JP2011115941A - 多層被覆切削工具 - Google Patents
多層被覆切削工具 Download PDFInfo
- Publication number
- JP2011115941A JP2011115941A JP2010270389A JP2010270389A JP2011115941A JP 2011115941 A JP2011115941 A JP 2011115941A JP 2010270389 A JP2010270389 A JP 2010270389A JP 2010270389 A JP2010270389 A JP 2010270389A JP 2011115941 A JP2011115941 A JP 2011115941A
- Authority
- JP
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- Prior art keywords
- region
- coating
- cutting tool
- coated cutting
- multilayer structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 238000005520 cutting process Methods 0.000 title claims abstract description 31
- 238000000576 coating method Methods 0.000 claims abstract description 61
- 239000011248 coating agent Substances 0.000 claims abstract description 57
- 239000000203 mixture Substances 0.000 claims abstract description 51
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 46
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 41
- 238000000034 method Methods 0.000 claims abstract description 25
- 230000000737 periodic effect Effects 0.000 claims abstract description 22
- 150000004767 nitrides Chemical class 0.000 claims abstract description 17
- 229910052727 yttrium Inorganic materials 0.000 claims abstract description 10
- 238000004519 manufacturing process Methods 0.000 claims abstract description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 31
- 239000000758 substrate Substances 0.000 claims description 30
- 229910052804 chromium Inorganic materials 0.000 claims description 28
- 229910000997 High-speed steel Inorganic materials 0.000 claims description 6
- 229910052582 BN Inorganic materials 0.000 claims description 5
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 5
- 239000000919 ceramic Substances 0.000 claims description 5
- 239000011195 cermet Substances 0.000 claims description 5
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 4
- 229910052757 nitrogen Inorganic materials 0.000 claims description 4
- 238000005516 engineering process Methods 0.000 claims description 3
- 229910017083 AlN Inorganic materials 0.000 claims description 2
- 239000000463 material Substances 0.000 abstract description 4
- 230000000593 degrading effect Effects 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 51
- 239000010936 titanium Substances 0.000 description 42
- 239000011651 chromium Substances 0.000 description 39
- 238000000151 deposition Methods 0.000 description 15
- 238000005240 physical vapour deposition Methods 0.000 description 15
- 230000008021 deposition Effects 0.000 description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000007789 gas Substances 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 238000005259 measurement Methods 0.000 description 4
- 150000001247 metal acetylides Chemical class 0.000 description 4
- 230000003252 repetitive effect Effects 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 3
- 229910001873 dinitrogen Inorganic materials 0.000 description 3
- 238000001755 magnetron sputter deposition Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000008199 coating composition Substances 0.000 description 2
- 239000011247 coating layer Substances 0.000 description 2
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910010038 TiAl Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical group [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- -1 borides Chemical class 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 238000005480 shot peening Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- PQDJYEQOELDLCP-UHFFFAOYSA-N trimethylsilane Chemical compound C[SiH](C)C PQDJYEQOELDLCP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C14/58—After-treatment
- C23C14/5873—Removal of material
- C23C14/588—Removal of material by mechanical treatment
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23B—TURNING; BORING
- B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
- B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
- C23C14/0068—Reactive sputtering characterised by means for confinement of gases or sputtered material, e.g. screens, baffles
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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Abstract
【解決手段】本発明は、基材及びPVD被覆を含む被覆切削工具に関係し、PVD被覆は最外領域Cを含み、最外領域CはSi、及びAl, Y及び周期表の4, 5または 6族から選択される少なくとも二つの追加元素の窒化物, 炭化物 または ホウ化物またはそれらの混合物であり,及び領域CはSi平均含有率の組成勾配がない。領域Cは薄板状の, 非周期の, 多層構造を有し、お互いに異なる組成を有する個々の層X 及び Yを交互に入れ替えている。この被覆は、基材に最も近い領域A,中間領域 Bをさらに含み、ここで:
-領域Aには本質的にSiが無く,
-領域 BはSi平均含有率の組成勾配を含み,ここでSi平均含有率は領域Cに向かって増加していく。
本発明はまた上記の被覆切削工具を製造する方法にも関係する。
【選択図】図1
Description
-領域Aには本質的にSiが無く,且つ
-領域 BはSi平均含有率の組成勾配を含み,ここでこのSi平均含有率は領域Cに向かって増加している。
-領域Aには本質的にSiが無く,且つ
-領域 BはSi平均含有率の組成勾配を含み,ここで該Si平均含有率は領域Cに向かって増加している。
-領域Aには本質的にSiが無く,且つ
-領域 BはSi平均含有率の組成勾配を含み,ここで該Si平均含有率は領域Cに向かって増加している。
-領域Aには本質的にSiが無く,且つ
-領域 BはSi平均含有率の組成勾配を含み,ここで該Si平均含有率は領域Cに向かって増加している。
超硬合金ドリルを、Ti, Ti0.90Si0.10 および Al0.70Cr0.30 ターゲットを用いて、PVDアーク蒸発装置で被覆した。全ての付着の間、付着温度は450℃であった。全ての付着の間、ドリルを3軸回転で回転させて、非周期の構造を得た。
例1と同じ組成および形状を有する超硬合金 ドリルを、例1と同じ装置で被覆した。付着は、例1で記載したものと同じエッチング工程で始めた。付着温度は450℃であり、バイアス電圧は-40 Vであった。
例1および2により作製されたドリルを、比較と称する(Ti,Al)N被覆および先行技術であるEP 1 939 328 A1に記載されたTiAlCrSiN多層を有する市販のドリルとともにテストし、切削操作では以下の条件で20mm貫通孔を作製した:
ワークピース材料 SS2244
切削速度 90 m/分
送り 0.15 mm/ターン
内部冷却 2.8〜3.5 l/分
vB(側面磨耗)> 主切刃上で0.3 mm;
vB>外側コーナーで0.5 mm または同サイズのチッピング;および
作業を続ければ全体的な破損に繋がると思われる、劣悪な切り屑の生成(糸様の切り屑)、音または力の増加。
Claims (15)
- 基材及びPVD被覆を含む被覆切削工具であって、ここで該被覆は最外領域 Cを含み、最外領域CはSiと、Al, Y及び周期表の4, 5または 6族から選択される少なくとも二つの追加元素との窒化物, 炭化物 または ホウ化物またはそれらの混合物であり,ここで領域CはSi平均含有率の組成勾配がなく、且つここで領域Cは非周期の, 多層構造を有し、互いに異なる組成を有する個々の層X 及び Yを交互に入れ替えており、
該被覆は、該基材に最も近い領域A、及び領域Aと領域Cの間の中間領域 Bをさらに含み、ここで:
-領域Aには本質的にSiが無く,且つ
-領域 BはSi平均含有率の組成勾配を含み,ここで該Si平均含有率は領域Cに向かって増加していることを特徴とする、被覆切削工具。 - 領域 Bが、非周期の多層構造を有し、互いに異なる組成を有する個々の層X 及び Yを交互に入れ替えている、請求項1に記載の被覆切削工具。
- 領域 Aが、TiN, (Ti,Al)N, Ti, AlN, Al, CrN, (Cr,Al)N 又は Crを含む、請求項1または2に記載の被覆切削工具。
- 該被覆が窒化物である、請求項1〜3のいずれか1項に記載の被覆切削工具。
- 該被覆がSi, Cr, Al およびTi元素の窒化物である、請求項1〜4のいずれか1項に記載の被覆切削工具。
- 領域 A+Bの合計厚みが被覆の合計厚みの20から95%である、請求項1〜5のいずれか1項に記載の被覆切削工具。
- 領域Aが、領域Aおよび領域Bの合計厚みの1から50%である、請求項1〜6のいずれか1項に記載の被覆切削工具。
- 該多層構造における該個々の層の厚みが0.1 nmより大きく200 nmより小さい、請求項1〜7のいずれか1項に記載の被覆切削工具。
- 層厚みの合計が0.5 から 20 μmである、請求項1〜8のいずれか1項に記載の被覆切削工具。
- 被覆切削工具を製造する方法であって、
超硬合金, サーメット, セラミックス, 立方晶窒化ホウ素 または 高速度鋼でできた基材を用意し、
前記基材に、PVD技術により、最外領域 Cを含む被覆を付着させる工程を含み、
最外領域CはSiと、Al, Y及び周期表の4, 5または 6族から選択される少なくとも二つの追加元素との窒化物, 炭化物 または ホウ化物またはそれらの混合物であり, ここで領域CはSi平均含有率の組成勾配がなく、ここで領域Cは非周期の, 多層構造を有し、互いに異なる組成を有する個々の層X 及び Yを交互に入れ替えており、
且つここで該被覆は、該基材に最も近い領域A、及び領域Aと領域Cの間の中間領域 Bをさらに含み、ここで
-領域Aには本質的にSiが無く,且つ
-領域 BはSi平均含有率の組成勾配を含み,ここで該Si平均含有率は領域Cに向かって増加している、方法。 - 領域 Bが、非周期の多層構造を有し、互いに異なる組成を有する個々の層X 及び Yを交互に入れ替えている、請求項10に記載の方法。
- 領域 A+Bの合計厚みが被覆の合計厚みの20から95%である、請求項10または11に記載の方法。
- 領域Aが、領域Aおよび領域Bの合計厚みの1から50%である、請求項10〜12のいずれか1項に記載の方法。
- 該多層構造における該個々の層の厚みが0.1 nmより大きく200 nmより小さい、請求項10〜13のいずれか1項に記載の方法。
- 該被覆がSi, Cr, Al およびTi元素の窒化物である、請求項10〜14のいずれか1項に記載の方法。
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Also Published As
Publication number | Publication date |
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KR101820165B1 (ko) | 2018-01-18 |
US8758890B2 (en) | 2014-06-24 |
JP5714879B2 (ja) | 2015-05-07 |
CN102091923A (zh) | 2011-06-15 |
EP2336382A1 (en) | 2011-06-22 |
EP2336382B1 (en) | 2015-01-07 |
US20110135898A1 (en) | 2011-06-09 |
EP2336383A1 (en) | 2011-06-22 |
KR20110063367A (ko) | 2011-06-10 |
CN102091923B (zh) | 2015-04-01 |
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