JP2011136559A5 - - Google Patents

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Publication number
JP2011136559A5
JP2011136559A5 JP2010291748A JP2010291748A JP2011136559A5 JP 2011136559 A5 JP2011136559 A5 JP 2011136559A5 JP 2010291748 A JP2010291748 A JP 2010291748A JP 2010291748 A JP2010291748 A JP 2010291748A JP 2011136559 A5 JP2011136559 A5 JP 2011136559A5
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JP
Japan
Prior art keywords
textured
silicon layer
flexible substrate
groove
pattern
Prior art date
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Granted
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JP2010291748A
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English (en)
Japanese (ja)
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JP5723592B2 (ja
JP2011136559A (ja
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Priority claimed from US12/647,977 external-priority patent/US8292404B2/en
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Publication of JP2011136559A publication Critical patent/JP2011136559A/ja
Publication of JP2011136559A5 publication Critical patent/JP2011136559A5/ja
Application granted granted Critical
Publication of JP5723592B2 publication Critical patent/JP5723592B2/ja
Active legal-status Critical Current
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JP2010291748A 2009-12-28 2010-12-28 可撓性デバイスを作製するための方法 Active JP5723592B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US12/647,977 2009-12-28
US12/647,977 US8292404B2 (en) 2009-12-28 2009-12-28 Superoleophobic and superhydrophobic surfaces and method for preparing same

Publications (3)

Publication Number Publication Date
JP2011136559A JP2011136559A (ja) 2011-07-14
JP2011136559A5 true JP2011136559A5 (enExample) 2014-02-13
JP5723592B2 JP5723592B2 (ja) 2015-05-27

Family

ID=44187005

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010291748A Active JP5723592B2 (ja) 2009-12-28 2010-12-28 可撓性デバイスを作製するための方法

Country Status (3)

Country Link
US (1) US8292404B2 (enExample)
JP (1) JP5723592B2 (enExample)
CN (1) CN102180016B (enExample)

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WO2016172561A1 (en) * 2015-04-24 2016-10-27 The Penn State Research Foundation Slippery rough surfaces
CN105297013B (zh) * 2015-12-01 2018-04-24 河南理工大学 一种超疏油表面的制备方法
CN108735636B (zh) * 2018-06-14 2020-11-27 深圳市克拉尼声学科技有限公司 一种半导体光刻板快速清洗装置
CN113165132A (zh) * 2018-12-21 2021-07-23 三菱电机株式会社 防污性基材及物品
CN112536205A (zh) * 2020-12-03 2021-03-23 长春理工大学 一种低成本超声辅助水下超亲油向超疏油特性的转变方法

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