JP2011161629A5 - - Google Patents

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Publication number
JP2011161629A5
JP2011161629A5 JP2011125564A JP2011125564A JP2011161629A5 JP 2011161629 A5 JP2011161629 A5 JP 2011161629A5 JP 2011125564 A JP2011125564 A JP 2011125564A JP 2011125564 A JP2011125564 A JP 2011125564A JP 2011161629 A5 JP2011161629 A5 JP 2011161629A5
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JP
Japan
Prior art keywords
wall
turning axis
turning
axis
substrate
Prior art date
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Withdrawn
Application number
JP2011125564A
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English (en)
Japanese (ja)
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JP2011161629A (ja
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Publication date
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Priority to JP2011125564A priority Critical patent/JP2011161629A/ja
Priority claimed from JP2011125564A external-priority patent/JP2011161629A/ja
Publication of JP2011161629A publication Critical patent/JP2011161629A/ja
Publication of JP2011161629A5 publication Critical patent/JP2011161629A5/ja
Withdrawn legal-status Critical Current

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JP2011125564A 2011-06-03 2011-06-03 基板搬送ロボット Withdrawn JP2011161629A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011125564A JP2011161629A (ja) 2011-06-03 2011-06-03 基板搬送ロボット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011125564A JP2011161629A (ja) 2011-06-03 2011-06-03 基板搬送ロボット

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2007114742A Division JP4980127B2 (ja) 2007-04-24 2007-04-24 基板搬送ロボット

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2013143470A Division JP5819356B2 (ja) 2013-07-09 2013-07-09 基板搬送ロボットおよび基板搬送装置

Publications (2)

Publication Number Publication Date
JP2011161629A JP2011161629A (ja) 2011-08-25
JP2011161629A5 true JP2011161629A5 (https=) 2011-10-06

Family

ID=44592910

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011125564A Withdrawn JP2011161629A (ja) 2011-06-03 2011-06-03 基板搬送ロボット

Country Status (1)

Country Link
JP (1) JP2011161629A (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5569544B2 (ja) 2012-01-31 2014-08-13 株式会社安川電機 搬送ロボット
JP6607661B2 (ja) * 2013-08-09 2019-11-20 日本電産サンキョー株式会社 水平多関節ロボット
JP7149792B2 (ja) 2018-09-25 2022-10-07 東京エレクトロン株式会社 搬送装置、半導体製造装置及び搬送方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3752234T2 (de) * 1986-04-28 1999-05-12 Varian Associates, Inc., Palo Alto, Calif. Transfersystem für Halbleiterscheibe
JP3539537B2 (ja) * 1997-11-06 2004-07-07 株式会社三協精機製作所 多関節ロボット
US6960057B1 (en) * 1998-09-30 2005-11-01 Brooks Automation, Inc. Substrate transport apparatus
JP2000133690A (ja) * 1998-10-26 2000-05-12 Rorze Corp ウエハ搬送装置
US6297611B1 (en) * 2000-07-06 2001-10-02 Genmark Automation Robot having independent end effector linkage motion
JP2002166376A (ja) * 2000-11-30 2002-06-11 Hirata Corp 基板搬送用ロボット
US6752585B2 (en) * 2001-06-13 2004-06-22 Applied Materials Inc Method and apparatus for transferring a semiconductor substrate
JP2003170384A (ja) * 2001-12-04 2003-06-17 Rorze Corp 平板状物の搬送用スカラ型ロボットおよび平板状物の処理システム
JP4070994B2 (ja) * 2001-12-20 2008-04-02 株式会社ダイヘン ワーク搬送用ロボット及びこのロボットを備えたワーク加工装置
JP4579723B2 (ja) * 2005-03-07 2010-11-10 川崎重工業株式会社 搬送系ユニットおよび分割体
US9248568B2 (en) * 2005-07-11 2016-02-02 Brooks Automation, Inc. Unequal link SCARA arm
JP4980127B2 (ja) * 2007-04-24 2012-07-18 川崎重工業株式会社 基板搬送ロボット

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