JP2011101048A - ハンドラのティーチング方法及びハンドラ - Google Patents

ハンドラのティーチング方法及びハンドラ Download PDF

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Publication number
JP2011101048A
JP2011101048A JP2011022492A JP2011022492A JP2011101048A JP 2011101048 A JP2011101048 A JP 2011101048A JP 2011022492 A JP2011022492 A JP 2011022492A JP 2011022492 A JP2011022492 A JP 2011022492A JP 2011101048 A JP2011101048 A JP 2011101048A
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Japan
Prior art keywords
gripping member
semiconductor chip
chip
flow rate
gas
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JP2011022492A
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Japanese (ja)
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JP2011101048A5 (enExample
Inventor
Satoshi Nakamura
敏 中村
Yoshiyuki Kakizaka
佳幸 柿坂
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Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2011022492A priority Critical patent/JP2011101048A/ja
Publication of JP2011101048A publication Critical patent/JP2011101048A/ja
Publication of JP2011101048A5 publication Critical patent/JP2011101048A5/ja
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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2011022492A 2011-02-04 2011-02-04 ハンドラのティーチング方法及びハンドラ Withdrawn JP2011101048A (ja)

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JP2011022492A JP2011101048A (ja) 2011-02-04 2011-02-04 ハンドラのティーチング方法及びハンドラ

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JP2011022492A JP2011101048A (ja) 2011-02-04 2011-02-04 ハンドラのティーチング方法及びハンドラ

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JP2009003969A Division JP4683129B2 (ja) 2009-01-09 2009-01-09 ハンドラのティーチング方法及びハンドラ

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JP2011101048A true JP2011101048A (ja) 2011-05-19
JP2011101048A5 JP2011101048A5 (enExample) 2012-02-16

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2518720A1 (en) 2011-04-28 2012-10-31 Yamaha Corporation Woodwind instrument and airflow adjuster

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10199803A (ja) * 1997-01-14 1998-07-31 Canon Inc 位置決め装置
JP2002368491A (ja) * 2001-06-13 2002-12-20 Sony Corp 部品装着装置における部品高さ測定方法及びその装置
JP2003133795A (ja) * 2001-10-29 2003-05-09 Matsushita Electric Ind Co Ltd 電子部品実装装置における基板上面高さの検出方法
JP2008124198A (ja) * 2006-11-10 2008-05-29 Seiko Epson Corp ハンドラのティーチング方法及びハンドラ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10199803A (ja) * 1997-01-14 1998-07-31 Canon Inc 位置決め装置
JP2002368491A (ja) * 2001-06-13 2002-12-20 Sony Corp 部品装着装置における部品高さ測定方法及びその装置
JP2003133795A (ja) * 2001-10-29 2003-05-09 Matsushita Electric Ind Co Ltd 電子部品実装装置における基板上面高さの検出方法
JP2008124198A (ja) * 2006-11-10 2008-05-29 Seiko Epson Corp ハンドラのティーチング方法及びハンドラ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2518720A1 (en) 2011-04-28 2012-10-31 Yamaha Corporation Woodwind instrument and airflow adjuster

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