WO2007067359A3 - System and method for correcting for pressure variations using a motor - Google Patents

System and method for correcting for pressure variations using a motor Download PDF

Info

Publication number
WO2007067359A3
WO2007067359A3 PCT/US2006/045176 US2006045176W WO2007067359A3 WO 2007067359 A3 WO2007067359 A3 WO 2007067359A3 US 2006045176 W US2006045176 W US 2006045176W WO 2007067359 A3 WO2007067359 A3 WO 2007067359A3
Authority
WO
WIPO (PCT)
Prior art keywords
chamber
compensate
motor
correcting
pressure increase
Prior art date
Application number
PCT/US2006/045176
Other languages
French (fr)
Other versions
WO2007067359A2 (en
Inventor
George Gonnella
James Cedrone
Raymond A Zagers
Robert F Mcloughlin
Original Assignee
Entegris Inc
George Gonnella
James Cedrone
Raymond A Zagers
Robert F Mcloughlin
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc, George Gonnella, James Cedrone, Raymond A Zagers, Robert F Mcloughlin filed Critical Entegris Inc
Priority to CN2006800450740A priority Critical patent/CN101495756B/en
Priority to JP2008543355A priority patent/JP5355091B2/en
Priority to KR1020087013119A priority patent/KR101243524B1/en
Publication of WO2007067359A2 publication Critical patent/WO2007067359A2/en
Publication of WO2007067359A3 publication Critical patent/WO2007067359A3/en

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B13/00Pumps specially modified to deliver fixed or variable measured quantities
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/08Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having peristaltic action
    • F04B45/10Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having peristaltic action having plate-like flexible members

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Jet Pumps And Other Pumps (AREA)

Abstract

Systems and methods for compensating for pressure increase which may occur in various enclosed spaces of a pumping apparatus are disclosed. Embodiments of the present invention may compensate for pressure increases in chambers of a pumping apparatus by moving a pumping means of the pumping apparatus to adjust the volume of the chamber to compensate for a pressure increase in the chamber. More specifically, in one embodiment, to account for unwanted pressure increases to the fluid in a dispense chamber the dispense motor may be reversed to back out piston to compensate for any pressure increase in the dispense chamber.
PCT/US2006/045176 2005-12-02 2006-11-20 System and method for correcting for pressure variations using a motor WO2007067359A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN2006800450740A CN101495756B (en) 2005-12-02 2006-11-20 System and method for correcting for pressure variations using a motor
JP2008543355A JP5355091B2 (en) 2005-12-02 2006-11-20 System and method for correcting pressure fluctuations using a motor
KR1020087013119A KR101243524B1 (en) 2005-12-02 2006-11-20 System and method for correcting for pressure variations using a motor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US74168105P 2005-12-02 2005-12-02
US60/741,681 2005-12-02

Publications (2)

Publication Number Publication Date
WO2007067359A2 WO2007067359A2 (en) 2007-06-14
WO2007067359A3 true WO2007067359A3 (en) 2009-04-23

Family

ID=38123375

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/045176 WO2007067359A2 (en) 2005-12-02 2006-11-20 System and method for correcting for pressure variations using a motor

Country Status (5)

Country Link
JP (2) JP5355091B2 (en)
KR (1) KR101243524B1 (en)
CN (2) CN101495756B (en)
TW (1) TWI443482B (en)
WO (1) WO2007067359A2 (en)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8172546B2 (en) 1998-11-23 2012-05-08 Entegris, Inc. System and method for correcting for pressure variations using a motor
KR101212824B1 (en) 2004-11-23 2012-12-14 엔테그리스, 아이엔씨. System and method for a variable home position dispense system
US7878765B2 (en) 2005-12-02 2011-02-01 Entegris, Inc. System and method for monitoring operation of a pump
KR101364385B1 (en) 2005-12-02 2014-02-17 엔테그리스, 아이엔씨. I/o systems, methods and devices for interfacing a pump controller
KR101243509B1 (en) 2005-12-02 2013-03-20 엔테그리스, 아이엔씨. System and method for pressure compensation in a pump
CN101356715B (en) 2005-12-02 2012-07-18 恩特格里公司 System and method for valve sequencing in a pump
US8083498B2 (en) 2005-12-02 2011-12-27 Entegris, Inc. System and method for position control of a mechanical piston in a pump
US7897196B2 (en) 2005-12-05 2011-03-01 Entegris, Inc. Error volume system and method for a pump
TWI402423B (en) 2006-02-28 2013-07-21 Entegris Inc System and method for operation of a pump
US7494265B2 (en) 2006-03-01 2009-02-24 Entegris, Inc. System and method for controlled mixing of fluids via temperature
CA2872297C (en) 2006-09-28 2016-10-11 Smith & Nephew, Inc. Portable wound therapy system
US8684705B2 (en) * 2010-02-26 2014-04-01 Entegris, Inc. Method and system for controlling operation of a pump based on filter information in a filter information tag
TW201613018A (en) * 2010-06-28 2016-04-01 Entegris Inc Customizable dispense system with smart controller
GB201015656D0 (en) 2010-09-20 2010-10-27 Smith & Nephew Pressure control apparatus
TWI563351B (en) * 2010-10-20 2016-12-21 Entegris Inc Method and system for pump priming
US9084845B2 (en) 2011-11-02 2015-07-21 Smith & Nephew Plc Reduced pressure therapy apparatuses and methods of using same
US9427505B2 (en) 2012-05-15 2016-08-30 Smith & Nephew Plc Negative pressure wound therapy apparatus
JP6644712B2 (en) * 2014-05-28 2020-02-12 インテグリス・インコーポレーテッド System and method for operation of a pump with supply and dispense sensors, filtration and dispense confirmation, and vacuum priming of a filter
JP6725527B2 (en) 2014-12-22 2020-07-22 スミス アンド ネフュー ピーエルシーSmith & Nephew Public Limited Company Device and method for negative pressure wound therapy
US10954935B2 (en) 2016-04-19 2021-03-23 ClearMotion, Inc. Active hydraulic ripple cancellation methods and systems
JPWO2023084687A1 (en) 2021-11-11 2023-05-19

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6330517B1 (en) * 1999-09-17 2001-12-11 Rosemount Inc. Interface for managing process
US6478547B1 (en) * 1999-10-18 2002-11-12 Integrated Designs L.P. Method and apparatus for dispensing fluids

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4131393A (en) * 1977-01-21 1978-12-26 Altex Scientific, Inc. Fluid pump mechanism
JPS5573563A (en) * 1978-11-29 1980-06-03 Ricoh Co Ltd Ink feed pump of ink jet printer
JPS63255575A (en) * 1987-04-10 1988-10-21 Yoshimoto Seisakusho:Kk Pump device
JPH04167916A (en) * 1990-10-30 1992-06-16 Sumitomo Metal Ind Ltd Device for controlling pressure of feeding water for spraying
JP3822362B2 (en) * 1998-07-10 2006-09-20 株式会社スギノマシン Liquid pressurizer
DE69917927T2 (en) * 1998-11-23 2005-06-23 Mykrolis Corp., Billerica PUMP CONTROL UNIT FOR HIGH PRECISION DOSING PUMP
US7029238B1 (en) * 1998-11-23 2006-04-18 Mykrolis Corporation Pump controller for precision pumping apparatus
JP4531328B2 (en) * 2002-05-31 2010-08-25 株式会社タクミナ Fixed quantity transfer device
JP3792624B2 (en) * 2002-08-08 2006-07-05 核燃料サイクル開発機構 Method for producing ferritic oxide dispersion strengthened steel with coarse grain structure and excellent high temperature creep strength
JP3861060B2 (en) * 2003-01-31 2006-12-20 日機装株式会社 Non-pulsating pump
US7878765B2 (en) * 2005-12-02 2011-02-01 Entegris, Inc. System and method for monitoring operation of a pump
US7850431B2 (en) * 2005-12-02 2010-12-14 Entegris, Inc. System and method for control of fluid pressure
US7443483B2 (en) * 2006-08-11 2008-10-28 Entegris, Inc. Systems and methods for fluid flow control in an immersion lithography system
JP5059821B2 (en) * 2009-08-28 2012-10-31 ルネサスエレクトロニクス株式会社 Optical disk device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6330517B1 (en) * 1999-09-17 2001-12-11 Rosemount Inc. Interface for managing process
US6478547B1 (en) * 1999-10-18 2002-11-12 Integrated Designs L.P. Method and apparatus for dispensing fluids

Also Published As

Publication number Publication date
CN101495756B (en) 2012-07-04
TWI443482B (en) 2014-07-01
JP5355091B2 (en) 2013-11-27
KR101243524B1 (en) 2013-03-20
TW200732872A (en) 2007-09-01
CN101495756A (en) 2009-07-29
WO2007067359A2 (en) 2007-06-14
JP2009527674A (en) 2009-07-30
KR20080071582A (en) 2008-08-04
JP5524269B2 (en) 2014-06-18
JP2012154337A (en) 2012-08-16
CN102705213A (en) 2012-10-03

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