JP2011166567A5 - - Google Patents
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- JP2011166567A5 JP2011166567A5 JP2010028615A JP2010028615A JP2011166567A5 JP 2011166567 A5 JP2011166567 A5 JP 2011166567A5 JP 2010028615 A JP2010028615 A JP 2010028615A JP 2010028615 A JP2010028615 A JP 2010028615A JP 2011166567 A5 JP2011166567 A5 JP 2011166567A5
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- JP
- Japan
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- aln
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- Prior art date
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 20
- 238000010897 surface acoustic wave method Methods 0.000 claims description 16
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 14
- 235000012239 silicon dioxide Nutrition 0.000 claims description 10
- 239000000377 silicon dioxide Substances 0.000 claims description 10
- 229910052594 sapphire Inorganic materials 0.000 claims description 4
- 239000010980 sapphire Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 229910004298 SiO 2 Inorganic materials 0.000 claims 53
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010028615A JP2011166567A (ja) | 2010-02-12 | 2010-02-12 | 弾性表面波デバイス、発振器、モジュール装置 |
| US12/977,525 US8624690B2 (en) | 2009-12-28 | 2010-12-23 | Surface acoustic wave device, oscillator, module apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010028615A JP2011166567A (ja) | 2010-02-12 | 2010-02-12 | 弾性表面波デバイス、発振器、モジュール装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2011166567A JP2011166567A (ja) | 2011-08-25 |
| JP2011166567A5 true JP2011166567A5 (https=) | 2013-02-28 |
Family
ID=44596700
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010028615A Withdrawn JP2011166567A (ja) | 2009-12-28 | 2010-02-12 | 弾性表面波デバイス、発振器、モジュール装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2011166567A (https=) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04109709A (ja) * | 1990-08-29 | 1992-04-10 | Sanyo Electric Co Ltd | 弾性表面波素子 |
| JPH08316779A (ja) * | 1995-05-15 | 1996-11-29 | Sanyo Electric Co Ltd | 弾性表面波素子 |
| JP3864697B2 (ja) * | 2000-11-14 | 2007-01-10 | セイコーエプソン株式会社 | 弾性表面波素子 |
| JP4502553B2 (ja) * | 2000-12-05 | 2010-07-14 | 日本碍子株式会社 | 弾性表面波デバイス用基板の製造方法 |
| JP2008244523A (ja) * | 2007-03-23 | 2008-10-09 | Seiko Epson Corp | 弾性表面波素子および電子機器 |
-
2010
- 2010-02-12 JP JP2010028615A patent/JP2011166567A/ja not_active Withdrawn
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