JP2012014170A5 - - Google Patents

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Publication number
JP2012014170A5
JP2012014170A5 JP2011137981A JP2011137981A JP2012014170A5 JP 2012014170 A5 JP2012014170 A5 JP 2012014170A5 JP 2011137981 A JP2011137981 A JP 2011137981A JP 2011137981 A JP2011137981 A JP 2011137981A JP 2012014170 A5 JP2012014170 A5 JP 2012014170A5
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JP
Japan
Prior art keywords
detection system
environment
particle detection
optical element
reticle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2011137981A
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English (en)
Japanese (ja)
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JP2012014170A (ja
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Publication date
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Publication of JP2012014170A publication Critical patent/JP2012014170A/ja
Publication of JP2012014170A5 publication Critical patent/JP2012014170A5/ja
Pending legal-status Critical Current

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JP2011137981A 2010-06-29 2011-06-22 光ウィンドウとともに広角対物レンズを用いる検査装置 Pending JP2012014170A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US35956510P 2010-06-29 2010-06-29
US61/359,565 2010-06-29

Publications (2)

Publication Number Publication Date
JP2012014170A JP2012014170A (ja) 2012-01-19
JP2012014170A5 true JP2012014170A5 (cg-RX-API-DMAC7.html) 2013-11-28

Family

ID=45352246

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011137981A Pending JP2012014170A (ja) 2010-06-29 2011-06-22 光ウィンドウとともに広角対物レンズを用いる検査装置

Country Status (2)

Country Link
US (1) US20110317136A1 (cg-RX-API-DMAC7.html)
JP (1) JP2012014170A (cg-RX-API-DMAC7.html)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9390926B2 (en) * 2013-03-11 2016-07-12 Applied Materials, Inc. Process sheet resistance uniformity improvement using multiple melt laser exposures
US9778207B2 (en) * 2013-05-14 2017-10-03 Kla-Tencor Corp. Integrated multi-pass inspection
JP2016180976A (ja) * 2015-03-24 2016-10-13 ネオ セミテック． カンパニー リミテッドＮＥＯ ＳＥＭＩＴＥＣＨ． Ｃｏ．， Ｌｔｄ フォトマスク検査装置および検査方法
US11119384B2 (en) 2017-09-28 2021-09-14 Kla-Tencor Corporation Hermetic sealing of a nonlinear crystal for use in a laser system
KR102493760B1 (ko) * 2017-09-28 2023-02-06 에이에스엠엘 네델란즈 비.브이. 보상 렌즈를 갖는 광학 시스템
CN116577404B (zh) * 2023-05-29 2025-08-01 成都凯圣捷科技有限公司 一种气体纯度检测装置
DE102023131119B3 (de) * 2023-11-09 2025-02-27 Carl Zeiss Smt Gmbh Optische Inspektionsvorrichtung

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04343315A (ja) * 1991-05-20 1992-11-30 Ulvac Japan Ltd 真空顕微鏡
JPH055841A (ja) * 1991-06-27 1993-01-14 Ulvac Japan Ltd 真空対応顕微鏡
JPH1019790A (ja) * 1996-07-02 1998-01-23 Hitachi Ltd 真空中基板検査装置
US6407373B1 (en) * 1999-06-15 2002-06-18 Applied Materials, Inc. Apparatus and method for reviewing defects on an object
JP3943022B2 (ja) * 2000-12-01 2007-07-11 株式会社荏原製作所 基板検査装置
TWI286674B (en) * 2002-12-27 2007-09-11 Asml Netherlands Bv Container for a mask, method of transferring lithographic masks therein and method of scanning a mask in a container
CN101263201B (zh) * 2005-09-16 2012-10-17 松下电器产业株式会社 复合材料、及使用该材料的光学部件
WO2008126792A1 (ja) * 2007-04-09 2008-10-23 Olympus Corporation 光学ガラス及びこれを使用した光学装置
NL2003588A (en) * 2008-12-15 2010-06-16 Asml Holding Nv Reticle inspection systems and method.

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