JP2012002688A - デュアル物理量センサ - Google Patents
デュアル物理量センサ Download PDFInfo
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- JP2012002688A JP2012002688A JP2010138333A JP2010138333A JP2012002688A JP 2012002688 A JP2012002688 A JP 2012002688A JP 2010138333 A JP2010138333 A JP 2010138333A JP 2010138333 A JP2010138333 A JP 2010138333A JP 2012002688 A JP2012002688 A JP 2012002688A
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- Japan
- Prior art keywords
- physical quantity
- temperature
- pressure
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L15/00—Devices or apparatus for measuring two or more fluid pressure values simultaneously
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
- G01L9/065—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices with temperature compensating means
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Measuring Fluid Pressure (AREA)
- Measuring Volume Flow (AREA)
Abstract
【解決手段】第1被測定対象の圧力を検出する圧力センサ3Aと、第2被測定対象の圧力を検出する圧力センサ3Bと、圧力センサ3Aおよび圧力センサ3Bの温度を検出する温度センサ4と、圧力センサ3Aの検出信号から温度変化による変動分を除外する補正を実行し、当該補正後の信号を第1被測定対象の測定信号として出力する第1補正部と、圧力センサ3Bの検出信号から温度変化による変動分を除外する補正を実行し、当該補正後の信号を第2被測定対象の測定信号として出力する第2補正部と、を備え、温度センサ4を、圧力センサ3Aおよび圧力センサ3Bと相互に接触した状態で一体化する。
【選択図】図1
Description
本発明を、上述した実施形態によって説明したが、この開示の一部をなす記述および図面は、この発明を限定するものではない。この開示から当業者には様々な代替の実施形態や運用技術等が明らかになるはずである。
Claims (5)
- 第1被測定対象の物理量を検出する第1物理量検出素子と、
第2被測定対象の物理量を検出する第2物理量検出素子と、
前記第1物理量検出素子および前記第2物理量検出素子の温度を検出する温度検出素子と、
前記第1物理量検出素子の検出信号から温度変化による変動分を除外する補正を実行し、当該補正後の信号を前記第1被測定対象の測定信号として出力する第1補正部と、
前記第2物理量検出素子の検出信号から温度変化による変動分を除外する補正を実行し、当該補正後の信号を前記第2被測定対象の測定信号として出力する第2補正部と、を備え、
前記温度検出素子は、前記第1物理量検出素子および前記第2物理量検出素子と相互に接触した状態で一体化されていることを特徴とするデュアル物理量センサ。 - 前記第1物理量検出素子および前記第2物理量検出素子の温度を同等にする発熱器を、さらに備えることを特徴とする請求項1記載のデュアル物理量センサ。
- 前記温度検出素子の検出温度が予め定められた所定温度となるように前記発熱器の発熱量を制御する発熱制御部を、さらに備えることを特徴とする請求項1または2記載のデュアル物理量センサ。
- 前記第1補正部および前記第2補正部は、前記温度検出素子の検出温度を用いて前記補正を実行することを特徴とする請求項1〜3のいずれか1項に記載のデュアル物理量センサ。
- 前記第1補正部および前記第2補正部は、前記所定温度を用いて前記補正を実行することを特徴とする請求項3記載のデュアル物理量センサ。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010138333A JP5548531B2 (ja) | 2010-06-17 | 2010-06-17 | デュアル物理量センサ |
US13/154,925 US8443675B2 (en) | 2010-06-17 | 2011-06-07 | Dual physical quantity sensor |
CN201110165743.0A CN102288357B (zh) | 2010-06-17 | 2011-06-14 | 双重物理量传感器 |
KR1020110057490A KR101257592B1 (ko) | 2010-06-17 | 2011-06-14 | 듀얼 물리량 센서 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010138333A JP5548531B2 (ja) | 2010-06-17 | 2010-06-17 | デュアル物理量センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012002688A true JP2012002688A (ja) | 2012-01-05 |
JP5548531B2 JP5548531B2 (ja) | 2014-07-16 |
Family
ID=45327471
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010138333A Expired - Fee Related JP5548531B2 (ja) | 2010-06-17 | 2010-06-17 | デュアル物理量センサ |
Country Status (4)
Country | Link |
---|---|
US (1) | US8443675B2 (ja) |
JP (1) | JP5548531B2 (ja) |
KR (1) | KR101257592B1 (ja) |
CN (1) | CN102288357B (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016531299A (ja) * | 2013-09-06 | 2016-10-06 | イリノイ トゥール ワークス インコーポレイティド | 絶対圧差圧圧力トランスデューサー |
WO2022249769A1 (ja) * | 2021-05-27 | 2022-12-01 | 株式会社村田製作所 | 圧力センサ |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5749806B2 (ja) * | 2011-11-01 | 2015-07-15 | パナソニックヘルスケアホールディングス株式会社 | 生体試料測定装置 |
JP6502769B2 (ja) * | 2015-07-02 | 2019-04-17 | 旭サナック株式会社 | 圧力検出器 |
US11137300B2 (en) * | 2017-04-25 | 2021-10-05 | Ati Industrial Automation, Inc. | Robotic force/torque sensor with improved temperature compensation |
JP6964063B2 (ja) * | 2018-11-28 | 2021-11-10 | 長野計器株式会社 | センサアッシーおよび物理量測定装置 |
FR3092167B1 (fr) * | 2019-01-29 | 2021-10-22 | Arianegroup Sas | Capteur pour la mesure d’une première grandeur physique dont la mesure est influencée par une deuxième grandeur physique |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5915944U (ja) * | 1982-07-21 | 1984-01-31 | 株式会社日立製作所 | 差圧検出器 |
JPS6173382A (ja) * | 1984-09-18 | 1986-04-15 | Fujikura Ltd | 半導体圧力センサの温度補償方法 |
JPS6355137U (ja) * | 1986-09-30 | 1988-04-13 | ||
JPH03122536A (ja) * | 1989-09-28 | 1991-05-24 | Endress & Hauser Gmbh & Co | 差圧測定装置 |
JP2003075318A (ja) * | 2001-09-06 | 2003-03-12 | Nippon Sanso Corp | 流体成分濃度測定方法及び装置 |
JP2008197001A (ja) * | 2007-02-14 | 2008-08-28 | Denso Corp | 圧力センサ |
JP2009031003A (ja) * | 2007-07-24 | 2009-02-12 | Yamatake Corp | デュアル圧力センサ |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3896435B2 (ja) | 1997-12-17 | 2007-03-22 | アークレイ株式会社 | センサおよびセンサ集合体 |
EP1128168A3 (en) * | 2000-02-23 | 2002-07-03 | Hitachi, Ltd. | Measurement apparatus for measuring physical quantity such as fluid flow |
CN1200254C (zh) * | 2003-04-20 | 2005-05-04 | 胡永成 | 内置式气体流量计及温度压力补偿传输法 |
KR100682941B1 (ko) | 2004-03-27 | 2007-02-15 | 삼성전자주식회사 | 생체신호 동시 측정장치 및 방법 |
CN101184973B (zh) * | 2005-06-01 | 2012-06-13 | 西铁城控股株式会社 | 物理量传感器 |
JP4927683B2 (ja) | 2007-11-09 | 2012-05-09 | 株式会社山武 | 流量制御弁 |
JP4794596B2 (ja) * | 2008-04-04 | 2011-10-19 | パナソニック株式会社 | 物理量検出回路、物理量センサ装置 |
JP2009281888A (ja) * | 2008-05-22 | 2009-12-03 | Panasonic Corp | 物理量検出回路およびそれを備える物理量センサ装置、並びに物理量検出方法 |
JP2010151669A (ja) * | 2008-12-25 | 2010-07-08 | Panasonic Corp | 物理量検出回路、物理量センサ装置 |
JP2012002741A (ja) * | 2010-06-18 | 2012-01-05 | Yamatake Corp | 物理量センサ |
-
2010
- 2010-06-17 JP JP2010138333A patent/JP5548531B2/ja not_active Expired - Fee Related
-
2011
- 2011-06-07 US US13/154,925 patent/US8443675B2/en not_active Expired - Fee Related
- 2011-06-14 KR KR1020110057490A patent/KR101257592B1/ko not_active IP Right Cessation
- 2011-06-14 CN CN201110165743.0A patent/CN102288357B/zh not_active Expired - Fee Related
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5915944U (ja) * | 1982-07-21 | 1984-01-31 | 株式会社日立製作所 | 差圧検出器 |
JPS6173382A (ja) * | 1984-09-18 | 1986-04-15 | Fujikura Ltd | 半導体圧力センサの温度補償方法 |
JPS6355137U (ja) * | 1986-09-30 | 1988-04-13 | ||
JPH03122536A (ja) * | 1989-09-28 | 1991-05-24 | Endress & Hauser Gmbh & Co | 差圧測定装置 |
JP2003075318A (ja) * | 2001-09-06 | 2003-03-12 | Nippon Sanso Corp | 流体成分濃度測定方法及び装置 |
JP2008197001A (ja) * | 2007-02-14 | 2008-08-28 | Denso Corp | 圧力センサ |
JP2009031003A (ja) * | 2007-07-24 | 2009-02-12 | Yamatake Corp | デュアル圧力センサ |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016531299A (ja) * | 2013-09-06 | 2016-10-06 | イリノイ トゥール ワークス インコーポレイティド | 絶対圧差圧圧力トランスデューサー |
WO2022249769A1 (ja) * | 2021-05-27 | 2022-12-01 | 株式会社村田製作所 | 圧力センサ |
Also Published As
Publication number | Publication date |
---|---|
CN102288357B (zh) | 2014-12-24 |
US20110308321A1 (en) | 2011-12-22 |
US8443675B2 (en) | 2013-05-21 |
CN102288357A (zh) | 2011-12-21 |
KR20110137744A (ko) | 2011-12-23 |
KR101257592B1 (ko) | 2013-04-26 |
JP5548531B2 (ja) | 2014-07-16 |
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