JP2011139215A - 弾性表面波デバイス、発振器、モジュール装置 - Google Patents
弾性表面波デバイス、発振器、モジュール装置 Download PDFInfo
- Publication number
- JP2011139215A JP2011139215A JP2009297056A JP2009297056A JP2011139215A JP 2011139215 A JP2011139215 A JP 2011139215A JP 2009297056 A JP2009297056 A JP 2009297056A JP 2009297056 A JP2009297056 A JP 2009297056A JP 2011139215 A JP2011139215 A JP 2011139215A
- Authority
- JP
- Japan
- Prior art keywords
- aln
- sio
- coordinates
- coordinate
- acoustic wave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000010897 surface acoustic wave method Methods 0.000 title claims abstract description 70
- 229910004298 SiO 2 Inorganic materials 0.000 claims abstract description 174
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 88
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims abstract description 57
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 45
- 235000012239 silicon dioxide Nutrition 0.000 claims abstract description 43
- 239000000758 substrate Substances 0.000 claims abstract description 35
- 229910052594 sapphire Inorganic materials 0.000 claims abstract description 27
- 239000010980 sapphire Substances 0.000 claims abstract description 27
- 230000008878 coupling Effects 0.000 abstract description 30
- 238000010168 coupling process Methods 0.000 abstract description 30
- 238000005859 coupling reaction Methods 0.000 abstract description 30
- 230000005284 excitation Effects 0.000 abstract description 5
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 10
- 244000126211 Hericium coralloides Species 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 239000011787 zinc oxide Substances 0.000 description 4
- 229910000838 Al alloy Inorganic materials 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
Images
Landscapes
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009297056A JP2011139215A (ja) | 2009-12-28 | 2009-12-28 | 弾性表面波デバイス、発振器、モジュール装置 |
| US12/977,525 US8624690B2 (en) | 2009-12-28 | 2010-12-23 | Surface acoustic wave device, oscillator, module apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009297056A JP2011139215A (ja) | 2009-12-28 | 2009-12-28 | 弾性表面波デバイス、発振器、モジュール装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2011139215A true JP2011139215A (ja) | 2011-07-14 |
| JP2011139215A5 JP2011139215A5 (https=) | 2012-08-30 |
Family
ID=44350211
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009297056A Withdrawn JP2011139215A (ja) | 2009-12-28 | 2009-12-28 | 弾性表面波デバイス、発振器、モジュール装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2011139215A (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022051000A (ja) * | 2020-09-18 | 2022-03-31 | ローム株式会社 | 圧電素子及びその製造方法、並びに、表面弾性波素子及び圧電薄膜共振素子 |
| CN114928341A (zh) * | 2021-07-09 | 2022-08-19 | 三安日本科技株式会社 | 弹性波装置及包含所述弹性波装置的模块 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04109709A (ja) * | 1990-08-29 | 1992-04-10 | Sanyo Electric Co Ltd | 弾性表面波素子 |
| JPH08316779A (ja) * | 1995-05-15 | 1996-11-29 | Sanyo Electric Co Ltd | 弾性表面波素子 |
| JP2002152000A (ja) * | 2000-11-14 | 2002-05-24 | Seiko Epson Corp | 弾性表面波素子 |
| JP2008244523A (ja) * | 2007-03-23 | 2008-10-09 | Seiko Epson Corp | 弾性表面波素子および電子機器 |
-
2009
- 2009-12-28 JP JP2009297056A patent/JP2011139215A/ja not_active Withdrawn
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04109709A (ja) * | 1990-08-29 | 1992-04-10 | Sanyo Electric Co Ltd | 弾性表面波素子 |
| JPH08316779A (ja) * | 1995-05-15 | 1996-11-29 | Sanyo Electric Co Ltd | 弾性表面波素子 |
| JP2002152000A (ja) * | 2000-11-14 | 2002-05-24 | Seiko Epson Corp | 弾性表面波素子 |
| JP2008244523A (ja) * | 2007-03-23 | 2008-10-09 | Seiko Epson Corp | 弾性表面波素子および電子機器 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022051000A (ja) * | 2020-09-18 | 2022-03-31 | ローム株式会社 | 圧電素子及びその製造方法、並びに、表面弾性波素子及び圧電薄膜共振素子 |
| US12328108B2 (en) | 2020-09-18 | 2025-06-10 | Rohm Co., Ltd. | Piezoelectric element, method of manufacturing the same, surface acoustic wave element, and piezoelectric thin film resonance element |
| CN114928341A (zh) * | 2021-07-09 | 2022-08-19 | 三安日本科技株式会社 | 弹性波装置及包含所述弹性波装置的模块 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6856825B2 (ja) | 弾性波装置、分波器および通信装置 | |
| US9048813B2 (en) | Acoustic wave device and antenna duplexer using the same | |
| US7659653B2 (en) | Acoustic wave device and filter | |
| US7564174B2 (en) | Acoustic wave device and filter | |
| KR100858324B1 (ko) | 탄성 표면파 디바이스 | |
| US20060071579A1 (en) | Elastic boundary wave device | |
| US9425766B2 (en) | Elastic wave element, and electrical apparatus and duplexer using same | |
| US11437973B2 (en) | Surface acoustic wave device on composite substrate | |
| JP3278167B2 (ja) | 弾性表面波装置 | |
| US9843304B2 (en) | Transducer with bulk waves surface-guided by synchronous excitation structures | |
| WO2005093949A1 (ja) | 弾性境界波装置の製造方法及び弾性境界波装置 | |
| JP2015537492A (ja) | 電子音響部品 | |
| WO2005060094A1 (ja) | 弾性境界波装置 | |
| JP2008079227A (ja) | フィルタおよび分波器 | |
| CN110771039A (zh) | 弹性波装置、分波器以及通信装置 | |
| JP2014504827A (ja) | 表面音響波フィルタ | |
| CN110800213A (zh) | 弹性波元件、滤波器元件及通信装置 | |
| CN102386878A (zh) | 表面声波谐振器、表面声波振荡器以及电子设备 | |
| JP2011139215A (ja) | 弾性表面波デバイス、発振器、モジュール装置 | |
| JP2007142794A (ja) | 弾性表面波素子片および弾性表面波デバイス | |
| US8624690B2 (en) | Surface acoustic wave device, oscillator, module apparatus | |
| US8674790B2 (en) | Surface acoustic wave device, oscillator, module apparatus | |
| KR20080008396A (ko) | 탄성경계파 장치 | |
| JP2011176546A (ja) | 弾性表面波デバイス、発振器、モジュール装置 | |
| JP2002141768A (ja) | 表面弾性波素子 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120711 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20120711 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20130308 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130319 |
|
| A761 | Written withdrawal of application |
Free format text: JAPANESE INTERMEDIATE CODE: A761 Effective date: 20130510 |