JP4830165B2 - 超音波モータ用振動子 - Google Patents

超音波モータ用振動子 Download PDF

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Publication number
JP4830165B2
JP4830165B2 JP2010015216A JP2010015216A JP4830165B2 JP 4830165 B2 JP4830165 B2 JP 4830165B2 JP 2010015216 A JP2010015216 A JP 2010015216A JP 2010015216 A JP2010015216 A JP 2010015216A JP 4830165 B2 JP4830165 B2 JP 4830165B2
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JP
Japan
Prior art keywords
electrode
vibration
vibrator
bending
distortion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2010015216A
Other languages
English (en)
Japanese (ja)
Other versions
JP2011155760A (ja
JP2011155760A5 (enExample
Inventor
昌宏 高野
憲一 廣崎
勇太 吉田
卓也 長田
翔 槙野
悟 市村
崇 吉田
真之 石田
博司 河合
幹夫 滝本
中村　　健太郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ishikawa Prefecture
Nikko Co Ltd
Tokyo Institute of Technology NUC
SIGMAKOKI Co Ltd
Original Assignee
Ishikawa Prefecture
Nikko Co Ltd
Tokyo Institute of Technology NUC
SIGMAKOKI Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ishikawa Prefecture, Nikko Co Ltd, Tokyo Institute of Technology NUC, SIGMAKOKI Co Ltd filed Critical Ishikawa Prefecture
Priority to JP2010015216A priority Critical patent/JP4830165B2/ja
Priority to CN201180007460.1A priority patent/CN102725951B/zh
Priority to PCT/JP2011/051417 priority patent/WO2011093306A1/ja
Priority to US13/575,544 priority patent/US9099640B2/en
Priority to EP11737019.7A priority patent/EP2530825A4/en
Publication of JP2011155760A publication Critical patent/JP2011155760A/ja
Publication of JP2011155760A5 publication Critical patent/JP2011155760A5/ja
Application granted granted Critical
Publication of JP4830165B2 publication Critical patent/JP4830165B2/ja
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H10N30/2023—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having polygonal or rectangular shape
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/003—Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
    • H02N2/004—Rectangular vibrators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2010015216A 2010-01-27 2010-01-27 超音波モータ用振動子 Active JP4830165B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2010015216A JP4830165B2 (ja) 2010-01-27 2010-01-27 超音波モータ用振動子
CN201180007460.1A CN102725951B (zh) 2010-01-27 2011-01-26 超声波电动机用振子
PCT/JP2011/051417 WO2011093306A1 (ja) 2010-01-27 2011-01-26 超音波モータ用振動子
US13/575,544 US9099640B2 (en) 2010-01-27 2011-01-26 Transducer for ultrasonic motor
EP11737019.7A EP2530825A4 (en) 2010-01-27 2011-01-26 CONVERTER FOR AN ULTRASOUND MOTOR

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010015216A JP4830165B2 (ja) 2010-01-27 2010-01-27 超音波モータ用振動子

Publications (3)

Publication Number Publication Date
JP2011155760A JP2011155760A (ja) 2011-08-11
JP2011155760A5 JP2011155760A5 (enExample) 2011-09-22
JP4830165B2 true JP4830165B2 (ja) 2011-12-07

Family

ID=44319293

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010015216A Active JP4830165B2 (ja) 2010-01-27 2010-01-27 超音波モータ用振動子

Country Status (5)

Country Link
US (1) US9099640B2 (enExample)
EP (1) EP2530825A4 (enExample)
JP (1) JP4830165B2 (enExample)
CN (1) CN102725951B (enExample)
WO (1) WO2011093306A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2992120B1 (fr) 2012-06-15 2014-07-18 Commissariat Energie Atomique Actionneur pour moteur ultrasonique et moteur ultrasonique comportant au moins un tel actionneur
JP6367693B2 (ja) * 2014-11-21 2018-08-01 京セラ株式会社 圧電素子、圧電振動装置、音響発生器、音響発生装置および電子機器
WO2017065263A1 (ja) * 2015-10-15 2017-04-20 有限会社Ｕｗａｖｅ ランジュバン型超音波振動子の振動励起方法及び超音波加工方法と超音波送信方法
US20210367135A1 (en) * 2017-04-17 2021-11-25 Rda Microelectronics (Shanghai) Co., Ltd. Mems piezoelectric transducer having optimized capacitor shape
CN107359810B (zh) * 2017-08-17 2023-04-25 浙江师范大学 一种超低频压电振动俘能器
US12329033B2 (en) * 2021-10-21 2025-06-10 Skyworks Solutions, Inc. Piezoelectric sensor with increased sensitivity and devices having the same

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2722211B2 (ja) * 1988-07-30 1998-03-04 本多電子株式会社 超音波駆動装置
JP3311446B2 (ja) 1993-11-30 2002-08-05 オリンパス光学工業株式会社 超音波モータ
EP1186063B1 (en) * 1999-05-31 2006-07-12 Nanomotion Ltd. Multilayer piezoelectric motor
JP2004297951A (ja) * 2003-03-27 2004-10-21 Olympus Corp 超音波振動子及び超音波モータ
JP4679938B2 (ja) * 2005-03-11 2011-05-11 オリンパス株式会社 超音波モータ
JP4218666B2 (ja) * 2005-07-21 2009-02-04 セイコーエプソン株式会社 圧電アクチュエータ、および電子機器
CN101213734B (zh) * 2006-02-07 2011-01-12 松下电器产业株式会社 压电元件与超声波执行机构
JP4892661B2 (ja) * 2006-08-24 2012-03-07 ニッコー株式会社 超音波モータ用振動子
JP2010004625A (ja) * 2008-06-19 2010-01-07 Nec Tokin Corp 圧電振動子およびその駆動方法
JP4918122B2 (ja) * 2009-08-31 2012-04-18 セイコーインスツル株式会社 超音波モータ及び超音波モータ付き電子機器

Also Published As

Publication number Publication date
EP2530825A1 (en) 2012-12-05
US9099640B2 (en) 2015-08-04
JP2011155760A (ja) 2011-08-11
CN102725951A (zh) 2012-10-10
WO2011093306A1 (ja) 2011-08-04
EP2530825A4 (en) 2015-04-08
US20120293043A1 (en) 2012-11-22
CN102725951B (zh) 2015-08-19

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