JP2011519042A - 圧力センサー - Google Patents
圧力センサー Download PDFInfo
- Publication number
- JP2011519042A JP2011519042A JP2011506653A JP2011506653A JP2011519042A JP 2011519042 A JP2011519042 A JP 2011519042A JP 2011506653 A JP2011506653 A JP 2011506653A JP 2011506653 A JP2011506653 A JP 2011506653A JP 2011519042 A JP2011519042 A JP 2011519042A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- pressure sensor
- pressure
- deformation
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- G—PHYSICS
- G04—HOROLOGY
- G04G—ELECTRONIC TIME-PIECES
- G04G21/00—Input or output devices integrated in time-pieces
- G04G21/02—Detectors of external physical values, e.g. temperature
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
- G01L9/0044—Constructional details of non-semiconductive diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/008—Transmitting or indicating the displacement of flexible diaphragms using piezoelectric devices
-
- G—PHYSICS
- G04—HOROLOGY
- G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
- G04B47/00—Time-pieces combined with other articles which do not interfere with the running or the time-keeping of the time-piece
- G04B47/06—Time-pieces combined with other articles which do not interfere with the running or the time-keeping of the time-piece with attached measuring instruments, e.g. pedometer, barometer, thermometer or compass
-
- G—PHYSICS
- G04—HOROLOGY
- G04B—MECHANICALLY-DRIVEN CLOCKS OR WATCHES; MECHANICAL PARTS OF CLOCKS OR WATCHES IN GENERAL; TIME PIECES USING THE POSITION OF THE SUN, MOON OR STARS
- G04B47/00—Time-pieces combined with other articles which do not interfere with the running or the time-keeping of the time-piece
- G04B47/06—Time-pieces combined with other articles which do not interfere with the running or the time-keeping of the time-piece with attached measuring instruments, e.g. pedometer, barometer, thermometer or compass
- G04B47/066—Time-pieces combined with other articles which do not interfere with the running or the time-keeping of the time-piece with attached measuring instruments, e.g. pedometer, barometer, thermometer or compass with a pressure sensor
Abstract
Description
b)加熱されたマトリクス間にアモルファス金属円板を挿入する。
c)アモルファス金属円板にこれら形状の複製を作るため、マトリクスに閉じ方向の力を加える。
d)所定の最大期間の間、そのままに置く。
e)マトリクスを開く。
f)薄膜11を温度Tg以下に急速に冷却する。
g)マトリクスから薄膜11を取出す。
7 ベース; 8 中間部材; 9 密閉空洞部; 10 伝達装置; 11 薄膜;
13 複数の孔; 21 ケース。
Claims (10)
- 柔軟な薄膜(11)を含み、該薄膜(11)が該薄膜の変形に基づいて加えられた圧力値を示すことが可能な伝達装置(10)と協働するように構成され、前記薄膜(11)は、センサーの寸法を最適化できるように、少なくとも部分的にアモルファス合金で製造された圧力センサー(6)であって、
前記金属合金が、金、プラチナ、パラジウム、レニウム、ルチニウム、ロジウム、銀、イリジウム又はオスニウムを包含するリスト中に含まれた、少なくとも1つの貴金属元素からなることを特徴とするセンサー。 - 請求項1の圧力センサーであって、前記薄膜(11)が完全にアモルファス材料から製造されていることを特徴とするセンサー。
- 請求項1又は2のセンサーであって、前記材料のヤング率に対する弾性限界の比が、0.01以上であることを特徴とするセンサー。
- 請求項3のセンサーであって、前記材料のヤング率が、50GPa以上であることを特徴とするセンサー。
- 請求項1〜4の何れか1項に記載のセンサーであって、前記材料がアレルギー原因元素を放出しない、ことを特徴とするセンサー。
- 請求項1〜5のいずれか1項の圧力センサーであって、前記薄膜(11)は、円板状であり、またその周辺部において前記センサーに取付けられることを特徴とするセンサー。
- 請求項1〜6のいずれか1項の圧力センサーであって、前記薄膜(11)が、変形表面を増やすために、非線形の輪郭形状を有していることを特徴とするセンサー。
- 請求項7の圧力センサーであって、前記薄膜(11)の輪郭形状が少なくとも1つの正弦波形状を有することを特徴とするセンサー。
- 請求項1〜8のいずれか1項に記載した圧力センサー(6)を有することを特徴とする時計。
- 請求項9に記載した時計であって、前記時計に深さ測定機能が達成されるように、前記圧力値を深さに変換する手段を、更に備えていることを特徴とする時計。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP08155390A EP2113759A1 (fr) | 2008-04-29 | 2008-04-29 | Capteur de pression ayant une membrane comprenant un matériau amorphe |
EP08155390.1 | 2008-04-29 | ||
PCT/EP2009/054677 WO2009132983A1 (fr) | 2008-04-29 | 2009-04-20 | Capteur de pression ayant une membrane comprenant un materiau amorphe |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2011519042A true JP2011519042A (ja) | 2011-06-30 |
Family
ID=39811516
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011506653A Pending JP2011519042A (ja) | 2008-04-29 | 2009-04-20 | 圧力センサー |
Country Status (9)
Country | Link |
---|---|
US (1) | US8640547B2 (ja) |
EP (2) | EP2113759A1 (ja) |
JP (1) | JP2011519042A (ja) |
KR (1) | KR20100135860A (ja) |
CN (1) | CN102084232B (ja) |
AT (1) | ATE532116T1 (ja) |
HK (1) | HK1153266A1 (ja) |
TW (1) | TWI486730B (ja) |
WO (1) | WO2009132983A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015079751A (ja) * | 2013-10-15 | 2015-04-23 | ザ・スウォッチ・グループ・リサーチ・アンド・ディベロップメント・リミテッド | 圧力センサー |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8672873B2 (en) | 2009-08-18 | 2014-03-18 | Cequr Sa | Medicine delivery device having detachable pressure sensing unit |
US8547239B2 (en) * | 2009-08-18 | 2013-10-01 | Cequr Sa | Methods for detecting failure states in a medicine delivery device |
CH702839B1 (fr) * | 2010-03-16 | 2019-12-30 | Montres Breguet Sa | Montre à sonnerie munie d’une membrane acoustique. |
EP2400353A1 (fr) * | 2010-06-22 | 2011-12-28 | The Swatch Group Research and Development Ltd. | Aiguille de pièce d'horlogerie |
EP2466394A1 (fr) * | 2010-12-17 | 2012-06-20 | The Swatch Group Research and Development Ltd. | Capsule pour instrument scientifique |
US8997547B2 (en) | 2011-03-23 | 2015-04-07 | Irwin Industrial Tool Company | Gauge with visual calibration confirmation and related method |
CN102937705B (zh) * | 2012-11-20 | 2015-07-08 | 重庆大学 | 复合结构的直流磁传感器 |
US10124391B1 (en) | 2013-04-18 | 2018-11-13 | Yale University | Property enabled feature integration strategies and their fabrication methods for metallic glasses |
AT515787B1 (de) * | 2014-10-14 | 2015-12-15 | Piezocryst Advanced Sensorics | Drucksensor mit einer sensormembran |
CN105004456B (zh) * | 2015-08-18 | 2017-10-17 | 北京中航兴盛测控技术有限公司 | 基于非晶材料的高性能薄膜压力传感器 |
EP3379342B1 (fr) * | 2017-03-22 | 2022-07-20 | Officine Panerai AG | Dispositif comportant un ressort de réglage rapide coopérant avec un mobile d'une pièce d'horlogerie |
CN107242856B (zh) * | 2017-06-07 | 2020-11-24 | 宋佳 | 基于非晶合金织物的柔性传感器 |
CN107168589B (zh) | 2017-07-20 | 2020-09-18 | 上海天马微电子有限公司 | 一种显示基板及其制作方法、显示面板和显示装置 |
EP3695920B1 (de) * | 2019-02-13 | 2022-04-06 | Heraeus Deutschland GmbH & Co. KG | Robuster ingot für die herstellung von bauteilen aus metallischen massivgläsern |
WO2021094144A1 (en) | 2019-11-12 | 2021-05-20 | Fresenius Medical Care Deutschland Gmbh | Blood treatment systems |
CA3160850A1 (en) | 2019-11-12 | 2021-05-20 | Fresenius Medical Care Deutschland Gmbh | Blood treatment systems |
WO2021096706A1 (en) | 2019-11-12 | 2021-05-20 | Fresenius Medical Care Deutschland Gmbh | Blood treatment systems |
CA3160853A1 (en) | 2019-11-12 | 2021-05-20 | Fresenius Medical Care Deutschland Gmbh | Blood treatment systems |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58210534A (ja) * | 1982-06-01 | 1983-12-07 | Citizen Watch Co Ltd | 圧力検出装置 |
JPS6183930A (ja) * | 1984-09-29 | 1986-04-28 | Toshiba Corp | 圧力・差圧伝送器 |
JPS6275222A (ja) * | 1985-09-30 | 1987-04-07 | Toshiba Corp | 圧力・差圧伝送器 |
JP2007282996A (ja) * | 2006-04-19 | 2007-11-01 | Asahi Kasei Medical Co Ltd | 圧力センサ |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3635089A (en) * | 1969-12-02 | 1972-01-18 | Carborundum Co | Apparatus and process for the measurement of the pressure of corrosive material |
DE3638978C2 (de) * | 1986-11-14 | 1996-04-25 | Teves Gmbh Alfred | Elektrohydraulische Vorrichtung zur kontinuierlichen Überwachung des Druckes in einer hydraulischen Kraftfahrzeug-Bremsanlage |
JPH06100514B2 (ja) * | 1990-05-25 | 1994-12-12 | 本田技研工業株式会社 | 圧力センサおよびその製造方法 |
US5600070A (en) * | 1993-07-01 | 1997-02-04 | Wlodarczyk; Marek | Fiber optic combustion pressure sensor with improved long-term reliability |
US5597957A (en) * | 1993-12-23 | 1997-01-28 | Heimann Optoelectronics Gmbh | Microvacuum sensor having an expanded sensitivity range |
US5705751A (en) * | 1995-06-07 | 1998-01-06 | Setra Systems, Inc. | Magnetic diaphragm pressure transducer with magnetic field shield |
US20040099061A1 (en) * | 1997-12-22 | 2004-05-27 | Mks Instruments | Pressure sensor for detecting small pressure differences and low pressures |
WO2004047582A2 (en) * | 2002-11-22 | 2004-06-10 | Liquidmetal Technologies, Inc. | Jewelry made of precious amorphous metal and method of making such articles |
EP1455165A1 (fr) * | 2003-03-07 | 2004-09-08 | Intersema Sensoric SA | Capteur miniaturisé |
US7082834B2 (en) * | 2003-06-18 | 2006-08-01 | New Jersey Institute Of Technology | Flexible thin film pressure sensor |
EP1850194A1 (fr) * | 2006-04-25 | 2007-10-31 | Piguet, Frédéric | Montre de plongée |
US7814798B2 (en) * | 2008-09-17 | 2010-10-19 | P I Components Corporation | Diaphragm structure and method of manufacturing a diaphragm structure |
US8141429B2 (en) * | 2010-07-30 | 2012-03-27 | Rosemount Aerospace Inc. | High temperature capacitive static/dynamic pressure sensors and methods of making the same |
-
2008
- 2008-04-29 EP EP08155390A patent/EP2113759A1/fr not_active Withdrawn
-
2009
- 2009-04-20 WO PCT/EP2009/054677 patent/WO2009132983A1/fr active Application Filing
- 2009-04-20 EP EP09738027A patent/EP2271903B1/fr active Active
- 2009-04-20 US US12/990,191 patent/US8640547B2/en active Active
- 2009-04-20 KR KR1020107024333A patent/KR20100135860A/ko active Search and Examination
- 2009-04-20 CN CN200980125156XA patent/CN102084232B/zh active Active
- 2009-04-20 JP JP2011506653A patent/JP2011519042A/ja active Pending
- 2009-04-20 AT AT09738027T patent/ATE532116T1/de active
- 2009-04-23 TW TW098113507A patent/TWI486730B/zh active
-
2011
- 2011-07-14 HK HK11107338.3A patent/HK1153266A1/xx unknown
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58210534A (ja) * | 1982-06-01 | 1983-12-07 | Citizen Watch Co Ltd | 圧力検出装置 |
JPS6183930A (ja) * | 1984-09-29 | 1986-04-28 | Toshiba Corp | 圧力・差圧伝送器 |
JPS6275222A (ja) * | 1985-09-30 | 1987-04-07 | Toshiba Corp | 圧力・差圧伝送器 |
JP2007282996A (ja) * | 2006-04-19 | 2007-11-01 | Asahi Kasei Medical Co Ltd | 圧力センサ |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015079751A (ja) * | 2013-10-15 | 2015-04-23 | ザ・スウォッチ・グループ・リサーチ・アンド・ディベロップメント・リミテッド | 圧力センサー |
KR101624415B1 (ko) * | 2013-10-15 | 2016-05-25 | 더 스와치 그룹 리서치 앤 디벨롭먼트 엘티디 | 압력 센서 |
Also Published As
Publication number | Publication date |
---|---|
WO2009132983A1 (fr) | 2009-11-05 |
EP2271903A1 (fr) | 2011-01-12 |
ATE532116T1 (de) | 2011-11-15 |
HK1153266A1 (en) | 2012-03-23 |
TWI486730B (zh) | 2015-06-01 |
US8640547B2 (en) | 2014-02-04 |
EP2113759A1 (fr) | 2009-11-04 |
CN102084232A (zh) | 2011-06-01 |
CN102084232B (zh) | 2013-02-06 |
EP2271903B1 (fr) | 2011-11-02 |
KR20100135860A (ko) | 2010-12-27 |
TW201007396A (en) | 2010-02-16 |
US20110056301A1 (en) | 2011-03-10 |
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