KR20080071582A - System and method for correcting for pressure variations using a motor - Google Patents

Abstract

Systems and methods for compensating for pressure increase which may occur in various enclosed spaces of a pumping apparatus are disclosed. Embodiments of the present invention may compensate for pressure increases in chambers of a pumping apparatus by moving a pumping means of the pumping apparatus to adjust the volume of the chamber to compensate for a pressure increase in the chamber. More specifically, in one embodiment, to account for unwanted pressure increases to the fluid in a dispense chamber the dispense motor may be reversed to back out piston to compensate for any pressure increase in the dispense chamber.

Description

Pressure fluctuation correction system and correction method using a motor

Related Applications

The present application is entitled "System and Method for Correcting for Pressure Variations Using a Motor," and the inventors found Cornell George, Kedron James, Jagers Raymond and McLaughlin Robert. And claims priority of US Provisional Patent Application No. 60 / 741,681, filed December 2, 2005, the entire contents of which provisions are hereby expressly incorporated herein by reference. This application is a part of US patent application Ser. No. 11 / 051,576, entitled "Pump Controller for Precision Pumping Apparatus," and filed February 4, 2005 by J. Raymond A. et al. And a US patent application entitled "Pump Controller for Precision Pumping Apparatus" and the inventor of which is J.S. et al. Filed November 23, 1999 No. 09 / 447,604, which is filed in US Patent Application No. 09 / 447,604, also discloses 35 USC. Claims priority to provisional patent application No. 60 / 109,568, filed November 23, 1998, under §119, the entire contents of which are hereby expressly incorporated herein by reference.

The present invention generally relates to a fluid pump. More specifically, embodiments of the present invention relate to multi-stage pumps. More specifically, embodiments of the present invention relate to compensation for pressure fluctuations caused by the operation of components in pumps used in semiconductor manufacturing.

There are many applications where precise control of the flow rate and / or velocity of the fluid dispensed by the pumping device is required. In semiconductor processes, for example, it is important to control the flow rate and speed of photochemicals such as photoresist chemicals applied to semiconductor wafers. Coatings applied to semiconductor wafers during processing generally require flatness, measured in angstroms, across the surface of the wafer. To ensure that the processing liquid is applied uniformly, the rate at which the processing chemical is applied to the wafer must be controlled.

Many photochemicals used in the semiconductor industry today are very expensive and usually cost around $ 1000 a liter. Thus, it is desirable to ensure that a minimum and appropriate amount of chemical is used and that the chemical is not damaged by the pumping device. Current multistage pumps can cause sudden pressure spikes in liquids. For example, negative pressure spikes can promote gas evolution and bubble formation in chemicals, which can cause defects in wafer coating. Similarly, positive pressure spikes can cause premature polymer crosslinking, which can also result in coating defects.

As can be appreciated, this pressure spike and subsequent pressure drops can damage the fluid (ie, change the physical properties of the fluid poorly). In addition, the pressure spike may cause an increase in the fluid pressure which may allow the dispensing pump to dispense more than the intended amount or to dispense the fluid in a manner with poor dynamics.

More specifically, when the valve is closed to form a confined space in the pumping device, the closing of such a valve may cause the pressure rise in the aforementioned closed space. This pressure rise can be particularly detrimental if it occurs in a dispensing chamber that contains a fluid waiting to be dispensed. Therefore, there is a need for a method of correcting the pressure rise resulting from the operation of the valve in the pumping device.

Disclosed are a system and method for correcting for pressure rise (or pressure drop) that can occur in various confined spaces of a pumping device. Embodiments of the present invention can compensate for pressure rise (or pressure drop) in a chamber of a pumping device by moving pumping means of the pumping device to adjust the volume of the chamber to compensate for pressure rise (or pressure drop) in the chamber. have. More specifically, in one embodiment, to cope with undesired pressure rises to the fluid in the dispensing chamber, the dispensing motor may be reversed to retract the piston to compensate for any pressure rise in the dispensing chamber.

One embodiment of the present invention provides a correction system and correction method for pressure perturbation that substantially eliminates or reduces the disadvantages of previously developed pumping systems and methods. More specifically, embodiments of the present invention provide a system and method for correcting pressure fluctuations in a distribution chamber caused by the operation of a multistage pump or various instruments or components embedded in equipment used in connection with the multistage pump. do.

One embodiment of the present invention may correct for a pressure change in the dispensing chamber caused by closing the purge valve prior to commencement of the dispensing interval. This correction is achieved by rotating the dispensing motor so that the volume of the dispensing chamber substantially increases by the hold-up volume of the purge valve.

Another embodiment of the present invention ensures that the final operation of the dispensing motor is done in the forward direction by rotating the dispensing motor by an additional distance and operating the dispensing motor forward to the same distance as this additional distance before the dispensing interval.

Embodiments of the present invention may provide technical advantages such that the desired reference pressure for dispensing in the dispensing chamber is achieved prior to the dispensing interval.

Another embodiment of the present invention may provide the ability to correct for differences in equipment used in conjunction with multistage pumps, such as head pressure differences between systems.

Certain embodiments of the present invention provide the advantage that the backlash has little effect on dispensing by coping with any backlash that may occur in the drive assembly of the dispensing motor.

These or other aspects of the invention are better appreciated and understood by consideration of the following description and the accompanying drawings. The following description sets forth various aspects and numerous specific details of the invention, but is given as a means of explanation rather than limitation. Numerous substitutions, modifications, additions, or rearrangements may be made within the scope of the invention, and the invention includes all such substitutions, modifications, additions, or rearrangements.

1 is a schematic diagram of one embodiment of a pumping system.

2 is a schematic diagram of a multiple stage pump ("multiple stage pump") in accordance with one embodiment of the present invention.

3A, 3B, 4A, 4C and 4D are schematic diagrams of various embodiments of a multistage pump.

4B is a schematic diagram of one embodiment of a distribution block.

5 is a schematic diagram of valve and motor timing for one embodiment of the present invention.

6 is an exemplary pressure profile of an embodiment of an operating sequence used with a pump.

7 is an exemplary pressure profile of a portion of an embodiment of an operating sequence used with a pump.

8A and 8B are schematic diagrams of one embodiment of valve and motor timing for various operating sections of a pump.

9A and 9B are schematic diagrams of one embodiment of valve and motor timing for various operating sections of a pump.

10A and 10B are exemplary pressure profiles of a portion of an embodiment of an operating sequence used with a pump.

11 is a schematic diagram of one embodiment of a pumping system.

A more complete understanding of the invention and its advantages can be achieved by referring to the following description in conjunction with the accompanying drawings, in which like features are designated by like reference numerals.

Preferred embodiments of the invention are shown in the drawings wherein like reference numerals are used for like and corresponding parts in the various figures.

Embodiments of the present invention relate to a pumping system for accurately dispensing fluid using a pump, which may be a single stage pump or a multistage pump ("multistage pump"). More specifically, embodiments of the present invention can compensate for pressure rise (or pressure drop) that may occur in various confined spaces of the pumping device. Embodiments of the present invention may correct pressure variations in the chamber of the pumping apparatus by moving the pumping means of the pumping apparatus to adjust the volume of the chamber to correct the pressure variation. More specifically, in one embodiment, to cope with undesired pressure rises to the fluid in the dispensing chamber, the dispensing motor may be reversed to retract the piston to compensate for any pressure rise in the dispensing chamber. An embodiment of such a pumping system is named "System and Method for Multi-Stage Pump with Reduced Form Factor," and inventors Kedron James, Cornella George And US Provisional Patent Application No. 60 / 742,435, filed December 5, 2005, the disclosure of which is incorporated herein by reference in its entirety.

1 is a schematic diagram of one embodiment of such a pumping system 10. Pumping system 10 may include a fluid source 15, a pump controller 20, and a multistage pump 100, which work together to dispense fluid to the wafer 25. The operation of the multistage pump 100 may be controlled by the pump controller 20, which may be embedded in the multistage pump 100, or one or more communication links for communication of control signals, data, or other information. It is connected to the multistage pump 100 via a communication link. In addition, the function of the pump controller 20 may be distributed to the embedded controller and other controllers. The pump controller 20 is a computer readable medium 27 (e.g., RAM, ROM, flash memory, optical disk, etc.) equipped with a predetermined set of control instructions 30 for controlling the operation of the multistage pump 100. Magnetic drive, or other computer-readable media). The processor 35 (eg, CPU, ASIC, RISC, DSP, or other processor) may perform these instructions. An example of a processor is Texas Instruments' TMS320F2812PGFA 16-bit DSP (Texas, Inc. is based in Dallas, Texas). In the embodiment of FIG. 1, the controller 20 communicates with the multistage pump 100 via communication links 40 and 45. The communication links 40 and 45 may be networks (eg, Ethernet, wireless networks, global area networks, DeviceNet networks, or other networks known or developed in the art) or other communication links. The controller 20 may be implemented as an embedded PCB board, remote controller, or in other suitable manner. The pump controller 20 may include suitable interfaces (eg, network interfaces, I / O interfaces, analog to digital converters, and other components) to the controller to communicate with the multistage pump 100. In addition, the pump controller 20 may include various computer components known in the art, including processors, memory, interfaces, display devices, peripherals, or other computer components that are not presented for simplicity. The pump controller 20 may control various valves and motors in the multistage pump to allow the multistage pump to accurately dispense fluid, including low viscosity (ie less than 100 centipose), or other fluids. U.S. Patent Application No. 60 / 741,657, entitled "I / O Interface System and Method for a Pump," filed December 2, 2005 by Kedron et al. The invention is titled "I / O Systems, Methods and Devices for Interfacing a Pump Controller," and is filed on November 20, 2006. I / O interface connectors as described in 11 / 602,449 [ENTG1810-1] can be used to connect pump controller 20 to various interfaces and manufacturing tools, both of which are incorporated herein by reference. It is completely included.

2 is a schematic diagram of a multistage pump 100. The multistage pump 100 includes a feed end portion 105 and a separate dispense end portion 110. A filter 120 for filtering impurities from the process solution is located between feed end portion 105 and distribution end portion 110 in terms of fluid flow. The multiple valves include, for example, a multistage including an inlet valve 125, an isolation valve 130, a barrier valve 135, a purge valve 140, an exhaust valve 145, and an outlet valve 147. Fluid flow through the pump 100 may be controlled. The dispensing end portion 110 may further include a pressure sensor 112 that measures the pressure of the fluid at the dispensing end 110. The pressure measured by the pressure sensor 112 can be used to control the speed of the various pumps as described below. Exemplary pressure sensors include capacitive pressure sensors and capacitive pressure sensors made of ceramic and polymer, including pressure sensors manufactured by Metallux AG, Korf, Germany. According to one embodiment, the front side of the pressure sensor 112 in contact with the process solution is a perfluoropolymer. The pump 100 may include an additional pressure sensor, such as a pressure sensor that reads the pressure in the supply chamber 155.

Supply stage 105 and distribution stage 110 may include a rolling diaphram pump to pump fluid in multistage pump 100. For example, feed stage pump 150 (“feed pump 150”) includes supply chamber 155 for collecting fluid, supply stage diaphragm 160 for moving fluid while moving within supply chamber 155, and supply stage diaphragm. Piston 165, lead screw 170, and stepper motor 175 to move 160. Lead screw 170 is coupled to stepper motor 175 via a nut, gear, or other mechanism for transferring energy from the motor to lead screw 170. According to one embodiment, the feed motor 175 then rotates the nut that rotates the lead screw 170, which causes the piston 165 to actuate. Dispense stage pump 180 ("dispensing pump 180") similarly includes dispensing chamber 185, dispensing stage diaphragm 190, piston 192, lead screw 195 and dispensing motor 200. can do. Dispense motor 200 may drive lead screw 195 through a threaded nut (eg, a Tolon or other material nut).

According to another embodiment, feed stage 105 and distribution stage 110 may be a variety of other pumps, including pneumatically actuated pumps or hydraulically actuated pumps, hydraulic pumps, or other pumps. One example of a multistage pump using a pneumatically actuated pump and a stepper motor driven hydraulic pump for the feed stage is described in US patent application Ser. No. 11 / 051,576. However, the use of motors at both the supply and distribution stages offers advantages in the absence of hydraulic piping, control systems and fluids, thereby saving space and reducing the possibility of leakage.

Supply motor 175 and distribution motor 200 may be any suitable motor. According to one embodiment, the dispensing motor 200 is a permanent magnet synchronous motor (“PMSM”). The PMSM can be a field-oriented control (“FOC”) or other type known in the art in a motor 200, a controller-integrated multistage pump 100, or a separate pump controller (eg, as shown in FIG. 1). It can be controlled by a digital signal processor ("DSP") using position / speed control. The PMSM 200 may further include an encoder (eg, a sophisticated line rotation position encoder) for real-time feedback of the position of the distribution motor 200. Position sensors are used for accurate and repeatable control of the position of the piston 192, thereby allowing accurate and repeatable control of fluid movement in the dispensing chamber 185. For example, according to one embodiment, using a 2000 line encoder that provides 8000 pulses to the DSP allows accurate measurement and control when rotating by 0.045 degrees. In addition, PMSM can operate at a slow speed with little or no vibration. Supply motor 175 may also be a PMSM or stepper motor. It should also be noted that the feed pump may include a home sensor that indicates when the feed pump is in place.

3A is a schematic diagram of one embodiment of a pump assembly for a multistage pump 100. The multistage pump 100 may include a distribution block 205 that defines various fluid flow paths through the multistage pump 100 and at least partially defines the supply chamber 155 and the distribution chamber 185. According to one embodiment, the dispense pump block 205 may be a single block of PTFE, modified PTFE, or other material. Because these materials do not or minimally react with a large number of process solutions, the use of these materials enables the machining of flow passages and pump chambers directly within the distribution block 205 with a minimum of additional hardware. . The distribution block 205 consequently reduces the need for piping by providing an integrated fluid manifold.

The dispensing block 205 includes, for example, an inlet 210 through which the fluid received passes, an exhaust outlet 215 for exhausting the fluid during the exhaust section, and a distribution outlet 220 through which the fluid dispensed during the distribution section passes. Various external inlets and outlets may be included. In the example of FIG. 3A, the distribution block 205 does not include an external purge outlet because purged fluid is returned to the supply chamber (as shown in FIGS. 4A and 4B). However, in another embodiment of the present invention, the fluid may be purged outward. United States Provisional Patent, filed December 2, 2005 by the Initiator, entitled “O-Ring-Less Low Profile Fitting and Assembly Thereof”. Application 60 / 741,667 describes an embodiment of an accessory that can be used to connect the outer inlet and outlet of distribution block 205 to a fluid conduit, which is incorporated herein by reference in its entirety.

Dispense block 205 moves fluid to feed pump, dispense pump, and filter 120. The piston housing 227 may protect the piston 165 and the piston 192, the pump cover 225 may protect the supply motor 175 and the dispensing motor 200 from damage, and According to one embodiment it is formed of polyethylene or another polymer. The valve plate 230 is a valve system (eg, inlet valve 125, isolation valve 130, barrier valve 135) that can be configured to direct fluid flow to various components of multistage pump 100. ), A purge valve 140 and an exhaust valve 145. According to one embodiment, the inlet valve 125, the isolation valve 130, the barrier valve 135, the purge valve 140 and the exhaust valve 145 are each at least partially integrated into the valve plate 230 and correspondingly. The diaphragm valve is opened or closed depending on whether pressure or vacuum is applied to the diaphragm. In other embodiments, some of the valves may be external to the distribution block 205 or may be disposed in additional valve plates. According to one embodiment, a sheet of PTFE is inserted between the valve plate 230 and the distribution block 205 to form diaphragms of the various valves. The valve plate 230 includes a valve control inlet that allows each valve to apply pressure or vacuum to the corresponding diaphragm. For example, inlet 235 corresponds to barrier valve 135, inlet 240 corresponds to purge valve 140, inlet 245 corresponds to isolation valve 130, and inlet 250. Corresponds to exhaust valve 145, and inlet 255 corresponds to inlet valve 125 (outlet valve 147 is external in this case). By selectively applying pressure or vacuum to this inlet, the corresponding valve is opened and closed.

The valve control gas and vacuum are supplied from the valve control manifold (in the area under the top cover 263 or the housing cover 225) to the valve control supply line through the distribution block 205 to the valve plate 230. 260 is provided to the valve plate 230 via the medium. The valve control gas supply inlet 265 provides compressed gas to the valve control manifold, and the vacuum inlet 270 provides a vacuum (or low pressure) to the valve control manifold. The valve control manifold acts as a 3-way valve to compress the gas or vacuum compressed into the appropriate inlet of the valve plate 230 via the supply line 260 to actuate the corresponding valve (s). To be delivered. US Patent Application No. 11 / 602,457 [ENTG1770-1], entitled “Fixed Volume Valve System” and filed November 20, 2006, by Gashge et al., Incorporated by reference in its entirety. Included herein, and in the U.S. patent application, a valve plate as described in one embodiment may be used, which reduces the hold up volume of the valve, eliminates volume fluctuations caused by vacuum perturbation, and requires vacuum Reduces the conditions and reduces the stress on the valve diaphragm.

3B is a schematic diagram of another embodiment of a multistage pump 100. Many of the features shown in FIG. 3B are similar to the features previously described with FIG. 3A. However, the embodiment of FIG. 3B includes several features that prevent fluid drips from entering the housing electronics region of the multistage pump 100. Fluid droplets may occur, for example, when the operator connects or detaches the tube from the inlet 210, the outlet 215, or the exhaust 220. The “drip proof” feature is configured to prevent droplets of potentially harmful chemicals from entering the pump, especially the electronics chamber, and requires that the pump be “waterproof” (eg, submersible in the fluid without leaking). I do not. According to another embodiment, the pump may be completely sealed.

According to one embodiment, the distribution block 205 may include a vertically protruding flange or lip 272 projecting outward from the edge of the distribution block 205 which meets the top cover 263. According to one embodiment, on the upper edge, the top of the top cover 263 is flush with the top surface of the lip 272. This allows the droplets near the upper boundary of the distribution block 205 and the top cover 263 to tend to flow over the distribution block 205 rather than through the boundary. However, the top cover 263 is flush with the base of the lip 272 at the side, or otherwise offset inward from the outer surface of the lip 272. This allows the droplets to tend to flow down along the corners formed by the top cover 263 and the lips 272 rather than between the top cover 263 and the distribution block 205. In addition, a rubber seal is located between the top edge of the top cover 263 and the back plate 271 to prevent the droplets from leaking between the top cover 263 and the back plate 271.

Dispensing block 205 may also include an inclined feature 273 that includes an inclined surface formed in the distribution block 205, which is inclined away from the area of the housing electronics of the pump 100. It is sloped down. As a result, the droplets near the top of the distribution block 205 move away from the electronic equipment. In addition, the pump cover 225 may also be offset slightly inward from the outer edge of the distribution block 205, so that the drop down along the side of the pump 100 is different from that of the pump cover 225 and the pump 100. It tends to flow past the boundary of the part.

According to one embodiment of the invention, each time the metal cover is adjacent to the distribution block 205, the vertical surface of the metal cover is slightly inward (eg, 1/64 inch) from the corresponding vertical surface of the distribution block 205. Or 0.396875 millimeters). In addition, the multistage pump 100 may include seals, sloped features, and other features to prevent drops from entering the housing electronics portion of the multistage pump 100. Also, as shown in FIG. 4A described below, the back plate 271 may include features for an additional “drip resistant” multistage pump 100.

4A is a schematic diagram of one embodiment of a multistage pump 100 having a dispensing block 205 made transparent to view a fluid flow path formed through the dispensing block. The distribution block 205 defines various chambers and fluid flow chambers for the multistage pump 100. According to one embodiment, the supply chamber 155 and the distribution chamber 185 may be machined directly to the distribution block 205. In addition, various flow passages may be machined into the distribution block 205. Fluid flow passage 275 (shown in FIG. 5C) extends from inlet 210 to inlet valve. The fluid flow passage 280 extends from the inlet valve to the supply chamber 155 to complete the path from the inlet 210 to the feed pump 150. Inlet valve 125 in valve housing 230 regulates the flow between inlet 210 and feed pump 150. Flow passage 285 moves fluid from feed pump 150 to isolation valve 130 in valve plate 230. The discharge of the isolation valve 130 is moved to the filter 120 by another flow passage (not shown). Fluid flows from the filter 120 through a flow passage connecting the filter 120 to the exhaust valve 145 and the barrier valve 135. The discharge of the exhaust valve 145 is moved to the exhaust outlet 215, while the discharge of the barrier valve 135 is moved to the distribution pump 180 through the flow passage 290. The dispensing pump may discharge fluid to the outlet 220 through the flow passage 295 during the dispensing section, or to the purge valve through the flow passage 300 during the purge section. Fluid may return to the supply pump through flow passage 305 during the purge interval. Since the fluid flow passage can be formed directly in the PTFE block (or block of other material), the distribution block 205 can act as a piping for the process liquid between the various components of the multistage pump 100, which is an additional Eliminate or reduce the need for piping. In other cases, tubing can be inserted into the distribution block 205 to form a fluid flow passage. 4B is a schematic diagram of a distribution block 205 made transparent to view several flow passages within the distribution block according to one embodiment.

Returning to FIG. 4A, FIG. 4A also shows a multistage pump 100 with the top cover 263 and pump cover 225 removed to view the feed pump 150, which is a feed stage pump. 150, dispensing pump 180, dispensing motor 200, and valve control manifold 302. According to one embodiment of the invention, a portion of the feed pump 150, the dispense pump 180 and the valve plate 230 are inserted into a corresponding hole in the distribution block 205 (eg, a metal). Bar) to connect to distribution block 205. Each bar may include one or more threads that are threaded to receive a screw. By way of example, the dispensing motor 200 and the piston housing 227 may be mounted to the dispensing block 205 via one or more screws (eg, screws 275 and screws 280), the screws dispensing. It extends through the threaded hole in block 205 and threaded to the corresponding hole in bar 285. It should be noted that this mechanism for coupling components to distribution block 205 is presented by way of example and any suitable attachment mechanism may be used.

According to one embodiment of the invention, the back plate 271 may include an inwardly extending tab (eg, bracket 274) on which the top cover 263 and the pump cover 225 are mounted. Because top cover 263 and pump cover 225 overlap bracket 274 (eg, at the lower and rear edges of top cover 263 and at the upper and rear edges of pump cover 225). , Flow of the drop into the electronics region between any space between the bottom edge of the top cover 263 and the top edge of the pump cover 225, or at the rear edge of the top cover 263 and the pump cover 225. This is avoided.

According to one embodiment of the invention, the manifold 302 may optionally include a set of solenoid valves to allow pressure / vacuum to be applied to the valve plate 230. As a result, when there is a special solenoid which causes a vacuum or pressure to be applied to the valve, the solenoid generates heat depending on the implementation. According to one embodiment, the manifold 302 is mounted below the distribution block 205, in particular below the PCB board (mounted on the rear plate 271 and better shown in FIG. 4C) away from the distribution chamber 185. . Manifold 302 may be mounted to a bracket, which may then be mounted to rear plate 271 or otherwise coupled to rear plate 271. This helps to prevent heat from the solenoid in the manifold 302 from affecting the fluid in the distribution block 205. The back plate 271 may be made of stainless steel, machined aluminum or other material capable of dissipating heat from the manifold 302 and the PCB board. In other words, the back plate 271 can act as a heat dissipation bracket for the manifold 302 and the PCB board. The pump 100 may be further mounted to a surface or other structure where heat may be conducted by the back plate 271. Thus, the back plate 271 and the structure to which the back plate is attached act as a heat sink for the electronics of the manifold 302 and the pump 100.

4C is a schematic diagram of a multi-stage pump 100 showing supply line 260 for applying pressure or vacuum to valve plate 230. As described in conjunction with FIG. 3, the valves in the valve plate 230 may be configured to allow fluid to flow to various components of the multistage pump 100. The operation of the valve is controlled by a valve control manifold 302 that allows pressure or vacuum to be applied to each supply line 260. Each supply line 260 may include an accessory with a small orifice (an exemplary accessory is labeled 318 ). The diameter of this orifice may be smaller than the diameter of the corresponding supply line 260, to which the fitting 318 is attached. In one embodiment, the diameter of the orifice may be about 0.010 inches. Thus, the orifice of accessory 318 may serve to set constraints on supply line 260. The orifice in each supply line 260 helps to mitigate the effect of the sudden pressure difference between the pressure on the supply line and the application of vacuum, thereby smoothing the transition intervals while applying pressure and vacuum to the valve. can do. In other words, the orifice helps to reduce the effect of pressure changes on the diaphragm of the downstream valve. This allows the valve to open and close more smoothly and slower, thereby allowing more gentle pressure transitions in the system to be caused by opening and closing the valve, which in turn increases the life of the valve itself. Can be extended.

4C also shows a PCB board 397 to which the manifold 302 can be coupled. According to one embodiment of the present invention, the manifold 302 receives a signal from the PCB board 397 to allow the solenoid to be opened / closed to vacuum the various supply lines 260 that control the valve of the multistage pump 100. Pressure may be applied. In addition, as shown in FIG. 4C, the manifold 302 may be located distal to the PCB board 397 from the distribution block 205 to reduce the effect of heat on the fluid in the distribution block 205. . In addition, heat generating components can be located on the side of the PCB board away from the distribution block 205, thus reducing the effects of heat, to the extent practicable based on the PCB structure and space constraints. Heat from manifold 302 and PCB board 397 may be dissipated by back plate 271. On the other hand, FIG. 4D is a schematic diagram of an embodiment of a pump 100 in which a manifold 302 is mounted directly to the distribution block 205.

It may now be useful to describe the operation of the multistage pump 100. During operation of the multistage pump 100, opening or closing the valve of the multistage pump 100 allows or inhibits fluid flow to various portions of the multistage pump 100. According to one embodiment, these valves may be pneumatically actuated (ie gas driven) diaphragm valves that open or close depending on whether pressure or vacuum is applied. However, in other embodiments of the present invention, any suitable valve may be used.

The following provides a summary of the various stages of operation of the multistage pump 100. However, the multi-stage pump 100 may be controlled according to various control techniques for performing a sequence of valves and controlling pressure, which control method is called "system for controlling fluid flow in an immersion lithography system and "Systems and Methods for Fluid Flow Control in an Immersion Lithography System" and described in US Patent Application No. 11 / 502,729 filed August 11, 2006 by Clark Michael, McLaughlin Robert F., and Laverdie Marc. Methods, including, but not limited to, the respective methods described in the above-mentioned US patent application, the entire contents of which are incorporated herein by reference. According to an embodiment, the multistage pump 100 may include a preparation section, a distribution section, a charging section, a preliminary filtration section, a filtration section, an exhaust section, a purge section, and a static purge section. During the supply section, the inlet valve 125 is open and the feed end pump 150 moves (eg, pushes) the feed end diaphragm 160 to allow fluid to enter the supply chamber 155. Once a sufficient amount of fluid fills the supply chamber 155, the inlet valve 125 is closed. During the filtration section, feed stage pump 150 moves supply stage diaphragm 160 to move fluid from supply chamber 155. The isolation valve 130 and the barrier valve 135 are opened to allow fluid to flow through the filter 120 to the distribution chamber 185. According to one embodiment, the isolation valve 130 may be opened preferentially (eg, in the "preliminary filtration section") to allow the pressure to rise in the filter 120, after which the barrier valve 135 is opened Allow fluid to flow into the dispensing chamber 185. According to another embodiment, the isolation valve 130 and the barrier valve 135 can both be opened and operate the feed pump to raise the pressure on the dispensing side of the filter. During the filtration section, the dispensing pump 180 may be moved to its original position. US Provisional Patent Application No. 60 / filed entitled "System and Method for a Variable Home Position Dispense System" and filed by Roverdee et al. On 23 November 2004. No. 630,384 and the invention entitled "System and Method for a Variable Home Position Dispense System" and filed by PCT Application No. PCT, filed on November 21, 2005 by Laverdie et al. As described in / US2005 / 042127, the home position of the dispensing pump may be a position that provides the maximum available volume in the dispensing pump in the dispensing cycle, but is less than the maximum available volume that the dispensing pump can provide, as described above. Patents are incorporated herein by reference. The home position is selected based on various parameters to reduce the unused hold up volume of the multistage pump 100 during the dispensing cycle. Similarly, feed pump 150 may be moved to a win position providing a volume less than the maximum available volume.

At the beginning of the exhaust section, the isolation valve 130 is open, the barrier valve 135 is closed, and the exhaust valve 145 is open. In another embodiment, the barrier valve 135 may remain open during the exhaust section and is closed at the end of the exhaust section. During this time, if the barrier valve 135 is open, the pressure in the dispensing chamber, which can be measured by the pressure sensor 112, will be affected by the pressure in the filter 120, so the pressure is controlled by the controller. Can be predicted. Feed stage pump 150 pressurizes the fluid so that air bubbles are removed through exhaust valve 145 open from filter 120. Feed stage pump 150 may be controlled to allow exhaust to occur at a predetermined rate, which allows for longer exhaust times and slower exhaust rates, thereby allowing accurate control of the amount of waste waste. If the feed pump is a pneumatic pump, the fluid flow restriction can be placed in the exhaust fluid path, and the pneumatic pressure applied to the feed pump can be increased or decreased to maintain the pressure at the "exhaust" set point, and in other ways This allows for some control of the uncontrolled method of control.

At the start of the purge section, the isolation valve 130 is closed, the barrier valve 135 is closed if it is open at the exhaust section, the exhaust valve 145 is closed, the purge valve 140 is opened, and the inlet The valve 125 is open. The dispensing pump 180 exerts pressure on the fluid in the dispensing chamber 185 to evacuate the bubbles through the purge valve 140. During the static purge interval, the dispensing pump 180 stops, but the purge valve 140 remains open to continuously exhaust air. Any excess fluid removed during the purge section or the static purge section may be moved out of the multistage pump 100 (eg, returned to the fluid source or discarded), or recycled to the feed stage pump 150. During the preparation section, the inlet valve 125, isolation valve 130 and barrier valve 135 can be opened and the purge valve 140 can be closed, so that feed stage pump 150 is configured to provide a source (eg, source bottle). Ambient pressure can be reached. According to another embodiment, all valves may be closed in the preparation section.

During the dispensing interval, the outlet valve 147 opens and the dispensing pump 180 pressurizes the fluid in the dispensing chamber 185. Since the outlet valve 147 may respond to control slower than the dispense pump 180, the outlet valve 147 may open preferentially and the dispense motor 200 is started after some predetermined time. This prevents the dispense pump 180 from pushing the fluid through the outlet valve 147 which is partially open. This also prevents fluid from moving over the dispensing nozzle by opening the valve and then by forward fluid movement caused by motor operation. In another embodiment, the outlet valve 147 may be open and dispensing is initiated simultaneously by the dispensing pump 180.

An additional suckback section may be performed in which excess fluid in the dispensing nozzle is removed. During the seat back section, the outlet valve 147 may be closed and may draw excess fluid out of the outlet nozzle using a second motor or vacuum. Alternatively, the outlet valve 147 can be left open and the dispensing motor 200 can be rotated back to draw fluid back into the dispensing chamber. The three hundred intervals help to prevent excess fluid from dripping onto the wafer.

Referring briefly to FIG. 5, FIG. 5 is a schematic diagram of valve and dispense motor timing at various operating intervals of the multistage pump 100 of FIG. 2. While several valves are shown to be closed at the same time during the interval change, the timing of closing the valve can be adjusted to be slightly (eg, 100 milliseconds) apart to reduce pressure spikes. For example, between the exhaust section and the purge section, the isolation valve 130 may be closed immediately before the exhaust valve 145. However, it should be noted that other valve timings may be used in various embodiments of the present invention. In addition, several of the sections may be performed together (eg the filling / dispensing step may be performed simultaneously, in which case the inlet and outlet valves may be opened in the dispensing / filling section). It should also be noted that certain intervals do not have to be repeated for each cycle. For example, the purge section and the static purge section may not be performed every cycle. Similarly, the exhaust section may not be performed every cycle.

Opening and closing the various valves may cause pressure spikes in the fluid in the multistage pump 100. Since the outlet valve 147 is closed in the static purge section, closing the purge valve 140 at the end of the static purge section may, for example, cause a pressure rise in the distribution chamber 185. This situation can occur because a small volume of fluid can move when each valve is closed. More specifically, in many cases, purge cycles and / or static purge cycles are used to prevent sputtering or other perturbations in dispensing fluid from multistage pump 100 before fluid is dispensed from dispensing chamber 185. Thereby purging the air from the distribution chamber 185. However, at the end of the static purge cycle, the purge valve 140 is closed to seal the dispensing chamber 185 in preparation for starting dispensing. When the purge valve 140 is closed, an extra fluid of a predetermined volume (approximately equal to the hold up volume of the purge valve 140) is forced to move to the dispensing chamber 185, thus subsequently dispensing chamber 185 The fluid pressure in N) increases to exceed the reference pressure intended for dispensing the fluid. This excess pressure (pressure above the reference pressure) can cause problems in subsequent fluid distribution. This problem becomes more severe in low pressure applications because the pressure increase caused by closing the purge valve 140 may be a greater proportion to the reference pressure required for dispensing.

More specifically, because of the pressure rise that occurs as the purge valve 140 closes, unless such pressure is reduced, “spitting”, dual dispensing, or other undesirable fluid of the fluid on the wafer during subsequent dispensing intervals. Dynamics can occur. In addition, since this pressure rise during operation of the multi-stage pump 100 may not be constant, the aforementioned pressure rise may cause variations in the amount of fluid dispensed, or other characteristics of the dispense, in successive dispense sections. This variation in distribution can then lead to wafer scrap and reprocessing of the wafer. Embodiments of the present invention provide a desired starting pressure for initiation of the dispensing section in response to pressure rise by closing the various valves in the system and by allowing almost any reference pressure to be achieved in the dispensing chamber 185 prior to dispensing. Consider head pressures that vary from system to system and other differences in equipment.

In one embodiment, an increase in pressure in the barrier valve 135, purge valve 140, and / or dispensing chamber 185 may be caused to account for unwanted pressure rises to the fluid in the dispensing chamber 185. The dispensing motor 200 can be reversed during the static purge interval to pull the piston 192 back a predetermined distance to compensate for any pressure rise caused by closing any other factor present. The pressure in the dispensing chamber 185 is entitled “System and Method for Control of Fluid Pressure,” filed December 2, 2005 by Cornella George and Kedron James. A U.S. Patent Application No. 11 / 292,559, and titled "System and Method for Monitoring Operation of a Pump," by Cornella George and Kedron James, It can be controlled by adjusting the speed of feed pump 150 as described in US patent application Ser. No. 11 / 364,286, filed May 28, which is incorporated herein by reference.

Accordingly, embodiments of the present invention provide a multistage pump having smooth fluid handling characteristics. By correcting the pressure fluctuations in the dispensing chamber before the dispensing interval, it is possible to prevent or mitigate potentially damaging pressure spikes. Embodiments of the present invention may also use other pump control mechanisms and valve timings to help reduce the deleterious effects of pressure and pressure variations on process fluids.

To this end, attention should be paid to systems and methods for correcting the pressure rise or decrease that may occur in the various confined spaces of the pumping device. Embodiments of the present invention may compensate for the pressure rise or decrease in the chamber of the pumping device by moving the pumping means of the pumping device to adjust the volume of the chamber to compensate for the pressure rise or decrease in the chamber. More specifically, in one embodiment, to cope with undesired pressure rises to the fluid in the dispensing chamber, the dispensing motor can be reversed to draw back the piston to compensate for any pressure rise in the dispensing chamber.

This reduction in pressure fluctuation will be better understood with reference to FIG. 6, which shows an exemplary pressure profile in the dispensing chamber 185 for operation of a multistage pump in accordance with one embodiment of the present invention. At point 440, dispensing commences and dispensing pump 180 pushes fluid to the outlet. This distribution ends at point 445. The pressure in the dispensing chamber 185 remains nearly constant during the filling phase because the dispensing pump 180 is generally not related to the filling phase. At point 450, the filtration step is initiated and feed end motor 175 operates in a forward direction to push fluid out of supply chamber 155 at a predetermined speed. As can be seen in FIG. 6, the pressure in the dispensing chamber 185 begins to increase and reaches a predetermined set point at point 455. When the pressure in the dispensing chamber 185 reaches the set point, the dispensing motor 200 reversely rotates at a constant speed to increase the available volume in the dispensing chamber 185. In the relatively flat portion of the pressure profile between the points 455 and 460, the speed of the feed motor 175 increases each time the pressure decreases below the set point and slows down when the set point is reached. This maintains the pressure in the distribution chamber 185 at an almost constant pressure. At point 460, the dispensing motor 200 reaches its home position and the filtration step ends. A sudden pressure spike at point 460 is caused by closing the barrier valve 135 at the end of filtration.

After the exhaust and purge sections and before the end of the static purge section, the purge valve 140 is closed, which causes a spike of pressure starting at point 1500 in the pressure profile. As can be seen between points 1500 and 1502 of the pressure profile, the pressure in the dispensing chamber 185 can be significantly increased by the closing of the valve described above. The increase in pressure due to the closing of the purge valve 140 is usually inconsistent and depends on the temperature of the system and the viscosity of the fluid used with the multistage pump 100.

To cope with the pressure rise that occurs between points 1500 and 1502, any pressure rise caused by the closure of barrier valve 135, purge valve 140, and / or any other factor is compensated for. The dispensing motor 200 can be reversed to withdraw the piston 192 backwards by a predetermined distance so as to be predetermined. In some cases, since purge valve 140 may take some time to close, it may be desirable to delay the dispensing motor 200 by a certain amount of time before reverse rotation. Thus, the time between points 1500 and 1504 on the pressure profile reflects the delay between the signal for closing the purge valve 140 and the reverse rotation of the dispensing motor 200. This time delay may be appropriate to allow the purge valve 140 to close completely and to allow the pressure in the dispensing chamber 185 to be substantially stable, which may be about 50 milliseconds.

Since the hold up volume of the purge valve 140 can be a known value (eg, within manufacturing tolerances), the piston by the correction distance to increase the volume of the dispensing chamber 185 approximately equal to the hold up volume of the purge valve 140. Dispensing motor 200 may be reversed to withdraw 192 rearward. Since the dimensions of the dispensing chamber 185 and the piston 192 are also known values, the dispensing motor 200 may be reversed by a certain number of motor increments, and the dispensing motor 200 may be rotated by this particular number of motor increments. By reversing, the volume of the distribution chamber 185 is increased substantially by the hold up volume of the purge valve 140.

The effect of the rearward movement of the piston 192 via the reverse rotation of the dispensing motor 200 is that the pressure in the dispensing chamber 185 from point 1504 to the approximate reference pressure required for dispensing at point 1506. Decreases. In many cases, this pressure correction may be appropriate to achieve satisfactory dispensing in subsequent dispensing steps. However, depending on the type of motor used in the dispensing motor 200 or the type of valve used in the purge valve 140, reversing the dispensing motor 200 to increase the volume of the dispensing chamber 185 may result in dispensing. The drive mechanism of the motor 200 may cause a certain space or “backlash”. This “backlash” is of a particular size between components of the dispensing motor 200, such as the motor nut assembly, when the dispensing motor 200 is operated in a forward direction to push fluid out of the dispensing pump 180 during the dispensing interval. It means that a slack or space may be present, which should be reduced before the drive assembly of the dispensing motor 200 is physically coupled and the piston 192 moves. Because the amount of backlash described above is variable, it can be difficult to take this backlash into account when determining how far forward the piston 192 should be moved to obtain the required dispense pressure. Thus, such backlash in the drive assembly of the dispensing motor 200 can cause variations in the amount of fluid dispensed during each dispensing interval.

As a result, in order to reduce the amount of backlash in the drive assembly of the dispensing motor 200 to a substantially negligible level or no backlash at all, ensuring that the final operation of the dispensing motor 200 is in the forward direction before the dispensing interval. It may be desirable to. Thus, in some embodiments, pressure rise in barrier valve 135, purge valve 140, and / or dispense chamber 185 to counteract unwanted backlash in the drive motor assembly of dispense pump 200. The dispensing motor 200 can be reversed to move the piston 192 backwards by a predetermined distance to compensate for any pressure rise caused by closing any other factor that can cause the dispensing chamber 185. The dispensing motor can be further reversed to pull the piston 192 backwards by an additional overshoot distance to add an overshoot volume. The dispensing motor 200 may then engage in forward direction to move the piston 192 forward by substantially the same as the overshoot distance. This is the approximate required reference pressure in the dispensing chamber 185 and also ensures that the final operation of the dispensing motor 200 prior to dispensing is in the forward direction, so that any backlash from the drive assembly of the dispensing motor 200 is achieved. Substantially eliminates

Referring again to FIG. 6, as described above, the pressure spike starting at point 1500 in the pressure profile may be caused by closing the purge valve 140. To cope with the pressure increase that occurs between point 1500 and point 1502, correct any pressure increase caused by closing the purge valve 140 (and / or any other factor) after a predetermined delay. The dispensing motor 200 may be reversely rotated to move the piston 192 backwards by the sum of the predetermined distance and the additional overshoot distance. As described above, this correction distance can increase the volume of the distribution chamber 185 to approximately the same amount as the hold up volume of the purge valve 140. The overshoot distance may also increase the volume of the distribution chamber 185 to a volume that is about the same or smaller or larger than the hold up volume of the purge valve 140, depending on the specific implementation.

The effect of moving the piston 192 backwards by the distance of the sum of the correction distance and the overshoot distance via the reverse rotation of the dispensing motor 200 is that in the dispensing chamber 185 from point 1504 to point 1508. Causes a decrease in pressure. The dispensing motor 200 may then engage in forward direction to move the piston 192 forward by a distance substantially equal to the overshoot distance. In some cases, it may be desirable to allow the dispensing motor 200 to stop substantially completely before the dispensing motor 200 engages in the forward direction, and this delay may be about 50 milliseconds. The effect of forward movement of the piston 192 via the forward engagement of the dispensing motor 200 is approximately the pressure required for dispensing at point 1512 by increasing the pressure in dispensing chamber 185 from point 1510. To the reference pressure, to ensure that the final operation of the dispensing motor 200 before the dispensing interval is in the forward direction, and substantially eliminates all backlash from the drive assembly of the dispensing motor 200. Reverse rotation and forward operation of the dispensing motor 200 at the end of the static purge interval is shown in the timing diagram of FIG. 2.

An embodiment of the present invention may be more clearly described with reference to FIG. 7, which shows an exemplary pressure profile in the dispensing chamber 185 during a particular operating period of a multistage pump in accordance with an embodiment of the present invention. Line 1520 represents the reference pressure required for the dispensing of the fluid, and the reference pressure may be any pressure required but is typically 0 psi (eg, gauge pressure) or atmospheric pressure. At point 1522, the pressure in the dispensing chamber 185 during the purge interval may slightly exceed the reference pressure 1520. Dispensing motor 200 may be stopped at the end of the purge interval such that pressure in dispensing chamber 185 begins at point 1524 and lowers to approximately reference pressure 1520 at point 1526. However, prior to the end of the static purge interval, a valve in the pump 100, such as purge valve 140, may close, causing a spike of pressure between points 1528 and 1530 of the pressure profile. .

The dispensing motor 200 then has an overshoot distance (as described above) such that the pressure in the dispensing chamber 185 is less than the reference pressure 1520 between the points 1532 and 1534 of the pressure profile. It may be reversed to move the piston 192 by the sum of the correction distances. In order to return the pressure in the dispensing chamber 185 to be close to the reference pressure 1520 and to remove backlash from the drive assembly of the dispensing motor 200, the dispensing motor 200 will engage substantially the same as the overshoot distance in the forward direction. Can be. This movement causes the pressure in the dispensing chamber 185 to return to the reference pressure 1520 between points 1536 and 1538 of the pressure profile. Thus, the pressure in the dispensing chamber 185 is substantially returned to the reference pressure required for dispensing, the backlash is removed from the drive assembly of the dispensing motor 200, and desirable dispensing can be achieved during subsequent dispensing sections.

Although the foregoing embodiments of the present invention have been described primarily with the correction of pressure rise caused by closing the purge valves during a static purge interval, this same technique may be used in any stage of operation of the multistage pump 100. Dispensing chamber 185 may be applied to compensate for the pressure rise or decrease caused by almost any cause, internal or external, and caused by opening or closing of a valve in the flow path into and out of distribution chamber 185. It will be apparent that it may be particularly useful for correcting pressure fluctuations in the c).

It is also apparent that this same technique can be used to achieve the reference pressure required in the dispensing chamber 185 by correcting for variations in other equipment used with the multistage pump 100. To better compensate for these or other variations in equipment during the process, the internal or external environment or equipment used internally or externally to the multistage pump 100, the reference pressure required in the distribution chamber 185, calibration Certain aspects or variables of the invention, such as distance, overshoot distance, delay time, and the like, may be configurable by the user of the pump 100.

In addition, embodiments of the present invention may similarly use pressure transducer 112 to achieve the required reference pressure in dispensing chamber 185. For example, in order to compensate for any pressure rise caused by closing the purge valve 140 (and / or any other factor), by the reference pressure required by the dispensing chamber 185 (by pressure transducer 112) As measured, the piston 192 may be pulled back (or moved forward). Similarly, in order to reduce the amount of backlash in the drive assembly of the dispensing motor 200 to a level that is substantially negligible or not present at all prior to dispensing, the pressure in the dispensing chamber 185 must be less than the reference pressure. The piston 192 may be displaced rearward until then and the piston may then engage forward until the pressure in the dispensing chamber 185 is the reference pressure required for dispensing.

In addition to coping with the pressure fluctuations in the fluid as described above, pressure spikes or other pressure perturbations in the process fluid also prevent the closing of the valve so that no closed space is formed and by opening the valve between the closed spaces. Can be reduced. During the complete dispensing cycle of the multistage pump 100 (eg, from the dispensing section to the dispensing section), the valve inside the multistage pump 100 may change state several times. Among these myriad changes, unwanted pressure spikes and pressure drops can occur. Such pressure fluctuations not only cause damage to sensitive process chemicals, but also opening and closing such valves can cause disturbances or fluctuations in the distribution of fluids. For example, a sudden pressure rise in the holdup volume caused by opening one or more valves associated with the dispensing chamber 185 may cause a corresponding decrease in fluid pressure in the dispensing chamber 185, where bubbles are formed in the fluid. Can be made, which can then affect subsequent dispensing.

In order to improve pressure fluctuations caused by opening and closing various valves in the multi-stage pump 100, opening and closing of the various valves and / or engagement and disengagement of the motor may adjust timing to reduce these pressure spikes. In general, according to an embodiment of the present invention, in order to reduce the pressure fluctuation, if the closed space may not be formed, the closed space or the closed space is not formed by the closing of the valve, and an important point in this regard is that If it can not open, it does not open the valve between the two closed spaces. Conversely, there is no flow path open to the outer region for the multistage pump 100 or a fluid path (eg, outlet valve 147, exhaust valve 145 open to external atmospheric or external conditions for the multistage pump 100). , Or inlet valve 125 is open], any valve should not be opened.

Another method for expressing a general guideline for opening and closing the valve inside the multi-stage pump 100 according to an embodiment of the present invention is to change the volume that may occur as the valve is opened ( Multistage pump 100 only when an outer valve, such as inlet valve 125, exhaust valve 145, or outlet valve 147 is open, to eliminate any pressure variations caused by Is to open or close the inner valve in the multi-stage pump 100, such as barrier valve 135 or purge valve 140, during operation. These guidelines also have to be opened in other ways, i.e. when opening the valve inside the multistage pump 100, from the outside to the inside (ie the valve on the outside must be opened before opening the valve on the inside). When the valve inside the multi-stage pump 100 is closed, the valve may be closed from the inside to the outside (that is, the inner valve should be closed before the outer valve).

In addition, in some embodiments, to ensure that a particular valve is fully open or closed, to ensure that the motor is fully started or stopped, or that the pressure in the system or part of the system is changed in other ways (eg, Substantially 0 psi (eg gauge pressure) or any other non-zero level before opening (e.g., starting the valve) or starting the motor or stopping the motor). Use enough time between certain changes to ensure that they are in. In many cases, a delay of 100 to 300 milliseconds is sufficient to allow the valve inside the multi-stage pump 100 to be substantially open or closed, although the actual delay used in the specific application or implementation of these techniques is a wide variety of other factors. And at least in part depend on the viscosity of the fluid used in the multistage pump 100.

8A and 8B schematically illustrate one embodiment of valve and motor timing that serve to improve pressure fluctuations during operation of the multistage pump 100 for various operating sections of the multistage pump 100. Reference may be better understood. 8A and 8B are not drawn to scale, each such interval marked with numbers may be different or unique time intervals (including zero time intervals), irrespective of the depicted content of FIGS. 8A and 8B, The length of each numbered section can be determined by a wide range of factors, such as the user method performed, the type of valves used in the multistage pump 100 (eg, the time it takes to open or close these valves), and the like. Be careful.

Referring to FIG. 8A, at time 2010 , the ready zone signal may mean that the multistage pump 100 is ready to dispense, and at time 2020 to dispense fluid to open the inlet valve 125. One or more signals may be delivered sometime after time 2010 or at time 2010 to operate the dispensing motor 200 in the forward direction and to reversely rotate the charging motor 175 to direct fluid into the supply chamber 155. . After time 2020 Before time 2022 (eg, during interval 2), fluid may be dispensed from the outlet valve 147 because a predetermined signal may be transmitted to open the outlet valve 147.

Reading this disclosure, it will be apparent that the timing of the valve signal and the motor signal may vary depending on the time required to operate the various valves or motors of the pump, and the user method may be a multistage pump 100 or other factors. Is carried out together. For example, in FIG. 8A, a signal may be transmitted to open the outlet valve 147 after a signal for operating the dispensing motor 200 in the forward direction may be transmitted. In this example, the outlet valve 147 may be Since it can be operated faster than the dispensing motor 200, the timing of the opening of the outlet valve 147 and the operation of the dispensing motor 200 is adjusted so that the opening of the valve and the operation of the dispensing motor are performed substantially simultaneously to achieve better dispensing. It is required to do so. However, other valves and motors may have different operating speeds, etc., and thus different timings may be used with these different valves and motors. For example, a signal for opening the outlet valve 147 may be transmitted before or substantially simultaneously with a signal for operating the dispensing motor 200, and similarly a signal for closing the outlet valve 147. May be transmitted before, after, or simultaneously with a signal for stopping the operation of the dispensing motor 200 or the like.

Thus, fluid may be dispensed from the multi-stage pump 200 between time period 2020 and time period 2030 . Depending on the method implemented by the multi-stage pump 200, the operating speed of the dispensing motor 200 can vary between the time period 2020 and the time period 2030 (eg, each of the sections 2 to 6) so that different amounts of fluid can And may be distributed at different time points between the liver 2020 and the time period 2030 . For example, since the dispensing motor can be operated according to a polynomial function, the dispensing motor 200 operates faster in section 2 than in section 6 and proportionally more fluid in section 2 than in section 6 multistage pumps. From 200. A signal for closing the outlet valve 147 is transmitted before the time point 2030 after the dispensing period starts, and a signal for stopping the dispensing motor 200 is transmitted at the time point 2030 .

Similarly, between time points 2020 and 2050 (eg, in sections 2 through 7), the supply chamber 155 may be filled with fluid through reverse rotation of the charging motor 175. Thereafter, at time 2050 , a signal is next transmitted to stop the charging motor 175, after which the charging section ends. The inlet valve is any other operation between time point 2050 and time point 2060 (eg, in section 9, delay number 0) such that the pressure inside fill chamber 155 can be returned to substantially 0 psi (eg, gauge pressure). It may be left open before this is done. In one embodiment, this delay may be about 10 milliseconds. In other embodiments, the time period between time point 2050 and time point 2060 may vary and may depend on the pressure pointed at filling chamber 155. For example, a pressure transducer can be used to measure the pressure in the filling chamber 155. Interval 10 may begin at time point 2060 when the pressure transducer indicates that pressure in fill chamber 155 has reached 0 psi.

Thereafter, at time point 2060 , a signal is transmitted to open the isolation valve 130 and the barrier valve at time point 2070 after a suitable long enough delay (eg, about 250 milliseconds) to allow the isolation valve 130 to fully open. A signal is opened to open 135. After a suitable long enough delay (eg, 250 milliseconds) to allow the barrier valve 135 to fully open again, a signal is delivered at time 2080 to close the inlet valve 125. After a suitable delay (eg, about 350 milliseconds) that may cause the inlet valve 125 to close completely, a signal may be communicated to operate the charging motor 175 at time point 2090 and the charging motor 175 Signal is actuated to operate the dispensing motor 200 at time point 2100 so that it operates during the preliminary filtration section and the filtration section (eg section 13 and section 14) and the dispensing motor 200 operates during the filtration section (eg section 14). Can be. The time period between the time point 2090 and the time point 2100 may be a preliminary filtration section, which may be a time period or a set distance for the operation of the motor such that the pressure of the fluid being filtered reaches a predetermined set point, or Or pressure transducers as described above.

Alternatively, a pressure transducer may be used to measure the pressure of the fluid, and when the pressure transducer indicates that the pressure of the fluid has reached a set point, filtration section 14 may begin at time point 2100 . An example of these processes is a US patent application entitled "System and Method for Control of Fluid Pressure" and filed December 2, 2005 by Cornella George and Kedron James. US Patent Application No. 11 / 364,286, entitled "System and Method for Monitoring Operation of a Pump," and filed by Cornella George and Kedron James. The patent application is described in more detail, and these patent applications are incorporated herein by reference.

After the filtration interval, at least one signal is transmitted to stop the charging motor 175 and the dispensing motor 200 at time 2110 . The time between the time point 2100 and the time point 2110 (eg, the filtration section 14) may vary depending on the required filtration speed, the speed of the filling motor 175 and the dispensing motor 200, the viscosity of the fluid, and the like. In one embodiment, the filtration section may end at time 2110 when the dispensing motor 200 reaches its home position.

After a suitable delay to allow the charging motor 175 and the dispensing motor 200 to come to a complete stop, a signal is sent to open the exhaust valve 145 at time 2120 and a time is required to completely stop the charging motor and the dispensing motor. This may not take at all (eg no time delay). Moving to FIG. 8B, the signal for actuating the stepper motor 175 during the exhaust section (eg section 17) after a suitable delay (eg, about 225 milliseconds) for the exhaust valve 145 to fully open is initiated. 2130 may be delivered to the charging motor 175. The barrier valve 135 may remain open during the exhaust section, while the barrier valve 135 may also remain open during the exhaust section to monitor the fluid pressure inside the multistage pump 100 by the pressure transducer 112. It may be closed prior to the start of the exhaust section at time 2130 .

In order to end the exhaust section, a signal for stopping the operation of the charging motor 175 is transmitted at a time point 2140 . If desired, there may be some delay (eg, about 100 milliseconds) between time 2140 and time 2142 so that the pressure of the fluid is properly dissipated, for example, during the exhaust period. In one embodiment, a time period between time 2142 and time 2150 may be used to zero the pressure transducer 112, which may be about 10 milliseconds.

Thereafter, at time 2150 , a signal is delivered to close the barrier valve 135. After the time point 2150 , an appropriate delay (eg, about 250 milliseconds) is allowed for the barrier valve 135 to close completely. A signal is then transmitted to close the isolation valve 130 and close the exhaust valve 145 at time 2170 after a suitable delay (eg, about 250 milliseconds) to allow the isolation valve 130 to be fully closed. The signal for transmitting is transmitted. Appropriate delays (eg, about 250 milliseconds) are allowed to allow the exhaust valve 145 to close completely, and after this delay a signal is transmitted to open the inlet valve 125 at time 2180 and the inlet valve 125 Is followed by an appropriate delay (eg, about 250 milliseconds) to allow the fully open), and a signal to open the purge valve 140 is communicated at time 2190 .

After a suitable delay (eg, about 250 milliseconds) for the exhaust valve 145 to fully open, a signal for starting the dispensing motor 200 for the purge section (eg, section 25) at time 2200 is provided. After a time period for the purge period, which may be transferred to the method 200 and may vary according to a method, a signal for stopping the distribution motor 200 and ending the purge period may be transmitted at a time point 2210 . Between time points 2210 and time point 2212 , a time period sufficient to allow the pressure in the distribution chamber 185 to stabilize to substantially 0 psi (about 10 milliseconds) (eg, predetermined or using the pressure transducer 112). Determined] is allowed. Then, a sufficient delay (e.g., about 250 ms) after allowing the inlet valve at a time point 2230 to fully close, and a signal for closing the purge valve 140 at the time point 2220 may be transferred, the purge valve 140 Signals for closing 125 can be communicated. After operating the dispensing motor 200 to correct any pressure fluctuations caused by closing the valve in the multistage pump 100 (as described above), the multistage pump 100 will once again dispense at time 2010 . May be in a ready state.

It should be noted that there may be a slight delay between the preparation section and the distribution section. When the multistage pump 100 enters the preparation section, the barrier valve 135 and the isolation valve 130 may be closed, so that fluid may be introduced into the filling chamber 155 without affecting the distribution of subsequent multistage pumps. It may be irrespective of whether dispensing is initiated during or following the filling.

Filling the filling chamber 155 while the multi-stage pump 100 is in a ready state includes a valve that serves to improve pressure fluctuations during operation of the multi-stage pump 100 for various operating sections of the multi-stage pump 100. It may be more clearly shown in connection with FIGS. 9A and 9B, which schematically illustrate another embodiment of motor timing.

Referring to FIG. 9A, the ready section signal at time point 3010 may indicate that the multistage pump 100 is ready to dispense, and then a signal for opening the outlet valve 147 may someday be delivered at time point 3012. . After a suitable delay to allow the outlet valve 147 to open, to operate the dispensing motor 200 in the forward direction to dispense the fluid from the outlet valve 147 and to fill the fluid into the filling chamber 155. One or more signals may be delivered at time point 3020 to reverse rotate motor 175 (inlet valve 125 may still be open from a previous charge section, as described in more detail below). At time 3030 , a signal may be delivered to stop the distribution motor 200, and at time 3040 a signal may be delivered to close the outlet valve 147.

After reading this disclosure, it will be clear that the timing of the valve signal and the motor signal may vary depending on the time required to operate the various valves or motors of the pump, and the user method may vary with the multistage pump 100 or other factors. Is carried out together. For example (as shown in FIG. 8A), a signal for opening the outlet valve 147 may be delivered after a signal for operating the dispensing motor 200 in the forward direction, in this example an outlet valve. The opening of the outlet valve 147 is such that 147 can operate faster than the dispensing motor 200 and thus the timing of the operation of the dispensing motor substantially coincides with the opening of the outlet valve to achieve better dispensing. This is because it is desirable to time the operation of the dispensing motor 200. However, the operating speeds of the other valves and motors, etc. may be different and thus different timings may be used with these different valves and motors. For example, a signal for opening the outlet valve 147 may be transmitted before or substantially simultaneously with the signal for operating the dispensing motor 200, and similarly for closing the outlet valve 147. The signal may be delivered before, after, or simultaneously with a signal to stop the operation of the dispensing motor 200 or the like.

Thus, fluid may be dispensed from the multi-stage pump 200 between time period 3020 and time period 3030 . Depending on the user method implemented by the multi-stage pump 200, the operating speed of the dispensing motor 200 can vary between the time period 3020 and the time period 3030 (eg, each of the sections 2 to 6), so that the time interval 3020 to Different amounts of fluid may be dispensed at different time points between 3030 . For example, since the dispensing motor can operate according to the polynomial function, the dispensing motor 200 can operate more quickly in section 2 than in section 6, and correspondingly the multistage pump 200 in section 2 than in section 6. More fluid is dispensed from After this distribution period is started, the time before 3030, the outlet valve 147 and a signal is sent to close a, a signal is transmitted for stopping the dispense motor 200 at the time point 3030 at a later time.

Similarly, between time points 3020 and time point 3050 (eg, in sections 2 through 7), supply chamber 155 may be filled with fluid through reverse rotation of charging motor 175. Thereafter, at time 3050 , a signal is next transmitted to stop the charging motor 175, and then the charging section ends. In order to allow the pressure in the filling chamber 155 to return to substantially 0 psi (eg, gauge pressure), the inlet valve remains open between time points 3050 and 3060 before any other action is taken. Can be. In one embodiment, this delay may be about 10 milliseconds. In other embodiments, the time period between time point 3050 and time point 3060 may vary and may depend on the pressure in filling chamber 155. For example, a pressure transducer can be used to measure the pressure in the filling chamber 155. When the pressure transducer indicates that the pressure in the filling chamber 155 has reached 0 psi, interval 10 may begin at time point 3060 .

At time 3060 , a signal is then transmitted to open the isolation valve 130, and at time 3070 a signal to open the barrier valve 135 is transmitted. Thereafter, a signal for closing the inlet valve 125 may be transmitted at a time point 3080 , and a signal for operating the charging motor 175 may then be transmitted at a time point 3090 , and the distribution motor 200 is operated at a time point 3100 . A signal may be transmitted so that the charging motor 175 operates in the preliminary filtration section and the filtration section and the dispensing motor 200 operates during the filtration section.

After the filtration interval, at least one signal is transmitted to stop operation of the charging motor 175 and the dispensing motor 200 at time 3110 . At time 3120 , a signal is passed to open the exhaust valve 145. 9B, a signal for operating the stepper motor 175 may be transmitted to the charging motor 175 during the exhaust period at the time point 3130 . To end the evacuation section, a signal is provided to stop the operation of the charging motor 175 at time 3140 . Thereafter, a signal for closing the barrier valve 135 is transmitted at a time point 3150 , while a signal for closing the isolation valve 130 is transmitted at a time point 3160 and a signal for closing the exhaust valve 145 at a time point 3170. Is passed.

At time 3180 , a signal for opening the inlet valve 125 is transmitted, and at time 3190 a signal for opening the purge valve 140 is transmitted. Thereafter, a signal for starting the distribution motor 200 for the purge section may be transmitted to the distribution motor 200 at a time point 3200 , and a signal for stopping the distribution motor 200 is transmitted at the time point 3210 after the purge section. Can be.

Subsequently, a signal for closing the purge valve 140 may be transmitted at a time point 3220 , and a signal for closing the inlet valve 125 may be transmitted at a time point 3230 . After operating the dispensing motor 200 to correct any pressure fluctuations caused by closing the valve inside the multistage pump 100 (as described above), the multistage pump 100 dispenses once again at time point 3010 . Can be prepared to do.

Once the multistage pump 100 enters the preparation section at time point 3010 , a signal may be transmitted to open the inlet valve 125 so that liquid is guided to the filling chamber 155 while the multistage pump 100 is in the ready state. In addition, another signal may be transmitted to reversely rotate the charging motor 175. The filling chamber 155 is filled with liquid during the preparation section, but this filling has no effect on the ability of the multistage pump 100 to dispense fluid at any point after entering the preparation section, which is a barrier valve 135 And the isolation valve 130 are closed so that the filling chamber 155 is substantially distinct from the distribution chamber 185. In addition, if dispensing is initiated before the filling is complete, the filling can continue substantially simultaneously while dispensing fluid from the multistage pump 100.

Initially when the multistage pump 100 enters the preparation section, the pressure in the dispensing chamber 185 may be approximately equal to the pressure required during the dispensing section. However, there may be some delay between the entry into the preparation section and the start of the distribution section, which may affect various factors such as the characteristics of the distribution stage diaphragm 190 in the distribution chamber 185, temperature changes, or various other factors. The pressure in the dispensing chamber 185 can thus vary during the preparation period. As a result, the pressure in the dispensing chamber 185 at the start of the dispensing section may vary from a relatively significant level from the reference pressure required for dispensing.

This variation can be shown more clearly in connection with FIGS. 10A and 10B. 10A shows an exemplary pressure profile in the dispensing chamber 185 and shows the pressure variation in the dispensing chamber during the preparation period. At approximately point 4010, a correction for any pressure change caused by valve actuation or other factors may be made as described above in connection with FIGS. 22 and 23. This pressure correction is performed at the dispensing chamber 185 such that the multi-stage pump 100 is close to the reference pressure (indicated by line 4030) required for dispensing at an approximate point 4020 where the multistage pump 100 can enter the preparatory stage. The pressure can be corrected. As can be appreciated, after entering the preparatory step at approximate point 4020, the pressure in the dispensing chamber 185 can rise steadily by various factors as described above. Next, when the subsequent dispensing interval appears, this pressure variation from the reference pressure 4030 can result in unsatisfactory dispensing.

In addition, since the time delay between the entry of the preparation section and the subsequent dispensing section may vary, the pressure variation in the dispensing chamber 185 may be associated with this time delay, and the dispensing made in each successive dispensing section It may be different depending on the different amount of pressure fluctuations occurring during different delays. Thus, such pressure fluctuations may also affect the ability of the multistage pump 100 to accurately repeat dispensing, which may then hinder the use of the multistage pump 100 in repetition of the same process regime. Therefore, substantially maintaining the reference pressure during the preparation section of the multi-stage pump 100 to achieve acceptable fluid dynamics while improving distribution in the subsequent distribution section and distribution over the distribution section. It may be desirable.

In one embodiment, to substantially maintain the reference pressure during the preparation period, the dispensing motor 200 may be controlled to compensate for or cope with the pressure fluctuations that may occur in the dispensing chamber 185. Can be. More specifically, the "dead band" closed loop pressure control may be used to control the dispensing motor 200 to substantially maintain the reference pressure in the dispensing chamber 185. 2, the pressure sensor 112 may deliver the read pressure to the pump controller 20 at regular intervals. If the delivered pressure deviates from the required reference pressure by a certain amount or by tolerance, the pump controller 20 can signal the dispensing motor 200 to reverse rotation (or to operate in the forward direction) by a minimum distance. The dispensing motor 200 may move by the minimum distance (motor increment) detectable by the pump controller 20, thereby pulling the piston 192 back (or moving forward) and dispensing end diaphragm ( 190 compensates for the pressure drop in the dispensing chamber 185.

Since the frequency at which the pressure sensor 112 can sample and deliver the pressure in the dispensing chamber 185 can be somewhat faster than the operating speed of the dispensing motor 200, the pump controller 20 is controlled by the pressure sensor 112. The delivered pressure measurement may not be processed or the pressure sensor 112 may be interrupted for a particular time interval in the vicinity of signaling the dispense motor 200, whereby the dispense motor 200 may be configured to provide a pump controller ( 20) The dispensing motor can be completed before other pressure readings have been received or processed. Alternatively, the pump controller 20 may wait until the dispensing motor 200 detects that it has completed its operation before processing the pressure measurement delivered by the pressure sensor 112. In many embodiments, the sampling interval at which pressure sensor 112 samples the pressure in dispensing chamber 185 and delivers this pressure measurement may be about 30 kHz, about 10 kHz, or other interval.

However, the embodiment described above is not without problems. In some cases, one or more such embodiments may exhibit significant variations in distribution when the time delay between entry to the preparation section and subsequent distribution sections may vary as described above. This problem can be reduced to some extent and repeatability is improved by using a fixed time interval between the preparation section and subsequent entry to the dispense, but this is not always possible when performing a specific process.

In some cases, closed-loop pressure control is used to compensate for pressure variations that may occur in the dispensing chamber 185 to substantially maintain the reference pressure during the preparation period of the multistage pump 100 while improving the repeatability of the dispensing, or The dispensing motor 200 may be controlled to cope with the pressure fluctuation. The pressure sensor 112 may deliver the read pressure to the pump controller 20 at regular intervals (as described above, in some embodiments, this interval may be about 30 kHz, about 10 kHz, or other intervals). Can be. If the delivered pressure exceeds the required reference pressure (or below the reference pressure), the pump controller 20 dispenses to reverse rotate (or operate in the forward direction) the dispense motor 200 by motor increment. A signal can be sent to the motor 200, thereby withdrawing (or moving forward) the piston 192 and the dispensing stage diaphragm 190, thereby lowering (or raising) the pressure in the dispensing chamber 185. . This pressure monitoring and correction can be done almost continuously until the dispensing interval is initiated. In this way, the dispensing chamber 185 can be maintained at a pressure approximately equal to the required reference pressure.

As discussed above, the frequency at which the pressure sensor 112 samples and delivers the pressure in the dispensing chamber 185 may be somewhat faster than the operating speed of the dispensing motor 200. In order to account for this difference, the pump controller 20 may not process the pressure measurement delivered by the pressure sensor 112, or the pressure sensor at a particular time interval at which it will signal the dispensing motor 200. As such, 112 may be discontinued, the dispensing motor 200 may thus complete operation of the dispensing pump before other pressure measurements are received or processed by the pump controller 20. Alternatively, the pump controller 20 may wait until it is detected or notified that the dispensing motor 200 has terminated operation of the dispensing motor before processing the pressure measurement delivered by the pressure sensor 112. can do.

The beneficial effect of using the embodiment of the closed loop control system to substantially maintain the reference pressure as described above is exemplary in the distribution chamber 185 when using the embodiment of the closed loop control system described above during the preparation period. It can be easily seen with reference to FIG. 10B, which shows the pressure profile. At approximately point 4050, correction for any pressure change caused by valve actuation or other factors may be made as described above with reference to FIGS. 6 and 7. This pressure correction provides an approximate reference pressure (indicated by line 4040) required for dispensing at an approximate point 4060 at which multistage pump 100 may enter the preparation section. Can be corrected. After entering the preparation section, at an approximate point 4060 an embodiment of the closed loop control system can cope with any variation in pressure during the preparation section to substantially maintain the required reference temperature. For example, at point 4070, the closed loop control system can detect the pressure rise and can cope with this pressure rise to substantially maintain the reference pressure 4040. Similarly, at points 4080, 4090, 4100, 4110, the closed-loop control system is only representative of the length of the preparation section (points 4080, 4090, 4100, and 4110 are merely representative, and other pressures by the closed-loop control system Please note that the correction is shown in FIG. 10B, which has not been assigned a reference number and is therefore not discussed] to cope with or correct for a pressure variation in the distribution chamber 185 to substantially maintain the required reference pressure 4040. can do. As a result, more satisfactory dispensing can be achieved in the subsequent dispensing section since the reference pressure 4040 required in the dispensing chamber 185 is substantially maintained by the closed loop control system during the preparation section.

However, to achieve this more satisfactory dispensing during subsequent dispensing intervals, any corrections are made to substantially maintain the reference pressure when operating the dispensing motor 200 to dispense fluid from the dispensing chamber 185. It may be desirable to consider. More specifically, at point 4060, immediately after the pressure correction is made and the multi-stage pump 100 initially enters the preparation section, the dispensing stage diaphragm 190 may be in an initial position. In order to achieve the required dispensing, dispensing stage diaphragm 190 must be moved from this initial position to the dispensing position. However, after correcting for pressure variations as described above, the dispensing stage diaphragm 190 may be at a second position different from the initial position. In some embodiments, this difference should be accounted for during the dispensing interval by moving dispensing stage diaphragm 190 to the dispensing position to achieve the required dispensing. In other words, in order to achieve the required dispensing, the dispensing stage diaphragm 190 may be configured such that the multistage pump 100 initially enters the preparation section from the second position after making any corrections to the pressure fluctuations during the preparation section. When entering, the dispensing stage diaphragm 190 may be moved to an initial position, after which the dispensing stage diaphragm 190 may then be moved by a distance from the initial position to the dispensing position.

In one embodiment, when the multi-stage pump 100 initially enters the preparation section, the pump controller 20 sets the initial distance (dispensing distance) to move the dispensing motor 200 to achieve the required dispensing. Can be calculated While the multistage pump 100 is in the preparation section, the pump controller 20 may record the distance traveled by the dispensing motor 200 (correction distance) to correct any pressure fluctuations that occur during the preparation section. During the dispensing phase, to achieve the required dispensing, the pump controller 20 sends a signal to the dispensing motor 200 to move the correction distance by the distance plus the dispensing distance (or by the distance minus the dispensing distance). can send.

In other cases, however, it may be undesirable to consider this pressure correction when operating the dispensing motor 200 to dispense fluid from the dispensing chamber 185. More specifically, immediately after the pressure correction at point 4060 and the multistage pump 100 initially enters the preparation section, the dispensing stage diaphragm 190 may be in an initial position. In order to achieve the required dispensing from this initial position, dispensing stage diaphragm 190 must be moved by the dispensing distance. After correcting for pressure variations as described above, the dispensing stage diaphragm 190 may be in a second position different from the initial position. In some embodiments, only the dispensing stage diaphragm 190 can be moved by the dispensing distance (starting from the second position) to achieve the required dispensing.

In one embodiment, when the multi-stage pump 100 initially enters the preparation section, the pump controller 20 may calculate the initial distance to move the dispensing motor 200 to achieve the required dispensing. Subsequently during the dispensing phase, to achieve the required dispensing, the pump controller 20 moves the dispensing motor to move by the initial distance irrespective of the distance the dispensing motor 200 has moved for correction of pressure fluctuations in the preparation section. Signal 200.

Selecting one of the foregoing embodiments used or applied in any given situation depends on a group of factors, such as systems, equipment, or empirical conditions used with the selected embodiment among other embodiments. It is clear that it can be run. In addition, while the foregoing embodiments of the control system for substantially maintaining the reference pressure have been described in connection with considering upward pressure variations in the preparation section, embodiments of these same systems and methods are the preparation section of the multistage pump 100. It is obvious that the same may be applicable to take into account the upward or downward pressure fluctuations in any other section. In addition, although embodiments of the present invention have been described with respect to a multistage pump 100, embodiments of these inventions (e.g., control methods, etc.) are equally applicable to single stage pumping devices or virtually any other type of pumping device. It can of course be used effectively with these pumping devices.

It may be useful herein to describe an example of the one-stage pumping device described above that may be used with various embodiments of the present invention. 11 is a schematic diagram of one embodiment of a pump assembly for a pump 4000. The pump 4000 may be similar to the first stage, that is, the dispensing stage, of the multistage pump 100 described above, and may include a rolling diaphragm pump driven by a stepper motor, brushless DC motor, or other motor. The pump 4000 may include a distribution block 4005 that defines various fluid flow paths through the pump 4000 and at least partially defines the pump chamber. According to one embodiment, the dispense pump block 4005 may be a single block of PTFE, modified PTFE, or other material. Because these materials do not or minimally react with a number of process solutions, these materials allow the flow passages and pump chambers to be machined directly into distribution block 4005 with minimal additional hardware. Distribution block 4005 consequently reduces the need for piping by providing an integrated fluid manifold.

The distribution block 4005 may include a plurality of external inlets and outlets, for example, the external inlets and outlets may include an inlet 4010 for receiving fluid, a purge / exhaust outlet 4015 for purging / exhausting fluid, And a dispensing outlet 4020 through which fluid is dispensed during the dispensing interval. In the example of FIG. 11, distribution block 4005 includes an external purge outlet 4010 because the pump has only one chamber. United States Provisional Patent Application, filed December 2, 2005, entitled “O-Ring-Less Low Profile Fitting and Assembly Thereof”, entitled “O-Ring-Less Low Profile Fitting and Assembly Thereof” No. 60 / 741,667 and invention entitled "O-Ring-Less Low Profile Fittings and Fitting Assemblies", filed Nov. 20, 2006 by the Initiator. US Patent Application No. 11 / 602,513 [ENTG1760-1] is hereby incorporated by reference in its entirety, including embodiments of accessories that may be used to connect the external inlets and outlets of distribution block 4005 to fluid piping. Explain.

The distribution block 4005 is from the inlet to the inlet valve (eg, at least partly defined by the valve plate 4030), from the inlet valve to the pump chamber, from the pump chamber to the exhaust / purge valve, and from the pump chamber to 4020. Move the fluid up to. The pump cover 4025 can prevent the pump motor from being damaged, the piston housing 4027 can protect the piston, and according to one embodiment of the invention the piston housing can be formed of polyethylene or other polymer. The valve plate 4030 provides a valve housing for a system of valves (eg, inlet valves and purge / exhaust valves) that can be configured to direct fluid flow to various components of the pump 4000. The valve plate 4030 and corresponding valve may be formed similarly to the manner described with respect to the valve plate 230 described above. According to one embodiment, each inlet valve and purge / exhaust valve is a diaphragm valve which is at least partially integrated in valve plate 4030 and opened or closed depending on whether pressure or vacuum is applied to the corresponding diaphragm. In other embodiments, some of the valves may be external to the distribution block 4005, or may be disposed on additional valve plates. According to one embodiment, a seat of PTFE is inserted between the valve plate 4030 and the distribution block 4005 to form the diaphragms of the various valves. The valve plate 4030 includes a valve control inlet (not shown) that allows each valve to apply pressure or vacuum to the corresponding diaphragm.

As with multistage pump 100, pump 4000 may include several features that prevent fluid droplets from entering the area of the multistage pump 100 housing electronics. “Anti-drop” features may include protruding lips, beveled features, seals between components, offsets at metal / polymer boundaries, and other features described above that isolate electronic equipment from droplets. The electronics and manifold can be configured in a manner similar to that described above to reduce the effect of heat on the fluid in the pump chamber. Thus, features similar to those used in multistage pumps can be used in a single pump to reduce form factor and thermal effects and prevent fluids from entering the electronics housing.

In addition, many of the control methods described above may also be used with the pump 4000 to achieve a substantially satisfactory distribution. For example, embodiments of the present invention can be used to control the valves of the pump 4000 and the valves of the pumping device according to the valve sequence configured to substantially minimize the time that the fluid flow path through the pumping device is closed. It can be used to control the valve of the pump 4000 to ensure that the system is operated (eg, used for an external area for the pumping device). Also, in certain embodiments, when the pump 4000 is in operation, sufficient time is used between valve state changes to ensure that a particular valve is fully open or closed before other changes begin. For example, the motion of the motor of the pump 4000 may be delayed by a sufficient time to ensure that the inlet valve of the pump 4000 is fully open before the filling step.

Similarly, embodiments of systems and methods for correcting or accounting for pressure variations that may occur in a chamber of a pumping device may be applied to pump 4000 while maintaining substantially the same effect. The dispensing motor may be controlled to substantially maintain the reference pressure in the dispensing chamber prior to dispensing based on the pressure sensed in the dispensing chamber, and a closed circuit may be used to determine whether the pressure in the dispensing chamber is different from the reference pressure (eg, high). Or low) is determined repeatedly, and if different, the operation of the pumping means is adjusted to substantially maintain the pressure required in the dispensing chamber.

Pressure adjustment in the chamber of the pump 4000 is possible at virtually any point of time, but it may be particularly useful to adjust before the dispensing section is initiated. More specifically, the pressure in the dispensing chamber 185 when the pump 4000 initially enters the preparation section is the pressure required for the subsequent dispensing section (eg, the dispensing pressure is from calibration or previous dispensing). Determined, or a reference pressure less than that. This required dispensing pressure can be used to achieve a dispensing having the desired set of characteristics, such as required flow rate, flow rate, and the like. By ensuring that the fluid in the dispensing chamber 185 has this required reference pressure at any time before the outlet valve is opened, the flexibility and variation of the components of the pump 4000 are considered before the dispensing section and satisfactory dispensing are achieved. Can be.

However, since there may be a slight delay between the entry into the preparation section and the start of the dispensing section, the pressure in the chamber of the pump 4000 may vary during the preparation section depending on various factors. To address this pressure variation, embodiments of the present invention can be used such that the required reference pressure is maintained substantially in the chamber of the pump 4000 and satisfactory dispensing is achieved in subsequent dispensing sections.

In addition to controlling the pressure fluctuations in the single stage pump, embodiments of the present invention may also be caused by the operation of various mechanisms or components internal to the pump 4000 or equipment used with the pump 4000. It can be used to correct pressure fluctuations in the dispensing chamber.

One embodiment of the present invention may compensate for pressure changes in the chamber of the pump caused by closing the purge valve or exhaust valve prior to the start of the dispensing section (or any other section). This correction may be achieved by rotating the motor of the pump 4000 reversely so that the volume of the chamber of the pump 4000 is substantially increased by the hold-up volume of the purge valve or the exhaust valve when the valve is closed. Similar to what has been described above with respect to this can be achieved.

Accordingly, embodiments of the present invention provide a pumping device having intact fluid handling characteristics. By a sequence of motor operation and / or opening and closing of the valve in the pumping device, it is possible to prevent or mitigate potentially harmful pressure spikes. Embodiments of the present invention may also employ other pump control mechanisms and valve linings to help reduce the deleterious effects of pressure on the process liquid.

In the foregoing detailed description, the invention has been described with reference to specific embodiments. However, one of ordinary skill in the art appreciates that various modifications and changes can be made without departing from the scope of the present invention as set forth in the claims below. Accordingly, the specification and drawings are to be regarded in an illustrative rather than a restrictive sense, and all such modifications are to be understood as included within the scope of the present invention.

Benefits, other advantages, and solutions to problems have been described above with regard to specific embodiments. However, the benefits, advantages, solutions to problems, and any component (s) that can make any benefit, advantage, or solution achieve or become more prominent are the core of any claim or all claims, It is necessary, or not regarded as an essential feature or component.

Claims (36)

Introducing a fluid into a distribution chamber of the pumping device, Moving the diaphragm of the pumping means of the pumping device to adjust the volume of the distribution chamber to correct pressure fluctuations in the distribution chamber, Pressure fluctuation correction method for directly moving the diaphragm using a motor. The method of claim 1, wherein the pressure fluctuation is a pressure drop due to the opening of the valve. The method of claim 1, wherein the pressure fluctuation is a pressure increase due to the closing of the valve. 4. The method of claim 3 wherein the pressure rise is approximately proportional to the hold-back volume of the valve. 5. The method of claim 4, wherein the diaphragm is moved to increase the volume of the dispensing chamber by an amount substantially equal to the holdback volume of the valve. 6. The method of claim 5, further comprising moving a diaphragm to dispense fluid from the pumping device. 6. The method of claim 5, wherein the diaphragm is moved to reduce the volume of the distribution chamber by approximately overshoot volume after the diaphragm is moved to increase the volume of the distribution chamber by approximately overshoot volume. 8. The method of claim 7, further comprising moving a diaphragm to dissolve the fluid from the pumping device. 5. The method of claim 4 wherein the diaphragm is moved to increase the volume of the dispensing chamber until the required pressure in the dispensing chamber is achieved. 10. The method of claim 9, further comprising moving a diaphragm to dispense fluid from the pumping device. 10. The dispensing of claim 9 wherein the diaphragm is moved until the pressure in the dispensing chamber is below the required pressure to increase the volume of the dispensing chamber and the diaphragm is moved to dispense until approximately the required pressure is achieved. Pressure fluctuation correction method to reduce the volume of the chamber. 12. The method of claim 11 further comprising moving a diaphragm to dispense fluid from the pumping device. Introducing a fluid into a distribution chamber of the pumping device; and A translatable instruction for moving the diaphragm of the pumping means of the pumping device to adjust the volume of the dispensing chamber to compensate for pressure fluctuations in the dispensing chamber, wherein the diaphragm is moved directly using a motor. Readable Media. The computer readable medium of claim 13, wherein the pressure change is a pressure decrease due to the opening of the valve. The computer readable medium of claim 13, wherein the pressure change is a pressure increase upon closing of the valve. 16. The computer readable medium of claim 15, wherein the pressure rise is approximately proportional to the holdback volume of the valve. 17. The computer readable medium of claim 16, wherein the diaphragm is moved to increase the volume of the distribution chamber by an amount substantially equal to the holdback volume of the valve. 18. The computer readable medium of claim 17, further comprising moving a diaphragm to dispense fluid from the pumping device. 18. The computer readable medium of claim 17, wherein the diaphragm is moved to reduce the volume of the distribution chamber by approximately overshoot volume after the diaphragm is moved to increase the volume of the distribution chamber by approximately overshoot volume. 20. The computer readable medium of claim 19, further comprising moving a diaphragm to dispense fluid from the pumping device. 17. The computer readable medium of claim 16, wherein the diaphragm is moved to increase the volume of the distribution chamber until the required pressure within the distribution chamber is achieved. 22. The computer readable medium of claim 21, further comprising moving a diaphragm to dispense fluid from the pumping device. 22. The method of claim 21 wherein the diaphragm is moved until the pressure in the dispensing chamber is below the required pressure to increase the volume of the dispensing chamber and the diaphragm is moved to dispense until approximately the required pressure is achieved. Reducing the volume of the chamber. 24. The computer readable medium of claim 23, further comprising moving a diaphragm to dispense fluid from the pumping device. A pumping device comprising a supply chamber, a dispensing chamber operable to receive a dispensing fluid, and pumping means in the dispensing chamber, the pumping means comprising a diaphragm connected to a motor operable to move the diaphragm directly; A controller configured to adjust the movement of the pumping means of the pumping device to adjust the volume of the distribution chamber to correct the pressure fluctuation in the distribution chamber Pressure fluctuation correction system comprising a. 27. The pressure fluctuation correction system according to claim 25, wherein said pressure fluctuation is a pressure decrease with opening of a valve. 27. The pressure fluctuation correction system of claim 26 wherein the pressure fluctuation is a pressure rise upon closing of the valve. 28. The pressure variation correction system of claim 27 wherein the pressure rise is approximately proportional to the holdback volume of the valve. 29. The pressure fluctuation correction system of claim 28 wherein adjusting the volume of the dispensing chamber comprises moving the diaphragm to increase the volume of the dispensing chamber by an amount substantially equal to the holdback volume of the valve. 30. The pressure fluctuation correction system of claim 29 wherein the controller is operable to regulate movement of a diaphragm to dispense fluid from the pumping device. 30. The method of claim 29, wherein adjusting the volume of the dispensing chamber comprises moving the diaphragm to increase the volume of the dispensing chamber by approximately overshoot volume to move the diaphragm to reduce the volume of the dispensing chamber by approximately overshoot volume. Pressure fluctuation correction system. 32. The pressure fluctuation correction system of claim 31 wherein the controller is operable to regulate movement of a diaphragm to dispense fluid from the pumping device. 29. The pressure fluctuation correction system of claim 28 wherein adjusting the volume of the dispensing chamber comprises moving the diaphragm to increase the volume of the dispensing chamber until the required pressure within the dispensing chamber is achieved. 34. The pressure variation correction system of claim 33 wherein the controller is operable to regulate movement of a diaphragm to dispense fluid from the pumping device. 34. The method of claim 33, wherein adjusting the volume of the dispensing chamber is such that the approximately required pressure is increased after moving the diaphragm to increase the volume of the dispensing chamber until the pressure in the dispensing chamber is below the required pressure. Moving the diaphragm to reduce the volume of the dispensing chamber until it is achieved. 36. The pressure fluctuation correction system of claim 35 wherein the controller is operable to regulate movement of a diaphragm to dispense fluid from the pumping device.

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