JP2011507202A5 - - Google Patents

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Publication number
JP2011507202A5
JP2011507202A5 JP2010538606A JP2010538606A JP2011507202A5 JP 2011507202 A5 JP2011507202 A5 JP 2011507202A5 JP 2010538606 A JP2010538606 A JP 2010538606A JP 2010538606 A JP2010538606 A JP 2010538606A JP 2011507202 A5 JP2011507202 A5 JP 2011507202A5
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JP
Japan
Prior art keywords
charged particle
sample
particle beam
portions
region
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JP2010538606A
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English (en)
Japanese (ja)
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JP2011507202A (ja
JP5473004B2 (ja
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Priority claimed from PCT/EP2008/067419 external-priority patent/WO2009077450A2/en
Publication of JP2011507202A publication Critical patent/JP2011507202A/ja
Publication of JP2011507202A5 publication Critical patent/JP2011507202A5/ja
Application granted granted Critical
Publication of JP5473004B2 publication Critical patent/JP5473004B2/ja
Active legal-status Critical Current
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JP2010538606A 2007-12-17 2008-12-12 走査荷電粒子ビーム Active JP5473004B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US1422907P 2007-12-17 2007-12-17
US61/014,229 2007-12-17
PCT/EP2008/067419 WO2009077450A2 (en) 2007-12-17 2008-12-12 Scanning charged particle beams

Publications (3)

Publication Number Publication Date
JP2011507202A JP2011507202A (ja) 2011-03-03
JP2011507202A5 true JP2011507202A5 (https=) 2011-12-08
JP5473004B2 JP5473004B2 (ja) 2014-04-16

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ID=40497572

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010538606A Active JP5473004B2 (ja) 2007-12-17 2008-12-12 走査荷電粒子ビーム

Country Status (5)

Country Link
US (1) US8304750B2 (https=)
EP (1) EP2238606B1 (https=)
JP (1) JP5473004B2 (https=)
AT (1) ATE521979T1 (https=)
WO (1) WO2009077450A2 (https=)

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EP2901824B1 (en) 2012-09-28 2020-04-15 Mevion Medical Systems, Inc. Magnetic shims to adjust a position of a main coil and corresponding method
JP6121545B2 (ja) 2012-09-28 2017-04-26 メビオン・メディカル・システムズ・インコーポレーテッド 粒子ビームのエネルギーの調整
EP2901823B1 (en) 2012-09-28 2021-12-08 Mevion Medical Systems, Inc. Controlling intensity of a particle beam
US10254739B2 (en) 2012-09-28 2019-04-09 Mevion Medical Systems, Inc. Coil positioning system
EP2901821B1 (en) 2012-09-28 2020-07-08 Mevion Medical Systems, Inc. Magnetic field regenerator
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TW201422278A (zh) 2012-09-28 2014-06-16 Mevion Medical Systems Inc 粒子加速器之控制系統
SG11201509479WA (en) 2013-05-30 2015-12-30 Goldway Technology Ltd Method of marking material and system therefore, and material marked according to same method
US8791656B1 (en) 2013-05-31 2014-07-29 Mevion Medical Systems, Inc. Active return system
US9730308B2 (en) 2013-06-12 2017-08-08 Mevion Medical Systems, Inc. Particle accelerator that produces charged particles having variable energies
US9218934B2 (en) 2013-07-08 2015-12-22 Carl Zeiss Microscopy, Llc Charged particle beam system and method of operating a charged particle beam system
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KR102098315B1 (ko) 2013-10-11 2020-04-10 차우 타이 푹 쥬얼리 컴퍼니 리미티드 원석과 다이아몬드를 포함하는 보석을 마킹하는 방법, 및 이 방법에 따라 마킹된 마크 및 마킹된 보석
US9962560B2 (en) 2013-12-20 2018-05-08 Mevion Medical Systems, Inc. Collimator and energy degrader
US10675487B2 (en) 2013-12-20 2020-06-09 Mevion Medical Systems, Inc. Energy degrader enabling high-speed energy switching
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US9950194B2 (en) 2014-09-09 2018-04-24 Mevion Medical Systems, Inc. Patient positioning system
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US10786689B2 (en) 2015-11-10 2020-09-29 Mevion Medical Systems, Inc. Adaptive aperture
US10925147B2 (en) 2016-07-08 2021-02-16 Mevion Medical Systems, Inc. Treatment planning
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JP6940676B2 (ja) 2017-06-30 2021-09-29 メビオン・メディカル・システムズ・インコーポレーテッド リニアモーターを使用して制御される構成可能コリメータ
KR102757231B1 (ko) * 2017-07-21 2025-01-21 칼 짜이스 에스엠티 게엠베하 포토리소그래피 마스크의 과잉 재료의 폐기를 위한 방법 및 장치
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