CN102725951B - 超声波电动机用振子 - Google Patents

超声波电动机用振子 Download PDF

Info

Publication number
CN102725951B
CN102725951B CN201180007460.1A CN201180007460A CN102725951B CN 102725951 B CN102725951 B CN 102725951B CN 201180007460 A CN201180007460 A CN 201180007460A CN 102725951 B CN102725951 B CN 102725951B
Authority
CN
China
Prior art keywords
electrode
vibration
distortion
flexing
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201180007460.1A
Other languages
English (en)
Chinese (zh)
Other versions
CN102725951A (zh
Inventor
高野昌宏
广崎宪一
吉田勇太
长田卓也
槙野翔
市村悟
吉田崇
石田真之
河合博司
泷本干夫
中村健太郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIYING CO Ltd
Shi Chuanxian
Tokyo Institute of Technology NUC
Original Assignee
NIYING CO Ltd
Shi Chuanxian
Tokyo Institute of Technology NUC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIYING CO Ltd, Shi Chuanxian, Tokyo Institute of Technology NUC filed Critical NIYING CO Ltd
Publication of CN102725951A publication Critical patent/CN102725951A/zh
Application granted granted Critical
Publication of CN102725951B publication Critical patent/CN102725951B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001Driving devices, e.g. vibrators
    • H02N2/003Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
    • H02N2/004Rectangular vibrators
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/20Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/202Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement
    • H10N30/2023Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using longitudinal or thickness displacement combined with bending, shear or torsion displacement having polygonal or rectangular shape
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/80Constructional details
    • H10N30/87Electrodes or interconnections, e.g. leads or terminals

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
CN201180007460.1A 2010-01-27 2011-01-26 超声波电动机用振子 Expired - Fee Related CN102725951B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2010015216A JP4830165B2 (ja) 2010-01-27 2010-01-27 超音波モータ用振動子
JP2010-015216 2010-01-27
PCT/JP2011/051417 WO2011093306A1 (ja) 2010-01-27 2011-01-26 超音波モータ用振動子

Publications (2)

Publication Number Publication Date
CN102725951A CN102725951A (zh) 2012-10-10
CN102725951B true CN102725951B (zh) 2015-08-19

Family

ID=44319293

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201180007460.1A Expired - Fee Related CN102725951B (zh) 2010-01-27 2011-01-26 超声波电动机用振子

Country Status (5)

Country Link
US (1) US9099640B2 (enExample)
EP (1) EP2530825A4 (enExample)
JP (1) JP4830165B2 (enExample)
CN (1) CN102725951B (enExample)
WO (1) WO2011093306A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2992120B1 (fr) 2012-06-15 2014-07-18 Commissariat Energie Atomique Actionneur pour moteur ultrasonique et moteur ultrasonique comportant au moins un tel actionneur
JP6367693B2 (ja) * 2014-11-21 2018-08-01 京セラ株式会社 圧電素子、圧電振動装置、音響発生器、音響発生装置および電子機器
WO2017065263A1 (ja) * 2015-10-15 2017-04-20 有限会社Uwave ランジュバン型超音波振動子の振動励起方法及び超音波加工方法と超音波送信方法
US20210367135A1 (en) * 2017-04-17 2021-11-25 Rda Microelectronics (Shanghai) Co., Ltd. Mems piezoelectric transducer having optimized capacitor shape
CN107359810B (zh) * 2017-08-17 2023-04-25 浙江师范大学 一种超低频压电振动俘能器
US12329033B2 (en) * 2021-10-21 2025-06-10 Skyworks Solutions, Inc. Piezoelectric sensor with increased sensitivity and devices having the same

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1538612A (zh) * 2003-03-27 2004-10-20 ���ְ�˹��ʽ���� 超声波振子及超声波电机

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2722211B2 (ja) * 1988-07-30 1998-03-04 本多電子株式会社 超音波駆動装置
JP3311446B2 (ja) 1993-11-30 2002-08-05 オリンパス光学工業株式会社 超音波モータ
EP1186063B1 (en) * 1999-05-31 2006-07-12 Nanomotion Ltd. Multilayer piezoelectric motor
JP4679938B2 (ja) * 2005-03-11 2011-05-11 オリンパス株式会社 超音波モータ
JP4218666B2 (ja) * 2005-07-21 2009-02-04 セイコーエプソン株式会社 圧電アクチュエータ、および電子機器
CN101213734B (zh) * 2006-02-07 2011-01-12 松下电器产业株式会社 压电元件与超声波执行机构
JP4892661B2 (ja) * 2006-08-24 2012-03-07 ニッコー株式会社 超音波モータ用振動子
JP2010004625A (ja) * 2008-06-19 2010-01-07 Nec Tokin Corp 圧電振動子およびその駆動方法
JP4918122B2 (ja) * 2009-08-31 2012-04-18 セイコーインスツル株式会社 超音波モータ及び超音波モータ付き電子機器

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1538612A (zh) * 2003-03-27 2004-10-20 ���ְ�˹��ʽ���� 超声波振子及超声波电机

Also Published As

Publication number Publication date
EP2530825A1 (en) 2012-12-05
US9099640B2 (en) 2015-08-04
JP2011155760A (ja) 2011-08-11
CN102725951A (zh) 2012-10-10
JP4830165B2 (ja) 2011-12-07
WO2011093306A1 (ja) 2011-08-04
EP2530825A4 (en) 2015-04-08
US20120293043A1 (en) 2012-11-22

Similar Documents

Publication Publication Date Title
CN102725951B (zh) 超声波电动机用振子
EP2341565B1 (en) Wide frequency range electromechanical actuator
JP5765993B2 (ja) 振動型駆動装置
CN100502074C (zh) 压电超声马达
TWI595738B (zh) 微機電系統及其相關系統、用途、微機電系統揚聲器和調節單元
JP5979817B2 (ja) 振動波駆動装置
JP4209465B2 (ja) 駆動装置
US8749121B2 (en) Piezoelectric power generating device and manufacturing method thereof
WO2007080851A1 (ja) 超音波アクチュエータ
CN106100435B (zh) 压电马达
EP3134925B1 (en) Piezoelektric actuator
Liu et al. A novel plate type linear piezoelectric actuator using dual-frequency drive
US8987972B2 (en) Vibrator in vibration type driving apparatus and manufacturing method thereof
JP4814948B2 (ja) 振動型アクチュエータの制御装置
CN102569637B (zh) 压电驱动器及压电马达
CN109478856B (zh) 致动器
JP5740397B2 (ja) 電気機械式モーター
JP2574577B2 (ja) リニア型アクチュエータ
JP5701020B2 (ja) 振動型駆動装置における振動体とその製造方法、振動型駆動装置とその振動子
US8008840B2 (en) Drive unit
CN115298950A (zh) 致动器以及光学反射元件
JP2015144557A (ja) 超音波モータの駆動制御方法及び超音波モータの駆動制御装置
Kondo et al. Miniaturization of the traveling wave ultrasonic linear motor using bimorph transducers
JPH06169582A (ja) 超音波駆動装置
JPH01270775A (ja) リニア超音波モータ

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C41 Transfer of patent application or patent right or utility model
TA01 Transfer of patent application right

Effective date of registration: 20150722

Address after: Ishikawa County

Applicant after: Shi Chuanxian

Applicant after: Niying Co., Ltd.

Applicant after: Tokyo Inst Tech

Address before: Ishikawa County

Applicant before: Shi Chuanxian

Applicant before: Sigma Koki Co., Ltd.

Applicant before: Niying Co., Ltd.

Applicant before: Tokyo Inst Tech

C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20150819

Termination date: 20170126

CF01 Termination of patent right due to non-payment of annual fee