JP2011139215A5 - - Google Patents
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- JP2011139215A5 JP2011139215A5 JP2009297056A JP2009297056A JP2011139215A5 JP 2011139215 A5 JP2011139215 A5 JP 2011139215A5 JP 2009297056 A JP2009297056 A JP 2009297056A JP 2009297056 A JP2009297056 A JP 2009297056A JP 2011139215 A5 JP2011139215 A5 JP 2011139215A5
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- JP
- Japan
- Prior art keywords
- aln
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- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 20
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 14
- 238000010897 surface acoustic wave method Methods 0.000 claims description 14
- 235000012239 silicon dioxide Nutrition 0.000 claims description 10
- 239000000377 silicon dioxide Substances 0.000 claims description 10
- 229910052594 sapphire Inorganic materials 0.000 claims description 4
- 239000010980 sapphire Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 229910004298 SiO 2 Inorganic materials 0.000 claims 54
- 244000126211 Hericium coralloides Species 0.000 description 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009297056A JP2011139215A (ja) | 2009-12-28 | 2009-12-28 | 弾性表面波デバイス、発振器、モジュール装置 |
| US12/977,525 US8624690B2 (en) | 2009-12-28 | 2010-12-23 | Surface acoustic wave device, oscillator, module apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009297056A JP2011139215A (ja) | 2009-12-28 | 2009-12-28 | 弾性表面波デバイス、発振器、モジュール装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2011139215A JP2011139215A (ja) | 2011-07-14 |
| JP2011139215A5 true JP2011139215A5 (https=) | 2012-08-30 |
Family
ID=44350211
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009297056A Withdrawn JP2011139215A (ja) | 2009-12-28 | 2009-12-28 | 弾性表面波デバイス、発振器、モジュール装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2011139215A (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2022051000A (ja) * | 2020-09-18 | 2022-03-31 | ローム株式会社 | 圧電素子及びその製造方法、並びに、表面弾性波素子及び圧電薄膜共振素子 |
| JP2023010468A (ja) * | 2021-07-09 | 2023-01-20 | 三安ジャパンテクノロジー株式会社 | 弾性波デバイス、モジュール |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04109709A (ja) * | 1990-08-29 | 1992-04-10 | Sanyo Electric Co Ltd | 弾性表面波素子 |
| JPH08316779A (ja) * | 1995-05-15 | 1996-11-29 | Sanyo Electric Co Ltd | 弾性表面波素子 |
| JP3864697B2 (ja) * | 2000-11-14 | 2007-01-10 | セイコーエプソン株式会社 | 弾性表面波素子 |
| JP2008244523A (ja) * | 2007-03-23 | 2008-10-09 | Seiko Epson Corp | 弾性表面波素子および電子機器 |
-
2009
- 2009-12-28 JP JP2009297056A patent/JP2011139215A/ja not_active Withdrawn
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