JP2011527106A5 - - Google Patents

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Publication number
JP2011527106A5
JP2011527106A5 JP2011516380A JP2011516380A JP2011527106A5 JP 2011527106 A5 JP2011527106 A5 JP 2011527106A5 JP 2011516380 A JP2011516380 A JP 2011516380A JP 2011516380 A JP2011516380 A JP 2011516380A JP 2011527106 A5 JP2011527106 A5 JP 2011527106A5
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JP
Japan
Prior art keywords
liquid
surface region
structured surface
recessed features
substrate
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Application number
JP2011516380A
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English (en)
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JP5319769B2 (ja
JP2011527106A (ja
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Priority claimed from PCT/US2009/045120 external-priority patent/WO2010002519A1/en
Publication of JP2011527106A publication Critical patent/JP2011527106A/ja
Publication of JP2011527106A5 publication Critical patent/JP2011527106A5/ja
Application granted granted Critical
Publication of JP5319769B2 publication Critical patent/JP5319769B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Claims (3)

  1. パターン形成された基板を形成するための方法であって、
    1つ以上の凹状形成部を有する構造化表面領域を有する基板を与える工程と、
    第1の液体を前記構造化表面領域の少なくとも一部分の上に配置する工程と、
    前記第1の液体を第2の液体と接触させる工程と、
    前記第2の液体によって前記構造化表面領域の少なくとも一部分から前記第1の液体を排除して前記第1の液体を前記1つ以上の凹状形成部の少なくとも一部分に選択的に配置する工程と、
    を含み、
    前記第1の液体が、金属、金属前駆物質、無電解メッキ触媒、無電解メッキ触媒前駆物質、マスク材料、又はこれらの組み合わせを含む、方法。
  2. パターン形成された基板を形成するための方法であって、
    1つ以上の凹状形成部と前記1つ以上の凹状形成部と相補的な表面領域とを有し、基板上に配置された金属層を含む金属化構造化表面領域を有する基板を与える工程と、
    第1の液体を前記金属化構造化表面領域の少なくとも一部分の上に配置する工程と、
    前記第1の液体を第2の液体と接触させる工程と、
    前記第2の液体によって前記金属化構造化表面領域の少なくとも一部分から前記第1の液体を排除して前記第1の液体を前記1つ以上の凹状形成部の少なくとも一部分に選択的に配置する工程と、
    前記1つ以上の凹状形成部と相補的な前記表面領域から前記金属層の少なくとも一部分を前記第2の液体中に選択的に溶解する工程と、
    を含む方法。
  3. パターン形成された基板を形成するための方法であって、
    1つ以上の凹状形成部を有する構造化表面領域を有する基板を与える工程と、
    第1の液体を前記構造化表面領域の少なくとも一部分の上に配置する工程と、
    前記第1の液体を第2の液体と接触させる工程と、
    前記第2の液体によって前記構造化表面領域の少なくとも一部分から前記第1の液体を排除して前記第1の液体を前記1つ以上の凹状形成部の少なくとも一部分に選択的に配置する工程と、
    を含み、
    前記第1の液体が前記1つ以上の凹状形成部の少なくとも一部分に選択的に配置された後に前記第1の液体が固体に変換される、方法。
JP2011516380A 2008-06-30 2009-05-26 パターン形成された基板の形成方法 Expired - Fee Related JP5319769B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US7673608P 2008-06-30 2008-06-30
US61/076,736 2008-06-30
PCT/US2009/045120 WO2010002519A1 (en) 2008-06-30 2009-05-26 Method of forming a patterned substrate

Publications (3)

Publication Number Publication Date
JP2011527106A JP2011527106A (ja) 2011-10-20
JP2011527106A5 true JP2011527106A5 (ja) 2012-07-12
JP5319769B2 JP5319769B2 (ja) 2013-10-16

Family

ID=40984776

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011516380A Expired - Fee Related JP5319769B2 (ja) 2008-06-30 2009-05-26 パターン形成された基板の形成方法

Country Status (6)

Country Link
US (1) US8652345B2 (ja)
EP (1) EP2311301B1 (ja)
JP (1) JP5319769B2 (ja)
CN (1) CN102124825B (ja)
AT (1) ATE555643T1 (ja)
WO (1) WO2010002519A1 (ja)

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