TWI399628B - 用以調節流體流量之系統與電腦程式及用以結束分配程序之方法 - Google Patents

用以調節流體流量之系統與電腦程式及用以結束分配程序之方法 Download PDF

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Publication number
TWI399628B
TWI399628B TW94104062A TW94104062A TWI399628B TW I399628 B TWI399628 B TW I399628B TW 94104062 A TW94104062 A TW 94104062A TW 94104062 A TW94104062 A TW 94104062A TW I399628 B TWI399628 B TW I399628B
Authority
TW
Taiwan
Prior art keywords
fluid
valve
control signal
rate
control valve
Prior art date
Application number
TW94104062A
Other languages
English (en)
Chinese (zh)
Other versions
TW200540591A (en
Inventor
拉文戴瑞 馬克
麥克勞林 羅伯特Ｆ
Original Assignee
恩特葛瑞斯公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 恩特葛瑞斯公司 filed Critical 恩特葛瑞斯公司
Publication of TW200540591A publication Critical patent/TW200540591A/zh
Application granted granted Critical
Publication of TWI399628B publication Critical patent/TWI399628B/zh

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Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D11/00—Control of flow ratio
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0448—Apparatus for applying a liquid, a resin, an ink or the like
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0971—Speed responsive valve control
    • Y10T137/0989—Acceleration responsive valve control

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
  • Coating Apparatus (AREA)
TW94104062A 2004-02-13 2005-02-05 用以調節流體流量之系統與電腦程式及用以結束分配程序之方法 TWI399628B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/779,009 US7107128B2 (en) 2004-02-13 2004-02-13 System for controlling fluid flow

Publications (2)

Publication Number Publication Date
TW200540591A TW200540591A (en) 2005-12-16
TWI399628B true TWI399628B (zh) 2013-06-21

Family

ID=34838286

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94104062A TWI399628B (zh) 2004-02-13 2005-02-05 用以調節流體流量之系統與電腦程式及用以結束分配程序之方法

Country Status (8)

Country Link
US (3) US7107128B2 (https=)
EP (1) EP1725921A2 (https=)
JP (2) JP4729504B2 (https=)
KR (1) KR101162390B1 (https=)
CN (1) CN101160585A (https=)
SG (1) SG135178A1 (https=)
TW (1) TWI399628B (https=)
WO (1) WO2005079235A2 (https=)

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FR2837945B1 (fr) * 2002-03-28 2005-04-08 Celec Conception Electronique Gamme de produits configurables a l'installation, outil de configuration et procede de configuration de tels produits
US7107128B2 (en) * 2004-02-13 2006-09-12 Entegris, Inc. System for controlling fluid flow
EP1779073A4 (en) * 2004-08-13 2008-05-07 Entegris Inc SYSTEM AND METHOD FOR CALIBRATING A FLOW APPARATUS
US7172096B2 (en) * 2004-11-15 2007-02-06 Advanced Technology Materials, Inc. Liquid dispensing system
EP1958039B9 (en) 2005-12-02 2011-09-07 Entegris, Inc. I/o systems, methods and devices for interfacing a pump controller
US7517469B2 (en) * 2006-04-28 2009-04-14 Sokudo Co., Ltd. Method and system to measure flow velocity and volume
US8265794B2 (en) * 2007-10-01 2012-09-11 Westlock Controls Corporation Knowledge based valve control method
US8108056B2 (en) * 2007-11-13 2012-01-31 Rockwell Automation Technologies, Inc. Industrial controller using shared memory multicore architecture
DE102009032547A1 (de) * 2009-07-10 2011-01-13 Krones Ag Verfahren zur automatisierten Steuerung eines Rohrleitungsnetzes
SG186381A1 (en) 2010-06-18 2013-01-30 Advanced Tech Materials Endpoint determination for capillary-assisted flow control
DE102010039296B4 (de) * 2010-08-13 2020-06-10 Robert Bosch Gmbh Vorrichtung und Verfahren zur Erzeugung eines Steuersignals
WO2012109320A1 (en) * 2011-02-08 2012-08-16 The University Of Utah Research Foundation System and method for dispensing a minimum quantity of cutting fluid
US9506785B2 (en) 2013-03-15 2016-11-29 Rain Bird Corporation Remote flow rate measuring
EP3191751B1 (en) * 2014-09-09 2020-11-04 Proteus Industries Inc. Systems and methods for coolant drawback
JP6415418B2 (ja) * 2015-11-27 2018-10-31 株式会社アドヴィックス 流体制御弁装置
KR101817212B1 (ko) 2016-04-29 2018-02-21 세메스 주식회사 처리액 분사 유닛 및 기판 처리 장치
US10634538B2 (en) 2016-07-13 2020-04-28 Rain Bird Corporation Flow sensor
US10719089B2 (en) * 2017-05-18 2020-07-21 Fisher Controls International Llc Apparatus and methods to characterize fluid control valves
US10473494B2 (en) 2017-10-24 2019-11-12 Rain Bird Corporation Flow sensor
EP3814284B1 (en) 2018-08-29 2025-06-04 MKS Instruments, Inc. Ozonated water delivery system and method of use
US11662242B2 (en) 2018-12-31 2023-05-30 Rain Bird Corporation Flow sensor gauge
US11415230B2 (en) * 2020-03-31 2022-08-16 Applied Material, Inc. Slit valve pneumatic control
KR20220121306A (ko) * 2021-02-24 2022-09-01 삼성디스플레이 주식회사 커버 윈도우, 커버 윈도우의 제조방법, 및 표시 장치
US12443208B2 (en) 2023-02-08 2025-10-14 Rain Bird Corporation Control zone devices, systems and methods

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5964192A (en) * 1997-03-28 1999-10-12 Fuji Jukogyo Kabushiki Kaisha Electromagnetically operated valve control system and the method thereof
US6176438B1 (en) * 1998-08-31 2001-01-23 Smc Kabushiki Kaisha Suck back valve having sensor for detecting diaphragm displacement amount
US6200100B1 (en) * 1998-09-25 2001-03-13 Smc Kabushiki Kaisha Method and system for preventing incontinent liquid drip
US20010035512A1 (en) * 2000-04-07 2001-11-01 Messer Jeffrey M. Environmentally friendly electro-pneumatic positioner
US6348098B1 (en) * 1999-01-20 2002-02-19 Mykrolis Corporation Flow controller

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JPH1133471A (ja) * 1997-07-23 1999-02-09 Tokyo Electron Ltd 塗布装置
AU2002254405A1 (en) * 2001-03-29 2002-10-15 Applied Precision, Llc Precision controlled fast valve
TW483047B (en) * 2001-04-20 2002-04-11 Winbond Electronics Corp Liquid spraying method capable of preventing residual liquid drops
WO2004007931A2 (en) * 2002-07-11 2004-01-22 Sturman Industries, Inc. Hydraulic valve actuation methods and apparatus
US6973375B2 (en) * 2004-02-12 2005-12-06 Mykrolis Corporation System and method for flow monitoring and control
US7107128B2 (en) * 2004-02-13 2006-09-12 Entegris, Inc. System for controlling fluid flow

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5964192A (en) * 1997-03-28 1999-10-12 Fuji Jukogyo Kabushiki Kaisha Electromagnetically operated valve control system and the method thereof
US6176438B1 (en) * 1998-08-31 2001-01-23 Smc Kabushiki Kaisha Suck back valve having sensor for detecting diaphragm displacement amount
US6200100B1 (en) * 1998-09-25 2001-03-13 Smc Kabushiki Kaisha Method and system for preventing incontinent liquid drip
US6348098B1 (en) * 1999-01-20 2002-02-19 Mykrolis Corporation Flow controller
US20010035512A1 (en) * 2000-04-07 2001-11-01 Messer Jeffrey M. Environmentally friendly electro-pneumatic positioner

Also Published As

Publication number Publication date
US20050182525A1 (en) 2005-08-18
US7317971B2 (en) 2008-01-08
WO2005079235A2 (en) 2005-09-01
US20060276935A1 (en) 2006-12-07
WO2005079235A3 (en) 2007-04-05
CN101160585A (zh) 2008-04-09
US7107128B2 (en) 2006-09-12
JP2011071564A (ja) 2011-04-07
JP4729504B2 (ja) 2011-07-20
EP1725921A2 (en) 2006-11-29
KR20060127122A (ko) 2006-12-11
US8082066B2 (en) 2011-12-20
JP5314059B2 (ja) 2013-10-16
SG135178A1 (en) 2007-09-28
KR101162390B1 (ko) 2012-07-04
TW200540591A (en) 2005-12-16
JP2007525837A (ja) 2007-09-06
US20080071425A1 (en) 2008-03-20

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