CN102705213A - 使用电机校正压力变化的系统和方法 - Google Patents

使用电机校正压力变化的系统和方法 Download PDF

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Publication number
CN102705213A
CN102705213A CN2012101516051A CN201210151605A CN102705213A CN 102705213 A CN102705213 A CN 102705213A CN 2012101516051 A CN2012101516051 A CN 2012101516051A CN 201210151605 A CN201210151605 A CN 201210151605A CN 102705213 A CN102705213 A CN 102705213A
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CN
China
Prior art keywords
pressure
valve
pump
motor
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2012101516051A
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English (en)
Chinese (zh)
Inventor
G·贡内拉
J·切德罗内
R·A·扎格尔斯
R·F·麦克洛克林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris Inc
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Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of CN102705213A publication Critical patent/CN102705213A/zh
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B13/00—Pumps specially modified to deliver fixed or variable measured quantities
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/08—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having peristaltic action
    • F04B45/10—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having peristaltic action having plate-like flexible members

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Jet Pumps And Other Pumps (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
CN2012101516051A 2005-12-02 2006-11-20 使用电机校正压力变化的系统和方法 Pending CN102705213A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US74168105P 2005-12-02 2005-12-02
US60/741,681 2005-12-02

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN2006800450740A Division CN101495756B (zh) 2005-12-02 2006-11-20 使用电机校正压力变化的系统和方法

Publications (1)

Publication Number Publication Date
CN102705213A true CN102705213A (zh) 2012-10-03

Family

ID=38123375

Family Applications (2)

Application Number Title Priority Date Filing Date
CN2012101516051A Pending CN102705213A (zh) 2005-12-02 2006-11-20 使用电机校正压力变化的系统和方法
CN2006800450740A Expired - Fee Related CN101495756B (zh) 2005-12-02 2006-11-20 使用电机校正压力变化的系统和方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN2006800450740A Expired - Fee Related CN101495756B (zh) 2005-12-02 2006-11-20 使用电机校正压力变化的系统和方法

Country Status (5)

Country Link
JP (2) JP5355091B2 (https=)
KR (1) KR101243524B1 (https=)
CN (2) CN102705213A (https=)
TW (1) TWI443482B (https=)
WO (1) WO2007067359A2 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103133331A (zh) * 2006-11-30 2013-06-05 恩特格里公司 用于在半导体制造过程中监测泵的操作的计算机系统

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US8172546B2 (en) 1998-11-23 2012-05-08 Entegris, Inc. System and method for correcting for pressure variations using a motor
KR101231945B1 (ko) 2004-11-23 2013-02-08 엔테그리스, 아이엔씨. 가변 홈 위치 토출 장치용 시스템 및 방법
KR101281210B1 (ko) 2005-12-02 2013-07-02 엔테그리스, 아이엔씨. 펌프에서의 밸브 시퀀싱 시스템 및 방법
US7878765B2 (en) 2005-12-02 2011-02-01 Entegris, Inc. System and method for monitoring operation of a pump
US8083498B2 (en) 2005-12-02 2011-12-27 Entegris, Inc. System and method for position control of a mechanical piston in a pump
CN102705209B (zh) 2005-12-02 2015-09-30 恩特格里公司 用于泵中压力补偿的系统和方法
EP1958039B9 (en) 2005-12-02 2011-09-07 Entegris, Inc. I/o systems, methods and devices for interfacing a pump controller
KR101308175B1 (ko) 2005-12-05 2013-09-26 엔테그리스, 아이엔씨. 분배 체적의 오차 보상 방법, 다단계 펌프, 및 시스템 컴플라이언스 보상 방법
US7494265B2 (en) 2006-03-01 2009-02-24 Entegris, Inc. System and method for controlled mixing of fluids via temperature
DE602007004546D1 (de) 2006-09-28 2010-03-18 Tyco Healthcare Tragbares Wundtherapiesystem
GB0723855D0 (en) 2007-12-06 2008-01-16 Smith & Nephew Apparatus and method for wound volume measurement
US8684705B2 (en) 2010-02-26 2014-04-01 Entegris, Inc. Method and system for controlling operation of a pump based on filter information in a filter information tag
CN102959683B (zh) * 2010-06-28 2016-04-06 恩特格里公司 具有智能控制器的可定制分发系统
GB201015656D0 (en) 2010-09-20 2010-10-27 Smith & Nephew Pressure control apparatus
TWI563351B (en) * 2010-10-20 2016-12-21 Entegris Inc Method and system for pump priming
US9084845B2 (en) 2011-11-02 2015-07-21 Smith & Nephew Plc Reduced pressure therapy apparatuses and methods of using same
US9427505B2 (en) 2012-05-15 2016-08-30 Smith & Nephew Plc Negative pressure wound therapy apparatus
TWI670417B (zh) * 2014-05-28 2019-09-01 Entegris, Inc. 活塞總成及泵抽系統
SG11201704255WA (en) 2014-12-22 2017-07-28 Smith & Nephew Negative pressure wound therapy apparatus and methods
JP7336194B2 (ja) * 2016-04-19 2023-08-31 クリアモーション，インコーポレイテッド 能動液圧リップル消去方法およびシステム
CN118140050A (zh) 2021-11-11 2024-06-04 旭灿纳克株式会社 液体喷射装置

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US4131393A (en) * 1977-01-21 1978-12-26 Altex Scientific, Inc. Fluid pump mechanism
JPS5573563A (en) * 1978-11-29 1980-06-03 Ricoh Co Ltd Ink feed pump of ink jet printer
JPS63255575A (ja) * 1987-04-10 1988-10-21 Yoshimoto Seisakusho:Kk ポンプ装置
JPH04167916A (ja) * 1990-10-30 1992-06-16 Sumitomo Metal Ind Ltd スプレー用給水圧力制御装置
JP3822362B2 (ja) * 1998-07-10 2006-09-20 株式会社スギノマシン 液体加圧装置
US7029238B1 (en) * 1998-11-23 2006-04-18 Mykrolis Corporation Pump controller for precision pumping apparatus
EP1133639B1 (en) * 1998-11-23 2004-06-09 Mykrolis Corporation Pump controller for precision pumping apparatus
US6330517B1 (en) * 1999-09-17 2001-12-11 Rosemount Inc. Interface for managing process
KR100754342B1 (ko) * 1999-10-18 2007-09-03 인터그레이티드 디자인즈 엘.피. 유체 분배 방법 및 장치
JP4531328B2 (ja) * 2002-05-31 2010-08-25 株式会社タクミナ 定量搬送装置
JP3792624B2 (ja) * 2002-08-08 2006-07-05 核燃料サイクル開発機構 粗大結晶粒組織を有する高温クリープ強度に優れたフェライト系酸化物分散強化型鋼の製造方法
JP3861060B2 (ja) * 2003-01-31 2006-12-20 日機装株式会社 無脈動ポンプ
US7878765B2 (en) * 2005-12-02 2011-02-01 Entegris, Inc. System and method for monitoring operation of a pump
US7850431B2 (en) * 2005-12-02 2010-12-14 Entegris, Inc. System and method for control of fluid pressure
US7443483B2 (en) * 2006-08-11 2008-10-28 Entegris, Inc. Systems and methods for fluid flow control in an immersion lithography system
JP5059821B2 (ja) * 2009-08-28 2012-10-31 ルネサスエレクトロニクス株式会社 光ディスク装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103133331A (zh) * 2006-11-30 2013-06-05 恩特格里公司 用于在半导体制造过程中监测泵的操作的计算机系统
CN103133331B (zh) * 2006-11-30 2015-11-18 恩特格里公司 用于在半导体制造过程中监测泵的操作的计算机系统

Also Published As

Publication number Publication date
JP5524269B2 (ja) 2014-06-18
KR20080071582A (ko) 2008-08-04
JP5355091B2 (ja) 2013-11-27
KR101243524B1 (ko) 2013-03-20
JP2012154337A (ja) 2012-08-16
CN101495756B (zh) 2012-07-04
TW200732872A (en) 2007-09-01
WO2007067359A2 (en) 2007-06-14
JP2009527674A (ja) 2009-07-30
TWI443482B (zh) 2014-07-01
WO2007067359A3 (en) 2009-04-23
CN101495756A (zh) 2009-07-29

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Application publication date: 20121003