TW201613018A - Customizable dispense system with smart controller - Google Patents
Customizable dispense system with smart controllerInfo
- Publication number
- TW201613018A TW201613018A TW104143889A TW104143889A TW201613018A TW 201613018 A TW201613018 A TW 201613018A TW 104143889 A TW104143889 A TW 104143889A TW 104143889 A TW104143889 A TW 104143889A TW 201613018 A TW201613018 A TW 201613018A
- Authority
- TW
- Taiwan
- Prior art keywords
- pump
- smart controller
- dispense system
- smart
- customizable dispense
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/06—Pumps having fluid drive
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D83/00—Containers or packages with special means for dispensing contents
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/007—Installations or systems with two or more pumps or pump cylinders, wherein the flow-path through the stages can be changed, e.g. from series to parallel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/02—Stopping, starting, unloading or idling control
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Control Of Positive-Displacement Pumps (AREA)
- Reciprocating Pumps (AREA)
- Fluid-Pressure Circuits (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Coating Apparatus (AREA)
Abstract
Embodiments disclosed provide a customizable dispense system implementing modular architecture, the customizable dispense system comprising a smart controller configured to operate various pneumatic pumps and motor pumps in various semiconductor manufacturing processes that are sensitive to defects in printed patterns. The smart controller is configured to, upon switching from communicating with a first pump to a second pump, automatically recognize the second pump and apply a control scheme to control the second pump, which may be a motor pump or a pneumatic pump. The s witching may be due to physical disconnection of the first pump and physical connection of the second pump or it can be entirely done via software. The smart controller may be connected to track and a variety of devices, including smart filters.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US35923910P | 2010-06-28 | 2010-06-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW201613018A true TW201613018A (en) | 2016-04-01 |
Family
ID=45441718
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW100122495A TWI545669B (en) | 2010-06-28 | 2011-06-27 | Customizable dispense system with smart controller |
TW104143889A TW201613018A (en) | 2010-06-28 | 2011-06-27 | Customizable dispense system with smart controller |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW100122495A TWI545669B (en) | 2010-06-28 | 2011-06-27 | Customizable dispense system with smart controller |
Country Status (8)
Country | Link |
---|---|
US (1) | US20130101438A1 (en) |
EP (1) | EP2586053A4 (en) |
JP (1) | JP5883856B2 (en) |
KR (1) | KR101810719B1 (en) |
CN (1) | CN102959683B (en) |
SG (1) | SG186725A1 (en) |
TW (2) | TWI545669B (en) |
WO (1) | WO2012006019A2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110716509A (en) * | 2018-07-13 | 2020-01-21 | 台达电子工业股份有限公司 | Production system with quality measurement and mechanism diagnosis functions, driver and method thereof |
US11002629B2 (en) | 2017-01-05 | 2021-05-11 | Illumina, Inc. | Pressure and leak testing methods |
US11054803B2 (en) | 2018-07-13 | 2021-07-06 | Delta Electronics, Inc. | Motor drive, production system and method thereof with quality measuring and mechanism diagnosing functions using real and virtual system modules |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9395049B2 (en) | 2013-07-23 | 2016-07-19 | Baker Hughes Incorporated | Apparatus and methods for delivering a high volume of fluid into an underground well bore from a mobile pumping unit |
WO2015080081A1 (en) * | 2013-11-29 | 2015-06-04 | リソテックジャパン株式会社 | Chemical liquid supply mechanism and small-sized manufacturing device |
US9937990B2 (en) * | 2014-08-01 | 2018-04-10 | Circor Pumps North America, Llc | Intelligent sea water cooling system |
SG11201706560PA (en) | 2015-02-12 | 2017-09-28 | Entegris Inc | Smart package |
US10221856B2 (en) | 2015-08-18 | 2019-03-05 | Bj Services, Llc | Pump system and method of starting pump |
JP6736989B2 (en) * | 2016-06-07 | 2020-08-05 | 東京エレクトロン株式会社 | Treatment liquid supply device, equipment unit, treatment liquid supply method and storage medium |
JP6942497B2 (en) * | 2016-09-08 | 2021-09-29 | 東京エレクトロン株式会社 | Processing liquid supply device |
CN106241246B (en) * | 2016-10-09 | 2018-07-10 | 长沙高汇环保科技有限公司 | Article automatic distributing retracting device control method |
CN110360089B (en) * | 2019-05-17 | 2021-07-27 | 保定雷弗流体科技有限公司 | Network-based speed-regulating peristaltic pump system and flow regulating method thereof |
DE102019115009A1 (en) * | 2019-06-04 | 2020-12-10 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Print head and method of making a print head |
JP7274356B2 (en) * | 2019-06-11 | 2023-05-16 | 東京エレクトロン株式会社 | LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD AND STORAGE MEDIA |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3360951B2 (en) * | 1994-08-11 | 2003-01-07 | エービービー株式会社 | Painting equipment |
JPH10281069A (en) * | 1997-04-03 | 1998-10-20 | Iwaki:Kk | Pump unit |
US7029238B1 (en) * | 1998-11-23 | 2006-04-18 | Mykrolis Corporation | Pump controller for precision pumping apparatus |
JP3415061B2 (en) * | 1999-04-05 | 2003-06-09 | 東芝機械株式会社 | Drive control method and device for electric motor for driving hydraulic pump in injection molding machine |
JP2001038663A (en) * | 1999-07-28 | 2001-02-13 | Yamaha Motor Co Ltd | Machine control system |
US6912443B2 (en) * | 2000-03-10 | 2005-06-28 | David W. Duemler | Modular automated assembly system |
AU2005223452B2 (en) * | 2004-03-16 | 2008-05-15 | Newage Industries, Inc. | Process equipment tracking system |
US20060272576A1 (en) * | 2005-06-02 | 2006-12-07 | Chain-Chi Huang | Piping system structure of semiconductor equipment |
US7717682B2 (en) * | 2005-07-13 | 2010-05-18 | Purity Solutions Llc | Double diaphragm pump and related methods |
US7850431B2 (en) * | 2005-12-02 | 2010-12-14 | Entegris, Inc. | System and method for control of fluid pressure |
CN102705209B (en) * | 2005-12-02 | 2015-09-30 | 恩特格里公司 | For system and method pressure compensated in pump |
CN101495756B (en) * | 2005-12-02 | 2012-07-04 | 恩特格里公司 | System and method for correcting for pressure variations using a motor |
TWI402423B (en) * | 2006-02-28 | 2013-07-21 | Entegris Inc | System and method for operation of a pump |
US20080257912A1 (en) * | 2007-04-17 | 2008-10-23 | Bach David T | Plug and play fluid dispensing technology |
JP5085236B2 (en) * | 2007-08-29 | 2012-11-28 | 株式会社川本製作所 | Water supply device and water supply system using water supply device |
JP4932665B2 (en) * | 2007-10-16 | 2012-05-16 | 東京エレクトロン株式会社 | Processing liquid supply unit, liquid processing apparatus, processing liquid supply method, and storage medium |
-
2011
- 2011-06-27 TW TW100122495A patent/TWI545669B/en active
- 2011-06-27 EP EP11804086.4A patent/EP2586053A4/en not_active Withdrawn
- 2011-06-27 WO PCT/US2011/042018 patent/WO2012006019A2/en active Application Filing
- 2011-06-27 US US13/805,601 patent/US20130101438A1/en not_active Abandoned
- 2011-06-27 SG SG2012092144A patent/SG186725A1/en unknown
- 2011-06-27 CN CN201180032168.5A patent/CN102959683B/en active Active
- 2011-06-27 TW TW104143889A patent/TW201613018A/en unknown
- 2011-06-27 JP JP2013518534A patent/JP5883856B2/en active Active
- 2011-06-27 KR KR1020137002286A patent/KR101810719B1/en active IP Right Grant
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11002629B2 (en) | 2017-01-05 | 2021-05-11 | Illumina, Inc. | Pressure and leak testing methods |
TWI733969B (en) * | 2017-01-05 | 2021-07-21 | 美商伊路米納有限公司 | Pressure and leak testing methods |
CN110716509A (en) * | 2018-07-13 | 2020-01-21 | 台达电子工业股份有限公司 | Production system with quality measurement and mechanism diagnosis functions, driver and method thereof |
TWI692702B (en) * | 2018-07-13 | 2020-05-01 | 台達電子工業股份有限公司 | Production system with product quality measurement function and mechanism diagnosis function and driver and method thereof |
CN110716509B (en) * | 2018-07-13 | 2021-06-04 | 台达电子工业股份有限公司 | Production system with quality measurement and mechanism diagnosis functions, driver and method thereof |
US11054803B2 (en) | 2018-07-13 | 2021-07-06 | Delta Electronics, Inc. | Motor drive, production system and method thereof with quality measuring and mechanism diagnosing functions using real and virtual system modules |
Also Published As
Publication number | Publication date |
---|---|
KR101810719B1 (en) | 2017-12-19 |
EP2586053A4 (en) | 2018-05-02 |
JP2013539202A (en) | 2013-10-17 |
KR20130133752A (en) | 2013-12-09 |
CN102959683B (en) | 2016-04-06 |
US20130101438A1 (en) | 2013-04-25 |
JP5883856B2 (en) | 2016-03-15 |
WO2012006019A3 (en) | 2012-04-05 |
TW201212143A (en) | 2012-03-16 |
CN102959683A (en) | 2013-03-06 |
EP2586053A2 (en) | 2013-05-01 |
TWI545669B (en) | 2016-08-11 |
SG186725A1 (en) | 2013-02-28 |
WO2012006019A2 (en) | 2012-01-12 |
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