JP2011091234A5 - - Google Patents

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Publication number
JP2011091234A5
JP2011091234A5 JP2009244172A JP2009244172A JP2011091234A5 JP 2011091234 A5 JP2011091234 A5 JP 2011091234A5 JP 2009244172 A JP2009244172 A JP 2009244172A JP 2009244172 A JP2009244172 A JP 2009244172A JP 2011091234 A5 JP2011091234 A5 JP 2011091234A5
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JP
Japan
Prior art keywords
layer
additive
electrode
added
piezoelectric
Prior art date
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Withdrawn
Application number
JP2009244172A
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Japanese (ja)
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JP2011091234A (en
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Publication date
Application filed filed Critical
Priority to JP2009244172A priority Critical patent/JP2011091234A/en
Priority claimed from JP2009244172A external-priority patent/JP2011091234A/en
Publication of JP2011091234A publication Critical patent/JP2011091234A/en
Publication of JP2011091234A5 publication Critical patent/JP2011091234A5/ja
Withdrawn legal-status Critical Current

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Claims (1)

液体を噴射するノズル開口に連通する圧力発生室が並設された流路形成基板と、前記流路形成基板の上方に設けられた圧電素子とを備え、圧電素子の変形によってノズル開口から液体を吐出する液体噴射ヘッドにおいて、
前記圧電素子は、第1電極と、チタン、ジルコニウム及び鉛を含み菱面体晶系の結晶構造を有する圧電体層と、該圧電体層の前記第1電極とは反対側に形成された第2電極と、を具備し、
前記圧電体層は、ニッケル及びストロンチウムの少なくとも一方の添加物が添加されている添加層と実質的に前記添加物が添加されていない無添加層との積層体からなり、
前記添加層は、前記無添加層の前記第1電極側及び前記第2電極側の少なくとも一方に形成されていることを特徴とする液体噴射ヘッド。
A flow path forming substrate in which pressure generation chambers communicating with a nozzle opening for injecting liquid are arranged in parallel; and a piezoelectric element provided above the flow path forming substrate. In the liquid jet head for discharging,
The piezoelectric element includes a first electrode, a piezoelectric layer having a rhombohedral crystal structure including titanium, zirconium, and lead, and a second layer formed on the opposite side of the piezoelectric layer from the first electrode. An electrode,
The piezoelectric layer comprises a laminate of an additive layer to which at least one additive of nickel and strontium is added and an additive-free layer to which the additive is not substantially added,
The liquid ejecting head according to claim 1, wherein the additive layer is formed on at least one of the first electrode side and the second electrode side of the non-added layer.
JP2009244172A 2009-10-23 2009-10-23 Liquid ejection head, liquid ejection device and actuator device Withdrawn JP2011091234A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009244172A JP2011091234A (en) 2009-10-23 2009-10-23 Liquid ejection head, liquid ejection device and actuator device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2009244172A JP2011091234A (en) 2009-10-23 2009-10-23 Liquid ejection head, liquid ejection device and actuator device

Publications (2)

Publication Number Publication Date
JP2011091234A JP2011091234A (en) 2011-05-06
JP2011091234A5 true JP2011091234A5 (en) 2012-09-27

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Family Applications (1)

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JP2009244172A Withdrawn JP2011091234A (en) 2009-10-23 2009-10-23 Liquid ejection head, liquid ejection device and actuator device

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JP (1) JP2011091234A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9147827B2 (en) * 2012-11-28 2015-09-29 Tdk Corporation Piezoelectric element, piezoelectric actuator, piezoelectric sensor, hard disk drive, and inkjet printer device
GB2532106B (en) * 2014-11-04 2017-06-28 Xaar Technology Ltd A piezoelectric thin film element
JP7194528B2 (en) * 2018-07-18 2022-12-22 株式会社アルバック PZT element, PZT element manufacturing method
WO2020230450A1 (en) * 2019-05-14 2020-11-19 株式会社村田製作所 Piezoelectric ceramic electronic component

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004235599A (en) * 2002-05-31 2004-08-19 Matsushita Electric Ind Co Ltd Piezoelectric element, ink jet head, angular velocity sensor, and their manufacturing methods, and ink jet type recording apparatus
CN100505357C (en) * 2005-03-22 2009-06-24 精工爱普生株式会社 Piezoelectric element, liquid-jet head and liquid-jet equipment
JP2009200358A (en) * 2008-02-22 2009-09-03 Denso Corp Laminated piezoelectric element

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