JP2011524847A - 単結晶ダイヤモンドの成長方法 - Google Patents
単結晶ダイヤモンドの成長方法 Download PDFInfo
- Publication number
- JP2011524847A JP2011524847A JP2011514548A JP2011514548A JP2011524847A JP 2011524847 A JP2011524847 A JP 2011524847A JP 2011514548 A JP2011514548 A JP 2011514548A JP 2011514548 A JP2011514548 A JP 2011514548A JP 2011524847 A JP2011524847 A JP 2011524847A
- Authority
- JP
- Japan
- Prior art keywords
- nitrogen
- diamond
- single crystal
- crystal diamond
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010432 diamond Substances 0.000 title claims abstract description 145
- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 135
- 239000013078 crystal Substances 0.000 title claims abstract description 61
- 238000000034 method Methods 0.000 title claims abstract description 51
- 230000012010 growth Effects 0.000 title abstract description 46
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 170
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 90
- 238000005229 chemical vapour deposition Methods 0.000 claims abstract description 66
- 239000007789 gas Substances 0.000 claims abstract description 64
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 22
- 239000012495 reaction gas Substances 0.000 claims abstract description 16
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims abstract description 14
- 239000001257 hydrogen Substances 0.000 claims abstract description 12
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 12
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 10
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims abstract description 10
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 8
- 230000007547 defect Effects 0.000 claims description 22
- 229910002804 graphite Inorganic materials 0.000 claims description 14
- 239000010439 graphite Substances 0.000 claims description 14
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 8
- 239000001301 oxygen Substances 0.000 claims description 8
- 229910052760 oxygen Inorganic materials 0.000 claims description 8
- 239000001307 helium Substances 0.000 claims description 5
- 229910052734 helium Inorganic materials 0.000 claims description 5
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 5
- 239000010437 gem Substances 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 150000002431 hydrogen Chemical class 0.000 claims description 3
- MWUXSHHQAYIFBG-UHFFFAOYSA-N nitrogen oxide Inorganic materials O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 claims 3
- 238000000879 optical micrograph Methods 0.000 description 9
- 239000000203 mixture Substances 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 5
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 4
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 4
- 238000001157 Fourier transform infrared spectrum Methods 0.000 description 4
- 229910052796 boron Inorganic materials 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 229910001873 dinitrogen Inorganic materials 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 229910001751 gemstone Inorganic materials 0.000 description 3
- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 238000006731 degradation reaction Methods 0.000 description 2
- 238000001887 electron backscatter diffraction Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000013507 mapping Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 125000004433 nitrogen atom Chemical group N* 0.000 description 2
- 238000000628 photoluminescence spectroscopy Methods 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 238000001069 Raman spectroscopy Methods 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- PPWPWBNSKBDSPK-UHFFFAOYSA-N [B].[C] Chemical compound [B].[C] PPWPWBNSKBDSPK-UHFFFAOYSA-N 0.000 description 1
- CKUAXEQHGKSLHN-UHFFFAOYSA-N [C].[N] Chemical compound [C].[N] CKUAXEQHGKSLHN-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000000862 absorption spectrum Methods 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- CREMABGTGYGIQB-UHFFFAOYSA-N carbon carbon Chemical compound C.C CREMABGTGYGIQB-UHFFFAOYSA-N 0.000 description 1
- 150000001722 carbon compounds Chemical class 0.000 description 1
- 239000011203 carbon fibre reinforced carbon Substances 0.000 description 1
- 238000012733 comparative method Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000000295 emission spectrum Methods 0.000 description 1
- 210000003746 feather Anatomy 0.000 description 1
- 230000007773 growth pattern Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910017464 nitrogen compound Inorganic materials 0.000 description 1
- 150000002830 nitrogen compounds Chemical class 0.000 description 1
- 239000001272 nitrous oxide Substances 0.000 description 1
- 238000000103 photoluminescence spectrum Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- 238000000870 ultraviolet spectroscopy Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/04—Diamond
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/18—Epitaxial-layer growth characterised by the substrate
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Carbon And Carbon Compounds (AREA)
- Chemical Vapour Deposition (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SG200804637-7A SG157973A1 (en) | 2008-06-18 | 2008-06-18 | Method for growing monocrystalline diamonds |
| SG200804637-7 | 2008-06-18 | ||
| PCT/SG2009/000218 WO2009154577A1 (en) | 2008-06-18 | 2009-06-18 | Method for growing monocrystalline diamonds |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2011524847A true JP2011524847A (ja) | 2011-09-08 |
| JP2011524847A5 JP2011524847A5 (https=) | 2014-11-13 |
Family
ID=41434313
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011514548A Pending JP2011524847A (ja) | 2008-06-18 | 2009-06-18 | 単結晶ダイヤモンドの成長方法 |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US8992877B2 (https=) |
| EP (1) | EP2262920B1 (https=) |
| JP (1) | JP2011524847A (https=) |
| AU (1) | AU2009260912B2 (https=) |
| EA (1) | EA201001601A1 (https=) |
| IL (1) | IL208829A0 (https=) |
| MY (1) | MY173452A (https=) |
| NZ (1) | NZ588375A (https=) |
| SG (1) | SG157973A1 (https=) |
| WO (1) | WO2009154577A1 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017523120A (ja) * | 2014-05-28 | 2017-08-17 | ユニット セル ダイヤモンド エルエルシーUnit Cell Diamond Llc | コンビナトリアル合成によるダイヤモンド単位格子およびダイヤモンド塊 |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2373963B1 (en) | 2008-12-29 | 2023-03-01 | KAZ Europe SA | Probe cover with matching feature for a medical thermometer |
| WO2010124625A1 (zh) * | 2009-04-28 | 2010-11-04 | Chu Xi | 生产大颗粒金刚石的方法和设备 |
| JP2011219285A (ja) * | 2010-04-06 | 2011-11-04 | Kobe Steel Ltd | ダイヤモンドフレークの製造方法およびダイヤモンドフレークを含有した伝熱性強化材 |
| US9783885B2 (en) | 2010-08-11 | 2017-10-10 | Unit Cell Diamond Llc | Methods for producing diamond mass and apparatus therefor |
| US10258959B2 (en) | 2010-08-11 | 2019-04-16 | Unit Cell Diamond Llc | Methods of producing heterodiamond and apparatus therefor |
| SG179318A1 (en) * | 2010-09-27 | 2012-04-27 | Gemesis Company S Pte Ltd | Method for growing white color diamonds by using diborane and nitrogen in combination in a microwave plasma chemical vapor deposition system |
| CN103294439B (zh) * | 2013-06-28 | 2016-03-02 | 华为技术有限公司 | 一种图像更新方法、系统及装置 |
| SG10201505413VA (en) | 2015-01-14 | 2016-08-30 | Iia Technologies Pte Ltd | Electronic device grade single crystal diamonds and method of producing the same |
| TW201641420A (zh) * | 2015-03-09 | 2016-12-01 | 二A科技有限公司 | 單晶鑽石及其成長方法 |
| CN107305185A (zh) * | 2016-04-25 | 2017-10-31 | 潘栋雄 | 利用拉曼在三阶光谱的特征峰区分天然与合成钻石的方法 |
| TWI706061B (zh) * | 2017-04-26 | 2020-10-01 | 新加坡商二A 科技有限公司 | 大單晶鑽石及其生產方法 |
| US11469077B2 (en) | 2018-04-24 | 2022-10-11 | FD3M, Inc. | Microwave plasma chemical vapor deposition device and application thereof |
| GB201904435D0 (en) | 2019-03-29 | 2019-05-15 | Element Six Tech Ltd | Single crystal synthetic diamond material |
| CN114318529B (zh) * | 2021-11-26 | 2023-12-12 | 航天科工(长沙)新材料研究院有限公司 | 一种金刚石及其合成工艺 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005061400A1 (en) * | 2003-12-12 | 2005-07-07 | Element Six Limited | Method of incorporating a mark in cvd diamond |
| WO2006136929A2 (en) * | 2005-06-22 | 2006-12-28 | Element Six Limited | High colour diamond layer |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR900008505B1 (ko) * | 1987-02-24 | 1990-11-24 | 세미콘덕터 에너지 라보라터리 캄파니 리미티드 | 탄소 석출을 위한 마이크로파 강화 cvd 방법 |
| US5443032A (en) * | 1992-06-08 | 1995-08-22 | Air Products And Chemicals, Inc. | Method for the manufacture of large single crystals |
| JP3374866B2 (ja) * | 1993-08-30 | 2003-02-10 | 住友電気工業株式会社 | 半導体ダイヤモンド及びその形成方法 |
| JP3484749B2 (ja) * | 1994-04-04 | 2004-01-06 | 住友電気工業株式会社 | ダイヤモンドの合成法 |
| US6582513B1 (en) * | 1998-05-15 | 2003-06-24 | Apollo Diamond, Inc. | System and method for producing synthetic diamond |
| GB0227261D0 (en) * | 2002-11-21 | 2002-12-31 | Element Six Ltd | Optical quality diamond material |
| US7883684B2 (en) * | 2005-05-25 | 2011-02-08 | Carnegie Institution Of Washington | Colorless single-crystal CVD diamond at rapid growth rate |
| SG179318A1 (en) * | 2010-09-27 | 2012-04-27 | Gemesis Company S Pte Ltd | Method for growing white color diamonds by using diborane and nitrogen in combination in a microwave plasma chemical vapor deposition system |
-
2008
- 2008-06-18 SG SG200804637-7A patent/SG157973A1/en unknown
-
2009
- 2009-06-18 AU AU2009260912A patent/AU2009260912B2/en not_active Ceased
- 2009-06-18 JP JP2011514548A patent/JP2011524847A/ja active Pending
- 2009-06-18 US US12/933,059 patent/US8992877B2/en active Active
- 2009-06-18 WO PCT/SG2009/000218 patent/WO2009154577A1/en not_active Ceased
- 2009-06-18 MY MYPI2010004766A patent/MY173452A/en unknown
- 2009-06-18 NZ NZ588375A patent/NZ588375A/xx not_active IP Right Cessation
- 2009-06-18 EA EA201001601A patent/EA201001601A1/ru unknown
- 2009-06-18 EP EP09766960.0A patent/EP2262920B1/en not_active Not-in-force
-
2010
- 2010-10-20 IL IL208829A patent/IL208829A0/en unknown
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005061400A1 (en) * | 2003-12-12 | 2005-07-07 | Element Six Limited | Method of incorporating a mark in cvd diamond |
| WO2006136929A2 (en) * | 2005-06-22 | 2006-12-28 | Element Six Limited | High colour diamond layer |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017523120A (ja) * | 2014-05-28 | 2017-08-17 | ユニット セル ダイヤモンド エルエルシーUnit Cell Diamond Llc | コンビナトリアル合成によるダイヤモンド単位格子およびダイヤモンド塊 |
Also Published As
| Publication number | Publication date |
|---|---|
| AU2009260912A1 (en) | 2009-12-23 |
| IL208829A0 (en) | 2011-01-31 |
| AU2009260912B2 (en) | 2014-02-13 |
| MY173452A (en) | 2020-01-25 |
| NZ588375A (en) | 2012-08-31 |
| EP2262920B1 (en) | 2016-10-19 |
| WO2009154577A1 (en) | 2009-12-23 |
| US8992877B2 (en) | 2015-03-31 |
| SG157973A1 (en) | 2010-01-29 |
| EP2262920A1 (en) | 2010-12-22 |
| EP2262920A4 (en) | 2014-03-05 |
| US20110014112A1 (en) | 2011-01-20 |
| EA201001601A1 (ru) | 2011-10-31 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20120402 |
|
| A977 | Report on retrieval |
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| A131 | Notification of reasons for refusal |
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| A521 | Request for written amendment filed |
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|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20140527 |
|
| A524 | Written submission of copy of amendment under article 19 pct |
Free format text: JAPANESE INTERMEDIATE CODE: A524 Effective date: 20140916 |