CN102034648B - 开关装置 - Google Patents

开关装置 Download PDF

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Publication number
CN102034648B
CN102034648B CN201010500702.8A CN201010500702A CN102034648B CN 102034648 B CN102034648 B CN 102034648B CN 201010500702 A CN201010500702 A CN 201010500702A CN 102034648 B CN102034648 B CN 102034648B
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CN
China
Prior art keywords
conducting element
contact
switching devices
devices according
place
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201010500702.8A
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English (en)
Chinese (zh)
Other versions
CN102034648A (zh
Inventor
C·F·凯梅尔
M·F·艾米
S·班萨尔
R·R·科尔德曼
K·V·S·R·基肖尔
E·S·雷迪
A·萨哈
K·苏布拉马尼安
P·萨克尔
A·D·科温
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of CN102034648A publication Critical patent/CN102034648A/zh
Application granted granted Critical
Publication of CN102034648B publication Critical patent/CN102034648B/zh
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0052—Special contact materials used for MEMS
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0084—Switches making use of microelectromechanical systems [MEMS] with perpendicular movement of the movable contact relative to the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H2237/00—Mechanism between key and laykey
    • H01H2237/004—Cantilever
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49105—Switch making

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Contacts (AREA)
CN201010500702.8A 2009-09-23 2010-09-21 开关装置 Active CN102034648B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/565,127 US8354899B2 (en) 2009-09-23 2009-09-23 Switch structure and method
US12/565,127 2009-09-23
US12/565127 2009-09-23

Publications (2)

Publication Number Publication Date
CN102034648A CN102034648A (zh) 2011-04-27
CN102034648B true CN102034648B (zh) 2014-06-25

Family

ID=43303797

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201010500702.8A Active CN102034648B (zh) 2009-09-23 2010-09-21 开关装置

Country Status (5)

Country Link
US (1) US8354899B2 (https=)
EP (1) EP2315221B1 (https=)
JP (1) JP2011091029A (https=)
KR (1) KR101734547B1 (https=)
CN (1) CN102034648B (https=)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8779886B2 (en) * 2009-11-30 2014-07-15 General Electric Company Switch structures
KR102236803B1 (ko) * 2014-06-27 2021-04-06 인텔 코포레이션 정지마찰 보상을 위한 자기 나노기계적 디바이스들
FR3027448B1 (fr) * 2014-10-21 2016-10-28 Airmems Commutateur microelectromecanique robuste
US9362608B1 (en) 2014-12-03 2016-06-07 General Electric Company Multichannel relay assembly with in line MEMS switches
US9663347B2 (en) * 2015-03-02 2017-05-30 General Electric Company Electromechanical system substrate attachment for reduced thermal deformation
FR3034567B1 (fr) 2015-03-31 2017-04-28 St Microelectronics Rousset Dispositif metallique a piece(s) mobile(s) ameliore loge dans une cavite de la partie d'interconnexion (" beol ") d'un circuit integre
US9466452B1 (en) 2015-03-31 2016-10-11 Stmicroelectronics, Inc. Integrated cantilever switch
US9845235B2 (en) * 2015-09-03 2017-12-19 General Electric Company Refractory seed metal for electroplated MEMS structures
KR101885996B1 (ko) * 2017-04-18 2018-08-07 국민대학교산학협력단 3-d 프린터로 제작되는 mems 칸틸레버 스위치의 제조방법
GB2564434B (en) 2017-07-10 2020-08-26 Ge Aviat Systems Ltd Power distribution switch for a power distribution system
US20230068451A1 (en) * 2021-08-30 2023-03-02 Texas Instruments Incorporated Methods and apparatus to thermally actuate microelectromechanical structures devices
DE102022200337A1 (de) * 2022-01-13 2023-07-13 Robert Bosch Gesellschaft mit beschränkter Haftung MEMS-Relais

Citations (9)

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US5258591A (en) * 1991-10-18 1993-11-02 Westinghouse Electric Corp. Low inductance cantilever switch
US6153839A (en) * 1998-10-22 2000-11-28 Northeastern University Micromechanical switching devices
US6624003B1 (en) * 2002-02-06 2003-09-23 Teravicta Technologies, Inc. Integrated MEMS device and package
US6699379B1 (en) * 2002-11-25 2004-03-02 Industrial Technology Research Institute Method for reducing stress in nickel-based alloy plating
US7126220B2 (en) * 2002-03-18 2006-10-24 Nanonexus, Inc. Miniaturized contact spring
CN1875447A (zh) * 2003-10-31 2006-12-06 皇家飞利浦电子股份有限公司 射频微机电系统及其制造方法
US7247035B2 (en) * 2000-06-20 2007-07-24 Nanonexus, Inc. Enhanced stress metal spring contactor
US7393594B2 (en) * 2003-11-14 2008-07-01 Tohru Yamasaki Laminated metal thin plate formed by electrodeposition and method of producing the same
EP2073236A1 (en) * 2007-12-20 2009-06-24 General Electric Company MEMS Microswitch having a conductive mechanical stop

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JP3612081B2 (ja) * 1992-01-31 2005-01-19 株式会社東芝 導電コネクタ及び高強度ばね
ATE156934T1 (de) * 1993-02-18 1997-08-15 Siemens Ag Mikromechanisches relais mit hybridantrieb
US20030016417A1 (en) * 2001-07-17 2003-01-23 Cruise Lee Wireless pointing and remote-controlling device for briefing
US6876047B2 (en) 2001-11-09 2005-04-05 Turnstone Systems, Inc. MEMS device having a trilayered beam and related methods
US6686820B1 (en) * 2002-07-11 2004-02-03 Intel Corporation Microelectromechanical (MEMS) switching apparatus
AU2002324639A1 (en) * 2002-08-08 2004-02-25 Xcom Wireless, Inc. Microfabricated relay with multimorph actuator and electrostatic latch mechanism
US20040154925A1 (en) * 2003-02-11 2004-08-12 Podlaha Elizabeth J. Composite metal and composite metal alloy microstructures
JP2005113189A (ja) * 2003-10-07 2005-04-28 Yoshihiko Yokoyama ナノ組織化合金
JP4366310B2 (ja) * 2004-12-24 2009-11-18 シャープ株式会社 マイクロ接点開閉器および無線通信機器
DK1705676T3 (da) * 2005-03-21 2008-02-18 Delfmems RF MEMS omskifter med en fleksibel og fri omskiftermembran
US7663456B2 (en) * 2005-12-15 2010-02-16 General Electric Company Micro-electromechanical system (MEMS) switch arrays
US7872432B2 (en) * 2006-03-20 2011-01-18 Innovative Micro Technology MEMS thermal device with slideably engaged tether and method of manufacture
US7812703B2 (en) * 2006-03-23 2010-10-12 Innovative Micro Technology MEMS device using NiMn alloy and method of manufacture
US7688167B2 (en) * 2006-10-12 2010-03-30 Innovative Micro Technology Contact electrode for microdevices and etch method of manufacture
US8274200B2 (en) * 2007-11-19 2012-09-25 Xcom Wireless, Inc. Microfabricated cantilever slider with asymmetric spring constant

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5258591A (en) * 1991-10-18 1993-11-02 Westinghouse Electric Corp. Low inductance cantilever switch
US6153839A (en) * 1998-10-22 2000-11-28 Northeastern University Micromechanical switching devices
US7247035B2 (en) * 2000-06-20 2007-07-24 Nanonexus, Inc. Enhanced stress metal spring contactor
US6624003B1 (en) * 2002-02-06 2003-09-23 Teravicta Technologies, Inc. Integrated MEMS device and package
US6809412B1 (en) * 2002-02-06 2004-10-26 Teravictu Technologies Packaging of MEMS devices using a thermoplastic
US7126220B2 (en) * 2002-03-18 2006-10-24 Nanonexus, Inc. Miniaturized contact spring
US6699379B1 (en) * 2002-11-25 2004-03-02 Industrial Technology Research Institute Method for reducing stress in nickel-based alloy plating
CN1875447A (zh) * 2003-10-31 2006-12-06 皇家飞利浦电子股份有限公司 射频微机电系统及其制造方法
US7393594B2 (en) * 2003-11-14 2008-07-01 Tohru Yamasaki Laminated metal thin plate formed by electrodeposition and method of producing the same
EP2073236A1 (en) * 2007-12-20 2009-06-24 General Electric Company MEMS Microswitch having a conductive mechanical stop

Also Published As

Publication number Publication date
US20110067983A1 (en) 2011-03-24
JP2011091029A (ja) 2011-05-06
US8354899B2 (en) 2013-01-15
KR20110033055A (ko) 2011-03-30
EP2315221A1 (en) 2011-04-27
KR101734547B1 (ko) 2017-05-11
CN102034648A (zh) 2011-04-27
EP2315221B1 (en) 2012-11-14

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