JP2011527521A5 - - Google Patents

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Publication number
JP2011527521A5
JP2011527521A5 JP2011517510A JP2011517510A JP2011527521A5 JP 2011527521 A5 JP2011527521 A5 JP 2011527521A5 JP 2011517510 A JP2011517510 A JP 2011517510A JP 2011517510 A JP2011517510 A JP 2011517510A JP 2011527521 A5 JP2011527521 A5 JP 2011527521A5
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JP
Japan
Prior art keywords
measurement results
characteristic parameter
parameter measurement
plasma
processing chamber
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JP2011517510A
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English (en)
Japanese (ja)
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JP2011527521A (ja
JP5427888B2 (ja
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Priority claimed from PCT/US2009/049757 external-priority patent/WO2010005930A2/en
Publication of JP2011527521A publication Critical patent/JP2011527521A/ja
Publication of JP2011527521A5 publication Critical patent/JP2011527521A5/ja
Application granted granted Critical
Publication of JP5427888B2 publication Critical patent/JP5427888B2/ja
Expired - Fee Related legal-status Critical Current
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JP2011517510A 2008-07-07 2009-07-07 プラズマ処理チャンバ内のストライクステップを検出するための容量結合静電（ｃｃｅ）プローブ構成、それに関連する方法、及び、その方法を実行するコードを格納するプログラム格納媒体 Expired - Fee Related JP5427888B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US7873908P 2008-07-07 2008-07-07
US61/078,739 2008-07-07
PCT/US2009/049757 WO2010005930A2 (en) 2008-07-07 2009-07-07 Capacitively-coupled electrostatic (cce) probe arrangement for detecting strike step in a plasma processing chamber and methods thereof

Publications (3)

Publication Number Publication Date
JP2011527521A JP2011527521A (ja) 2011-10-27
JP2011527521A5 true JP2011527521A5 (enExample) 2013-04-11
JP5427888B2 JP5427888B2 (ja) 2014-02-26

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ID=41504145

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011517510A Expired - Fee Related JP5427888B2 (ja) 2008-07-07 2009-07-07 プラズマ処理チャンバ内のストライクステップを検出するための容量結合静電（ｃｃｅ）プローブ構成、それに関連する方法、及び、その方法を実行するコードを格納するプログラム格納媒体

Country Status (6)

Country Link
US (1) US8164349B2 (enExample)
JP (1) JP5427888B2 (enExample)
KR (1) KR20110039239A (enExample)
CN (2) CN104320899A (enExample)
TW (1) TWI467623B (enExample)
WO (1) WO2010005930A2 (enExample)

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