TW201613018A - Customizable dispense system with smart controller - Google Patents

Customizable dispense system with smart controller

Info

Publication number
TW201613018A
TW201613018A TW104143889A TW104143889A TW201613018A TW 201613018 A TW201613018 A TW 201613018A TW 104143889 A TW104143889 A TW 104143889A TW 104143889 A TW104143889 A TW 104143889A TW 201613018 A TW201613018 A TW 201613018A
Authority
TW
Taiwan
Prior art keywords
pump
smart controller
dispense system
smart
customizable dispense
Prior art date
Application number
TW104143889A
Other languages
Chinese (zh)
Inventor
James Cedrone
Iraj Gashgaee
Paul J Magoon
Jennifer M Braggin
George L Gonnella
Johnathan Owen Vail
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of TW201613018A publication Critical patent/TW201613018A/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/06—Pumps having fluid drive
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D83/00—Containers or packages with special means for dispensing contents
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/007—Installations or systems with two or more pumps or pump cylinders, wherein the flow-path through the stages can be changed, e.g. from series to parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/02—Stopping, starting, unloading or idling control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Reciprocating Pumps (AREA)
  • Fluid-Pressure Circuits (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Coating Apparatus (AREA)

Abstract

Embodiments disclosed provide a customizable dispense system implementing modular architecture, the customizable dispense system comprising a smart controller configured to operate various pneumatic pumps and motor pumps in various semiconductor manufacturing processes that are sensitive to defects in printed patterns. The smart controller is configured to, upon switching from communicating with a first pump to a second pump, automatically recognize the second pump and apply a control scheme to control the second pump, which may be a motor pump or a pneumatic pump. The s witching may be due to physical disconnection of the first pump and physical connection of the second pump or it can be entirely done via software. The smart controller may be connected to track and a variety of devices, including smart filters.
TW104143889A 2010-06-28 2011-06-27 Customizable dispense system with smart controller TW201613018A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US35923910P 2010-06-28 2010-06-28

Publications (1)

Publication Number Publication Date
TW201613018A true TW201613018A (en) 2016-04-01

Family

ID=45441718

Family Applications (2)

Application Number Title Priority Date Filing Date
TW104143889A TW201613018A (en) 2010-06-28 2011-06-27 Customizable dispense system with smart controller
TW100122495A TWI545669B (en) 2010-06-28 2011-06-27 Customizable dispense system with smart controller

Family Applications After (1)

Application Number Title Priority Date Filing Date
TW100122495A TWI545669B (en) 2010-06-28 2011-06-27 Customizable dispense system with smart controller

Country Status (8)

Country Link
US (1) US20130101438A1 (en)
EP (1) EP2586053A4 (en)
JP (1) JP5883856B2 (en)
KR (1) KR101810719B1 (en)
CN (1) CN102959683B (en)
SG (1) SG186725A1 (en)
TW (2) TW201613018A (en)
WO (1) WO2012006019A2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110716509A (en) * 2018-07-13 2020-01-21 台达电子工业股份有限公司 Production system with quality measurement and mechanism diagnosis functions, driver and method thereof
US11002629B2 (en) 2017-01-05 2021-05-11 Illumina, Inc. Pressure and leak testing methods
US11054803B2 (en) 2018-07-13 2021-07-06 Delta Electronics, Inc. Motor drive, production system and method thereof with quality measuring and mechanism diagnosing functions using real and virtual system modules

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US9395049B2 (en) 2013-07-23 2016-07-19 Baker Hughes Incorporated Apparatus and methods for delivering a high volume of fluid into an underground well bore from a mobile pumping unit
WO2015080081A1 (en) * 2013-11-29 2015-06-04 リソテックジャパン株式会社 Chemical liquid supply mechanism and small-sized manufacturing device
US9937990B2 (en) * 2014-08-01 2018-04-10 Circor Pumps North America, Llc Intelligent sea water cooling system
US10247363B2 (en) 2015-02-12 2019-04-02 Entegris, Inc. Smart package
US10221856B2 (en) 2015-08-18 2019-03-05 Bj Services, Llc Pump system and method of starting pump
JP6736989B2 (en) * 2016-06-07 2020-08-05 東京エレクトロン株式会社 Treatment liquid supply device, equipment unit, treatment liquid supply method and storage medium
JP6942497B2 (en) * 2016-09-08 2021-09-29 東京エレクトロン株式会社 Processing liquid supply device
CN106241246B (en) * 2016-10-09 2018-07-10 长沙高汇环保科技有限公司 Article automatic distributing retracting device control method
CN110360089B (en) * 2019-05-17 2021-07-27 保定雷弗流体科技有限公司 Network-based speed-regulating peristaltic pump system and flow regulating method thereof
DE102019115009A1 (en) * 2019-06-04 2020-12-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Print head and method of making a print head
JP7274356B2 (en) * 2019-06-11 2023-05-16 東京エレクトロン株式会社 LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD AND STORAGE MEDIA

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JP3360951B2 (en) * 1994-08-11 2003-01-07 エービービー株式会社 Painting equipment
JPH10281069A (en) * 1997-04-03 1998-10-20 Iwaki:Kk Pump unit
US7029238B1 (en) * 1998-11-23 2006-04-18 Mykrolis Corporation Pump controller for precision pumping apparatus
JP3415061B2 (en) * 1999-04-05 2003-06-09 東芝機械株式会社 Drive control method and device for electric motor for driving hydraulic pump in injection molding machine
JP2001038663A (en) * 1999-07-28 2001-02-13 Yamaha Motor Co Ltd Machine control system
US6912443B2 (en) * 2000-03-10 2005-06-28 David W. Duemler Modular automated assembly system
AU2005223452B2 (en) * 2004-03-16 2008-05-15 Newage Industries, Inc. Process equipment tracking system
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US7850431B2 (en) * 2005-12-02 2010-12-14 Entegris, Inc. System and method for control of fluid pressure
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TWI402423B (en) * 2006-02-28 2013-07-21 Entegris Inc System and method for operation of a pump
US20080257912A1 (en) * 2007-04-17 2008-10-23 Bach David T Plug and play fluid dispensing technology
JP5085236B2 (en) * 2007-08-29 2012-11-28 株式会社川本製作所 Water supply device and water supply system using water supply device
JP4932665B2 (en) * 2007-10-16 2012-05-16 東京エレクトロン株式会社 Processing liquid supply unit, liquid processing apparatus, processing liquid supply method, and storage medium

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11002629B2 (en) 2017-01-05 2021-05-11 Illumina, Inc. Pressure and leak testing methods
TWI733969B (en) * 2017-01-05 2021-07-21 美商伊路米納有限公司 Pressure and leak testing methods
CN110716509A (en) * 2018-07-13 2020-01-21 台达电子工业股份有限公司 Production system with quality measurement and mechanism diagnosis functions, driver and method thereof
TWI692702B (en) * 2018-07-13 2020-05-01 台達電子工業股份有限公司 Production system with product quality measurement function and mechanism diagnosis function and driver and method thereof
CN110716509B (en) * 2018-07-13 2021-06-04 台达电子工业股份有限公司 Production system with quality measurement and mechanism diagnosis functions, driver and method thereof
US11054803B2 (en) 2018-07-13 2021-07-06 Delta Electronics, Inc. Motor drive, production system and method thereof with quality measuring and mechanism diagnosing functions using real and virtual system modules

Also Published As

Publication number Publication date
EP2586053A4 (en) 2018-05-02
JP2013539202A (en) 2013-10-17
KR20130133752A (en) 2013-12-09
JP5883856B2 (en) 2016-03-15
EP2586053A2 (en) 2013-05-01
WO2012006019A2 (en) 2012-01-12
KR101810719B1 (en) 2017-12-19
US20130101438A1 (en) 2013-04-25
CN102959683B (en) 2016-04-06
TWI545669B (en) 2016-08-11
TW201212143A (en) 2012-03-16
WO2012006019A3 (en) 2012-04-05
CN102959683A (en) 2013-03-06
SG186725A1 (en) 2013-02-28

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