JP2011091234A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2011091234A5 JP2011091234A5 JP2009244172A JP2009244172A JP2011091234A5 JP 2011091234 A5 JP2011091234 A5 JP 2011091234A5 JP 2009244172 A JP2009244172 A JP 2009244172A JP 2009244172 A JP2009244172 A JP 2009244172A JP 2011091234 A5 JP2011091234 A5 JP 2011091234A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- additive
- electrode
- added
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000000654 additive Substances 0.000 claims 4
- 230000000996 additive effect Effects 0.000 claims 4
- 239000007788 liquid Substances 0.000 claims 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims 1
- 239000013078 crystal Substances 0.000 claims 1
- 238000007599 discharging Methods 0.000 claims 1
- 229910052759 nickel Inorganic materials 0.000 claims 1
- 229910052712 strontium Inorganic materials 0.000 claims 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- 239000010936 titanium Substances 0.000 claims 1
- 229910052726 zirconium Inorganic materials 0.000 claims 1
Claims (1)
前記圧電素子は、第１電極と、チタン、ジルコニウム及び鉛を含み菱面体晶系の結晶構造を有する圧電体層と、該圧電体層の前記第１電極とは反対側に形成された第２電極と、を具備し、
前記圧電体層は、ニッケル及びストロンチウムの少なくとも一方の添加物が添加されている添加層と実質的に前記添加物が添加されていない無添加層との積層体からなり、
前記添加層は、前記無添加層の前記第１電極側及び前記第２電極側の少なくとも一方に形成されていることを特徴とする液体噴射ヘッド。 A flow path forming substrate in which pressure generation chambers communicating with a nozzle opening for injecting liquid are arranged in parallel; and a piezoelectric element provided above the flow path forming substrate. In the liquid jet head for discharging,
The piezoelectric element includes a first electrode, a piezoelectric layer having a rhombohedral crystal structure including titanium, zirconium, and lead, and a second layer formed on the opposite side of the piezoelectric layer from the first electrode. An electrode,
The piezoelectric layer comprises a laminate of an additive layer to which at least one additive of nickel and strontium is added and an additive-free layer to which the additive is not substantially added,
The liquid ejecting head according to claim 1, wherein the additive layer is formed on at least one of the first electrode side and the second electrode side of the non-added layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009244172A JP2011091234A (en) | 2009-10-23 | 2009-10-23 | Liquid ejection head, liquid ejection device and actuator device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009244172A JP2011091234A (en) | 2009-10-23 | 2009-10-23 | Liquid ejection head, liquid ejection device and actuator device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2011091234A JP2011091234A (en) | 2011-05-06 |
| JP2011091234A5 true JP2011091234A5 (en) | 2012-09-27 |
Family
ID=44109222
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009244172A Withdrawn JP2011091234A (en) | 2009-10-23 | 2009-10-23 | Liquid ejection head, liquid ejection device and actuator device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2011091234A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9147827B2 (en) * | 2012-11-28 | 2015-09-29 | Tdk Corporation | Piezoelectric element, piezoelectric actuator, piezoelectric sensor, hard disk drive, and inkjet printer device |
| GB2532106B (en) * | 2014-11-04 | 2017-06-28 | Xaar Technology Ltd | A piezoelectric thin film element |
| JP7194528B2 (en) * | 2018-07-18 | 2022-12-22 | 株式会社アルバック | PZT element, PZT element manufacturing method |
| WO2020230450A1 (en) * | 2019-05-14 | 2020-11-19 | 株式会社村田製作所 | Piezoelectric ceramic electronic component |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004235599A (en) * | 2002-05-31 | 2004-08-19 | Matsushita Electric Ind Co Ltd | Piezoelectric element, ink jet head, angular velocity sensor, and their manufacturing methods, and ink jet type recording apparatus |
| CN100505357C (en) * | 2005-03-22 | 2009-06-24 | 精工爱普生株式会社 | Piezoelectric element, liquid-jet head and liquid-jet equipment |
| JP2009200358A (en) * | 2008-02-22 | 2009-09-03 | Denso Corp | Laminated piezoelectric element |
-
2009
- 2009-10-23 JP JP2009244172A patent/JP2011091234A/en not_active Withdrawn
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| WO2011005699A3 (en) | Mems jetting structure for dense packing | |
| JP2011211141A5 (en) | Liquid ejecting head, liquid ejecting apparatus, piezoelectric element, and ultrasonic device | |
| JP2011091234A5 (en) | ||
| JP2012196882A5 (en) | ||
| JP2013111807A5 (en) | ||
| JP2008114589A5 (en) | ||
| JP2010137554A5 (en) | ||
| JP2008091877A5 (en) | ||
| JP2015116696A5 (en) | ||
| JP2009279830A5 (en) | ||
| JP2009132133A5 (en) | ||
| JP2014166728A5 (en) | Piezoelectric element, liquid ejecting head, liquid ejecting apparatus, and ultrasonic sensor | |
| JP2009078398A5 (en) | ||
| JP2013226818A5 (en) | Piezoelectric element, liquid ejecting head, liquid ejecting apparatus, ultrasonic device, filter and sensor, and method for manufacturing piezoelectric element | |
| JP2007273976A5 (en) | ||
| JP2011143331A5 (en) | ||
| JP2012104658A5 (en) | ||
| JP2009208330A5 (en) | ||
| JP2012139923A5 (en) | Liquid jet head and method of manufacturing the same, liquid jet device, piezoelectric element, ultrasonic sensor, and infrared sensor | |
| JP2012121273A5 (en) | Liquid jet head, liquid jet device, piezoelectric element, ultrasonic device and IR sensor | |
| JP2012151308A5 (en) | Liquid jet head, liquid jet device, piezoelectric element, ultrasonic sensor and infrared sensor | |
| JP2011167855A (en) | Liquid ejecting head and liquid ejecting apparatus | |
| JP2015000560A5 (en) | Electromechanical conversion element, droplet discharge head, liquid cartridge, image forming apparatus, droplet discharge device, and pump device | |
| JP2015036245A5 (en) | ||
| JP2017212423A5 (en) |