JP2011176546A5 - - Google Patents
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- JP2011176546A5 JP2011176546A5 JP2010038404A JP2010038404A JP2011176546A5 JP 2011176546 A5 JP2011176546 A5 JP 2011176546A5 JP 2010038404 A JP2010038404 A JP 2010038404A JP 2010038404 A JP2010038404 A JP 2010038404A JP 2011176546 A5 JP2011176546 A5 JP 2011176546A5
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- JP
- Japan
- Prior art keywords
- aln
- sio
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- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 24
- 238000010897 surface acoustic wave method Methods 0.000 claims description 18
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 16
- 235000012239 silicon dioxide Nutrition 0.000 claims description 12
- 239000000377 silicon dioxide Substances 0.000 claims description 12
- 229910052594 sapphire Inorganic materials 0.000 claims description 4
- 239000010980 sapphire Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 229910004298 SiO 2 Inorganic materials 0.000 claims 48
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010038404A JP2011176546A (ja) | 2010-02-24 | 2010-02-24 | 弾性表面波デバイス、発振器、モジュール装置 |
| US12/977,525 US8624690B2 (en) | 2009-12-28 | 2010-12-23 | Surface acoustic wave device, oscillator, module apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010038404A JP2011176546A (ja) | 2010-02-24 | 2010-02-24 | 弾性表面波デバイス、発振器、モジュール装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2011176546A JP2011176546A (ja) | 2011-09-08 |
| JP2011176546A5 true JP2011176546A5 (https=) | 2013-02-28 |
Family
ID=44689008
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010038404A Withdrawn JP2011176546A (ja) | 2009-12-28 | 2010-02-24 | 弾性表面波デバイス、発振器、モジュール装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2011176546A (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102018105290B4 (de) * | 2018-03-07 | 2022-11-17 | RF360 Europe GmbH | Schichtsystem, Herstellungsverfahren und auf dem Schichtsystem ausgebildetet SAW-Bauelement |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04109709A (ja) * | 1990-08-29 | 1992-04-10 | Sanyo Electric Co Ltd | 弾性表面波素子 |
| JPH08316779A (ja) * | 1995-05-15 | 1996-11-29 | Sanyo Electric Co Ltd | 弾性表面波素子 |
| JP3864697B2 (ja) * | 2000-11-14 | 2007-01-10 | セイコーエプソン株式会社 | 弾性表面波素子 |
| JP4502553B2 (ja) * | 2000-12-05 | 2010-07-14 | 日本碍子株式会社 | 弾性表面波デバイス用基板の製造方法 |
| JP2008244523A (ja) * | 2007-03-23 | 2008-10-09 | Seiko Epson Corp | 弾性表面波素子および電子機器 |
-
2010
- 2010-02-24 JP JP2010038404A patent/JP2011176546A/ja not_active Withdrawn
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