JP2011166112A5 - - Google Patents

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Publication number
JP2011166112A5
JP2011166112A5 JP2010227766A JP2010227766A JP2011166112A5 JP 2011166112 A5 JP2011166112 A5 JP 2011166112A5 JP 2010227766 A JP2010227766 A JP 2010227766A JP 2010227766 A JP2010227766 A JP 2010227766A JP 2011166112 A5 JP2011166112 A5 JP 2011166112A5
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JP
Japan
Prior art keywords
lid
motor
processing tube
substrate
boat
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Application number
JP2010227766A
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English (en)
Japanese (ja)
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JP2011166112A (ja
JP5711930B2 (ja
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Application filed filed Critical
Priority to JP2010227766A priority Critical patent/JP5711930B2/ja
Priority claimed from JP2010227766A external-priority patent/JP5711930B2/ja
Priority to KR1020100129772A priority patent/KR101219587B1/ko
Priority to TW100100797A priority patent/TWI447839B/zh
Priority to US13/004,495 priority patent/US8876453B2/en
Publication of JP2011166112A publication Critical patent/JP2011166112A/ja
Publication of JP2011166112A5 publication Critical patent/JP2011166112A5/ja
Application granted granted Critical
Publication of JP5711930B2 publication Critical patent/JP5711930B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2010227766A 2010-01-12 2010-10-07 基板処理装置及び半導体装置の製造方法 Active JP5711930B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2010227766A JP5711930B2 (ja) 2010-01-12 2010-10-07 基板処理装置及び半導体装置の製造方法
KR1020100129772A KR101219587B1 (ko) 2010-01-12 2010-12-17 기판 처리 장치 및 반도체 장치의 제조 방법
TW100100797A TWI447839B (zh) 2010-01-12 2011-01-10 基板處理裝置及半導體裝置之製造方法
US13/004,495 US8876453B2 (en) 2010-01-12 2011-01-11 Substrate processing apparatus and method of manufacturing semiconductor device

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010003884 2010-01-12
JP2010003884 2010-01-12
JP2010227766A JP5711930B2 (ja) 2010-01-12 2010-10-07 基板処理装置及び半導体装置の製造方法

Publications (3)

Publication Number Publication Date
JP2011166112A JP2011166112A (ja) 2011-08-25
JP2011166112A5 true JP2011166112A5 (https=) 2013-11-14
JP5711930B2 JP5711930B2 (ja) 2015-05-07

Family

ID=44596384

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010227766A Active JP5711930B2 (ja) 2010-01-12 2010-10-07 基板処理装置及び半導体装置の製造方法

Country Status (1)

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JP (1) JP5711930B2 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6208588B2 (ja) * 2014-01-28 2017-10-04 東京エレクトロン株式会社 支持機構及び基板処理装置
WO2016052023A1 (ja) 2014-09-30 2016-04-07 株式会社日立国際電気 半導体製造装置、半導体装置の製造方法および記録媒体

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3065438B2 (ja) * 1992-07-22 2000-07-17 キヤノン株式会社 位置決め制御装置
JPH07230320A (ja) * 1994-02-18 1995-08-29 Canon Inc サーボ制御装置
JP2004104011A (ja) * 2002-09-12 2004-04-02 Hitachi Kokusai Electric Inc 基板処理装置
JP2005056905A (ja) * 2003-08-05 2005-03-03 Hitachi Kokusai Electric Inc 基板処理装置
JP2008277354A (ja) * 2007-04-25 2008-11-13 Tekkusu Iijii:Kk 把持装置
JP5221118B2 (ja) * 2007-12-14 2013-06-26 東京エレクトロン株式会社 検査装置
JP5635270B2 (ja) * 2009-02-13 2014-12-03 株式会社日立国際電気 基板処理装置及び基板処理システム及び基板処理装置の表示方法及び基板処理装置のパラメータ設定方法及び記録媒体

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