JP2009527674A5 - - Google Patents

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Publication number
JP2009527674A5
JP2009527674A5 JP2008543355A JP2008543355A JP2009527674A5 JP 2009527674 A5 JP2009527674 A5 JP 2009527674A5 JP 2008543355 A JP2008543355 A JP 2008543355A JP 2008543355 A JP2008543355 A JP 2008543355A JP 2009527674 A5 JP2009527674 A5 JP 2009527674A5
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JP
Japan
Prior art keywords
volume
chamber
diaphragm
pressure
distribution chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2008543355A
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English (en)
Japanese (ja)
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JP5355091B2 (ja
JP2009527674A (ja
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Publication date
Application filed filed Critical
Priority claimed from PCT/US2006/045176 external-priority patent/WO2007067359A2/en
Publication of JP2009527674A publication Critical patent/JP2009527674A/ja
Publication of JP2009527674A5 publication Critical patent/JP2009527674A5/ja
Application granted granted Critical
Publication of JP5355091B2 publication Critical patent/JP5355091B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2008543355A 2005-12-02 2006-11-20 モータを用いて圧力変動を補正するためのシステムおよび方法 Expired - Fee Related JP5355091B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US74168105P 2005-12-02 2005-12-02
US60/741,681 2005-12-02
PCT/US2006/045176 WO2007067359A2 (en) 2005-12-02 2006-11-20 System and method for correcting for pressure variations using a motor

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2012085238A Division JP5524269B2 (ja) 2005-12-02 2012-04-04 モータを用いて圧力変動を補正するためのシステムおよび方法

Publications (3)

Publication Number Publication Date
JP2009527674A JP2009527674A (ja) 2009-07-30
JP2009527674A5 true JP2009527674A5 (https=) 2010-03-11
JP5355091B2 JP5355091B2 (ja) 2013-11-27

Family

ID=38123375

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2008543355A Expired - Fee Related JP5355091B2 (ja) 2005-12-02 2006-11-20 モータを用いて圧力変動を補正するためのシステムおよび方法
JP2012085238A Expired - Fee Related JP5524269B2 (ja) 2005-12-02 2012-04-04 モータを用いて圧力変動を補正するためのシステムおよび方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2012085238A Expired - Fee Related JP5524269B2 (ja) 2005-12-02 2012-04-04 モータを用いて圧力変動を補正するためのシステムおよび方法

Country Status (5)

Country Link
JP (2) JP5355091B2 (https=)
KR (1) KR101243524B1 (https=)
CN (2) CN102705213A (https=)
TW (1) TWI443482B (https=)
WO (1) WO2007067359A2 (https=)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8172546B2 (en) 1998-11-23 2012-05-08 Entegris, Inc. System and method for correcting for pressure variations using a motor
KR101231945B1 (ko) 2004-11-23 2013-02-08 엔테그리스, 아이엔씨. 가변 홈 위치 토출 장치용 시스템 및 방법
KR101281210B1 (ko) 2005-12-02 2013-07-02 엔테그리스, 아이엔씨. 펌프에서의 밸브 시퀀싱 시스템 및 방법
US7878765B2 (en) 2005-12-02 2011-02-01 Entegris, Inc. System and method for monitoring operation of a pump
US8083498B2 (en) 2005-12-02 2011-12-27 Entegris, Inc. System and method for position control of a mechanical piston in a pump
CN102705209B (zh) 2005-12-02 2015-09-30 恩特格里公司 用于泵中压力补偿的系统和方法
EP1958039B9 (en) 2005-12-02 2011-09-07 Entegris, Inc. I/o systems, methods and devices for interfacing a pump controller
KR101308175B1 (ko) 2005-12-05 2013-09-26 엔테그리스, 아이엔씨. 분배 체적의 오차 보상 방법, 다단계 펌프, 및 시스템 컴플라이언스 보상 방법
TWI402423B (zh) 2006-02-28 2013-07-21 Entegris Inc 用於一幫浦操作之系統及方法
US7494265B2 (en) 2006-03-01 2009-02-24 Entegris, Inc. System and method for controlled mixing of fluids via temperature
DE602007004546D1 (de) 2006-09-28 2010-03-18 Tyco Healthcare Tragbares Wundtherapiesystem
GB0723855D0 (en) 2007-12-06 2008-01-16 Smith & Nephew Apparatus and method for wound volume measurement
US8684705B2 (en) 2010-02-26 2014-04-01 Entegris, Inc. Method and system for controlling operation of a pump based on filter information in a filter information tag
CN102959683B (zh) * 2010-06-28 2016-04-06 恩特格里公司 具有智能控制器的可定制分发系统
GB201015656D0 (en) 2010-09-20 2010-10-27 Smith & Nephew Pressure control apparatus
TWI563351B (en) * 2010-10-20 2016-12-21 Entegris Inc Method and system for pump priming
US9084845B2 (en) 2011-11-02 2015-07-21 Smith & Nephew Plc Reduced pressure therapy apparatuses and methods of using same
US9427505B2 (en) 2012-05-15 2016-08-30 Smith & Nephew Plc Negative pressure wound therapy apparatus
TWI670417B (zh) * 2014-05-28 2019-09-01 Entegris, Inc. 活塞總成及泵抽系統
SG11201704255WA (en) 2014-12-22 2017-07-28 Smith & Nephew Negative pressure wound therapy apparatus and methods
JP7336194B2 (ja) * 2016-04-19 2023-08-31 クリアモーション，インコーポレイテッド 能動液圧リップル消去方法およびシステム
CN118140050A (zh) 2021-11-11 2024-06-04 旭灿纳克株式会社 液体喷射装置

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JPS5573563A (en) * 1978-11-29 1980-06-03 Ricoh Co Ltd Ink feed pump of ink jet printer
JPS63255575A (ja) * 1987-04-10 1988-10-21 Yoshimoto Seisakusho:Kk ポンプ装置
JPH04167916A (ja) * 1990-10-30 1992-06-16 Sumitomo Metal Ind Ltd スプレー用給水圧力制御装置
JP3822362B2 (ja) * 1998-07-10 2006-09-20 株式会社スギノマシン 液体加圧装置
US7029238B1 (en) * 1998-11-23 2006-04-18 Mykrolis Corporation Pump controller for precision pumping apparatus
EP1133639B1 (en) * 1998-11-23 2004-06-09 Mykrolis Corporation Pump controller for precision pumping apparatus
US6330517B1 (en) * 1999-09-17 2001-12-11 Rosemount Inc. Interface for managing process
KR100754342B1 (ko) * 1999-10-18 2007-09-03 인터그레이티드 디자인즈 엘.피. 유체 분배 방법 및 장치
JP4531328B2 (ja) * 2002-05-31 2010-08-25 株式会社タクミナ 定量搬送装置
JP3792624B2 (ja) * 2002-08-08 2006-07-05 核燃料サイクル開発機構 粗大結晶粒組織を有する高温クリープ強度に優れたフェライト系酸化物分散強化型鋼の製造方法
JP3861060B2 (ja) * 2003-01-31 2006-12-20 日機装株式会社 無脈動ポンプ
US7878765B2 (en) * 2005-12-02 2011-02-01 Entegris, Inc. System and method for monitoring operation of a pump
US7850431B2 (en) * 2005-12-02 2010-12-14 Entegris, Inc. System and method for control of fluid pressure
US7443483B2 (en) * 2006-08-11 2008-10-28 Entegris, Inc. Systems and methods for fluid flow control in an immersion lithography system
JP5059821B2 (ja) * 2009-08-28 2012-10-31 ルネサスエレクトロニクス株式会社 光ディスク装置

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