JP2011176546A - 弾性表面波デバイス、発振器、モジュール装置 - Google Patents
弾性表面波デバイス、発振器、モジュール装置 Download PDFInfo
- Publication number
- JP2011176546A JP2011176546A JP2010038404A JP2010038404A JP2011176546A JP 2011176546 A JP2011176546 A JP 2011176546A JP 2010038404 A JP2010038404 A JP 2010038404A JP 2010038404 A JP2010038404 A JP 2010038404A JP 2011176546 A JP2011176546 A JP 2011176546A
- Authority
- JP
- Japan
- Prior art keywords
- sio
- aln
- coordinates
- film
- surface acoustic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000010897 surface acoustic wave method Methods 0.000 title claims abstract description 70
- 229910004298 SiO 2 Inorganic materials 0.000 claims abstract description 172
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 98
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims abstract description 57
- 235000012239 silicon dioxide Nutrition 0.000 claims abstract description 49
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 49
- 239000000758 substrate Substances 0.000 claims abstract description 48
- 229910052594 sapphire Inorganic materials 0.000 claims abstract description 40
- 239000010980 sapphire Substances 0.000 claims abstract description 40
- 230000008878 coupling Effects 0.000 description 16
- 238000010168 coupling process Methods 0.000 description 16
- 238000005859 coupling reaction Methods 0.000 description 16
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 10
- 230000001902 propagating effect Effects 0.000 description 8
- 244000126211 Hericium coralloides Species 0.000 description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 6
- 229910000838 Al alloy Inorganic materials 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 230000005284 excitation Effects 0.000 description 4
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 239000011787 zinc oxide Substances 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
Images
Landscapes
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010038404A JP2011176546A (ja) | 2010-02-24 | 2010-02-24 | 弾性表面波デバイス、発振器、モジュール装置 |
| US12/977,525 US8624690B2 (en) | 2009-12-28 | 2010-12-23 | Surface acoustic wave device, oscillator, module apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010038404A JP2011176546A (ja) | 2010-02-24 | 2010-02-24 | 弾性表面波デバイス、発振器、モジュール装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2011176546A true JP2011176546A (ja) | 2011-09-08 |
| JP2011176546A5 JP2011176546A5 (https=) | 2013-02-28 |
Family
ID=44689008
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010038404A Withdrawn JP2011176546A (ja) | 2009-12-28 | 2010-02-24 | 弾性表面波デバイス、発振器、モジュール装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2011176546A (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021516015A (ja) * | 2018-03-07 | 2021-06-24 | アールエフ３６０・ヨーロップ・ゲーエムベーハー | マルチプルレイヤシステム、製造方法およびマルチプルレイヤシステム上に形成されるｓａｗデバイス |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04109709A (ja) * | 1990-08-29 | 1992-04-10 | Sanyo Electric Co Ltd | 弾性表面波素子 |
| JPH08316779A (ja) * | 1995-05-15 | 1996-11-29 | Sanyo Electric Co Ltd | 弾性表面波素子 |
| JP2002152000A (ja) * | 2000-11-14 | 2002-05-24 | Seiko Epson Corp | 弾性表面波素子 |
| JP2002237737A (ja) * | 2000-12-05 | 2002-08-23 | Ngk Insulators Ltd | 弾性表面波デバイス用基板、その製造方法およびそれを用いた弾性表面波デバイス |
| JP2008244523A (ja) * | 2007-03-23 | 2008-10-09 | Seiko Epson Corp | 弾性表面波素子および電子機器 |
-
2010
- 2010-02-24 JP JP2010038404A patent/JP2011176546A/ja not_active Withdrawn
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04109709A (ja) * | 1990-08-29 | 1992-04-10 | Sanyo Electric Co Ltd | 弾性表面波素子 |
| JPH08316779A (ja) * | 1995-05-15 | 1996-11-29 | Sanyo Electric Co Ltd | 弾性表面波素子 |
| JP2002152000A (ja) * | 2000-11-14 | 2002-05-24 | Seiko Epson Corp | 弾性表面波素子 |
| JP2002237737A (ja) * | 2000-12-05 | 2002-08-23 | Ngk Insulators Ltd | 弾性表面波デバイス用基板、その製造方法およびそれを用いた弾性表面波デバイス |
| JP2008244523A (ja) * | 2007-03-23 | 2008-10-09 | Seiko Epson Corp | 弾性表面波素子および電子機器 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021516015A (ja) * | 2018-03-07 | 2021-06-24 | アールエフ３６０・ヨーロップ・ゲーエムベーハー | マルチプルレイヤシステム、製造方法およびマルチプルレイヤシステム上に形成されるｓａｗデバイス |
| JP7432518B2 (ja) | 2018-03-07 | 2024-02-16 | アールエフ３６０・シンガポール・ピーティーイー・リミテッド | マルチプルレイヤシステム、製造方法およびマルチプルレイヤシステム上に形成されるｓａｗデバイス |
| US11949400B2 (en) | 2018-03-07 | 2024-04-02 | Rf360 Singapore Pte. Ltd. | Multiple layer system, method of manufacture and saw device formed on the multiple layer system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6856825B2 (ja) | 弾性波装置、分波器および通信装置 | |
| US9048813B2 (en) | Acoustic wave device and antenna duplexer using the same | |
| KR100858324B1 (ko) | 탄성 표면파 디바이스 | |
| US7355319B2 (en) | Boundary acoustic wave device | |
| US20060071579A1 (en) | Elastic boundary wave device | |
| JP2015537492A (ja) | 電子音響部品 | |
| US20170338796A1 (en) | Elastic wave element, filter element, and communication device | |
| CN110771039A (zh) | 弹性波装置、分波器以及通信装置 | |
| JP2014504827A (ja) | 表面音響波フィルタ | |
| JP2019201345A (ja) | 弾性波共振器、フィルタおよびマルチプレクサ | |
| JP4182157B2 (ja) | 表面波装置 | |
| CN102386878A (zh) | 表面声波谐振器、表面声波振荡器以及电子设备 | |
| JP2002152000A (ja) | 弾性表面波素子 | |
| WO2023097531A1 (zh) | 一种体声波谐振器、滤波器及电子设备 | |
| JP4127170B2 (ja) | 表面波装置 | |
| WO2019082806A1 (ja) | 弾性波素子 | |
| JP4569447B2 (ja) | 弾性表面波素子片および弾性表面波デバイス | |
| JP7188412B2 (ja) | 弾性波装置及び複合フィルタ装置 | |
| JP2011139215A (ja) | 弾性表面波デバイス、発振器、モジュール装置 | |
| KR20080008396A (ko) | 탄성경계파 장치 | |
| JP2011176546A (ja) | 弾性表面波デバイス、発振器、モジュール装置 | |
| US8624690B2 (en) | Surface acoustic wave device, oscillator, module apparatus | |
| JP2002141768A (ja) | 表面弾性波素子 | |
| US8674790B2 (en) | Surface acoustic wave device, oscillator, module apparatus | |
| JP2011166567A (ja) | 弾性表面波デバイス、発振器、モジュール装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130111 |
|
| A621 | Written request for application examination |
Effective date: 20130111 Free format text: JAPANESE INTERMEDIATE CODE: A621 |
|
| A977 | Report on retrieval |
Effective date: 20130930 Free format text: JAPANESE INTERMEDIATE CODE: A971007 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20131008 |
|
| A761 | Written withdrawal of application |
Free format text: JAPANESE INTERMEDIATE CODE: A761 Effective date: 20131030 |