CN101160585A - 控制流体流的系统及方法 - Google Patents

控制流体流的系统及方法 Download PDF

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Publication number
CN101160585A
CN101160585A CNA2005800046269A CN200580004626A CN101160585A CN 101160585 A CN101160585 A CN 101160585A CN A2005800046269 A CNA2005800046269 A CN A2005800046269A CN 200580004626 A CN200580004626 A CN 200580004626A CN 101160585 A CN101160585 A CN 101160585A
Authority
CN
China
Prior art keywords
fluid
valve
rate parameter
closing
close rate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2005800046269A
Other languages
English (en)
Chinese (zh)
Inventor
马尔考·拉维迪尔里
罗伯特·F·麦克罗克林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris Inc
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of CN101160585A publication Critical patent/CN101160585A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D11/00—Control of flow ratio
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0448—Apparatus for applying a liquid, a resin, an ink or the like
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0971—Speed responsive valve control
    • Y10T137/0989—Acceleration responsive valve control

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
  • Coating Apparatus (AREA)
CNA2005800046269A 2004-02-13 2005-02-07 控制流体流的系统及方法 Pending CN101160585A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/779,009 US7107128B2 (en) 2004-02-13 2004-02-13 System for controlling fluid flow
US10/779,009 2004-02-13

Publications (1)

Publication Number Publication Date
CN101160585A true CN101160585A (zh) 2008-04-09

Family

ID=34838286

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2005800046269A Pending CN101160585A (zh) 2004-02-13 2005-02-07 控制流体流的系统及方法

Country Status (8)

Country Link
US (3) US7107128B2 (https=)
EP (1) EP1725921A2 (https=)
JP (2) JP4729504B2 (https=)
KR (1) KR101162390B1 (https=)
CN (1) CN101160585A (https=)
SG (1) SG135178A1 (https=)
TW (1) TWI399628B (https=)
WO (1) WO2005079235A2 (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102498326A (zh) * 2009-07-10 2012-06-13 克朗斯股份公司 管道网络的自动控制方法
CN105047591A (zh) * 2010-06-18 2015-11-11 恩特格里斯公司 用于流体供应容器的终点监测和控制装置及流体供应装置
CN108291561A (zh) * 2015-11-27 2018-07-17 株式会社爱德克斯 流体控制阀装置

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* Cited by examiner, † Cited by third party
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FR2837945B1 (fr) * 2002-03-28 2005-04-08 Celec Conception Electronique Gamme de produits configurables a l'installation, outil de configuration et procede de configuration de tels produits
US7107128B2 (en) * 2004-02-13 2006-09-12 Entegris, Inc. System for controlling fluid flow
EP1779073A4 (en) * 2004-08-13 2008-05-07 Entegris Inc SYSTEM AND METHOD FOR CALIBRATING A FLOW APPARATUS
US7172096B2 (en) * 2004-11-15 2007-02-06 Advanced Technology Materials, Inc. Liquid dispensing system
EP1958039B9 (en) 2005-12-02 2011-09-07 Entegris, Inc. I/o systems, methods and devices for interfacing a pump controller
US7517469B2 (en) * 2006-04-28 2009-04-14 Sokudo Co., Ltd. Method and system to measure flow velocity and volume
US8265794B2 (en) * 2007-10-01 2012-09-11 Westlock Controls Corporation Knowledge based valve control method
US8108056B2 (en) * 2007-11-13 2012-01-31 Rockwell Automation Technologies, Inc. Industrial controller using shared memory multicore architecture
DE102010039296B4 (de) * 2010-08-13 2020-06-10 Robert Bosch Gmbh Vorrichtung und Verfahren zur Erzeugung eines Steuersignals
WO2012109320A1 (en) * 2011-02-08 2012-08-16 The University Of Utah Research Foundation System and method for dispensing a minimum quantity of cutting fluid
US9506785B2 (en) 2013-03-15 2016-11-29 Rain Bird Corporation Remote flow rate measuring
EP3191751B1 (en) * 2014-09-09 2020-11-04 Proteus Industries Inc. Systems and methods for coolant drawback
KR101817212B1 (ko) 2016-04-29 2018-02-21 세메스 주식회사 처리액 분사 유닛 및 기판 처리 장치
US10634538B2 (en) 2016-07-13 2020-04-28 Rain Bird Corporation Flow sensor
US10719089B2 (en) * 2017-05-18 2020-07-21 Fisher Controls International Llc Apparatus and methods to characterize fluid control valves
US10473494B2 (en) 2017-10-24 2019-11-12 Rain Bird Corporation Flow sensor
EP3814284B1 (en) 2018-08-29 2025-06-04 MKS Instruments, Inc. Ozonated water delivery system and method of use
US11662242B2 (en) 2018-12-31 2023-05-30 Rain Bird Corporation Flow sensor gauge
US11415230B2 (en) * 2020-03-31 2022-08-16 Applied Material, Inc. Slit valve pneumatic control
KR20220121306A (ko) * 2021-02-24 2022-09-01 삼성디스플레이 주식회사 커버 윈도우, 커버 윈도우의 제조방법, 및 표시 장치
US12443208B2 (en) 2023-02-08 2025-10-14 Rain Bird Corporation Control zone devices, systems and methods

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10274016A (ja) * 1997-03-28 1998-10-13 Fuji Heavy Ind Ltd 電磁式動弁制御装置
JPH1133471A (ja) * 1997-07-23 1999-02-09 Tokyo Electron Ltd 塗布装置
JP3997535B2 (ja) * 1998-08-31 2007-10-24 Ｓｍｃ株式会社 サックバックバルブ
JP3493322B2 (ja) * 1998-09-25 2004-02-03 Ｓｍｃ株式会社 液だれ防止方法およびシステム
JP2002535122A (ja) * 1999-01-20 2002-10-22 マイクロリス・コーポレーション 流れコントローラ
US20010035512A1 (en) * 2000-04-07 2001-11-01 Messer Jeffrey M. Environmentally friendly electro-pneumatic positioner
AU2002254405A1 (en) * 2001-03-29 2002-10-15 Applied Precision, Llc Precision controlled fast valve
TW483047B (en) * 2001-04-20 2002-04-11 Winbond Electronics Corp Liquid spraying method capable of preventing residual liquid drops
WO2004007931A2 (en) * 2002-07-11 2004-01-22 Sturman Industries, Inc. Hydraulic valve actuation methods and apparatus
US6973375B2 (en) * 2004-02-12 2005-12-06 Mykrolis Corporation System and method for flow monitoring and control
US7107128B2 (en) * 2004-02-13 2006-09-12 Entegris, Inc. System for controlling fluid flow

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102498326A (zh) * 2009-07-10 2012-06-13 克朗斯股份公司 管道网络的自动控制方法
CN102498326B (zh) * 2009-07-10 2014-02-26 克朗斯股份公司 管道网络的自动控制方法
CN105047591A (zh) * 2010-06-18 2015-11-11 恩特格里斯公司 用于流体供应容器的终点监测和控制装置及流体供应装置
CN105047591B (zh) * 2010-06-18 2018-02-13 恩特格里斯公司 用于流体供应容器的终点监测和控制装置及流体供应装置
CN108291561A (zh) * 2015-11-27 2018-07-17 株式会社爱德克斯 流体控制阀装置

Also Published As

Publication number Publication date
US20050182525A1 (en) 2005-08-18
US7317971B2 (en) 2008-01-08
WO2005079235A2 (en) 2005-09-01
US20060276935A1 (en) 2006-12-07
WO2005079235A3 (en) 2007-04-05
US7107128B2 (en) 2006-09-12
JP2011071564A (ja) 2011-04-07
JP4729504B2 (ja) 2011-07-20
EP1725921A2 (en) 2006-11-29
KR20060127122A (ko) 2006-12-11
US8082066B2 (en) 2011-12-20
JP5314059B2 (ja) 2013-10-16
SG135178A1 (en) 2007-09-28
KR101162390B1 (ko) 2012-07-04
TW200540591A (en) 2005-12-16
JP2007525837A (ja) 2007-09-06
US20080071425A1 (en) 2008-03-20
TWI399628B (zh) 2013-06-21

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C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication

Open date: 20080409