JP2011091234A5 - - Google Patents
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- Publication number
- JP2011091234A5 JP2011091234A5 JP2009244172A JP2009244172A JP2011091234A5 JP 2011091234 A5 JP2011091234 A5 JP 2011091234A5 JP 2009244172 A JP2009244172 A JP 2009244172A JP 2009244172 A JP2009244172 A JP 2009244172A JP 2011091234 A5 JP2011091234 A5 JP 2011091234A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- additive
- electrode
- added
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000654 additive Substances 0.000 claims 4
- 230000000996 additive effect Effects 0.000 claims 4
- 239000007788 liquid Substances 0.000 claims 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims 1
- 239000013078 crystal Substances 0.000 claims 1
- 238000007599 discharging Methods 0.000 claims 1
- 229910052759 nickel Inorganic materials 0.000 claims 1
- 229910052712 strontium Inorganic materials 0.000 claims 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- 239000010936 titanium Substances 0.000 claims 1
- 229910052726 zirconium Inorganic materials 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009244172A JP2011091234A (ja) | 2009-10-23 | 2009-10-23 | 液体噴射ヘッド、液体噴射装置及びアクチュエーター装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009244172A JP2011091234A (ja) | 2009-10-23 | 2009-10-23 | 液体噴射ヘッド、液体噴射装置及びアクチュエーター装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2011091234A JP2011091234A (ja) | 2011-05-06 |
| JP2011091234A5 true JP2011091234A5 (enExample) | 2012-09-27 |
Family
ID=44109222
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009244172A Withdrawn JP2011091234A (ja) | 2009-10-23 | 2009-10-23 | 液体噴射ヘッド、液体噴射装置及びアクチュエーター装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2011091234A (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9147827B2 (en) * | 2012-11-28 | 2015-09-29 | Tdk Corporation | Piezoelectric element, piezoelectric actuator, piezoelectric sensor, hard disk drive, and inkjet printer device |
| GB2532106B (en) * | 2014-11-04 | 2017-06-28 | Xaar Technology Ltd | A piezoelectric thin film element |
| JP7194528B2 (ja) * | 2018-07-18 | 2022-12-22 | 株式会社アルバック | Ｐｚｔ素子、ｐｚｔ素子製造方法 |
| JP7151884B2 (ja) * | 2019-05-14 | 2022-10-12 | 株式会社村田製作所 | 圧電セラミック電子部品 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004235599A (ja) * | 2002-05-31 | 2004-08-19 | Matsushita Electric Ind Co Ltd | 圧電素子、インクジェットヘッド、角速度センサ及びこれらの製造方法、並びにインクジェット式記録装置 |
| CN100505357C (zh) * | 2005-03-22 | 2009-06-24 | 精工爱普生株式会社 | 压电元件，液体喷射头和液体喷射设备 |
| JP2009200358A (ja) * | 2008-02-22 | 2009-09-03 | Denso Corp | 積層型圧電素子 |
-
2009
- 2009-10-23 JP JP2009244172A patent/JP2011091234A/ja not_active Withdrawn
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