JP2012139923A5 - Liquid jet head and method of manufacturing the same, liquid jet device, piezoelectric element, ultrasonic sensor, and infrared sensor - Google Patents
Liquid jet head and method of manufacturing the same, liquid jet device, piezoelectric element, ultrasonic sensor, and infrared sensor Download PDFInfo
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- JP2012139923A5 JP2012139923A5 JP2010294368A JP2010294368A JP2012139923A5 JP 2012139923 A5 JP2012139923 A5 JP 2012139923A5 JP 2010294368 A JP2010294368 A JP 2010294368A JP 2010294368 A JP2010294368 A JP 2010294368A JP 2012139923 A5 JP2012139923 A5 JP 2012139923A5
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圧電体層と前記圧電体層に設けられた電極とを備えた圧電素子と、を具備する液体噴射ヘッドの製造方法であって、
第1圧電体膜形成用組成物を塗布して第1圧電体前駆体膜を形成する工程及び該第1圧電体前駆体膜を加熱することにより結晶化させて第1圧電体膜を形成する工程を備え、Aサイトに、カリウム及びナトリウムを含み、Bサイトにニオブを含むペロブスカイト構造の複合酸化物を含む圧電材料からなる第1圧電体膜を有する第1圧電体層を前記電極上方に形成する工程と、
気相成長法により中間層を前記第1圧電体層上に形成する工程と、
第2圧電体膜形成用組成物を塗布して第2圧電体前駆体膜を形成する工程及び該第2圧電体前駆体膜を加熱することにより結晶化させて第2圧電体膜を形成する工程を備え、Aサイトに、カリウム及びナトリウムを含み、Bサイトにニオブを含むペロブスカイト構造の複合酸化物を含む圧電材料からなる第2圧電体膜を有する第2圧電体層を前記中間層上に形成する工程と、
を具備し、前記第1圧電体層、中間層、及び前記第2圧電体層からなる前記圧電体層を形成することを特徴とする液体噴射ヘッドの製造方法。 A pressure generating chamber in communication with the nozzle opening;
A method of manufacturing a liquid jet head comprising: a piezoelectric element comprising a piezoelectric layer and an electrode provided on the piezoelectric layer,
Applying a composition for forming a first piezoelectric film to form a first piezoelectric precursor film, and heating the first piezoelectric precursor film to crystallize it to form a first piezoelectric film Forming a first piezoelectric layer having a first piezoelectric film made of a piezoelectric material containing a complex oxide of a perovskite structure containing potassium and sodium at site A and niobium at site B on the electrode The process to
Forming an intermediate layer on the first piezoelectric layer by a vapor deposition method;
Applying a composition for forming a second piezoelectric film to form a second piezoelectric precursor film, and heating the second piezoelectric precursor film to crystallize it to form a second piezoelectric film A second piezoelectric layer having a second piezoelectric film made of a piezoelectric material containing a complex oxide of a perovskite structure containing potassium and sodium at A site and niobium at B site on the intermediate layer Forming step;
A method of manufacturing a liquid jet head, comprising: forming the piezoelectric layer comprising the first piezoelectric layer, the intermediate layer, and the second piezoelectric layer.
圧電体層と前記圧電体層に設けられた電極とを備えた圧電素子と、を具備し、
前記圧電体層は、
CSD法(Chemical Solution Deposition)により形成され、Aサイトに、カリウム及びナトリウムを含み、Bサイトにニオブを含むペロブスカイト構造の複合酸化物を含む圧電材料からなる第1圧電体層及び第2圧電体層と、
前記第1圧電体層と前記第2圧電体層との間に設けられ、気相成長法により形成された中間層と、を備えることを特徴とする液体噴射ヘッド。 A pressure generating chamber in communication with the nozzle opening;
A piezoelectric element comprising a piezoelectric layer and an electrode provided on the piezoelectric layer;
The piezoelectric layer is
A first piezoelectric layer and a second piezoelectric layer formed by a CSD method (Chemical Solution Deposition), comprising a piezoelectric material containing a complex oxide of a perovskite structure containing potassium and sodium at the A site and niobium at the B site When,
A liquid jet head comprising: an intermediate layer provided between the first piezoelectric layer and the second piezoelectric layer and formed by a vapor deposition method.
第1圧電体膜形成用組成物を塗布して第1圧電体前駆体膜を形成する工程及び該第1圧電体前駆体膜を加熱することにより結晶化させて第1圧電体膜を形成する工程を備え、Aサイトに、カリウム及びナトリウムを含み、Bサイトにニオブを含むペロブスカイト構造の複合酸化物を含む圧電材料からなる第1圧電体膜を有する第1圧電体層を前記第1電極上方に形成する工程と、
気相成長法により中間層を前記第1圧電体層上に形成する工程と、
第2圧電体膜形成用組成物を塗布して第2圧電体前駆体膜を形成する工程及び該第2圧電体前駆体膜を加熱することにより結晶化させて第2圧電体膜を形成する工程を備え、Aサイトに、カリウム及びナトリウムを含み、Bサイトにニオブを含むペロブスカイト構造の複合酸化物を含む圧電材料からなる第2圧電体膜を有する第2圧電体層を前記中間層上に形成する工程と、
を具備し、前記第1圧電体層、中間層、及び前記第2圧電体層からなる前記圧電体層を形成することを特徴とする圧電素子の製造方法。 A method of manufacturing a piezoelectric element, comprising: a first electrode, a piezoelectric layer, and a second electrode,
Applying a composition for forming a first piezoelectric film to form a first piezoelectric precursor film, and heating the first piezoelectric precursor film to crystallize it to form a first piezoelectric film A first piezoelectric layer having a first piezoelectric film made of a piezoelectric material containing a complex oxide of the perovskite structure containing potassium and sodium at the A site and niobium containing the B site at the upper side of the first electrode Forming in
Forming an intermediate layer on the first piezoelectric layer by a vapor deposition method;
Applying a composition for forming a second piezoelectric film to form a second piezoelectric precursor film, and heating the second piezoelectric precursor film to crystallize it to form a second piezoelectric film A second piezoelectric layer having a second piezoelectric film made of a piezoelectric material containing a complex oxide of a perovskite structure containing potassium and sodium at A site and niobium at B site on the intermediate layer Forming step;
And manufacturing the piezoelectric layer comprising the first piezoelectric layer, the intermediate layer, and the second piezoelectric layer.
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JP2010294368A JP5668473B2 (en) | 2010-12-29 | 2010-12-29 | Piezoelectric element and method for manufacturing the same, liquid ejecting head, liquid ejecting apparatus, ultrasonic sensor, and infrared sensor |
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JP2015038953A (en) | 2013-06-28 | 2015-02-26 | セイコーエプソン株式会社 | Piezoelectric material, piezoelectric element, liquid injection head, liquid injection device, ultrasonic sensor, piezoelectric motor and power generator |
JP5754660B2 (en) | 2013-06-28 | 2015-07-29 | セイコーエプソン株式会社 | Piezoelectric material, piezoelectric element, liquid ejecting head, liquid ejecting apparatus, ultrasonic sensor, piezoelectric motor, and power generation apparatus |
JP5761540B2 (en) | 2013-06-28 | 2015-08-12 | セイコーエプソン株式会社 | Piezoelectric material, piezoelectric element, liquid ejecting head, liquid ejecting apparatus, ultrasonic sensor, piezoelectric motor, and power generation apparatus |
JP6478070B2 (en) | 2014-12-26 | 2019-03-06 | セイコーエプソン株式会社 | Piezoelectric material, manufacturing method thereof, piezoelectric element, and piezoelectric element applied device |
JP6560897B2 (en) * | 2015-05-20 | 2019-08-14 | スタンレー電気株式会社 | Piezoelectric film laminate, method of manufacturing the same, and optical scanner |
KR20200094995A (en) * | 2019-01-31 | 2020-08-10 | 삼성전기주식회사 | Bulk-acoustic wave resonator |
CN114068799A (en) * | 2020-07-30 | 2022-02-18 | 丰田自动车株式会社 | Niobate base leadless ferroelectric piezoelectric film and preparation method thereof |
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JPH1187791A (en) * | 1997-09-02 | 1999-03-30 | Seiko Epson Corp | Piezoelectric element, ink jet recording head and manufacture thereof |
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