JP2011091029A5 - - Google Patents
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- Publication number
- JP2011091029A5 JP2011091029A5 JP2010201497A JP2010201497A JP2011091029A5 JP 2011091029 A5 JP2011091029 A5 JP 2011091029A5 JP 2010201497 A JP2010201497 A JP 2010201497A JP 2010201497 A JP2010201497 A JP 2010201497A JP 2011091029 A5 JP2011091029 A5 JP 2011091029A5
- Authority
- JP
- Japan
- Prior art keywords
- conductive element
- contact
- metallic material
- circuit
- less
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/565,127 US8354899B2 (en) | 2009-09-23 | 2009-09-23 | Switch structure and method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2011091029A JP2011091029A (ja) | 2011-05-06 |
| JP2011091029A5 true JP2011091029A5 (https=) | 2013-10-10 |
Family
ID=43303797
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010201497A Pending JP2011091029A (ja) | 2009-09-23 | 2010-09-09 | スイッチ構造及び方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US8354899B2 (https=) |
| EP (1) | EP2315221B1 (https=) |
| JP (1) | JP2011091029A (https=) |
| KR (1) | KR101734547B1 (https=) |
| CN (1) | CN102034648B (https=) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8779886B2 (en) * | 2009-11-30 | 2014-07-15 | General Electric Company | Switch structures |
| KR102236803B1 (ko) * | 2014-06-27 | 2021-04-06 | 인텔 코포레이션 | 정지마찰 보상을 위한 자기 나노기계적 디바이스들 |
| FR3027448B1 (fr) * | 2014-10-21 | 2016-10-28 | Airmems | Commutateur microelectromecanique robuste |
| US9362608B1 (en) | 2014-12-03 | 2016-06-07 | General Electric Company | Multichannel relay assembly with in line MEMS switches |
| US9663347B2 (en) * | 2015-03-02 | 2017-05-30 | General Electric Company | Electromechanical system substrate attachment for reduced thermal deformation |
| FR3034567B1 (fr) | 2015-03-31 | 2017-04-28 | St Microelectronics Rousset | Dispositif metallique a piece(s) mobile(s) ameliore loge dans une cavite de la partie d'interconnexion (" beol ") d'un circuit integre |
| US9466452B1 (en) | 2015-03-31 | 2016-10-11 | Stmicroelectronics, Inc. | Integrated cantilever switch |
| US9845235B2 (en) * | 2015-09-03 | 2017-12-19 | General Electric Company | Refractory seed metal for electroplated MEMS structures |
| KR101885996B1 (ko) * | 2017-04-18 | 2018-08-07 | 국민대학교산학협력단 | 3-d 프린터로 제작되는 mems 칸틸레버 스위치의 제조방법 |
| GB2564434B (en) | 2017-07-10 | 2020-08-26 | Ge Aviat Systems Ltd | Power distribution switch for a power distribution system |
| US20230068451A1 (en) * | 2021-08-30 | 2023-03-02 | Texas Instruments Incorporated | Methods and apparatus to thermally actuate microelectromechanical structures devices |
| DE102022200337A1 (de) * | 2022-01-13 | 2023-07-13 | Robert Bosch Gesellschaft mit beschränkter Haftung | MEMS-Relais |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5258591A (en) * | 1991-10-18 | 1993-11-02 | Westinghouse Electric Corp. | Low inductance cantilever switch |
| JP3612081B2 (ja) * | 1992-01-31 | 2005-01-19 | 株式会社東芝 | 導電コネクタ及び高強度ばね |
| ATE156934T1 (de) * | 1993-02-18 | 1997-08-15 | Siemens Ag | Mikromechanisches relais mit hybridantrieb |
| US6153839A (en) * | 1998-10-22 | 2000-11-28 | Northeastern University | Micromechanical switching devices |
| US7126220B2 (en) * | 2002-03-18 | 2006-10-24 | Nanonexus, Inc. | Miniaturized contact spring |
| US7247035B2 (en) * | 2000-06-20 | 2007-07-24 | Nanonexus, Inc. | Enhanced stress metal spring contactor |
| US20030016417A1 (en) * | 2001-07-17 | 2003-01-23 | Cruise Lee | Wireless pointing and remote-controlling device for briefing |
| US6876047B2 (en) | 2001-11-09 | 2005-04-05 | Turnstone Systems, Inc. | MEMS device having a trilayered beam and related methods |
| US6624003B1 (en) * | 2002-02-06 | 2003-09-23 | Teravicta Technologies, Inc. | Integrated MEMS device and package |
| US6686820B1 (en) * | 2002-07-11 | 2004-02-03 | Intel Corporation | Microelectromechanical (MEMS) switching apparatus |
| AU2002324639A1 (en) * | 2002-08-08 | 2004-02-25 | Xcom Wireless, Inc. | Microfabricated relay with multimorph actuator and electrostatic latch mechanism |
| US6699379B1 (en) * | 2002-11-25 | 2004-03-02 | Industrial Technology Research Institute | Method for reducing stress in nickel-based alloy plating |
| US20040154925A1 (en) * | 2003-02-11 | 2004-08-12 | Podlaha Elizabeth J. | Composite metal and composite metal alloy microstructures |
| JP2005113189A (ja) * | 2003-10-07 | 2005-04-28 | Yoshihiko Yokoyama | ナノ組織化合金 |
| ATE382188T1 (de) * | 2003-10-31 | 2008-01-15 | Nxp Bv | Mikroelektromechanische hochfrequenz-systeme und verfahren zur herstellung solcher systeme |
| JP2005146405A (ja) * | 2003-11-14 | 2005-06-09 | Toru Yamazaki | 電析積層合金薄板とその製造方法 |
| JP4366310B2 (ja) * | 2004-12-24 | 2009-11-18 | シャープ株式会社 | マイクロ接点開閉器および無線通信機器 |
| DK1705676T3 (da) * | 2005-03-21 | 2008-02-18 | Delfmems | RF MEMS omskifter med en fleksibel og fri omskiftermembran |
| US7663456B2 (en) * | 2005-12-15 | 2010-02-16 | General Electric Company | Micro-electromechanical system (MEMS) switch arrays |
| US7872432B2 (en) * | 2006-03-20 | 2011-01-18 | Innovative Micro Technology | MEMS thermal device with slideably engaged tether and method of manufacture |
| US7812703B2 (en) * | 2006-03-23 | 2010-10-12 | Innovative Micro Technology | MEMS device using NiMn alloy and method of manufacture |
| US7688167B2 (en) * | 2006-10-12 | 2010-03-30 | Innovative Micro Technology | Contact electrode for microdevices and etch method of manufacture |
| US8274200B2 (en) * | 2007-11-19 | 2012-09-25 | Xcom Wireless, Inc. | Microfabricated cantilever slider with asymmetric spring constant |
| US7609136B2 (en) * | 2007-12-20 | 2009-10-27 | General Electric Company | MEMS microswitch having a conductive mechanical stop |
-
2009
- 2009-09-23 US US12/565,127 patent/US8354899B2/en active Active
-
2010
- 2010-09-09 JP JP2010201497A patent/JP2011091029A/ja active Pending
- 2010-09-17 KR KR1020100091557A patent/KR101734547B1/ko active Active
- 2010-09-17 EP EP10177345A patent/EP2315221B1/en active Active
- 2010-09-21 CN CN201010500702.8A patent/CN102034648B/zh active Active
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