JP2011155760A5 - - Google Patents

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Publication number
JP2011155760A5
JP2011155760A5 JP2010015216A JP2010015216A JP2011155760A5 JP 2011155760 A5 JP2011155760 A5 JP 2011155760A5 JP 2010015216 A JP2010015216 A JP 2010015216A JP 2010015216 A JP2010015216 A JP 2010015216A JP 2011155760 A5 JP2011155760 A5 JP 2011155760A5
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JP
Japan
Prior art keywords
electrode
vibration
vibrator
bending
distortion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2010015216A
Other languages
English (en)
Japanese (ja)
Other versions
JP4830165B2 (ja
JP2011155760A (ja
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Publication date
Application filed filed Critical
Priority claimed from JP2010015216A external-priority patent/JP4830165B2/ja
Priority to JP2010015216A priority Critical patent/JP4830165B2/ja
Priority to US13/575,544 priority patent/US9099640B2/en
Priority to CN201180007460.1A priority patent/CN102725951B/zh
Priority to PCT/JP2011/051417 priority patent/WO2011093306A1/ja
Priority to EP11737019.7A priority patent/EP2530825A4/en
Publication of JP2011155760A publication Critical patent/JP2011155760A/ja
Publication of JP2011155760A5 publication Critical patent/JP2011155760A5/ja
Publication of JP4830165B2 publication Critical patent/JP4830165B2/ja
Application granted granted Critical
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2010015216A 2010-01-27 2010-01-27 超音波モータ用振動子 Active JP4830165B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2010015216A JP4830165B2 (ja) 2010-01-27 2010-01-27 超音波モータ用振動子
EP11737019.7A EP2530825A4 (en) 2010-01-27 2011-01-26 CONVERTER FOR AN ULTRASOUND MOTOR
CN201180007460.1A CN102725951B (zh) 2010-01-27 2011-01-26 超声波电动机用振子
PCT/JP2011/051417 WO2011093306A1 (ja) 2010-01-27 2011-01-26 超音波モータ用振動子
US13/575,544 US9099640B2 (en) 2010-01-27 2011-01-26 Transducer for ultrasonic motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010015216A JP4830165B2 (ja) 2010-01-27 2010-01-27 超音波モータ用振動子

Publications (3)

Publication Number Publication Date
JP2011155760A JP2011155760A (ja) 2011-08-11
JP2011155760A5 true JP2011155760A5 (enExample) 2011-09-22
JP4830165B2 JP4830165B2 (ja) 2011-12-07

Family

ID=44319293

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010015216A Active JP4830165B2 (ja) 2010-01-27 2010-01-27 超音波モータ用振動子

Country Status (5)

Country Link
US (1) US9099640B2 (enExample)
EP (1) EP2530825A4 (enExample)
JP (1) JP4830165B2 (enExample)
CN (1) CN102725951B (enExample)
WO (1) WO2011093306A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2992120B1 (fr) 2012-06-15 2014-07-18 Commissariat Energie Atomique Actionneur pour moteur ultrasonique et moteur ultrasonique comportant au moins un tel actionneur
JP6367693B2 (ja) * 2014-11-21 2018-08-01 京セラ株式会社 圧電素子、圧電振動装置、音響発生器、音響発生装置および電子機器
WO2017065263A1 (ja) * 2015-10-15 2017-04-20 有限会社Ｕｗａｖｅ ランジュバン型超音波振動子の振動励起方法及び超音波加工方法と超音波送信方法
US20210367135A1 (en) * 2017-04-17 2021-11-25 Rda Microelectronics (Shanghai) Co., Ltd. Mems piezoelectric transducer having optimized capacitor shape
CN107359810B (zh) * 2017-08-17 2023-04-25 浙江师范大学 一种超低频压电振动俘能器
US20230130082A1 (en) * 2021-10-21 2023-04-27 Skyworks Solutions, Inc. Method of making a piezoelectric sensor with increased sensitivity and devices having the same

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2722211B2 (ja) * 1988-07-30 1998-03-04 本多電子株式会社 超音波駆動装置
JP3311446B2 (ja) 1993-11-30 2002-08-05 オリンパス光学工業株式会社 超音波モータ
WO2000074153A1 (en) * 1999-05-31 2000-12-07 Nanomotion Ltd. Multilayer piezoelectric motor
JP2004297951A (ja) * 2003-03-27 2004-10-21 Olympus Corp 超音波振動子及び超音波モータ
JP4679938B2 (ja) * 2005-03-11 2011-05-11 オリンパス株式会社 超音波モータ
JP4218666B2 (ja) * 2005-07-21 2009-02-04 セイコーエプソン株式会社 圧電アクチュエータ、および電子機器
US7638932B2 (en) 2006-02-07 2009-12-29 Panasonic Corporation Piezoelectric element and ultrasonic actuator
JP4892661B2 (ja) * 2006-08-24 2012-03-07 ニッコー株式会社 超音波モータ用振動子
JP2010004625A (ja) * 2008-06-19 2010-01-07 Nec Tokin Corp 圧電振動子およびその駆動方法
JP4918122B2 (ja) 2009-08-31 2012-04-18 セイコーインスツル株式会社 超音波モータ及び超音波モータ付き電子機器

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