JP2011071564A5 - - Google Patents

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Publication number
JP2011071564A5
JP2011071564A5 JP2011004417A JP2011004417A JP2011071564A5 JP 2011071564 A5 JP2011071564 A5 JP 2011071564A5 JP 2011004417 A JP2011004417 A JP 2011004417A JP 2011004417 A JP2011004417 A JP 2011004417A JP 2011071564 A5 JP2011071564 A5 JP 2011071564A5
Authority
JP
Japan
Prior art keywords
flow control
closing
closing speed
valve
speed parameter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011004417A
Other languages
English (en)
Japanese (ja)
Other versions
JP2011071564A (ja
JP5314059B2 (ja
Filing date
Publication date
Priority claimed from US10/779,009 external-priority patent/US7107128B2/en
Application filed filed Critical
Publication of JP2011071564A publication Critical patent/JP2011071564A/ja
Publication of JP2011071564A5 publication Critical patent/JP2011071564A5/ja
Application granted granted Critical
Publication of JP5314059B2 publication Critical patent/JP5314059B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2011004417A 2004-02-13 2011-01-12 流体流れを制御するシステムおよび方法 Expired - Lifetime JP5314059B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/779,009 US7107128B2 (en) 2004-02-13 2004-02-13 System for controlling fluid flow
US10/779,009 2004-02-13

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2006553171A Division JP4729504B2 (ja) 2004-02-13 2005-02-07 流体流れを制御するシステム、コンピュータプログラム製品、及び、方法

Publications (3)

Publication Number Publication Date
JP2011071564A JP2011071564A (ja) 2011-04-07
JP2011071564A5 true JP2011071564A5 (https=) 2013-04-11
JP5314059B2 JP5314059B2 (ja) 2013-10-16

Family

ID=34838286

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2006553171A Expired - Lifetime JP4729504B2 (ja) 2004-02-13 2005-02-07 流体流れを制御するシステム、コンピュータプログラム製品、及び、方法
JP2011004417A Expired - Lifetime JP5314059B2 (ja) 2004-02-13 2011-01-12 流体流れを制御するシステムおよび方法

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2006553171A Expired - Lifetime JP4729504B2 (ja) 2004-02-13 2005-02-07 流体流れを制御するシステム、コンピュータプログラム製品、及び、方法

Country Status (8)

Country Link
US (3) US7107128B2 (https=)
EP (1) EP1725921A2 (https=)
JP (2) JP4729504B2 (https=)
KR (1) KR101162390B1 (https=)
CN (1) CN101160585A (https=)
SG (1) SG135178A1 (https=)
TW (1) TWI399628B (https=)
WO (1) WO2005079235A2 (https=)

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Publication number Priority date Publication date Assignee Title
FR2837945B1 (fr) * 2002-03-28 2005-04-08 Celec Conception Electronique Gamme de produits configurables a l'installation, outil de configuration et procede de configuration de tels produits
US7107128B2 (en) * 2004-02-13 2006-09-12 Entegris, Inc. System for controlling fluid flow
EP1779073A4 (en) * 2004-08-13 2008-05-07 Entegris Inc SYSTEM AND METHOD FOR CALIBRATING A FLOW APPARATUS
US7172096B2 (en) * 2004-11-15 2007-02-06 Advanced Technology Materials, Inc. Liquid dispensing system
EP1958039B9 (en) 2005-12-02 2011-09-07 Entegris, Inc. I/o systems, methods and devices for interfacing a pump controller
US7517469B2 (en) * 2006-04-28 2009-04-14 Sokudo Co., Ltd. Method and system to measure flow velocity and volume
US8265794B2 (en) * 2007-10-01 2012-09-11 Westlock Controls Corporation Knowledge based valve control method
US8108056B2 (en) * 2007-11-13 2012-01-31 Rockwell Automation Technologies, Inc. Industrial controller using shared memory multicore architecture
DE102009032547A1 (de) * 2009-07-10 2011-01-13 Krones Ag Verfahren zur automatisierten Steuerung eines Rohrleitungsnetzes
SG186381A1 (en) 2010-06-18 2013-01-30 Advanced Tech Materials Endpoint determination for capillary-assisted flow control
DE102010039296B4 (de) * 2010-08-13 2020-06-10 Robert Bosch Gmbh Vorrichtung und Verfahren zur Erzeugung eines Steuersignals
WO2012109320A1 (en) * 2011-02-08 2012-08-16 The University Of Utah Research Foundation System and method for dispensing a minimum quantity of cutting fluid
US9506785B2 (en) 2013-03-15 2016-11-29 Rain Bird Corporation Remote flow rate measuring
EP3191751B1 (en) * 2014-09-09 2020-11-04 Proteus Industries Inc. Systems and methods for coolant drawback
JP6415418B2 (ja) * 2015-11-27 2018-10-31 株式会社アドヴィックス 流体制御弁装置
KR101817212B1 (ko) 2016-04-29 2018-02-21 세메스 주식회사 처리액 분사 유닛 및 기판 처리 장치
US10634538B2 (en) 2016-07-13 2020-04-28 Rain Bird Corporation Flow sensor
US10719089B2 (en) * 2017-05-18 2020-07-21 Fisher Controls International Llc Apparatus and methods to characterize fluid control valves
US10473494B2 (en) 2017-10-24 2019-11-12 Rain Bird Corporation Flow sensor
EP3814284B1 (en) 2018-08-29 2025-06-04 MKS Instruments, Inc. Ozonated water delivery system and method of use
US11662242B2 (en) 2018-12-31 2023-05-30 Rain Bird Corporation Flow sensor gauge
US11415230B2 (en) * 2020-03-31 2022-08-16 Applied Material, Inc. Slit valve pneumatic control
KR20220121306A (ko) * 2021-02-24 2022-09-01 삼성디스플레이 주식회사 커버 윈도우, 커버 윈도우의 제조방법, 및 표시 장치
US12443208B2 (en) 2023-02-08 2025-10-14 Rain Bird Corporation Control zone devices, systems and methods

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10274016A (ja) * 1997-03-28 1998-10-13 Fuji Heavy Ind Ltd 電磁式動弁制御装置
JPH1133471A (ja) * 1997-07-23 1999-02-09 Tokyo Electron Ltd 塗布装置
JP3997535B2 (ja) * 1998-08-31 2007-10-24 Ｓｍｃ株式会社 サックバックバルブ
JP3493322B2 (ja) * 1998-09-25 2004-02-03 Ｓｍｃ株式会社 液だれ防止方法およびシステム
JP2002535122A (ja) * 1999-01-20 2002-10-22 マイクロリス・コーポレーション 流れコントローラ
US20010035512A1 (en) * 2000-04-07 2001-11-01 Messer Jeffrey M. Environmentally friendly electro-pneumatic positioner
AU2002254405A1 (en) * 2001-03-29 2002-10-15 Applied Precision, Llc Precision controlled fast valve
TW483047B (en) * 2001-04-20 2002-04-11 Winbond Electronics Corp Liquid spraying method capable of preventing residual liquid drops
WO2004007931A2 (en) * 2002-07-11 2004-01-22 Sturman Industries, Inc. Hydraulic valve actuation methods and apparatus
US6973375B2 (en) * 2004-02-12 2005-12-06 Mykrolis Corporation System and method for flow monitoring and control
US7107128B2 (en) * 2004-02-13 2006-09-12 Entegris, Inc. System for controlling fluid flow

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