JP2011141148A5 - - Google Patents

Download PDF

Info

Publication number
JP2011141148A5
JP2011141148A5 JP2010000932A JP2010000932A JP2011141148A5 JP 2011141148 A5 JP2011141148 A5 JP 2011141148A5 JP 2010000932 A JP2010000932 A JP 2010000932A JP 2010000932 A JP2010000932 A JP 2010000932A JP 2011141148 A5 JP2011141148 A5 JP 2011141148A5
Authority
JP
Japan
Prior art keywords
sample
diffracted
detection film
ray detection
ray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2010000932A
Other languages
English (en)
Other versions
JP2011141148A (ja
JP5024973B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2010000932A priority Critical patent/JP5024973B2/ja
Priority claimed from JP2010000932A external-priority patent/JP5024973B2/ja
Priority to US12/983,359 priority patent/US8503611B2/en
Publication of JP2011141148A publication Critical patent/JP2011141148A/ja
Publication of JP2011141148A5 publication Critical patent/JP2011141148A5/ja
Application granted granted Critical
Publication of JP5024973B2 publication Critical patent/JP5024973B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Description

入射スリット１０３及び回折スリット１０４は位置不動に固定配置されている。試料結晶１０１とＸ線検出フィルム１０６とは矢印Ａで示すように、互いに一体状態で試料１０１の試料面、すなわち被測定面に対して平行に走査移動させられる。この走査移動の際に、図９（ａ）の部分拡大図に示すように試料結晶１０１の格子面１０５で回折した回折Ｘ線Ｒ１によってＸ線検出フィルム１０６が露光される。
JP2010000932A 2010-01-06 2010-01-06 Ｘ線トポグラフィ装置 Expired - Fee Related JP5024973B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2010000932A JP5024973B2 (ja) 2010-01-06 2010-01-06 Ｘ線トポグラフィ装置
US12/983,359 US8503611B2 (en) 2010-01-06 2011-01-03 X-ray topography apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010000932A JP5024973B2 (ja) 2010-01-06 2010-01-06 Ｘ線トポグラフィ装置

Publications (3)

Publication Number Publication Date
JP2011141148A JP2011141148A (ja) 2011-07-21
JP2011141148A5 true JP2011141148A5 (ja) 2012-02-16
JP5024973B2 JP5024973B2 (ja) 2012-09-12

Family

ID=44224693

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010000932A Expired - Fee Related JP5024973B2 (ja) 2010-01-06 2010-01-06 Ｘ線トポグラフィ装置

Country Status (2)

Country Link
US (1) US8503611B2 (ja)
JP (1) JP5024973B2 (ja)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5569510B2 (ja) * 2011-11-29 2014-08-13 パルステック工業株式会社 Ｘ線回折測定装置
KR20140089431A (ko) * 2012-02-06 2014-07-14 가부시키가이샤 히다치 하이테크놀로지즈 X선 검사 장치, 검사 방법 및 x선 검출기
JP5920593B2 (ja) * 2013-04-15 2016-05-18 パルステック工業株式会社 Ｘ線回折測定システム
CN103411985A (zh) * 2013-08-27 2013-11-27 北京化工大学 一种弱x光3d成像方法
JP6025211B2 (ja) * 2013-11-28 2016-11-16 株式会社リガク Ｘ線トポグラフィ装置
US9726624B2 (en) 2014-06-18 2017-08-08 Bruker Jv Israel Ltd. Using multiple sources/detectors for high-throughput X-ray topography measurement
US10677744B1 (en) * 2016-06-03 2020-06-09 U.S. Department Of Energy Multi-cone x-ray imaging Bragg crystal spectrometer
KR102450776B1 (ko) * 2017-10-27 2022-10-05 삼성전자주식회사 레이저 가공 방법, 기판 다이싱 방법 및 이를 수행하기 위한 기판 가공 장치

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2807000B2 (ja) * 1989-11-27 1998-09-30 株式会社マックサイエンス Ｘ線回折装置
JPH05289190A (ja) 1992-02-21 1993-11-05 Xerox Corp プロセス方向における解像度の増したイメージ・バー・プリンタ
JPH05264475A (ja) * 1992-03-17 1993-10-12 Fine Ceramics Center 工業用コンピュータ断層撮影装置
JPH10313383A (ja) 1997-05-13 1998-11-24 Canon Inc 画像読み取り装置
JPH1114564A (ja) * 1997-06-18 1999-01-22 Rigaku Corp Ｘ線トポグラフィック装置
JP3976292B2 (ja) 1999-04-30 2007-09-12 株式会社リガク Ｘ線トポグラフィ装置
JP3759524B2 (ja) 2003-10-17 2006-03-29 株式会社リガク Ｘ線分析装置
JP2006071321A (ja) 2004-08-31 2006-03-16 Rigaku Corp Ｘ線検出装置及びｘ線分析装置
DE102004049921A1 (de) * 2004-10-14 2006-04-20 Technische Universität Clausthal Vorrichtung und Verfahren zur Registrierung von Röntgenbeugungsdiagrammen kristalliner Materialien
US7943906B2 (en) * 2006-06-30 2011-05-17 Uchicago Argonne, Llc High spatial resolution X-ray and gamma ray imaging system using diffraction crystals

Similar Documents

Publication Publication Date Title
JP2011141148A5 (ja)
JP2013036758A5 (ja)
ES2642212T3 (es) Cierre de cremallera
JP2012228427A5 (ja)
DE602007005778D1 (de) Tastkopf mit konstanter Rastergeschwindigkeit
FR2983965B1 (fr) Sonde de mesure d'incidence locale et procede mettant en oeuvre la sonde
JP2012129799A5 (ja)
JP2013124873A5 (ja)
FR2973160B1 (fr) Capteur d'image a multiplication d'electrons
JP2013541710A5 (ja)
JP2012099494A5 (ja)
JP2013533795A5 (ja)
JP2012049345A5 (ja)
IT1398421B1 (it) Dispositivo e procedimento per piegare materiali in nastro
JP2013021308A5 (ja) 半導体装置
JP2012166347A5 (ja)
JP2014096188A5 (ja)
FR2998381B1 (fr) Appareil d'imagerie a plusieurs ensembles de detection disposes dans un plan focal
JP2013164339A5 (ja)
JP2011002387A5 (ja)
JP2010185893A5 (ja)
JP2012023348A5 (ja) 半導体装置
JP2012023347A5 (ja) 光電変換装置
JP2011040966A5 (ja) 画像処理装置
JP2014190932A5 (ja)