 音叉型の圧電振動片および圧電デバイス |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010175320A JP2012039226A (ja) | 2010-08-04 | 2010-08-04 | 音叉型の圧電振動片および圧電デバイス |
Publications (2)
Publication Number | Publication Date |
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JP2012039226A true JP2012039226A (ja) | 2012-02-23 |
JP2012039226A5 JP2012039226A5 (enrdf_load_stackoverflow) | 2013-07-11 |
Family
ID=45850764
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2010175320A Ceased JP2012039226A (ja) | 2010-08-04 | 2010-08-04 | 音叉型の圧電振動片および圧電デバイス |
Country Status (1)
Country | Link |
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JP (1) | JP2012039226A (enrdf_load_stackoverflow) |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20110068876A1 (en) * | 2009-09-18 | 2011-03-24 | Seiko Epson Corporation | Vibrating reed, vibrator, oscillator, and electronic device |
US20120248938A1 (en) * | 2011-03-29 | 2012-10-04 | Nihon Dempa Kogyo Co., Ltd. | Tuning-fork type quartz-crystal vibrating pieces and piezoelectric devices having low crystal impedance |
US20120293048A1 (en) * | 2011-03-30 | 2012-11-22 | Nihon Dempa Kogyo Co., Ltd. | Piezoelectric device |
JP2015088866A (ja) * | 2013-10-29 | 2015-05-07 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動片、及び圧電振動子 |
JP2015109513A (ja) * | 2013-12-03 | 2015-06-11 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動片、圧電振動片の製造方法及び圧電振動子 |
US9246471B2 (en) | 2013-11-16 | 2016-01-26 | Seiko Epson Corporation | Resonator element, resonator, oscillator, electronic device, and mobile object |
US9257959B2 (en) | 2013-03-29 | 2016-02-09 | Seiko Epson Corporation | Resonator element, resonator, oscillator, electronic apparatus, sensor, and moving object |
US9344058B2 (en) | 2013-03-14 | 2016-05-17 | Seiko Epson Corporation | Resonator element having a pair of vibrating arms with wide portions and arm portions |
US9413332B2 (en) | 2013-07-18 | 2016-08-09 | Seiko Epson Corporation | Resonator element, resonator, oscillator, electronic device, and moving object |
JP2017152835A (ja) * | 2016-02-23 | 2017-08-31 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動片、及び圧電振動子 |
JP2018061286A (ja) * | 2017-12-08 | 2018-04-12 | セイコーエプソン株式会社 | 振動素子、振動子、発振器、電子機器および移動体 |
JP2018196002A (ja) * | 2017-05-18 | 2018-12-06 | 株式会社村田製作所 | 音叉型水晶振動素子及びそれを備えた音叉型水晶振動子 |
JP2019149725A (ja) * | 2018-02-27 | 2019-09-05 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動片、圧電振動子、発振器、電子機器及び電波時計 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57185717A (en) * | 1981-05-12 | 1982-11-16 | Citizen Watch Co Ltd | Tuning fork type quartz oscillator |
JP2006148857A (ja) * | 2004-10-20 | 2006-06-08 | Seiko Epson Corp | 圧電振動片および圧電デバイス |
JP2006345519A (ja) * | 2005-06-09 | 2006-12-21 | Eta Sa Manufacture Horlogere Suisse | 小型のピエゾ電子共振器 |
JP2010087574A (ja) * | 2008-09-29 | 2010-04-15 | Nippon Dempa Kogyo Co Ltd | 圧電振動片および圧電デバイス |
-
2010
- 2010-08-04 JP JP2010175320A patent/JP2012039226A/ja not_active Ceased
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57185717A (en) * | 1981-05-12 | 1982-11-16 | Citizen Watch Co Ltd | Tuning fork type quartz oscillator |
JP2006148857A (ja) * | 2004-10-20 | 2006-06-08 | Seiko Epson Corp | 圧電振動片および圧電デバイス |
JP2006345519A (ja) * | 2005-06-09 | 2006-12-21 | Eta Sa Manufacture Horlogere Suisse | 小型のピエゾ電子共振器 |
JP2010087574A (ja) * | 2008-09-29 | 2010-04-15 | Nippon Dempa Kogyo Co Ltd | 圧電振動片および圧電デバイス |
Cited By (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20110068876A1 (en) * | 2009-09-18 | 2011-03-24 | Seiko Epson Corporation | Vibrating reed, vibrator, oscillator, and electronic device |
US8552624B2 (en) * | 2009-09-18 | 2013-10-08 | Seiko Epson Corporation | Impact resistance vibrating reed, vibrator, oscillator, and electronic device |
US20120248938A1 (en) * | 2011-03-29 | 2012-10-04 | Nihon Dempa Kogyo Co., Ltd. | Tuning-fork type quartz-crystal vibrating pieces and piezoelectric devices having low crystal impedance |
US8928207B2 (en) * | 2011-03-29 | 2015-01-06 | Nihon Dempa Kogyo Co., Ltd. | Tuning-fork type quartz-crystal vibrating pieces and piezoelectric devices having low crystal impedance |
US20120293048A1 (en) * | 2011-03-30 | 2012-11-22 | Nihon Dempa Kogyo Co., Ltd. | Piezoelectric device |
US8933615B2 (en) * | 2011-03-30 | 2015-01-13 | Nihon Dempa Kogyo Co., Ltd. | Tuning fork piezoelectric vibrator with clearance groove formed on the base side of the package |
US9654083B2 (en) | 2013-03-14 | 2017-05-16 | Seiko Epson Corporation | Resonator element having a pair of vibrating arms with wide portions and arm portions |
US9344058B2 (en) | 2013-03-14 | 2016-05-17 | Seiko Epson Corporation | Resonator element having a pair of vibrating arms with wide portions and arm portions |
US9257959B2 (en) | 2013-03-29 | 2016-02-09 | Seiko Epson Corporation | Resonator element, resonator, oscillator, electronic apparatus, sensor, and moving object |
US9413332B2 (en) | 2013-07-18 | 2016-08-09 | Seiko Epson Corporation | Resonator element, resonator, oscillator, electronic device, and moving object |
JP2015088866A (ja) * | 2013-10-29 | 2015-05-07 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動片、及び圧電振動子 |
US9246471B2 (en) | 2013-11-16 | 2016-01-26 | Seiko Epson Corporation | Resonator element, resonator, oscillator, electronic device, and mobile object |
JP2015109513A (ja) * | 2013-12-03 | 2015-06-11 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動片、圧電振動片の製造方法及び圧電振動子 |
JP2017152835A (ja) * | 2016-02-23 | 2017-08-31 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動片、及び圧電振動子 |
JP2018196002A (ja) * | 2017-05-18 | 2018-12-06 | 株式会社村田製作所 | 音叉型水晶振動素子及びそれを備えた音叉型水晶振動子 |
JP2018061286A (ja) * | 2017-12-08 | 2018-04-12 | セイコーエプソン株式会社 | 振動素子、振動子、発振器、電子機器および移動体 |
JP2019149725A (ja) * | 2018-02-27 | 2019-09-05 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動片、圧電振動子、発振器、電子機器及び電波時計 |
JP7053118B2 (ja) | 2018-02-27 | 2022-04-12 | エスアイアイ・クリスタルテクノロジー株式会社 | 圧電振動片、圧電振動子、発振器、電子機器及び電波時計 |
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