JP2011141285A5 - - Google Patents

Download PDF

Info

Publication number
JP2011141285A5
JP2011141285A5 JP2011023349A JP2011023349A JP2011141285A5 JP 2011141285 A5 JP2011141285 A5 JP 2011141285A5 JP 2011023349 A JP2011023349 A JP 2011023349A JP 2011023349 A JP2011023349 A JP 2011023349A JP 2011141285 A5 JP2011141285 A5 JP 2011141285A5
Authority
JP
Japan
Prior art keywords
substrate
light
polarization direction
linearly polarized
polarized light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011023349A
Other languages
English (en)
Japanese (ja)
Other versions
JP5287891B2 (ja
JP2011141285A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2011023349A priority Critical patent/JP5287891B2/ja
Priority claimed from JP2011023349A external-priority patent/JP5287891B2/ja
Publication of JP2011141285A publication Critical patent/JP2011141285A/ja
Publication of JP2011141285A5 publication Critical patent/JP2011141285A5/ja
Application granted granted Critical
Publication of JP5287891B2 publication Critical patent/JP5287891B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2011023349A 2011-02-04 2011-02-04 欠陥検査方法 Expired - Lifetime JP5287891B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011023349A JP5287891B2 (ja) 2011-02-04 2011-02-04 欠陥検査方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2011023349A JP5287891B2 (ja) 2011-02-04 2011-02-04 欠陥検査方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2004322905A Division JP4901090B2 (ja) 2003-03-26 2004-10-06 欠陥検査方法及び欠陥検出装置

Publications (3)

Publication Number Publication Date
JP2011141285A JP2011141285A (ja) 2011-07-21
JP2011141285A5 true JP2011141285A5 (ru) 2011-12-22
JP5287891B2 JP5287891B2 (ja) 2013-09-11

Family

ID=44457208

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011023349A Expired - Lifetime JP5287891B2 (ja) 2011-02-04 2011-02-04 欠陥検査方法

Country Status (1)

Country Link
JP (1) JP5287891B2 (ru)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9612212B1 (en) 2015-11-30 2017-04-04 Samsung Electronics Co., Ltd. Ellipsometer and method of inspecting pattern asymmetry using the same
KR102368435B1 (ko) * 2017-07-28 2022-03-02 삼성전자주식회사 기판 검사 장치, 기판 검사 방법 및 이를 이용한 반도체 소자의 제조 방법
CN107682693B (zh) * 2017-11-07 2023-07-14 歌尔科技有限公司 一种图像传感器坏点亮点检测装置及检测方法
CN109856155A (zh) * 2019-01-18 2019-06-07 北京兆维电子(集团)有限责任公司 一种基于偏振光的液晶显示屏表面检测装置及方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10325805A (ja) * 1997-05-23 1998-12-08 Nikon Corp 半導体ウエハの自動検査装置
JP3982017B2 (ja) * 1997-08-05 2007-09-26 株式会社ニコン 欠陥検査装置
JP4184543B2 (ja) * 1999-06-10 2008-11-19 株式会社日立製作所 光学像検出方法および外観検査装置
JP3769996B2 (ja) * 1999-09-20 2006-04-26 三菱電機株式会社 欠陥検査用半導体基板、半導体基板の検査方法および半導体基板検査用モニター装置
JP4153652B2 (ja) * 2000-10-05 2008-09-24 株式会社東芝 パターン評価装置及びパターン評価方法
JP4183492B2 (ja) * 2002-11-27 2008-11-19 株式会社日立製作所 欠陥検査装置および欠陥検査方法

Similar Documents

Publication Publication Date Title
JP5274622B2 (ja) 欠陥検査装置及び方法
KR101590831B1 (ko) 기판의 이물질 검사방법
JP2014167476A5 (ru)
JP2016106228A5 (ru)
TW200626888A (en) Defect inspection method
JP2010256359A5 (ru)
US8416292B2 (en) Defect inspection apparatus and method
TWI456186B (zh) 表面檢查裝置
US10841561B2 (en) Apparatus and method for three-dimensional inspection
JP5837283B2 (ja) タイヤの外観検査方法および外観検査装置
WO2012091344A3 (ko) 비전검사장치
JP2009192520A5 (ru)
KR20130072535A (ko) 비파괴적 결함검사장치 및 이를 이용한 결함검사방법
JP2011141285A5 (ru)
JP2013250101A (ja) 基板検査装置および基板検査方法
JP2006105951A5 (ru)
JP6801142B1 (ja) 偏光板の検査方法および検査装置
US20120133761A1 (en) Uneven area inspection system
JP2007101401A (ja) 外観検査装置及び外観検査方法
JP5287891B2 (ja) 欠陥検査方法
JP2013205091A (ja) フィルム検査システム、フィルム検査方法
KR101188404B1 (ko) 디스플레이 패널 글라스 표면의 결함 검사 방법
KR102632190B1 (ko) 편광 필름의 촬상 장치, 및 검사 장치, 그리고 검사 방법
KR20140031687A (ko) 기판 표면 검사 시스템 및 검사 방법
JP2007147376A (ja) 検査装置