CN105004456B - 基于非晶材料的高性能薄膜压力传感器 - Google Patents
基于非晶材料的高性能薄膜压力传感器 Download PDFInfo
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CN105004456B true CN105004456B (zh) | 2017-10-17 |
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CN106768589A (zh) * | 2017-01-10 | 2017-05-31 | 北京中航兴盛测控技术有限公司 | 高精度薄膜压力传感器 |
CN111074177B (zh) * | 2020-01-17 | 2021-01-08 | 太原理工大学 | 一种非晶复合材料及其制备柔性联轴器膜片的方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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CN101160514A (zh) * | 2004-12-08 | 2008-04-09 | 株式会社Mdt | 利用磁致伸缩效应的可变电感型mems压力传感器 |
CN201075043Y (zh) * | 2007-05-16 | 2008-06-18 | 何宇亮 | 一种高灵敏压力传感器 |
CN102084232A (zh) * | 2008-04-29 | 2011-06-01 | 斯沃奇集团研究及开发有限公司 | 具有包括非晶材料的膜的压力传感器 |
CN204924515U (zh) * | 2015-08-18 | 2015-12-30 | 北京中航兴盛测控技术有限公司 | 基于非晶材料的高性能薄膜压力传感器 |
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JPH07176765A (ja) * | 1993-12-20 | 1995-07-14 | Ishizuka Glass Co Ltd | 半導体歪変換素子 |
DE102009044980A1 (de) * | 2009-09-24 | 2011-03-31 | Robert Bosch Gmbh | Verfahren zur Herstellung eines Sensorbauelementes ohne Passivierung sowie Sensorbauelement |
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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CN101160514A (zh) * | 2004-12-08 | 2008-04-09 | 株式会社Mdt | 利用磁致伸缩效应的可变电感型mems压力传感器 |
CN201075043Y (zh) * | 2007-05-16 | 2008-06-18 | 何宇亮 | 一种高灵敏压力传感器 |
CN102084232A (zh) * | 2008-04-29 | 2011-06-01 | 斯沃奇集团研究及开发有限公司 | 具有包括非晶材料的膜的压力传感器 |
CN204924515U (zh) * | 2015-08-18 | 2015-12-30 | 北京中航兴盛测控技术有限公司 | 基于非晶材料的高性能薄膜压力传感器 |
Non-Patent Citations (1)
Title |
---|
刘昆 等.非晶态薄膜压力传感器的研究.《传感技术学报》.1991,(第3期),第50-52页. * |
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Effective date of registration: 20191106 Address after: 102101 building 26, No. 8, Feng Gu Road, Badaling Development Zone, Yanqing District, Beijing. Co-patentee after: Wang Xinrong Patentee after: Lei Weiwu Co-patentee after: Liu Wei Address before: 100176, No. 5, Tongji Road, Beijing economic and Technological Development Zone (Yizhuang), Beijing Patentee before: BEIJING ZHONGHANG XINGSHENG MEASUREMENT AND CONTROL TECHNOLOGY CO., LTD. |
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Effective date of registration: 20200110 Address after: 410331 A5, Changsha e center, No. 18, Xiang Tai Road, Liuyang, Hunan. Patentee after: Suno Alliance Technology Co., Ltd. Address before: 102101 building 26, No. 8, Feng Gu Road, Badaling Development Zone, Yanqing District, Beijing. Co-patentee before: Wang Xinrong Patentee before: Lei Weiwu Co-patentee before: Liu Wei |