TWI545669B - Customizable dispense system with smart controller - Google Patents

Customizable dispense system with smart controller Download PDF

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Publication number
TWI545669B
TWI545669B TW100122495A TW100122495A TWI545669B TW I545669 B TWI545669 B TW I545669B TW 100122495 A TW100122495 A TW 100122495A TW 100122495 A TW100122495 A TW 100122495A TW I545669 B TWI545669 B TW I545669B
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Taiwan
Prior art keywords
pump
pumps
dispensing
pneumatic
filter
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TW100122495A
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Chinese (zh)
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TW201212143A (en
Inventor
詹姆士 賽隆
伊拉 賈西蓋
保羅J 馬岡
珍妮佛M 巴金
喬治L 葛那拉
強納森 歐文 維爾
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恩特葛瑞斯公司
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00Machines, pumps, or pumping installations having flexible working members
    • F04B43/02Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/06Pumps having fluid drive
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65DCONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D83/00Containers or packages with special means for dispensing contents
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/007Installations or systems with two or more pumps or pump cylinders, wherein the flow-path through the stages can be changed, e.g. from series to parallel
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/02Stopping, starting, unloading or idling control
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67017Apparatus for fluid treatment

Description

具有智慧型控制器之可客製化分配系統Customized distribution system with intelligent controller

本發明大體上係關於半導體製造程序中之液體分配,且更特定而言,係關於一種具有一智慧型控制器之新分配系統,該智慧型控制器用於控制可客製化泵操作以滿足半導體製造領域中之不同需要。 The present invention relates generally to liquid dispensing in semiconductor fabrication processes and, more particularly, to a new dispensing system having a smart controller for controlling customizable pump operation to meet semiconductors Different needs in the manufacturing field.

存在對流體藉由抽汲裝置分配之量及/或速率之精確控制為必要的許多應用。舉例而言,在半導體製造程序中,重要的是控制諸如光阻化學品之光化學品施加至半導體晶圓之量及速率。半導體製造程序指代用以產生存在於日常電氣及電子器件中之積體電路的程序。其包括一照相及化學處理步驟序列,在該等步驟期間電子電路逐漸地產生於由純半導體材料製成之晶圓上。在處理期間施加至半導體晶圓之塗層通常需要以埃為單位而量測的橫越晶圓之表面之某一平坦度及/或均勻厚度。必須仔細地控制處理化學品施加(亦即,分配)至晶圓上之速率以確保均一地施加處理液體。There are many applications where precise control of the amount and/or rate of fluid dispensed by the pumping device is necessary. For example, in semiconductor fabrication processes, it is important to control the amount and rate at which photochemicals, such as photoresist chemicals, are applied to the semiconductor wafer. Semiconductor manufacturing processes refer to programs used to generate integrated circuits that are present in everyday electrical and electronic devices. It includes a sequence of photographic and chemical processing steps during which electronic circuitry is gradually produced on a wafer made of pure semiconductor material. The coating applied to the semiconductor wafer during processing typically requires a certain flatness and/or uniform thickness across the surface of the wafer as measured in angstroms. The rate at which the treatment chemical is applied (i.e., dispensed) onto the wafer must be carefully controlled to ensure uniform application of the treatment liquid.

用於半導體工業中之光化學品可極昂貴。因此,高度地需要確保使用最小但適合量之化學品且確保化學品不受到抽汲裝置損壞。不幸地,此等理想品質可由於許多相互關聯障礙而在現今之抽汲系統中極其難以達成。舉例而言,歸因於來臨之供應問題,壓力可隨著不同系統而變化。歸因於流體動力學及屬性,壓力需要隨著不同流體而變化(例如,具有較高黏度之流體需要較多壓力)。因為此等障礙係相互關聯的,所以有時解決一個障礙可能會引起更多問題及/或使事情更差。再者,不同應用具有不同需要。滿足特定應用之需要的泵系統可能不適於不同應用。Photochemicals used in the semiconductor industry can be extremely expensive. Therefore, there is a high degree of need to ensure that the smallest but suitable amount of chemicals is used and that the chemicals are not damaged by the twitching device. Unfortunately, such desirable qualities can be extremely difficult to achieve in today's convulsion systems due to many interrelated obstacles. For example, due to the supply problem of the coming, the pressure can vary with different systems. Due to fluid dynamics and properties, pressure needs to vary with different fluids (eg, fluids with higher viscosities require more pressure). Because these obstacles are interrelated, sometimes solving an obstacle can cause more problems and/or make things worse. Furthermore, different applications have different needs. Pump systems that meet the needs of a particular application may not be suitable for different applications.

在半導體製造中,可使用各種泵以混合化學品,以及將化學品之混合物分配至晶圓上。可使用諸如Entegris IntelliGen小型光微影輥軋邊緣隔膜泵之高效能泵以直接混合及分配該等化學品(Entegris及IntelliGen為明尼蘇達州Chaska之Entegris公司的商標)。此等化學品可隨著不同應用而變化,且不同應用可具有不同需要。因此,用以分配該等化學品之一泵系統必須考慮複數個因素,包括尺寸、成本、效能(速度及準確度兩者)、可靠性、適應性,等等。In semiconductor manufacturing, various pumps can be used to mix the chemicals, and a mixture of chemicals can be dispensed onto the wafer. A high performance pump such as the Entegris IntelliGen compact photolithography roll edge diaphragm pump can be used to directly mix and dispense the chemicals (Entegris and IntelliGen are trademarks of Entegris, Inc. of Chaska, Minn.). These chemicals can vary from application to application and different applications can have different needs. Therefore, a pump system for dispensing such chemicals must consider a number of factors, including size, cost, performance (both speed and accuracy), reliability, adaptability, and the like.

本文中所揭示之實施例可藉由一可客製化分配系統來處理此等需要,該可客製化分配系統建置於模組化架構上且包括用於控制此通用「隨插即用」(plug-and-play)分配系統中之組件的單一主控制器。在本發明內,術語「可客製化」指代可容易改變、修改或以其他方式更改本文中所揭示之一分配系統之實施例以適合各種需要的事實。每當出現此需要時,便可動態地發生此改變、修改或更改。舉例而言,本文中所揭示之一可客製化分配系統之一實施例可最初以一氣動至氣動組態予以建置。氣動驅動泵(氣動泵)相比於馬達驅動泵(馬達泵)通常較不昂貴且可提供正壓力過濾及良好輸送量,此情形使此氣動至氣動組態對於處置諸如用於非臨界層之應用的應用係理想的。可將該氣動至氣動組態容易改變、修改或以其他方式更改成用於臨界層應用之一馬達至馬達組態。在一些實施例中,該單一主控制器經組態成具有必要智慧,且因此在本文中被稱作一「智慧型」控制器,其用以自動地辨識該可客製化分配系統之一改變且根據一新組態及/或一新應用而操作。Embodiments disclosed herein may address such needs by a customizable distribution system built on a modular architecture and including for controlling this generic "plug and play" (plug-and-play) A single master controller that distributes components in a system. Within the present invention, the term "customizable" refers to the fact that embodiments of one of the dispensing systems disclosed herein can be readily altered, modified, or otherwise modified to suit various needs. This change, modification, or change can occur dynamically whenever this need arises. For example, one of the embodiments of the customizable dispensing system disclosed herein can be initially constructed in a pneumatic to pneumatic configuration. Pneumatically driven pumps (pneumatic pumps) are generally less expensive and provide positive pressure filtration and good throughput compared to motor driven pumps (motor pumps), which makes this pneumatic to pneumatic configuration suitable for disposal such as for non-critical layers The application of the application is ideal. The pneumatic to pneumatic configuration can be easily changed, modified or otherwise modified to be one of the motor-to-motor configurations for critical layer applications. In some embodiments, the single master controller is configured to have the necessary intelligence and is therefore referred to herein as a "smart" controller for automatically identifying one of the customizable dispensing systems Change and operate according to a new configuration and/or a new application.

在一些實施例中,本文中所揭示之一可客製化分配系統之該智慧型控制器可經組態以在對經印刷圖案中之缺陷敏感的半導體製造程序中操作複數個泵。該複數個泵可包括至少一氣動泵及至少一馬達泵。該可客製化分配系統可進一步包含將該智慧型控制器與一軌道及多種器件連接之複數個線路。在一些實施例中,該多種器件可包括具有射頻識別標籤之過濾器、感測器,及泵頭。In some embodiments, one of the smart controllers of the customizable dispensing system disclosed herein can be configured to operate a plurality of pumps in a semiconductor fabrication process that is sensitive to defects in the printed pattern. The plurality of pumps can include at least one pneumatic pump and at least one motor pump. The customizable dispensing system can further include a plurality of lines connecting the smart controller to a track and a plurality of devices. In some embodiments, the plurality of devices can include a filter having a radio frequency identification tag, a sensor, and a pump head.

在一些實施例中,該智慧型控制器經進一步組態以在將該複數個線路中之一者自與一第一泵之通信切換至與一第二泵之通信後隨即自動地辨識該第二泵且應用對應於該第二泵之一控制方案,以便精確地且準確地控制該第二泵而無最小(若有的話)停機時間。In some embodiments, the smart controller is further configured to automatically identify the one of the plurality of lines after switching from communication with a first pump to communication with a second pump The second pump and application corresponds to one of the second pump control schemes to accurately and accurately control the second pump without minimal, if any, downtime.

在一些實施例中,該切換可發生於馬達泵之間、氣動泵之間,或氣動泵與馬達泵之一混合物之間。舉例而言,一使用者可拔出氣動泵且插入馬達泵以接管彼等氣動泵之某些功能。實例功能可包括化學饋入及分配。在一些實施例中,實體斷開/連接可為不必要的,且該切換係完全地經由軟體而進行。In some embodiments, the switching can occur between motor pumps, between pneumatic pumps, or between a mixture of a pneumatic pump and a motor pump. For example, a user can pull out a pneumatic pump and insert a motor pump to take over some of the functions of their pneumatic pumps. Example functions may include chemical feeds and dispenses. In some embodiments, physical disconnection/connection may be unnecessary and the switching is done entirely via software.

在一些實施例中,該智慧型控制器可經組態以在與一新連接泵建立介面連接後隨即自動地辨識該新連接泵且應用對應於該新連接泵之一控制方案,該新連接泵可為一馬達泵或一氣動泵。該智慧型控制器可包含儲存與複數個泵相關聯之資訊的一機上資料庫。In some embodiments, the smart controller can be configured to automatically identify the new connected pump immediately after establishing an interface connection with a new connected pump and apply a control scheme corresponding to the new connected pump, the new connection The pump can be a motor pump or a pneumatic pump. The smart controller can include an on-board repository that stores information associated with a plurality of pumps.

在一些實施例中,該智慧型控制器可經組態以控制一或多個整合泵。在一些實施例中,一整合泵可包含經實體地組合為一單元之兩個或兩個以上氣動泵。該單元中之該兩個或兩個以上氣動泵可彼此獨立地操作。在一些實施例中,該智慧型控制器可經進一步組態以獨立地控制該單元中之該兩個或兩個以上氣動泵。In some embodiments, the smart controller can be configured to control one or more integrated pumps. In some embodiments, an integrated pump can include two or more pneumatic pumps that are physically combined into one unit. The two or more pneumatic pumps in the unit can operate independently of each other. In some embodiments, the smart controller can be further configured to independently control the two or more pneumatic pumps in the unit.

在一些實施例中,一可客製化分配系統可包括一組饋入泵及一組分配泵。在一些實施例中,一智慧型控制器可經組態以操作可包括一或多個整合泵之該組饋入泵及該組分配泵。In some embodiments, a customizable dispensing system can include a set of feed pumps and a set of dispense pumps. In some embodiments, a smart controller can be configured to operate the set of feed pumps and the set of dispense pumps that can include one or more integrated pumps.

實施本文中所揭示之實施例的軟體可實施於合適電腦可執行指令中,該等指令可駐留於一或多個非暫時性電腦可讀媒體上。在本發明內,術語「電腦可讀儲存媒體」涵蓋可藉由諸如處理器或控制器之處理單元讀取的所有類型之資料儲存媒體。電腦可讀儲存媒體之實例可包括隨機存取記憶體、唯讀記憶體、硬碟機、資料匣、軟碟、快閃記憶體驅動器,及其類似者。Software embodying the embodiments disclosed herein may be implemented in suitable computer executable instructions, which may reside on one or more non-transitory computer readable media. Within the present invention, the term "computer readable storage medium" encompasses all types of data storage media that can be read by a processing unit such as a processor or controller. Examples of computer readable storage media may include random access memory, read only memory, hard drive, data cartridge, floppy disk, flash memory drive, and the like.

本文中所揭示之實施例可提供許多優勢。舉例而言,代替固定數目個泵,本文中所揭示之可客製化分配系統可隨著時間推移而支援可變數目個不同類型之泵。此混合及匹配靈活性允許該系統適於每一特定應用、減少維持該系統之成本,且提供容易升級至新類型之泵及/或新系統設置的方式。The embodiments disclosed herein can provide a number of advantages. For example, instead of a fixed number of pumps, the customizable dispensing system disclosed herein can support a variable number of different types of pumps over time. This blending and matching flexibility allows the system to be adapted to each particular application, reduce the cost of maintaining the system, and provide a means of easily upgrading to new types of pumps and/or new system settings.

當結合以下描述及隨附圖式進行考慮時,將更好地瞭解及理解本發明之此等態樣及其他態樣。然而,應理解,雖然以下描述指示本發明之各種實施例及其眾多特定細節,但以下描述係經由說明而非限制予以給出。在不脫離本發明之精神的情況下,可在本發明之範疇內進行許多取代、修改、添加及/或重排,且本發明包括所有此等取代、修改、添加及/或重排。These and other aspects of the present invention will be better understood and understood from the <RTIgt; It is to be understood, however, that the description of the claims Many substitutions, modifications, additions and/or rearrangements may be made without departing from the spirit of the invention, and the invention includes all such substitutions, modifications, additions and/or rearrangements.

包括隨附於本說明書且形成本說明書之部分的圖式以描繪本發明之某些態樣。應注意,在圖式中所說明之特徵未必按比例繪製。可藉由參考結合隨附圖式所採取之以下描述而獲取對本發明及其優勢之更完整的理解,在該等隨附圖式中類似參考數字指示類似特徵。The accompanying drawings, which are incorporated in the specification of the claims It should be noted that the features illustrated in the drawings are not necessarily to scale. A more complete understanding of the present invention and its advantages are set forth in the <RTIgt;

參考在隨附圖式中所說明且在以下描述中所詳述之例示性且因此非限制性的實施例,更充分地解釋本發明以及其各種特徵及有利細節。可省略已知程式設計技術、電腦軟體、硬體、操作平台及協定之描述,以便不必要地在細節方面混淆本發明。然而,應理解,雖然詳細描述及特定實例指示較佳實施例,但詳細描述及特定實例係僅經由說明而非限制予以給出。在基本發明性概念之精神及/或範疇內的各種取代、修改、添加及/或重排將自本發明而對熟習此項技術者變得顯而易見。The invention and its various features and advantageous details are explained more fully by reference to the exemplary embodiments illustrated in the accompanying drawings Descriptions of well-known programming techniques, computer software, hardware, operating platforms, and conventions may be omitted to unnecessarily obscure the invention in detail. It should be understood, however, that the description of the preferred embodiments Various substitutions, modifications, additions and/or rearrangements within the spirit and/or scope of the basic inventive concept will become apparent to those skilled in the art.

圖1描繪實例多級泵100之圖解表示。多級泵100包括饋入級部分105及分離分配級部分110。自流體流動觀點來看,過濾器120定位於饋入級部分105與分配級部分110之間以自處理流體過濾雜質。數個閥可控制通過多級泵100之流體流動,該等閥包括(例如)入口閥125、隔離閥130、障壁閥135、淨化閥140、排放閥145及出口閥147。打開或閉合多級泵100之閥以允許或限制至多級泵100之各種部分的流體流動。此等閥可為取決於是確證壓力或是確證真空而打開或閉合之氣動致動(亦即,氣體驅動)隔膜閥。FIG. 1 depicts a graphical representation of an example multi-stage pump 100. The multi-stage pump 100 includes a feed stage portion 105 and a split distribution stage portion 110. From the fluid flow point of view, the filter 120 is positioned between the feed stage portion 105 and the distribution stage portion 110 to filter impurities from the process fluid. A plurality of valves can control fluid flow through the multi-stage pump 100, including, for example, an inlet valve 125, an isolation valve 130, a barrier valve 135, a purge valve 140, a discharge valve 145, and an outlet valve 147. The valves of the multi-stage pump 100 are opened or closed to allow or limit fluid flow to various portions of the multi-stage pump 100. These valves may be pneumatically actuated (i.e., gas actuated) diaphragm valves that open or close depending on whether the pressure is confirmed or the vacuum is confirmed.

分配級部分110可進一步包括判定分配級110處之流體壓力的壓力感測器112。可使用藉由壓力感測器112判定之壓力以控制如下文所描述之各種泵之速度。實例壓力感測器包括陶瓷及聚合物壓阻式及電容式壓力感測器,包括由德國Korb之Metallux AG製造的壓力感測器。接觸處理流體的壓力感測器112之面可為全氟聚合物。泵100可包括額外壓力感測器,諸如,判定饋入級105處之流體壓力的壓力感測器,及/或用以讀取饋入腔室155中之壓力的壓力感測器。The distribution stage portion 110 can further include a pressure sensor 112 that determines the fluid pressure at the distribution stage 110. The pressure determined by pressure sensor 112 can be used to control the speed of the various pumps as described below. Example pressure sensors include ceramic and polymer piezoresistive and capacitive pressure sensors, including pressure sensors manufactured by Metallux AG of Korb, Germany. The face of the pressure sensor 112 that is in contact with the treatment fluid can be a perfluoropolymer. The pump 100 can include additional pressure sensors, such as pressure sensors that determine the fluid pressure at the feed stage 105, and/or pressure sensors to read the pressure fed into the chamber 155.

饋入級105及分配級110可包括輥軋隔膜泵以抽汲多級泵100中之流體。舉例而言,饋入級泵150(「饋入泵150」)包括收集流體之饋入腔室155、用以在饋入腔室155內移動且移置流體之饋入級隔膜160、用以移動饋入級隔膜160之活塞165、導螺桿170,及步進馬達175。導螺桿170經由用於將能量自馬達賦予至導螺桿170之螺帽、齒輪或其他機構而耦接至步進馬達175。根據一實施例,饋入馬達175旋轉一螺帽,該螺帽又致動導螺桿170,從而引起活塞165致動。分配級泵180(「分配泵180」)可相似地包括分配腔室185、分配級隔膜190、活塞192、導螺桿195,及分配馬達200。饋入級105及分配級110可各自包括多種泵,該等泵包括氣動致動泵、液壓泵或其他泵。舉例而言,氣動致動泵可用於饋入級,且步進馬達驅動液壓泵可用於分配級。Feeding stage 105 and dispensing stage 110 may include rolling a diaphragm pump to pump fluid in multi-stage pump 100. For example, the feed stage pump 150 ("feed pump 150") includes a feed chamber 155 for collecting fluid, a feed stage diaphragm 160 for moving within the feed chamber 155 and displacing the fluid, for The piston 165 of the feed stage diaphragm 160, the lead screw 170, and the stepper motor 175 are moved. The lead screw 170 is coupled to the stepper motor 175 via a nut, gear or other mechanism for imparting energy from the motor to the lead screw 170. According to an embodiment, the feed motor 175 rotates a nut that in turn actuates the lead screw 170 to cause the piston 165 to actuate. Dispensing stage pump 180 ("dispensing pump 180") can similarly include dispensing chamber 185, dispensing stage diaphragm 190, piston 192, lead screw 195, and dispensing motor 200. Feed stage 105 and distribution stage 110 can each include a variety of pumps, including pneumatically actuated pumps, hydraulic pumps, or other pumps. For example, a pneumatically actuated pump can be used for the feed stage and a stepper motor driven hydraulic pump can be used for the dispense stage.

在圖1所示之實例中,多級泵100在饋入級與分配級之間實施馬達至馬達組態。饋入馬達175及分配馬達200可為任何合適馬達。舉例而言,分配馬達200可為永久磁體同步馬達(「PMSM」)。PMSM可藉由數位信號處理器(「DSP」)利用場導向控制(「FOC」)或其他位置/速度控制方案予以控制。在一些實施例中,多級泵100中之智慧型控制器經組態以利用該控制方案來控制分配馬達200。In the example shown in Figure 1, the multi-stage pump 100 implements a motor-to-motor configuration between the feed stage and the dispense stage. Feed motor 175 and distribution motor 200 can be any suitable motor. For example, the distribution motor 200 can be a permanent magnet synchronous motor ("PMSM"). The PMSM can be controlled by a Field Signal Control ("DSP") using Field Oriented Control ("FOC") or other position/speed control schemes. In some embodiments, the smart controller in multi-stage pump 100 is configured to utilize the control scheme to control distribution motor 200.

分配馬達200可進一步包括用於分配馬達200之位置之即時回饋的編碼器(例如,細線旋轉位置編碼器)。位置感測器之使用實現活塞192之位置的準確且可重複之控制,此情形導致對分配腔室185中之流體移動的準確且可重複之控制。舉例而言,在使用可向DSP提供8000個脈衝之2000線編碼器的情況下,有可能在達到0.045度之旋轉的程度上準確地量測且在0.045度之旋轉下控制分配馬達200之位置。另外,PMSM可以低速在幾乎無振動的情況下運轉。饋入馬達175亦可為PMSM或步進馬達。舉例而言,饋入馬達175可為零件號為L1LAB-005的新罕布夏Dover之EAD Motors之步進馬達,且分配馬達200可為零件號為DA23DBBL-13E17A的EAD Motors之無刷DC馬達。The distribution motor 200 can further include an encoder (eg, a fine line rotational position encoder) for distributing the instantaneous feedback of the position of the motor 200. The use of a position sensor enables accurate and repeatable control of the position of the piston 192, which results in accurate and repeatable control of fluid movement in the dispensing chamber 185. For example, in the case of using a 2000 line encoder that can provide 8000 pulses to the DSP, it is possible to accurately measure the degree of rotation up to 0.045 degrees and control the position of the distribution motor 200 at a rotation of 0.045 degrees. . In addition, PMSM can operate at low speed with almost no vibration. The feed motor 175 can also be a PMSM or a stepper motor. For example, the feed motor 175 can be a stepper motor of EAD Motors of New Hampshire Dover, part number L1LAB-005, and the distribution motor 200 can be a brushless DC motor of EAD Motors, part number DA23DBBL-13E17A. .

圖2及圖3描繪用於多級泵100之泵總成之實例之透視圖。多級泵100可包括界定通過多級泵100之各種流體流動路徑的分配區塊205。分配泵區塊205可為PTFE、改質後PTFE或其他材料之整體區塊。因為此等材料與許多處理流體不反應或最低程度地反應,所以此等材料之使用允許在最小量之額外硬體的情況下將流動過道及泵腔室直接加工至分配區塊205中。因此,分配區塊205藉由提供流體歧管而減少針對管道之需要。2 and 3 depict perspective views of an example of a pump assembly for a multi-stage pump 100. The multi-stage pump 100 can include a distribution block 205 that defines various fluid flow paths through the multi-stage pump 100. Dispensing pump block 205 can be an integral block of PTFE, modified PTFE, or other materials. Because these materials do not react or minimally react with many process fluids, the use of such materials allows direct processing of the flow aisle and pump chamber into the distribution block 205 with a minimum amount of additional hardware. Thus, the distribution block 205 reduces the need for piping by providing a fluid manifold.

分配區塊205可包括各種外部入口及出口,該等外部入口及出口包括(例如)接收流體所通過之入口210、用於在排放片段期間排放流體之排放出口215,及在分配片段期間分配流體所通過之分配出口220。在圖2之實例中,分配區塊205不包括外部淨化出口,此係因為經淨化流體被導引回至饋入腔室。然而,在其他實施中,可在外部淨化流體。The distribution block 205 can include various external inlets and outlets including, for example, an inlet 210 through which the receiving fluid passes, a discharge outlet 215 for discharging fluid during the discharge of the segments, and dispensing fluid during dispensing of the segments The distribution exit 220 is passed. In the example of FIG. 2, the dispensing block 205 does not include an external purge outlet because the purified fluid is directed back to the feed chamber. However, in other implementations, the fluid can be purified externally.

分配區塊205將流體導引至饋入泵、分配泵及過濾器120。泵罩蓋225可保護饋入馬達175及分配馬達200以防損壞,而活塞外殼227可提供針對活塞165及活塞192之保護。在此實例中,閥板230提供用於一閥系統(例如,圖1之入口閥125、隔離閥130、障壁閥135、淨化閥140及排放閥145)之閥外殼,該閥系統可經組態以將流體流動引導至多級泵100之各種組件。根據一實施例,入口閥125、隔離閥130、障壁閥135、淨化閥140及排放閥145中之每一者部分地整合至閥板230中且為一隔膜閥,該隔膜閥取決於是將壓力或是將真空施加至相應隔膜閥而打開或閉合。The dispensing block 205 directs fluid to the feed pump, dispensing pump, and filter 120. The pump cover 225 protects the feed motor 175 and the distribution motor 200 from damage, while the piston housing 227 provides protection against the piston 165 and the piston 192. In this example, valve plate 230 provides a valve housing for a valve system (eg, inlet valve 125, isolation valve 130, barrier valve 135, purge valve 140, and discharge valve 145 of FIG. 1) that can be grouped State to direct fluid flow to various components of multi-stage pump 100. According to an embodiment, each of the inlet valve 125, the isolation valve 130, the barrier valve 135, the purge valve 140, and the discharge valve 145 is partially integrated into the valve plate 230 and is a diaphragm valve that depends on the pressure Either vacuum is applied to the corresponding diaphragm valve to open or close.

閥板230包括用於每一閥之閥控制入口以將壓力或真空施加至相應隔膜。舉例而言,入口235對應於障壁閥135,入口240對應於淨化閥140,入口245對應於隔離閥130,入口250對應於排放閥145,且入口255對應於入口閥125。藉由將壓力或真空選擇性地施加至該等入口,打開及閉合該等相應閥。可以可隨著不同應用而變化之各種序列打開及閉合該等閥。閥板230可經組態以減少閥之滯留體積、消除歸因於真空波動之體積變化、減少真空要求且減少對閥隔膜之應力。Valve plate 230 includes a valve control inlet for each valve to apply pressure or vacuum to the respective diaphragm. For example, the inlet 235 corresponds to the barrier valve 135, the inlet 240 corresponds to the purge valve 140, the inlet 245 corresponds to the isolation valve 130, the inlet 250 corresponds to the discharge valve 145, and the inlet 255 corresponds to the inlet valve 125. The respective valves are opened and closed by selectively applying pressure or vacuum to the inlets. The valves can be opened and closed in a variety of sequences that can vary with different applications. The valve plate 230 can be configured to reduce the retention volume of the valve, eliminate volume changes due to vacuum fluctuations, reduce vacuum requirements, and reduce stress on the valve diaphragm.

閥控制氣體及真空係經由閥控制供應管線260而提供至閥板230,閥控制供應管線260自閥控制歧管(藉由歧管罩蓋263或外殼罩蓋225覆蓋)通過分配區塊205而延伸至閥板230。閥控制氣體供應入口265向閥控制歧管提供加壓氣體,且真空入口270向閥控制歧管提供真空(或低壓力)。閥控制歧管充當三通閥以將加壓氣體或真空經由供應管線260而導引至閥板230之適當入口以致動相應閥。The valve control gas and vacuum are provided to the valve plate 230 via a valve control supply line 260 that passes from the valve control manifold (covered by the manifold cover 263 or the outer casing cover 225) through the distribution block 205 Extending to the valve plate 230. The valve control gas supply inlet 265 provides pressurized gas to the valve control manifold and the vacuum inlet 270 provides vacuum (or low pressure) to the valve control manifold. The valve control manifold acts as a three-way valve to direct pressurized gas or vacuum via supply line 260 to the appropriate inlet of valve plate 230 to actuate the respective valve.

在圖3中,使分配區塊205透明以展示通過分配區塊205而界定之流體流動過道。分配區塊205界定用於多級泵100之各種腔室及流體流動過道。可將饋入腔室155及分配腔室185直接加工至分配區塊205中。另外,可將各種流動過道加工至分配區塊205中。流體流動過道自入口210延伸至入口閥。流體流動過道280自入口閥延伸至饋入腔室155,以完成自入口210至饋入泵150之路徑。閥外殼230中之入口閥125調節在入口210與饋入泵150之間的流動。流動過道285將流體自饋入泵150導引至閥板230中之隔離閥130。藉由另一流動過道將隔離閥130之輸出導引至過濾器120。流體自過濾器120流動通過將過濾器120連接至排放閥145及障壁閥135之流動過道。將排放閥145之輸出導引至排放出口215,而將障壁閥135之輸出經由流動過道290而導引至分配泵180。在分配片段期間,分配泵可將流體經由流動過道295而輸出至出口220,或在淨化片段中,通過流動過道300而輸出至淨化閥。在淨化片段期間,可使流體通過流動過道305而返回至饋入泵150。因為可在PTFE(或其他材料)區塊中直接形成流體流動過道,所以分配區塊205可充當用於多級泵100之各種組件之間的處理流體的管道,從而排除或減少針對額外導管之需要,在其他狀況下,可將導管插入至分配區塊205中以界定流體流動過道。In FIG. 3, the distribution block 205 is made transparent to show the fluid flow aisles defined by the distribution block 205. The distribution block 205 defines various chambers and fluid flow aisles for the multi-stage pump 100. The feed chamber 155 and the dispensing chamber 185 can be machined directly into the dispense block 205. Additionally, various flow aisles can be machined into the distribution block 205. The fluid flow aisle extends from the inlet 210 to the inlet valve. Fluid flow aisle 280 extends from the inlet valve to feed chamber 155 to complete the path from inlet 210 to feed pump 150. The inlet valve 125 in the valve housing 230 regulates the flow between the inlet 210 and the feed pump 150. The flow aisle 285 directs fluid from the feed pump 150 to the isolation valve 130 in the valve plate 230. The output of the isolation valve 130 is directed to the filter 120 by another flow aisle. Fluid flows from the filter 120 through a flow aisle that connects the filter 120 to the discharge valve 145 and the barrier valve 135. The output of the discharge valve 145 is directed to the discharge outlet 215, and the output of the barrier valve 135 is directed to the distribution pump 180 via the flow aisle 290. During dispensing of the segments, the dispensing pump may output fluid to the outlet 220 via the flow aisle 295, or in the purge section, through the flow aisle 300 to the purge valve. Fluid may be returned to feed pump 150 through flow aisle 305 during the purification of the segment. Because fluid flow passages can be formed directly in the PTFE (or other material) block, the distribution block 205 can act as a conduit for the process fluid between the various components of the multi-stage pump 100, thereby eliminating or reducing additional conduits It is desirable, under other conditions, to insert a catheter into the dispensing block 205 to define a fluid flow aisle.

圖3進一步展示用於向閥板230提供壓力或真空之供應管線260。閥之致動係藉由閥控制歧管302控制,閥控制歧管302將壓力或真空引導至每一供應管線260。每一供應管線260可包括具有小節流孔(亦即,節流器)之配件(實例配件係以318指示)。每一供應管線中之節流孔幫助減輕將壓力施加至供應管線與將真空施加至供應管線之間的急劇壓力差的效應。此情形允許閥更平穩且更緩慢地打開及閉合。FIG. 3 further shows a supply line 260 for providing pressure or vacuum to the valve plate 230. The actuation of the valve is controlled by a valve control manifold 302 that directs pressure or vacuum to each supply line 260. Each supply line 260 can include an accessory having a small orifice (i.e., a restrictor) (example fittings are indicated at 318). The orifice in each supply line helps mitigate the effects of a sharp pressure differential between applying pressure to the supply line and applying vacuum to the supply line. This situation allows the valve to open and close more smoothly and more slowly.

除了圖1至圖3所示之實例以外,包括氣動至馬達及氣動至氣動的其他多級泵組態亦係可能的。另外,儘管按照多級泵進行描述,但本文中所揭示之實施例亦可用於單級泵中。圖4描繪用於單級泵4000之實例泵總成之透視圖。In addition to the examples shown in Figures 1 through 3, other multi-stage pump configurations including pneumatic to motor and pneumatic to pneumatic are also possible. Additionally, although described in terms of a multi-stage pump, the embodiments disclosed herein can also be used in a single stage pump. 4 depicts a perspective view of an example pump assembly for a single stage pump 4000.

泵4000可相似於上文所描述之多級泵100之一個級(比如,分配級)。泵4000可包括氣動致動泵,或藉由步進馬達、無刷DC馬達或其他馬達驅動之輥軋隔膜泵。泵4000可包括分配區塊4005,分配區塊4005界定通過泵4000之各種流體流動路徑且至少部分地界定泵腔室。分配泵區塊4005可為PTFE、改質後PTFE或其他材料之整體區塊。因為此等材料與許多處理流體不反應或最低程度地反應,所以此等材料之使用允許在最小量之額外硬體的情況下將流動過道及泵腔室直接加工至分配區塊4005中。因此,分配區塊4005藉由提供整合流體歧管而減少針對管道之需要。可定位壓力感測器以讀取泵腔室中之壓力。Pump 4000 can be similar to one of the stages (e.g., dispensing stages) of multi-stage pump 100 described above. Pump 4000 may include a pneumatically actuated pump, or a rolled diaphragm pump driven by a stepper motor, a brushless DC motor, or other motor. Pump 4000 can include a dispensing block 4005 that defines various fluid flow paths through pump 4000 and at least partially defines a pump chamber. Dispensing pump block 4005 can be an integral block of PTFE, modified PTFE, or other materials. Because these materials do not react or minimally react with many process fluids, the use of such materials allows direct processing of the flow aisle and pump chamber into the distribution block 4005 with a minimum amount of additional hardware. Thus, the distribution block 4005 reduces the need for piping by providing an integrated fluid manifold. A pressure sensor can be positioned to read the pressure in the pump chamber.

分配區塊4005可包括各種外部入口及出口,該等外部入口及出口包括(例如)接收流體所通過之入口4010、用於淨化/排放流體之淨化/排放出口4015,及在分配片段期間分配流體所通過之分配出口4020。在圖4之實例中,分配區塊4005包括外部淨化出口4010,此係因為泵僅具有一個腔室。可利用諸如無o型環低輪廓配件之適當配件以將分配區塊4005之外部入口及出口連接至流體管線。The distribution block 4005 can include various external inlets and outlets including, for example, an inlet 4010 through which fluid is received, a purge/discharge outlet 4015 for purifying/discharging fluid, and a fluid dispensed during dispensing of the segments The distribution exit 4020 is passed. In the example of FIG. 4, the distribution block 4005 includes an external purge outlet 4010 because the pump has only one chamber. Suitable fittings such as a no-o-ring low profile fitting can be utilized to connect the outer inlet and outlet of the dispensing block 4005 to the fluid line.

分配區塊4005將流體自入口導引至入口閥(例如,藉由閥板4030至少部分地界定)、自入口閥導引至泵腔室、自泵腔室導引至排放/淨化閥且自泵腔室導引至出口4020。泵罩蓋4025可保護泵馬達以防損壞,而活塞外殼4027可提供針對活塞之保護。罩蓋/外殼可由聚乙烯或其他聚合物形成。閥板4030提供用於一閥系統(例如,入口閥,及淨化/排放閥)之閥外殼,該閥系統可經組態以將流體流動引導至泵4000之各種組件。閥板4030及相應閥可相似於上文所論述之結合閥板230所描述的方式而形成。淨化閥可具有相同於、小於或大於入口閥之尺寸的尺寸。然而,使用較小淨化閥可減少返回至如上文所描述之腔室的滯留體積。入口閥及淨化/排放閥中每一者可部分地整合至閥板4030中且可為一隔膜閥,該隔膜閥取決於是將壓力或是將真空施加至相應隔膜而打開或閉合。在一些實施中,該等閥中之一些可在分配區塊4005外部或配置於額外閥板中。作為一實例,PTFE薄片可包夾於閥板4030與分配區塊4005之間以形成各種閥之隔膜。閥板4030包括用於每一閥之閥控制入口(未圖示)以將壓力或真空施加至相應隔膜。The distribution block 4005 directs fluid from the inlet to the inlet valve (eg, at least partially defined by the valve plate 4030), from the inlet valve to the pump chamber, from the pump chamber to the drain/purge valve and from The pump chamber is directed to the outlet 4020. The pump cover 4025 protects the pump motor from damage and the piston housing 4027 provides protection against the piston. The cover/housing may be formed from polyethylene or other polymers. Valve plate 4030 provides a valve housing for a valve system (eg, an inlet valve, and a purge/discharge valve) that can be configured to direct fluid flow to various components of pump 4000. Valve plate 4030 and corresponding valves may be formed in a manner similar to that described above in connection with valve plate 230. The purge valve can have a size that is the same as, smaller or larger than the size of the inlet valve. However, the use of a smaller purge valve can reduce the retention volume returned to the chamber as described above. Each of the inlet valve and the purge/discharge valve may be partially integrated into the valve plate 4030 and may be a diaphragm valve that opens or closes depending on whether pressure is applied or vacuum is applied to the respective diaphragm. In some implementations, some of the valves may be external to the distribution block 4005 or disposed in an additional valve plate. As an example, a PTFE sheet can be sandwiched between a valve plate 4030 and a dispensing block 4005 to form a diaphragm for various valves. Valve plate 4030 includes a valve control inlet (not shown) for each valve to apply pressure or vacuum to the respective diaphragm.

在一些實施例中,代替固定數目個泵,可客製化系統可隨著時間推移而支援可變數目個泵。可客製化分配系統使用靈活性模組化架構。可客製化分配系統之實施例亦可在任何給定時間支援包括氣動及馬達的不同類型之泵。舉例而言,在多級泵系統中,第一級泵可被氣動地驅動,且第二級泵可藉由馬達驅動。此混合及匹配靈活性允許該系統經客製化用於每一特定應用。圖5描繪用於可客製化分配系統之模組化架構500之一實例實施例之圖解表示。In some embodiments, instead of a fixed number of pumps, the customizable system can support a variable number of pumps over time. The customizable distribution system uses a flexible modular architecture. Embodiments of the customizable dispensing system can also support different types of pumps including pneumatics and motors at any given time. For example, in a multi-stage pump system, the first stage pump can be pneumatically driven and the second stage pump can be driven by a motor. This blending and matching flexibility allows the system to be customized for each specific application. FIG. 5 depicts a graphical representation of an example embodiment of a modular architecture 500 for a customizable dispensing system.

如圖5所說明,不同應用可具有不同需要,此或許取決於所使用之化學品、所需要之品質/效能位準、在達成所需要之品質/效能位準時所涉及之成本,等等。舉例而言,當化學品之成本高且最終產品對缺陷敏感時,系統可利用馬達至馬達組態(圖8中展示其實例),以在最低可能缺陷的情況下達成最好可能過濾控制。由於此馬達至馬達組態可固有地昂貴,故在一些狀況下,可利用氣動至馬達組態以減少系統之成本,同時保持理想的輸送量位準與監視及控制分配速率及體積的能力。圖7中展示氣動至馬達組態之實例。在一些狀況下,氣動至氣動組態可為理想的(特別是若關注關於分配體積之成本,及/或當不需要或不要求高品質效能時)。圖6中展示氣動至氣動組態之實例。在本文中所揭示之實施例中,模組化架構500包括一智慧型控制器,該智慧型控制器允許混合及匹配(有時動態地且在運作中)氣動泵及馬達泵。以此方式,本文中所揭示之可客製化分配系統之實施例可針對許多不同應用而捕獲整個效能位準範圍以滿足半導體製造領域中之不同需要。As illustrated in Figure 5, different applications may have different needs, depending on the chemicals used, the quality/performance level required, the cost involved in achieving the desired quality/performance level, and the like. For example, when the cost of the chemical is high and the final product is sensitive to defects, the system can utilize a motor-to-motor configuration (examples are shown in Figure 8) to achieve the best possible filtration control with the lowest possible defect. Since this motor-to-motor configuration can be inherently expensive, in some situations, a pneumatic to motor configuration can be utilized to reduce the cost of the system while maintaining the desired throughput level and the ability to monitor and control the dispensing rate and volume. An example of a pneumatic to motor configuration is shown in FIG. In some cases, a pneumatic to pneumatic configuration may be desirable (especially if attention is paid to the cost of the dispensed volume, and/or when high quality performance is not required or required). An example of a pneumatic to pneumatic configuration is shown in FIG. In the embodiments disclosed herein, the modular architecture 500 includes a smart controller that allows for mixing and matching (sometimes dynamically and in operation) pneumatic and motor pumps. In this manner, embodiments of the customizable dispensing system disclosed herein can capture the entire range of performance levels for many different applications to meet different needs in the semiconductor fabrication art.

此靈活性模組化架構可向本文中所揭示之分配系統提供許多優勢。舉例而言,系統之擁有者可以氣動至氣動設置而開始。隨著時間推移,擁有者之需要可改變,及/或在評估之後,氣動至氣動設置可能需要升級。一或多個氣動泵可容易被調換出且以馬達驅動泵及/或替換氣動泵進行替換。擁有者將不必替換整個分配系統。This flexible modular architecture provides many advantages to the distribution system disclosed herein. For example, the owner of the system can start with a pneumatic to pneumatic setting. Over time, the owner's needs may change, and/or after the assessment, the pneumatic to pneumatic settings may need to be upgraded. One or more pneumatic pumps can be easily exchanged and replaced with a motor driven pump and/or a replacement pneumatic pump. The owner will not have to replace the entire distribution system.

至少部分地歸因於可操作以自動地且動態地控制各種類型之泵的通用智慧型控制器,對分配系統的此類型之隨插即用修改係可能的。舉例而言,吾人可拔出第一泵、插入第二泵、使線路垂直,且開始或重新開始操作。在與第二泵之泵頭建立介面連接後,控制器隨即可操作以自動地辨識第二泵且應用對應於第二泵之控制方案。在一些實施例中,自一泵至另一泵之切換可完全地經由軟體而進行,而不必實體地拔出-插入泵。舉例而言,使用者可能想要使泵A及泵B離線且指定泵C及泵D來接管及充當新泵A及新泵B。This type of plug-and-play modification of the distribution system is possible, at least in part, due to a general-purpose smart controller that is operable to automatically and dynamically control various types of pumps. For example, we can pull out the first pump, insert the second pump, make the line vertical, and start or restart the operation. After establishing an interface connection with the pump head of the second pump, the controller can then operate to automatically identify the second pump and apply a control scheme corresponding to the second pump. In some embodiments, switching from one pump to another can be done entirely via the software without having to physically pull-plug the pump. For example, the user may want to take pump A and pump B offline and specify pump C and pump D to take over and act as new pump A and new pump B.

在一些實施例中,可利用電子可讀標籤或碼以向智慧型控制器提供多種資訊。在一些實施例中,智慧型控制器可連接至經由電子可讀標籤而可識別之各種器件,該等標籤可能或可能不直接貼附於彼等器件/封裝上或嵌入於彼等器件/封裝中。舉例而言,智慧型控制器可經由其許多埠中之一者而連接至智慧型過濾器,且可經由與智慧型過濾器相關聯之電子可讀標籤而向智慧型控制器提供關於智慧型過濾器之資訊。作為另一實例,智慧型控制器可連接至包裝或封裝,且可經由與包裝或封裝相關聯之電子可讀標籤而向智慧型控制器提供關於包裝或封裝中所含有之內容的資訊。包裝可含有為特定應用所必要之化學品或物質。其他器件/封裝可以相似方式連接至智慧型控制器。In some embodiments, an electronically readable tag or code can be utilized to provide a variety of information to a smart controller. In some embodiments, the smart controller can be connected to various devices identifiable via electronically readable tags that may or may not be directly attached to or embedded in their devices/packages. in. For example, a smart controller can be connected to a smart filter via one of its many ports, and can provide intelligence to a smart controller via an electronically readable tag associated with the smart filter Filter information. As another example, a smart controller can be coupled to a package or package and can provide information to the smart controller regarding the content contained in the package or package via an electronically readable label associated with the package or package. The package may contain chemicals or substances necessary for a particular application. Other devices/packages can be connected to the smart controller in a similar manner.

在半導體製造中,不同應用常常具有針對化學品層厚度及塗層面積之不同要求。相應地,可能需要廣泛之分配體積及速率陣列。滿足此等要求涉及針對所有不同軌道尺寸之許多不同尺寸之泵,此係因為每一泵必須能夠含有為個別分配所需要之全部流體。此等軌道及泵可依賴於離散線路以用於通信,此意謂每一輸入線路及每一輸出線路將需要實體電線或電纜線。佈線之複雜性對分配系統中已經複雜化之流體連接添加另一挑戰層。In semiconductor manufacturing, different applications often have different requirements for chemical layer thickness and coating area. Accordingly, a wide distribution of volume and rate arrays may be required. Meeting these requirements involves many different sizes of pumps for all different track sizes, since each pump must be able to contain all of the fluids required for individual dispensing. Such tracks and pumps may rely on discrete lines for communication, which means that each input line and each output line will require a physical wire or cable. The complexity of wiring adds another layer of challenge to fluid connections that have been complicated in the distribution system.

用以處理此等挑戰之一方式係提供可在個別泵控制器與軌道之間提供串列通信的輸入/輸出(I/O)介面器件。以此方式,用於相同類型之泵的個別泵控制器可經由I/O介面器件而與不同軌道通信。更具體而言,I/O介面器件可在前端處自軌道獲取信號且在後端處以可為泵控制器所理解之格式將彼信號串列地傳達至泵控制器。One way to handle these challenges is to provide an input/output (I/O) interface device that can provide serial communication between individual pump controllers and tracks. In this way, individual pump controllers for the same type of pump can communicate with different rails via I/O interface devices. More specifically, the I/O interface device can acquire signals from the track at the front end and communicate the signals to the pump controller in series at the back end in a format understandable by the pump controller.

本文中所揭示之智慧型控制器之實施例可提供另一可行解決方案。在一些實施例中,智慧型控制器可包含複數個通信埠以用於至一軌道及多種器件之實體連接。在一些實施例中,智慧型控制器可具有24個通信埠以用於馬達泵、氣動泵、過濾器、感測器等等,其中每一者可插入至24個埠中任一者且可藉由智慧型控制器利用機上資料庫予以自動地辨識。智慧型控制器與器件之間的通信線路可為軟件可組態的。在一些實施例中,可將每一類型之器件指派至智慧型控制器之特定埠。Embodiments of the smart controller disclosed herein may provide another possible solution. In some embodiments, the smart controller can include a plurality of communications ports for physical connections to a track and a plurality of devices. In some embodiments, the smart controller can have 24 communication ports for motor pumps, pneumatic pumps, filters, sensors, etc., each of which can be inserted into any of the 24 ports and can It is automatically identified by the intelligent controller using the on-board database. The communication line between the smart controller and the device can be software configurable. In some embodiments, each type of device can be assigned to a particular port of the smart controller.

在一些實施例中,智慧型控制器可包含不同類型之介面以將串列、並列或類比信號/資料傳達至各種器件及自該各種器件傳達該等信號/資料,該等器件包括軌道、泵、閥、感測器、標籤讀取器、泵頭及其他組件。在一些實施例中,至軌道之介面可利用專屬協定或工業標準協定。作為另一實例,至軌道之介面可為與DeviceNet、工業標準乙太網路或某其他工業標準協定之控制器區域網路(CAN)介面。舉例而言,智慧型控制器可利用傳輸控制協定/網際網路協定(TCP/IP)以與軌道通信。可使用智慧型控制器之其他介面來以一或多種協定而與包括個別泵頭之多種器件通信。在一些實施例中,多種器件可包括CAN器件。在一些實施例中,至多種器件之介面可包括剝離式簡單專屬介面。In some embodiments, the smart controller can include different types of interfaces to communicate serial, parallel or analog signals/data to and from the various devices, including tracks, pumps , valves, sensors, tag readers, pump heads and other components. In some embodiments, the interface to the track may utilize proprietary protocols or industry standard protocols. As another example, the interface to the track can be a Controller Area Network (CAN) interface that is compliant with DeviceNet, Industry Standard Ethernet, or some other industry standard. For example, a smart controller can utilize Transmission Control Protocol/Internet Protocol (TCP/IP) to communicate with the orbit. Other interfaces of the smart controller can be used to communicate with a variety of devices including individual pump heads in one or more protocols. In some embodiments, a variety of devices can include CAN devices. In some embodiments, the interface to the various devices can include a stripped simple, proprietary interface.

在許多軌道中,可利用乙太網路及DeviceNet或其相似者以控制泵之I/O信號。舉例而言,軌道將向DeviceNet並列I/O板發送DeviceNet命令以設定一些信號,且彼等信號將通過連接器及電纜而到達特殊泵介面模組。除了軟體程式設計以外,此種類之連接架構亦需要精密且複雜化之硬體配置。In many tracks, Ethernet and DeviceNet or similar devices can be used to control the I/O signal of the pump. For example, the track will send DeviceNet commands to the DeviceNet parallel I/O board to set some signals, and these signals will pass through the connector and cable to the special pump interface module. In addition to software programming, this type of connectivity architecture also requires sophisticated and complex hardware configurations.

在一些實施例中,智慧型控制器可實施用於與泵建立介面連接/通信之專屬通信協定。在一些實施例中,智慧型控制器可實施軌道介面以代替通常用以觸發泵且取得基本狀態之並列I/O。在一些實施例中,泵可實施為相同並列器件類型,且智慧型控制器可操作以直接解譯協定。此情形將消除針對泵以及軌道硬體板及電纜線上之並列信號的需要,同時實際上提供許多軌道當前使用之相同程式設計功能。遵循以上實例,軌道可經由智慧型控制器而向泵發送相同DeviceNet命令且不需要額外硬體。熟習此項技術者應瞭解,此情形僅僅為一個可能實例。在一些實施例中,可使用現存Entegris網路連接協定以與智慧型控制器或泵通信。In some embodiments, the smart controller can implement a proprietary communication protocol for establishing interface/communication with the pump. In some embodiments, the smart controller can implement a track interface instead of the parallel I/O typically used to trigger the pump and take the basic state. In some embodiments, the pump can be implemented in the same parallel device type, and the smart controller is operable to directly interpret the agreement. This situation will eliminate the need for parallel signals for the pump and rail hardware boards and cable lines, while actually providing the same programming features currently used by many rails. Following the above example, the track can send the same DeviceNet command to the pump via the smart controller and no additional hardware is required. Those skilled in the art should understand that this situation is only one possible example. In some embodiments, an existing Entegris network connection protocol can be used to communicate with a smart controller or pump.

在一些先前分配系統中,主控制器可連接至多個泵,且每一泵可具有耦接至該泵之專用泵控制器。可將此類型之專用泵控制器之功能性分類成兩個級別:高及低。高級別控制功能可包括為運轉分配泵所需要之功能。低級別控制功能可包括簡單功能,諸如,將馬達自點A移動至點B。此等泵控制器具有大量處理能力。不幸地,先前分配系統未以有效率方式利用此等泵控制器之處理能力。舉例而言,在具有多個泵(比如,30個至40個)之分配系統中,可存在同時操作之至多三個泵,且其餘泵閒置。此無效率可為成本高的。In some prior dispensing systems, the main controller can be connected to a plurality of pumps, and each pump can have a dedicated pump controller coupled to the pump. The functionality of this type of dedicated pump controller can be categorized into two levels: high and low. The high level control functions can include the functions required to dispense the pump for operation. The low level control function may include a simple function such as moving the motor from point A to point B. These pump controllers have a large amount of processing power. Unfortunately, previous distribution systems did not utilize the processing power of such pump controllers in an efficient manner. For example, in a dispensing system having multiple pumps (eg, 30 to 40), there may be up to three pumps operating simultaneously, with the remaining pumps idle. This inefficiency can be costly.

先前分配系統之另一缺點在於:不能容易修改其固定架構。主控制器通常藉由對應於連接至主控制器之泵控制器類型的控制方案予以程式設計。由於控制方案為泵類型所特有,故若拉出氣動泵且以馬達泵進行替換,則主控制器將不辨識馬達泵,主控制器亦將不知道如何控制馬達泵。Another disadvantage of previous distribution systems is that they cannot easily modify their fixed architecture. The main controller is typically programmed by a control scheme corresponding to the type of pump controller connected to the main controller. Since the control scheme is unique to the pump type, if the pneumatic pump is pulled out and replaced with a motor pump, the main controller will not recognize the motor pump and the main controller will not know how to control the motor pump.

本文中所揭示之智慧型控制器之實施例可自泵控制器中採取高級別功能性,因此,該等泵控制器可智慧地共用處理能力,以便減少閒置時間及相應成本。低級別功能性保持於泵頭處。高級別功能與低級別功能之間的區別可為軟體可組態的,以針對特定實施而客製化分配系統。舉例而言,在一些實施例中,智慧型控制器可向泵頭發送簡單「DISPENSE」命令,且泵頭具有足夠智慧來執行命令且在任務完成時向智慧型控制器報告。作為另一實例,智慧型控制器可向泵控制器(在泵處或在泵本端)給出通用命令「DISPENSE RECIPE 4」,且已經組態以分配此特定配方之泵控制器執行如所指示之任務。在一些實施例中,泵頭可僅具有足夠驅動耦接至泵頭之泵的初步功能或基本功能,且智慧型控制器可向泵頭提供特定指令,以便執行在手邊之任務。Embodiments of the smart controller disclosed herein can take a high level of functionality from the pump controller so that the pump controllers can intelligently share processing power to reduce idle time and corresponding costs. Low level functionality is maintained at the pump head. The distinction between high-level features and low-level features can be software configurable to customize the distribution system for a particular implementation. For example, in some embodiments, the smart controller can send a simple "DISPENSE" command to the pump head, and the pump head has sufficient intelligence to execute the command and report to the smart controller when the task is completed. As another example, the smart controller can give the pump controller (at the pump or at the pump end) a general command "DISPENSE RECIPE 4" and the pump controller that has been configured to dispense this particular recipe performs as The task of instruction. In some embodiments, the pump head may only have a preliminary function or basic function sufficient to drive a pump coupled to the pump head, and the smart controller may provide specific instructions to the pump head to perform the task at hand.

在一些實施例中,泵之操作係藉由智慧型控制器使用關於連接至泵之過濾器的資訊予以控制。在一些實施例中,過濾器為安置於泵入口與泵出口之間的流體流動路徑中的可卸除式過濾器。可卸除式過濾器可實施快速改變或快速連接機制以連接至泵。在一些實施例中,智慧型控制器經組態以接收過濾器資訊、接收諸如化學品類型之處理流體資訊、基於過濾器資訊及處理流體資訊而存取操作常式(控制方案)程式庫以選擇用於泵之操作常式,且根據選定操作常式來操作泵。選定操作常式可包括起動注給常式、分配循環、其他常式之分配循環之選定片段。In some embodiments, the operation of the pump is controlled by the smart controller using information about the filter connected to the pump. In some embodiments, the filter is a removable filter disposed in a fluid flow path between the pump inlet and the pump outlet. The removable filter can be implemented with a quick change or quick connect mechanism to connect to the pump. In some embodiments, the smart controller is configured to receive filter information, receive processing fluid information such as chemical types, access operating protocol (control scheme) libraries based on filter information and processing fluid information. The operating routine for the pump is selected and the pump is operated according to the selected operating routine. The selected operational routines may include selected segments of the dispense cycle for the routine, the dispense cycle, and other routines.

圖6描繪具有智慧型控制器610之可客製化分配系統600之一實例實施例之圖解表示,智慧型控制器610控制饋入級601處之氣動饋入泵630及分配級602處之氣動分配泵640。在此實例中,控制器610以通信方式連結至軌道620、氣動饋入泵630、過濾器650及分配泵640。在此實例中,使用電子調節器635以調節氣動致動饋入泵630,且使用電子調節器645以調節氣動致動分配泵640。6 depicts a graphical representation of an example embodiment of a customizable dispensing system 600 with a smart controller 610 that controls the pneumatic feed pump 630 at the feed stage 601 and the pneumatics at the distribution stage 602. The pump 640 is dispensed. In this example, controller 610 is communicatively coupled to rail 620, pneumatic feed pump 630, filter 650, and dispensing pump 640. In this example, an electronic regulator 635 is used to adjust the pneumatically actuated feed pump 630 and an electronic regulator 645 is used to adjust the pneumatically actuated dispensing pump 640.

圖7描繪具有智慧型控制器610之可客製化分配系統700之一實例實施例之圖解表示,智慧型控制器610控制饋入級601處之氣動饋入泵630及分配級602處之馬達驅動分配泵740。遵循以上實例,控制器610以通信方式連結至軌道620、氣動饋入泵630、過濾器650及分配泵740。在分配系統700中,使用電子調節器635以調節氣動致動饋入泵630。在此實例中,智慧型控制器610可經組態以在無電子調節器之情況下控制分配泵740。在一些實施例中,可客製化分配系統700可仍然包括作為標準組件之電子調節器。此情形允許混合及匹配用於分配泵740的不同類型之泵(視需要),其中分配泵740中之一或多個氣動泵連接至電子調節器。7 depicts a graphical representation of an example embodiment of a customizable dispensing system 700 with a smart controller 610 that controls a pneumatic feed pump 630 at the feed stage 601 and a motor at the distribution stage 602. The distribution pump 740 is driven. Following the above example, controller 610 is communicatively coupled to rail 620, pneumatic feed pump 630, filter 650, and dispensing pump 740. In the dispensing system 700, an electronic regulator 635 is used to adjust the pneumatically actuated feed pump 630. In this example, the smart controller 610 can be configured to control the dispense pump 740 without an electronic regulator. In some embodiments, the customizable dispensing system 700 can still include an electronic regulator as a standard component. This situation allows mixing and matching of different types of pumps (as needed) for dispensing pump 740, wherein one or more of the dispensing pumps 740 are connected to the electronic regulator.

圖8描繪具有智慧型控制器610之可客製化分配系統800之一實例實施例之圖解表示,智慧型控制器610控制饋入級601處之馬達驅動饋入泵830及分配級602處之馬達驅動分配泵740。遵循以上實例,控制器610以通信方式連結至軌道620、饋入泵830、過濾器650及分配泵740。智慧型控制器610可以相似於上文所描述之多級泵100的方式控制馬達驅動饋入泵830及馬達驅動分配泵740。在一些實施例中,可客製化分配系統800可包含作為標準組件的用於饋入級601之電子調節器及用於分配級602之電子調節器。此情形允許混合及匹配用於饋入泵830及分配泵740的不同類型之泵(視需要),其中饋入泵830中之一或多個氣動泵連接至饋入級601處之電子調節器,且分配泵740中之一或多個氣動泵連接至饋入級602處之電子調節器。8 depicts a graphical representation of an example embodiment of a customizable dispensing system 800 with a smart controller 610 that controls the motor-driven feed pump 830 and the distribution stage 602 at the feed stage 601. The motor drives the dispensing pump 740. Following the above example, controller 610 is communicatively coupled to rail 620, feed pump 830, filter 650, and dispense pump 740. The smart controller 610 can control the motor-driven feed pump 830 and the motor-driven dispense pump 740 in a manner similar to the multi-stage pump 100 described above. In some embodiments, the customizable dispensing system 800 can include an electronic regulator for the feed stage 601 and an electronic regulator for the distribution stage 602 as standard components. This situation allows mixing and matching of different types of pumps (if needed) for feeding pump 830 and dispensing pump 740, wherein one or more pneumatic pumps fed into pump 830 are coupled to the electronic regulator at feed stage 601 And one or more pneumatic pumps in the distribution pump 740 are coupled to the electronic regulator at the feed stage 602.

圖6至圖8例示智慧型控制器610之靈活性及通用性,智慧型控制器610可處置饋入級601處之氣動饋入泵630、分配級602處之氣動分配泵640、分配級602處之馬達驅動分配泵740及饋入級601處之馬達驅動饋入泵830,以及各種過濾器650。智慧型控制器610提供隨插即用介面,其中多個實體介面(埠)用於連接至軌道620及各種器件。可使用同一連接線路以與不同類型之泵通信。此情形減少/簡化用於基礎可客製化分配系統之佈線。6-8 illustrate the flexibility and versatility of the smart controller 610. The smart controller 610 can handle the pneumatic feed pump 630 at the feed stage 601, the pneumatic dispense pump 640 at the distribution stage 602, and the distribution stage 602. The motor-driven dispensing pump 740 and the motor-driven feed pump 830 at the feed stage 601, as well as various filters 650. The smart controller 610 provides a plug-and-play interface in which multiple physical interfaces (埠) are used to connect to the track 620 and various devices. The same connection line can be used to communicate with different types of pumps. This situation reduces/simplifies the wiring for the base customizable distribution system.

智慧型控制器可提供專屬或內部標準化通信線路以與多種器件通信,該等器件包括氣動泵、馬達泵、過濾器,等等。在與此等器件通信時,智慧型控制器可在連接後隨即識別每一類型之器件、查找相應控制方案,且相應地繼續進行。舉例而言,為了自與一泵之通信切換至與另一泵之通信,智慧型控制器可存取用於資訊之內部資料庫或本端資料庫(包括與新連接泵相關聯之控制方案),且相應地應用控制方案。The smart controller can provide dedicated or internally standardized communication lines to communicate with a variety of devices, including pneumatic pumps, motor pumps, filters, and the like. When communicating with such devices, the smart controller can identify each type of device, find the appropriate control scheme, and continue accordingly. For example, to switch from communication with one pump to communication with another pump, the smart controller can access an internal database or local database for information (including control schemes associated with the newly connected pump). ) and apply the control scheme accordingly.

在一些實施例中,智慧型控制器可連接至具有含有過濾器資訊之電子可讀過濾器資訊標籤的過濾器。電子可讀過濾器資訊標籤之一些實例可實施射頻識別(RFID)技術。此等過濾器可為實施快速改變或快速連接機制之可卸除式類型。在一些實施例中,過濾器資訊標籤可為主動或被動RFID標籤、條碼或其他光學可讀碼。In some embodiments, the smart controller can be connected to a filter having an electronically readable filter information tag containing filter information. Some examples of electronically readable filter information tags may implement radio frequency identification (RFID) technology. These filters can be of the removable type that implements a fast change or quick connect mechanism. In some embodiments, the filter information tag can be an active or passive RFID tag, barcode, or other optically readable code.

射頻識別(RFID)通常具有兩個部分:讀取器及標籤。在使用無線電波的情況下,可在幾公尺遠及超出RFID讀取器之視線的地方讀取一些RFID標籤。在一些實施例中,有意地縮短合適RFID標籤範圍以減少鄰近泵讀取彼此之標籤的串擾。作為一實例,在一實施例中,將RFID標籤範圍減少至約一吋。其他範圍亦係可能的,此取決於RFID讀取器及標籤之距離及/或配置。圖10展示具有RFID標籤952a之實例過濾器950a及具有RFID標籤952b之實例過濾器950b。在一些實施例中,RFID標籤可直接貼附於過濾器上或嵌入於過濾器內。在一些實施例中,RFID標籤可能無需實體地附接至過濾器。RFID技術為熟習此項技術者所知,且因此不在本文中予以進一步描述。Radio frequency identification (RFID) usually has two parts: a reader and a tag. In the case of using radio waves, some RFID tags can be read a few meters away and beyond the line of sight of the RFID reader. In some embodiments, the range of suitable RFID tags is intentionally shortened to reduce crosstalk of adjacent tags that are read by each other. As an example, in one embodiment, the RFID tag range is reduced to approximately one turn. Other ranges are also possible, depending on the distance and/or configuration of the RFID reader and tag. Figure 10 shows an example filter 950a with an RFID tag 952a and an example filter 950b with an RFID tag 952b. In some embodiments, the RFID tag can be attached directly to the filter or embedded within the filter. In some embodiments, the RFID tag may not need to be physically attached to the filter. RFID technology is known to those skilled in the art and is therefore not further described herein.

過濾器資訊之實例可包括(但不限於)零件號、設計式樣、薄膜類型、留存定額、過濾器之代、過濾器薄膜之組態、批號、序號、器件流程、薄膜厚度、薄膜起泡點、粒子品質、過濾器製造商品質資訊或其他資訊。設計式樣指示過濾器經設計所針對之泵類型、過濾器之容量/尺寸、過濾器中薄膜材料之量,或關於過濾器之設計的其他資訊。薄膜類型指示薄膜之材料及/或厚度。留存定額指示可藉由薄膜以特定效率移除之粒子的尺寸。過濾器之代指示過濾器是過濾器設計之第一代、第二代、第三代或是其他代。過濾器薄膜之組態指示過濾器是否摺疊、摺疊類型,或關於薄膜之設計的其他資訊。序號提供個別過濾器之序號。批號可詳細說明過濾器或薄膜之製造批。器件流程指示過濾器在仍產生良好分配的同時可處置的流動速率。可在製造期間判定個別過濾器之器件流程。薄膜起泡點提供過濾器可處置且仍產生良好分配之流動速率/壓力之另一量測。亦可在製造期間判定個別過濾器之薄膜起泡點。以上實例係經由解釋而非限制過濾器資訊中可含有之資訊予以提供。Examples of filter information may include, but are not limited to, part number, design style, film type, retention quota, filter generation, filter film configuration, lot number, serial number, device flow, film thickness, film bubble point , particle quality, filter manufacturer quality information or other information. The design pattern indicates the type of pump the filter is designed for, the volume/size of the filter, the amount of film material in the filter, or other information about the design of the filter. The film type indicates the material and/or thickness of the film. The retention quota indicates the size of the particles that can be removed by the film at a particular efficiency. The filter generation indicator filter is the first, second, third or other generation of the filter design. The configuration of the filter film indicates whether the filter is folded, the type of folding, or other information about the design of the film. The serial number provides the serial number of the individual filter. The batch number details the manufacturing batch of the filter or film. The device flow indicates the flow rate at which the filter can be disposed of while still producing a good dispense. The device flow for individual filters can be determined during manufacturing. The film bubble point provides another measure of the flow rate/pressure that the filter can handle and still produce a good distribution. The film bubble point of individual filters can also be determined during manufacturing. The above examples are provided by way of explanation and not limitation of information that may be contained in the filter information.

過濾器資訊中所含有之零件號可傳送多種資訊。舉例而言,實例零件號格式「Aabcdefgh」中之每一字母可傳送一條不同資訊。以下表1提供藉由零件號傳送之資訊之實例:The part number contained in the filter information can convey a variety of information. For example, each letter in the example part number format "Aabcdefgh" can convey a different piece of information. Table 1 below provides examples of information transmitted by part number:

在使用表1之實例的情況下,Impact泵過濾器之零件號A2AT2RMR1將指示:過濾器之連接學;過濾器經設計用於IntelliGen2泵(Impact及IntelliGen為明尼蘇達州Chaska之Entegris公司的商標);薄膜為薄UPE、具有10 nm之留存定額;過濾器為版本2過濾器;過濾器包括RFID標籤;過濾器薄膜具有M摺疊;過濾器為無O型環;及每盒存在一個過濾器。然而,使用零件號以傳送資訊係經由實例而提供,且可以其他方式傳送過濾器資訊。In the case of using the example of Table 1, the impact pump filter part number A2AT2RMR1 will indicate: the connection of the filter; the filter is designed for the IntelliGen2 pump (Impact and IntelliGen are trademarks of Entegris, Inc. of Chaska, Minn.); The film is a thin UPE with a retention rating of 10 nm; the filter is a version 2 filter; the filter comprises an RFID tag; the filter film has an M-fold; the filter is an O-ring free; and there is one filter per cartridge. However, the use of the part number to transmit information is provided via an instance, and the filter information can be transmitted in other ways.

其他合適過濾器亦可出於各種目的而連接至智慧型控制器。舉例而言,智慧型過濾器之較早版本可能需要被調換出且以較新版本進行替換。此情形可與將舊智慧型過濾器拉出且將替換物插入於其適當位置一樣簡單地進行。可將一組規則應用於過濾器資訊以判定過濾器是否適當。用於判定過濾器是否適當之規則可取決於過濾器資訊及其他因素,諸如,處理流體、環境屬性、所需循環時間或其他因素。舉例而言,可應用一規則,使得若處理流體具有某一黏度,則將僅在過濾器具有特定零件號或某一零件號及起泡點時將其視為適當。因此,所應用之規則可取決於多條過濾器資訊及其他資訊。若過濾器不為適當過濾器,則可採取相應動作。否則,泵之操作可繼續進行。Other suitable filters can also be connected to the smart controller for a variety of purposes. For example, an earlier version of a smart filter may need to be swapped out and replaced with a newer version. This situation can be as simple as pulling the old smart filter out and inserting the replacement in its proper position. A set of rules can be applied to the filter information to determine if the filter is appropriate. The rules used to determine if the filter is appropriate may depend on filter information and other factors such as process fluids, environmental attributes, required cycle times, or other factors. For example, a rule can be applied such that if the treatment fluid has a certain viscosity, it will only be considered appropriate if the filter has a particular part number or a part number and bubble point. Therefore, the rules applied may depend on multiple filter information and other information. If the filter is not a suitable filter, the corresponding action can be taken. Otherwise, the operation of the pump can continue.

智慧型過濾器可在對經印刷圖案中之缺陷敏感的各種半導體製造程序(尤其是涉及極小、微觀或次微米特徵尺寸的彼等程序)中起重要作用。一些現存分配系統在負壓力下過濾。一些現存分配系統能夠監視及或許被動地維持為過濾所需要之壓力。然而,先前分配系統被知道不具有準確地且精確地控制為過濾所需要之壓力的能力。Smart filters can play an important role in a variety of semiconductor fabrication processes that are sensitive to defects in printed patterns, especially those involving very small, micro or sub-micron feature sizes. Some existing distribution systems filter under negative pressure. Some existing distribution systems are able to monitor and perhaps passively maintain the pressure required for filtering. However, previous dispensing systems are known to have no ability to accurately and accurately control the pressure required for filtration.

本文中所揭示之一些實施例可控制及維持在分配側上之泵之入口處泵頭中之正壓力以減少引起缺陷之氣泡。對於馬達泵,此正壓力可藉由馬達移動及藉由至壓力轉換器之回饋迴路控制。舉例而言,為了提供5 psi之正壓力,可設定上游電子調節器以在第一級中提供10 psi,且可設定下游電子調節器以在第二級中提供5 psi。此壓差推動流體橫越過濾器而到達分配側。Some embodiments disclosed herein can control and maintain a positive pressure in the pump head at the inlet of the pump on the dispensing side to reduce bubbles that cause defects. For a motor pump, this positive pressure can be controlled by motor movement and by a feedback loop to the pressure transducer. For example, to provide a positive pressure of 5 psi, an upstream electronic regulator can be set to provide 10 psi in the first stage and a downstream electronic regulator can be set to provide 5 psi in the second stage. This pressure differential pushes the fluid across the filter to the dispensing side.

在氣動泵設置中,壓力轉換器置放於流體路徑中以偵測實際流體壓力。基於來自智慧型過濾器之資訊,智慧型控制器可推斷針對特定過濾器之實際過濾速率是多少且相應地控制彼過濾速率。除了設定下游壓力以外,此情形亦允許使用者設定所要過濾速率。可調整上游壓力以取得橫越過濾器之所要目標速率。In a pneumatic pump setting, a pressure transducer is placed in the fluid path to detect the actual fluid pressure. Based on information from the smart filter, the smart controller can infer what the actual filtering rate is for a particular filter and control the filtering rate accordingly. In addition to setting the downstream pressure, this situation also allows the user to set the desired filtration rate. The upstream pressure can be adjusted to achieve the desired target rate across the filter.

作為一實例,可如下計算針對氣動至氣動泵設置之過濾速率: As an example, the filtration rate for pneumatic to pneumatic pump settings can be calculated as follows:

- 使用者鍵入用於氣動分配泵之化學品之黏度(FV)。 - The user enters the viscosity (FV) of the chemical used to pneumatically dispense the pump.

- 使用者鍵入用於流體連接至泵之RFID過濾器的所要過濾壓力設定點(FP)。在一些狀況下,FP可經設定至4 psi。在一些狀況下,FP可經設定至自約2 psi至約10 psi。 - The user enters the desired filtration pressure set point (FP) for the RFID filter fluidly connected to the pump. In some cases, the FP can be set to 4 psi. In some cases, the FP can be set to from about 2 psi to about 10 psi.

- 使用者鍵入用於過濾化學品之所要過濾速率(FR)。FR可經設定至自約0.2 cc/sec.至約1 cc/sec.,且在一些狀況下或許更高。 - The user enters the desired filtration rate (FR) for the filtration of the chemical. The FR can be set from about 0.2 cc/sec. to about 1 cc/sec., and in some cases perhaps higher.

- 控制器自過濾器外之RFID標籤取得過濾器流動速率(FLR)。藉由RFID標籤提供之資訊可包括過濾器之類型,及流體流動通過過濾器之當前流動速率。 - The controller takes the filter flow rate (FLR) from the RFID tag outside the filter. The information provided by the RFID tag can include the type of filter and the current flow rate of fluid flow through the filter.

- 控制器具有儲存於韌體中之電阻常數(FC)。 - The controller has a resistance constant (FC) stored in the firmware.

- 控制器計算過濾器電阻(R),其中R=FC/FLR。 - The controller calculates the filter resistance (R), where R = FC / FLR.

- 在此點上,控制器具有為計算上游壓力(UFP)所需要之所有資訊,其中UFR=(R*FR*FV)+FP。需要UFP以獲得使用者所需要之過濾速率。 - At this point, the controller has all the information needed to calculate the upstream pressure (UFP), where UFR = (R * FR * FV) + FP. UFP is required to achieve the filtering rate required by the user.

- 控制器將第一級流體壓力設定至UFP且將第二級流體壓力設定至FP。 - The controller sets the first stage fluid pressure to UFP and the second stage fluid pressure to FP.

- 隔離閥及障壁閥打開。 - The isolation valve and the barrier valve are open.

- 過濾以給定過濾速率發生。 - Filtering occurs at a given filtering rate.

- 當過濾完成時,第一級流體壓力將自FP升高至UFP。 - When filtration is complete, the first stage fluid pressure will rise from FP to UFP.

- 升高壓力用信號通知過濾結束。 - Increase the pressure to signal the end of the filter.

作為一特定實例,使用者可能需要1.5 cc/sec.之過濾速率及在分配泵上4 psi之下游壓力以用於過濾具有3厘泊(cps)之黏度的流體。假定R=1.55,UFR=10.98 psi。若用於饋入泵之壓力調節器設定於10.98 psi且用於分配泵之壓力調節器設定於4 psi,則流體移動係由橫越過濾器之差壓而引起,在此實例中,該差壓使流體以1.5 cc/sec.之流動速率自饋入側通過過濾器而移動至分配側。彼流動速率將繼續直至其不再需要流體為止。彼時,分配泵隔膜將降至最低點,且用於分配泵之壓力調節器將不再能夠維持4 psi之設定點。第二級處之壓力接著開始朝向10.98 psi之設定點漂移。一旦開始發生彼漂移,其就意味過濾結束且分配泵可自過濾移開且轉到循環中之下一步驟。此情形係可能的一個原因係因為壓力轉換器置放於流體路徑中。若壓力轉換器僅置放於氣動路徑中,則可能未偵測流體壓力之改變。As a specific example, a user may require a filtration rate of 1.5 cc/sec. and a downstream pressure of 4 psi on the dispensing pump for filtering fluid having a viscosity of 3 centipoise (cps). Assuming R = 1.55, UFR = 10.98 psi. If the pressure regulator for the feed pump is set at 10.98 psi and the pressure regulator for the dispense pump is set at 4 psi, the fluid movement is caused by the differential pressure across the filter, in this example, the difference The pressure causes the fluid to move from the feed side through the filter to the dispensing side at a flow rate of 1.5 cc/sec. The flow rate will continue until it no longer requires fluid. At that time, the dispensing pump diaphragm will be at its lowest point and the pressure regulator used to dispense the pump will no longer be able to maintain a set point of 4 psi. The pressure at the second stage then begins to drift towards the set point of 10.98 psi. Once the drift begins to occur, it means that the filtration is over and the dispensing pump can be removed from the filter and passed to the next step in the cycle. One reason for this is possible because the pressure transducer is placed in the fluid path. If the pressure transducer is placed only in the aerodynamic path, the change in fluid pressure may not be detected.

圖9描繪具有用於饋入級901及分配級902之氣動至氣動泵設置的可客製化分配系統900之一實例實施例之圖解表示。在此實例中,饋入泵930a及饋入泵930b實體地組合為一單元,但其各自彼此獨立地操作、藉由本文中所揭示之智慧型控制器之實施例(見圖6)獨立地控制,且具有與數組各別瓶970a、970b之流體連接,瓶970a、970b含有用於特定分配應用之化學品。有利地,歸因於同時分配,此組態可提供成本節省及高輸送量。同樣地,分配泵940a及分配泵940b實體地組合為一單元,但其各自彼此獨立地操作、藉由智慧型控制器獨立地控制,且具有與各別過濾器950a、950b、淨化管線及通向分配點之分配(出口)閥的流體連接。在一些實施例中,出口閥可包括停止/回吸閥(SSBV)。出口閥可連接至空中分子污染或其他分子或化學品監視/偵測器件。在分配點處將含有處理化學品的控制量之流體通過分配噴嘴而施加(分配)至晶圓上。必須控制將處理化學品施加至晶圓之速率,以便確保均一地施加處理液體。橫越晶圓之表面的塗層之厚度通常係以埃為單位而量測。9 depicts a graphical representation of an example embodiment of a customizable dispensing system 900 having pneumatic to pneumatic pump settings for feed stage 901 and distribution stage 902. In this example, feed pump 930a and feed pump 930b are physically combined into a single unit, but each operates independently of each other, independently of the embodiment of the smart controller disclosed herein (see Figure 6). Controlled and fluidly coupled to array of individual vials 970a, 970b, the vials 970a, 970b contain chemicals for a particular dispensing application. Advantageously, this configuration provides cost savings and high throughput due to simultaneous dispensing. Similarly, the dispensing pump 940a and the dispensing pump 940b are physically combined into one unit, but each operates independently of each other, independently controlled by the smart controller, and has separate filters 950a, 950b, purge lines, and The fluid connection to the distribution (outlet) valve to the dispensing point. In some embodiments, the outlet valve can include a stop/back suction valve (SSBV). The outlet valve can be connected to airborne molecular contamination or other molecular or chemical monitoring/detection devices. A controlled amount of fluid containing the treatment chemicals is applied (distributed) to the wafer through the dispensing nozzle at the dispensing point. The rate at which the treatment chemicals are applied to the wafer must be controlled to ensure uniform application of the treatment liquid. The thickness of the coating across the surface of the wafer is typically measured in angstroms.

分配噴嘴通常處於大氣中。較佳地,分配噴嘴處之壓力位準保持未受干擾-無高壓力、無真空、無尖峰。將流體路徑中之壓力轉換器置放於氣動至氣動設置中可確保分配泵之入口具有正壓力,且總是準確地控制正壓力,而不必進行任何假設。壓力轉換器為可依據所強加之壓力而產生信號的感測器類型。許多合適壓力轉換器可用於此設置中。在一些實施例中,正壓力可在0 psi至約12 psi之範圍內。在一些實施例中,正壓力可在約2 psi至10 psi之範圍內。The dispensing nozzle is usually in the atmosphere. Preferably, the pressure level at the dispensing nozzle remains undisturbed - no high pressure, no vacuum, no spikes. Placing the pressure transducer in the fluid path in a pneumatic to pneumatic setting ensures that the inlet of the dispensing pump has a positive pressure and always accurately controls the positive pressure without any assumptions. A pressure transducer is a type of sensor that can generate a signal depending on the pressure applied. Many suitable pressure transducers can be used in this setup. In some embodiments, the positive pressure can range from 0 psi to about 12 psi. In some embodiments, the positive pressure can range from about 2 psi to 10 psi.

圖10至圖15說明具有用於饋入級901及分配級902之氣動至氣動泵組態的可客製化分配系統1000之一實例實施例之泵控制及序列操作。在此實例實施例中,可客製化分配系統1000可包含各種閥,該等閥包括入口閥、隔離閥、排放閥、障壁閥、淨化閥及出口閥,其具有與上文參考多級泵100所描述之各別閥之功能相似的功能。另外,在此實例中,利用電子調節器935以獨立地調節饋入泵930a、930b之氣動致動,且利用電子調節器945以獨立地調節分配泵940a、940b之氣動致動。在此實例實施例中,可客製化分配系統1000可進一步包含具有RFID標籤952a之智慧型過濾器950a、具有RFID標籤952b之智慧型過濾器950b、PCB 961,及PCB 962。在此實例中,由於兩個泵實體地組合為一單元,故印刷電路板(PCB)耦接至該單元及智慧型控制器以按來自該智慧型控制器之指令來運轉該等泵中之一者,或同時運轉此兩個泵。10 through 15 illustrate pump control and sequence operations of an example embodiment of a customizable dispensing system 1000 having a pneumatic to pneumatic pump configuration for feeding stage 901 and dispensing stage 902. In this example embodiment, the customizable dispensing system 1000 can include various valves including an inlet valve, an isolation valve, a discharge valve, a barrier valve, a purge valve, and an outlet valve having a multi-stage pump as described above. The functions of the various valves described in 100 are similar in function. Additionally, in this example, electronic regulator 935 is utilized to independently adjust the pneumatic actuation of feed pumps 930a, 930b, and electronic regulator 945 is utilized to independently adjust the pneumatic actuation of dispense pumps 940a, 940b. In this example embodiment, the customizable dispensing system 1000 can further include a smart filter 950a having an RFID tag 952a, a smart filter 950b having an RFID tag 952b, a PCB 961, and a PCB 962. In this example, since the two pumps are physically combined into one unit, a printed circuit board (PCB) is coupled to the unit and the smart controller to operate the pumps in accordance with instructions from the smart controller. One, or both pumps.

圖11說明實例填充及分配序列1100,其中將化學品自瓶970a牽引至饋入泵930a中。為了簡單起見,圖11至圖15中未展示饋入泵930b及分配泵940b以及與其相關聯之組件/連接。饋入泵930b及分配泵940b可具有本文中參考各別饋入泵930a及分配泵940a所描述之相同或相似泵控制及序列操作。Figure 11 illustrates an example fill and dispense sequence 1100 in which chemicals are drawn from bottle 970a into feed pump 930a. For the sake of simplicity, the feed pump 930b and the dispense pump 940b and the components/connections associated therewith are not shown in Figures 11-15. Feed pump 930b and dispense pump 940b may have the same or similar pump control and sequence operations as described herein with reference to respective feed pump 930a and dispense pump 940a.

過濾器950a可具有標籤952a。在操作中,標籤讀取器(未圖示)可自標籤952a讀取過濾器資訊且將過濾器資訊傳達至智慧型控制器(見圖6)。智慧型控制器可處理過濾器資訊且將規則應用於過濾器資訊以判定是否及如何操作饋入泵930a及分配泵940a,包括控制填充壓力、監視流體壓力概況,及針對偏移產生警報。另外,智慧型控制器可基於自標籤952a所獲得之過濾器資訊而在分配循環期間調整可客製化分配系統1000之操作。Filter 950a can have a label 952a. In operation, a tag reader (not shown) can read filter information from tag 952a and communicate the filter information to the smart controller (see Figure 6). The smart controller can process the filter information and apply rules to the filter information to determine if and how to operate the feed pump 930a and the dispense pump 940a, including controlling the fill pressure, monitoring the fluid pressure profile, and generating an alarm for the offset. Additionally, the smart controller can adjust the operation of the customizable dispensing system 1000 during the dispensing cycle based on the filter information obtained from the tag 952a.

智慧型控制器亦可使用過濾器資訊以使良好或不良操作與過濾器特性相關。在操作期間,智慧型控制器可追蹤用於可客製化分配系統1000之多種操作資料。藉由智慧型控制器追蹤之資訊可包括使可用於智慧型控制器之任何操作參數及藉由智慧型控制器計算之任何資訊。操作資料之一些非限制性實例可包括壓力、與閥操作有關之參數、馬達位置、馬達速度、液壓或其他參數(諸如,溫度(若泵包括溫度感測器))。此資訊可用以判定分配是否為/曾經為良好分配。此情形可在已發生分配之後或在分配循環期間即時地進行。Smart controllers can also use filter information to correlate good or bad operation with filter characteristics. During operation, the smart controller can track a variety of operational data for the customizable dispensing system 1000. The information tracked by the smart controller may include any operational parameters that can be used for the smart controller and any information calculated by the smart controller. Some non-limiting examples of operational data may include pressure, parameters related to valve operation, motor position, motor speed, hydraulic pressure, or other parameters (such as temperature (if the pump includes a temperature sensor)). This information can be used to determine if the assignment is/has been a good assignment. This situation can occur immediately after the allocation has taken place or during the dispensing cycle.

可使操作資料與過濾器資訊相關,使得可識別各種過濾器參數對分配品質之效應。作為一實例,智慧型控制器可記錄過濾器之批號,使得可客製化分配系統1000之操作資料可與彼批相關。此資訊可用以識別特定批之過濾器相比於相同設計之另一批之過濾器是產生更好結果或是產生更差結果。相似地,序號可用以追蹤操作資料相對於個別過濾器以幫助判定個別過濾器是否為不良塗層之原因。作為又一實例,可使操作資料與薄膜起泡點相關以判定具有相同零件號但不同薄膜起泡點之過濾器是否具有不同分配結果。來自標籤952a之記錄資訊及關於分配之追蹤資訊可最佳化過濾器之選擇且甚至最佳化過濾器之製造。The operational data can be correlated with the filter information so that the effects of various filter parameters on the quality of the distribution can be identified. As an example, the smart controller can record the batch number of the filter such that the operational data of the customizable dispensing system 1000 can be associated with the batch. This information can be used to identify that a particular batch of filters produces better results or produces worse results than another batch of filters of the same design. Similarly, serial numbers can be used to track operational data relative to individual filters to help determine if individual filters are poor coatings. As yet another example, the operational data can be correlated to the bubble point of the film to determine if filters having the same part number but different film bubble points have different distribution results. The recorded information from tag 952a and the tracking information about the distribution can optimize the selection of filters and even optimize the manufacture of the filters.

圖12說明實例過濾序列1200。如上文所論述,智慧型過濾器可在各種半導體製造程序中起重要作用。作為一特定實例,假定將第一級流體壓力設定點設定至10 psi且將第二級流體壓力設定點設定至8 psi,則該兩個設定點之間的差量為2 psi。此壓力差量(ΔP)拉動流體橫越過濾器。過濾器為密封類型,因此,當推動流體橫越過濾器時,不存在壓力損失。取決於過濾器之流動速率及電阻,兩個級中之壓力隨著時間推移而最終達到平衡且過濾結束。先前,在氣動至氣動設置中未精確地知道實際上何時發生彼結束。在一些實施例中,可將壓力轉換器定位於流體路徑中以向泵提供及時且準確之資訊,因此,泵可轉移至下一步驟,而無需不必要地等待。在使用圖10上所展示之設置作為一實例的情況下,分配側上之流體隔膜最終降至最低點且不再有流體可進入泵中。同時,饋入級處之瓶牽引器(bottle drawer)繼續設法推動流體通過至分配側,從而引起分配側處之流體壓力提高,最終上升至10 psi,從而用信號通知過濾結束。在氣動至氣動設置中,此壓力係藉由置放於流體路徑中之壓力轉換器偵測。再次,經由與分配級之協調而控制流動速率。在分配級處,可控制下游壓力,使得可產生最低缺陷。另外,過濾結束感測實現基礎可客製化分配系統之最好可能輸送量,此係因為該系統不必等待預定時段且可前進及繼續進行以準備好下一分配循環。FIG. 12 illustrates an example filter sequence 1200. As discussed above, smart filters can play an important role in a variety of semiconductor manufacturing processes. As a specific example, assuming a first stage fluid pressure set point is set to 10 psi and a second stage fluid pressure set point is set to 8 psi, the difference between the two set points is 2 psi. This pressure differential (ΔP) pulls the fluid across the filter. The filter is of the sealed type so there is no pressure loss when pushing the fluid across the filter. Depending on the flow rate and resistance of the filter, the pressure in the two stages eventually reaches equilibrium over time and the filtration ends. Previously, it was not precisely known in the pneumatic to pneumatic setting when the end actually occurred. In some embodiments, the pressure transducer can be positioned in the fluid path to provide timely and accurate information to the pump so that the pump can be moved to the next step without waiting unnecessarily. With the arrangement shown in Figure 10 as an example, the fluid diaphragm on the dispensing side eventually drops to a minimum and no more fluid can enter the pump. At the same time, the bottle drawer at the feed stage continues to try to push the fluid through to the dispensing side, causing the fluid pressure at the dispensing side to increase, eventually rising to 10 psi, signaling the end of filtration. In a pneumatic to pneumatic setting, this pressure is detected by a pressure transducer placed in the fluid path. Again, the flow rate is controlled via coordination with the distribution stage. At the distribution level, the downstream pressure can be controlled so that the lowest defects can be produced. In addition, the filter end sensing achieves the best possible throughput of the base customizable dispensing system because the system does not have to wait for a predetermined period of time and can proceed and continue to prepare for the next dispensing cycle.

在一混合及匹配系統中,瓶牽引器可利用馬達泵以自瓶拉動流體。可施加(經由上游電子調節器)負壓力以將流體自瓶拉動至第一級中之流體儲集器中。使用馬達泵可具有關於流體速率及壓力之較精細程度之控制的益處。在一些實施例中,可以較低成本利用氣動泵。因此,在一些實施例中,上文所描述之正壓力控制方案不限於氣動至氣動設置,且可實施於馬達至馬達設置或馬達至氣動設置中。亦可加壓於瓶,且饋入級可用以控制化學品填充之速率,且亦判定填充何時完成。In a mixing and matching system, the bottle tractor can utilize a motor pump to pull fluid from the bottle. A negative pressure can be applied (via the upstream electronic regulator) to pull the fluid from the bottle into the fluid reservoir in the first stage. The use of a motor pump can have the benefit of control over the finer degree of fluid velocity and pressure. In some embodiments, a pneumatic pump can be utilized at a lower cost. Thus, in some embodiments, the positive pressure control schemes described above are not limited to pneumatic to pneumatic settings and may be implemented in motor to motor settings or motor to pneumatic settings. It can also be pressurized to the bottle, and the feed stage can be used to control the rate at which the chemical is filled, and also when the fill is completed.

除了分配循環以外,智慧型控制器亦可經組態以執行其他操作。舉例而言,當新過濾器連接至泵時,應起動注給過濾器,使得過濾器薄膜在運轉分配循環之前充分地濕潤。實例起動注給常式可如下。首先,將流體引入至分配腔室中。可排放過濾器達一時段以自過濾器之上游部分移除氣泡。接下來,可發生再循環淨化片段。圖13中展示實例再循環淨化序列1300。除了對於以有效率方式起動注給過濾器重要以外,再循環淨化亦可移除氣泡而無化學廢料。在跟隨之淨化至排放片段中,打開隔離閥及淨化閥且閉合障壁閥。將流體引導出分配腔室且通過排放口。在此過程之後可為過濾片段、排放片段及淨化片段,此後可加壓於過濾器且可閉合障壁閥及排放閥,同時打開隔離閥且加壓於饋入級處之流體。可發生前向沖洗片段,其中使流體通過過濾器而流至分配腔室且使其淨化出淨化閥。可再次發生淨化至排放片段。可在需要或想要時重複起動注給常式。In addition to the distribution loop, the smart controller can also be configured to perform other operations. For example, when a new filter is connected to the pump, the injection should be initiated so that the filter membrane is sufficiently wetted prior to running the dispensing cycle. The example start-up note to the routine can be as follows. First, fluid is introduced into the dispensing chamber. The filter can be drained for a period of time to remove air bubbles from the upstream portion of the filter. Next, a recirculating purification fragment can occur. An example recycle purification sequence 1300 is shown in FIG. In addition to being important to activate the injection filter in an efficient manner, the recirculation purge can also remove air bubbles without chemical waste. In the subsequent purification to the discharge section, the isolation valve and the purge valve are opened and the barrier valve is closed. The fluid is directed out of the dispensing chamber and through the vent. This process can be followed by filtration of the fragments, drainage of the fragments and purification of the fragments, after which the pressure can be applied to the filter and the barrier and discharge valves can be closed while the isolation valve is opened and pressurized to the fluid at the feed stage. A forward flushing segment can occur in which fluid is passed through the filter to the dispensing chamber and purged out of the purge valve. Purification can occur again to the discharge section. The starter can be repeated to the routine when needed or desired.

可基於所使用之過濾器類型及處理流體而起動注給可客製化分配系統中之泵。因此,雖然前述內容提供實例起動注給常式,但可使用其他起動注給常式,此將為熟習此項技術者所理解。合適起動注給常式可涉及任何數目個不同步驟且確保過濾器薄膜充分地濕潤。可用於起動注給常式中之片段序列之一些非限制性實例包括(但不限於):i)填充片段、排放片段;ii)填充片段、淨化至排放片段、過濾片段、排放片段、淨化至入口片段;iii)分配片段、填充片段、過濾片段及淨化片段。圖14說明實例填充片段1400,其中可客製化分配系統1000準備好下一分配。圖15說明實例排放片段1500,其中可客製化分配系統1000在經由壓力監視而偵測氣泡時自動地排放以移除氣泡,因此防止氣體在壓力下再溶解。可在需要或想要時於起動注給常式中使用額外或替代片段。The pump in the customizable dispensing system can be activated based on the type of filter used and the process fluid. Thus, while the foregoing provides an example priming note to the routine, other priming notes can be used for the routine, as will be appreciated by those skilled in the art. Suitable priming to the routine can involve any number of different steps and ensure that the filter membrane is sufficiently wetted. Some non-limiting examples of sequences that can be used to initiate a fragment into a routine include, but are not limited to, i) filling fragments, discharging fragments; ii) filling fragments, purifying to discharging fragments, filtering fragments, discharging fragments, purifying to Inlet segment; iii) allocate segments, fill segments, filter segments, and purify segments. Figure 14 illustrates an example fill segment 1400 in which the customizable dispensing system 1000 is ready for the next allocation. Figure 15 illustrates an example discharge section 1500 in which the customizable dispensing system 1000 automatically vents to remove bubbles upon detection of bubbles via pressure monitoring, thus preventing gas from redissolving under pressure. Additional or alternative segments may be used in the priming routine as needed or desired.

如上文所論述,在一些實施例中,可客製化分配系統可包括實體連接泵之一或多個單元。在PCB之幫助下,智慧型控制器可經由每單元之單一線路/埠/實體介面而與此等泵通信。然而,由於該等泵未實體地整合,故該等泵中每一者仍需要一整組導管及零件。在一些實施例中,本文中所揭示之可客製化分配系統可包括具有簡化佈線/導管要求之整合泵。As discussed above, in some embodiments, the customizable dispensing system can include one or more units that are physically connected to the pump. With the help of the PCB, the smart controller can communicate with these pumps via a single line/埠/physical interface per unit. However, since the pumps are not physically integrated, each of the pumps still requires a complete set of conduits and parts. In some embodiments, the customizable dispensing system disclosed herein can include an integrated pump with simplified wiring/catheter requirements.

圖16描繪整合泵1600之一實例實施例之圖解表示,其中兩個氣動泵實體地整合為一單元。在整合泵1600中,兩個氣動泵(泵1、泵2)共用包夾於前板1611與端板1612之間的流體板1610。作為一非限制性實例,流體板可由諸如聚四氟乙烯(PTFE)之聚合材料或一些其他合適材料製成。作為一特定實例,流體板可為4"高、4"寬及 "厚。流體板之兩側可經加工或以其他方式塑形以產生盤狀物、凹座或凹形表面。在此實例中,該等氣動泵中每一者具有一端板,該端板耦接至該流體板之一側以形成一空腔或空間以用於在其中固持流體。可獨立氣動地致動隔膜1621、1622以將流體1601、1602引導進或引導出整合泵1600。配件板可包夾於端板之間以在流體空間與配件之間提供流體連接。作為一非限制性實例,端板可由金屬製成。亦可使用諸如塑膠之其他合適材料。參看圖6,假定饋入泵630包含複數個整合泵1600,整合泵1600之每一單元具有連接至該單元之單一控制板。在此實例中,可客製化分配系統600可容易增加其操作容量及能力,而不必重新佈線每一饋入泵630。 16 depicts a graphical representation of an example embodiment of an integrated pump 1600 in which two pneumatic pumps are physically integrated into one unit. In the integrated pump 1600, two pneumatic pumps (pump 1, pump 2) share a fluid plate 1610 sandwiched between the front plate 1611 and the end plate 1612. As a non-limiting example, the fluid plate can be made of a polymeric material such as polytetrafluoroethylene (PTFE) or some other suitable material. As a specific example, the fluid plate can be 4" high, 4" wide and "Thick. Both sides of the fluid plate can be processed or otherwise shaped to produce a disc, recess, or concave surface. In this example, each of the pneumatic pumps has an end plate, which Coupled to one side of the fluid plate to form a cavity or space for holding fluid therein. The diaphragm 1621, 1622 can be independently pneumatically actuated to guide fluid 1601, 1602 into or out of the integrated pump 1600. Accessory plate It can be sandwiched between the end plates to provide a fluid connection between the fluid space and the fittings. As a non-limiting example, the end plates can be made of metal. Other suitable materials such as plastic can also be used. See Figure 6, assuming the feed The inlet pump 630 includes a plurality of integrated pumps 1600, and each unit of the integrated pump 1600 has a single control board connected to the unit. In this example, the customizable dispensing system 600 can easily increase its operating capacity and capabilities without having to Rewire each feed pump 630. 16 depicts a graphical representation of an example embodiment of an integrated pump 1600 in which two pneumatic pumps are physically integrated into one unit. In the integrated pump 1600, two pneumatic pumps (pump 1, pump 2 ) share a fluid plate 1610 sandwiched between the front plate 1611 and the end plate 1612. As a non-limiting example, the fluid plate can be made of a polymeric material such as polytetrafluoroethylene (PTFE) or some other suitable material. As a specific example, the fluid plate can be 4" high, 4" wide and "Thick. Both sides of the fluid plate may be machined or otherwise shaped to create a disc, recess or concave surface. In this example, each of the pneumatic pumps has an end plate, the end plate One side of the fluid plate is coupled to form a cavity or space for holding fluid therein. The diaphragms 1621, 1622 can be independently pneumatically actuated to direct fluids 1601, 1602 into or out of the integrated pump 1600. It may be sandwiched between the end plates to provide a fluid connection between the fluid space and the fitting. As a non-limiting example, the end plates may be made of metal. Other suitable materials such as plastic may also be used. Referring to Figure 6, it is assumed that the feed The inlet pump 630 includes a plurality of integrated pumps 1600, each unit of the integrated pump 1600 having a single control panel coupled to the unit. In this example, the customizable dispensing system 600 can easily increase its operational capacity and capacity without having "Thick. Both sides of the fluid plate may be machined or otherwise shaped to create a disc, recess or concave surface. In this example, each of the pneumatic pumps has an end plate, the end plate One side of the fluid plate is coupled to form a cavity or space for holding fluid therein. The diaphragms 1621, 1622 can be independently pneumatically actuated to direct fluids 1601, 1602 into or out of the integrated pump 1600. It may be sandwiched between the end plates to provide a fluid connection between the fluid space and the fitting. As a non-limiting example, the end plates may be made of metal. Other suitable materials such as plastic may also be used. Referring to Figure 6, it is assumed that the feed The inlet pump 630 includes a plurality of integrated pumps 1600, each unit of the integrated pump 1600 having a single control panel coupled to the unit. In this example, the customizable dispensing system 600 can easily increase its operational capacity and capacity without having to Each feed pump 630 is re-routed. to Each feed pump 630 is re-routed.

圖17描繪整合泵1700之一實例實施例之圖解表示,其中四個氣動泵(針對流體1701之泵1、針對流體1702之泵2、針對流體1703之泵3、針對流體1704之泵4)實體地整合為一單元。智慧型控制器可經由單一線路/埠/介面而控制此等泵。每一泵具有一流體側及一氣動側。此等泵共用某些零件,包括中心板1710、前板1711、端板1712、流體板1721,及流體板1722。在一些實施例中,該等泵亦可共用配件板及配件,包括流體配件及氣動配件。17 depicts a graphical representation of an example embodiment of an integrated pump 1700 in which four pneumatic pumps (pump 1 for fluid 1701, pump 2 for fluid 1702, pump 3 for fluid 1703, pump 4 for fluid 1704) entity The ground is integrated into one unit. Smart controllers can control these pumps via a single line/埠/interface. Each pump has a fluid side and a pneumatic side. These pumps share certain components, including a center plate 1710, a front plate 1711, an end plate 1712, a fluid plate 1721, and a fluid plate 1722. In some embodiments, the pumps may also share accessory plates and accessories, including fluid fittings and pneumatic fittings.

圖18描繪整合泵1800之一實例實施例之透視俯視圖。在此實例中,整合泵1800之泵1及泵2共用流體板1810、前板1811、端板1812、配件板1860、流體配件1885,及氣動配件1895。FIG. 18 depicts a perspective top view of an example embodiment of an integrated pump 1800. In this example, pump 1 and pump 2 of integrated pump 1800 share fluid plate 1810, front plate 1811, end plate 1812, accessory plate 1860, fluid fitting 1885, and pneumatic fitting 1895.

圖19描繪整合泵1900之一實例實施例之分解圖。為了簡單起見,僅展示一個氣動泵。整合泵1900之氣動泵可共用如上文參看圖16至圖18所描述之某些零件。在此實例中,整合泵1900包含流體板1910、閥板1911、端板1912、包夾於閥板1911與流體板1910之間的隔膜1922、定位於隔膜1922與閥板1911之間的o型環1980,及將流體板1910、閥板1911、端板1912與隔膜1922固持於一起之緊固件1990。o型環1980可為部分地固定的。隔膜1922可由彈性體材料、PTFE、改質後PTFE、不同層類型之複合材料或較佳地與處理流體不反應之其他合適材料的薄片製成。在一實施例中,隔膜1922可為大約0.013吋厚。可將流體通過流體配件1985而引導進及引導出整合泵1900,流體配件1985可連接至通過頂部支撐板1970及配件板1960之流體通道。可經由氣動配件1995氣動地致動隔膜1922。空腔(流體側)中流體之移置體積可隨著施加至隔膜1922之壓力/真空之量而變化。此壓力可經由壓力螺帽1950而量測。19 depicts an exploded view of an example embodiment of an integrated pump 1900. For the sake of simplicity, only one pneumatic pump is shown. The pneumatic pump incorporating the pump 1900 can share certain components as described above with reference to Figures 16-18. In this example, the integrated pump 1900 includes a fluid plate 1910, a valve plate 1911, an end plate 1912, a diaphragm 1922 sandwiched between the valve plate 1911 and the fluid plate 1910, and an o-shaped positioned between the diaphragm 1922 and the valve plate 1911. Ring 1980, and fasteners 1990 holding fluid plate 1910, valve plate 1911, end plate 1912 and diaphragm 1922 together. The o-ring 1980 can be partially fixed. The diaphragm 1922 can be formed from a sheet of elastomeric material, PTFE, modified PTFE, composites of different layer types, or other suitable materials that preferably do not react with the treatment fluid. In an embodiment, the diaphragm 1922 can be approximately 0.013 inches thick. Fluid can be directed into and out of the integrated pump 1900 through the fluid fitting 1985, which can be coupled to the fluid passage through the top support plate 1970 and the accessory plate 1960. The diaphragm 1922 can be pneumatically actuated via a pneumatic fitting 1995. The displaced volume of fluid in the cavity (fluid side) can vary with the amount of pressure/vacuum applied to the membrane 1922. This pressure can be measured via the pressure nut 1950.

熟習此項技術者可瞭解,可以此方式組合的泵之數目以及泵之類型不限於隨附於本發明之圖式所示的泵之數目以及泵之類型。舉例而言,亦可組合馬達驅動泵:藉由在單一區塊中形成兩個或兩個以上鑽孔(每一泵一個鑽孔)、藉由以單一控制板將兩個或兩個以上輥軋隔膜泵用螺栓連接於一起,等等。在一些狀況下,諸如在組合該等泵時所涉及之複雜性及可藉由此組合提供之益處的實務考慮可影響待組合泵之數目。舉例而言,在一分配系統中使用兩個分離泵的成本可為X,且組合兩個泵的成本可為X之分率。然而,出現四個泵可增加X之彼分率。隨著待組合泵之數目繼續增加,挑戰亦增加,此情形減小在組合該等泵方面的價值。可存在X之彼分率足夠接近X以便致使自組合該等泵之節省可忽略的點。Those skilled in the art will appreciate that the number of pumps that can be combined in this manner, as well as the type of pump, is not limited to the number of pumps and the types of pumps that are included in the drawings of the present invention. For example, a motor-driven pump can also be combined: by forming two or more drill holes in a single block (one drill per pump), by placing two or more rolls with a single control panel The rolled diaphragm pumps are bolted together, and so on. In some cases, such as the complexity involved in combining such pumps and the practical considerations that may be provided by the combination may affect the number of pumps to be combined. For example, the cost of using two separate pumps in a distribution system can be X, and the cost of combining the two pumps can be a fraction of X. However, the presence of four pumps increases the Z rate. As the number of pumps to be combined continues to increase, the challenge also increases, which reduces the value in combining the pumps. There may be points where the X ratio is sufficiently close to X to cause a negligible savings in the self-combining of the pumps.

組合可獨立地操作之泵可提供許多優勢。舉例而言,整合泵可能需要小於分離泵之總佔據面積的佔據面積。另外,整合泵可簡化佈線/電纜線,藉此減少安裝/組態/維護時間。此外,至少歸因於在整合泵之每一單元中之材料共用,整合泵可減少總系統之成本。Combining pumps that can be operated independently provides many advantages. For example, an integrated pump may require an footprint that is less than the total footprint of the separation pump. In addition, integrated pumps simplify wiring/cables, thereby reducing installation/configuration/maintenance time. Furthermore, integrated pumps can reduce the cost of the overall system, at least due to material sharing in each unit of the integrated pump.

儘管已在本發明中描述模組化、靈活性、智慧型、具成本效益且高效能之分配系統之實施例,但一般熟習此項技術者可瞭解,可在不脫離本文中所揭示之特定實施例之精神及範疇的情況下進行各種修改及改變。熟習此項技術者應瞭解,可獨立地實施或以各種組合實施本文中所揭示之特徵及態樣。因此,本文中所揭示(包括在隨附附件中)之規格及數字應在說明性而非限制性意義上予以考慮,且所有此等修改皆意欲包括於本發明之範疇內。因此,本發明之範疇應藉由以下申請專利範圍及其合法等效物判定。Although an embodiment of a modular, flexible, intelligent, cost-effective, and efficient dispensing system has been described in the present invention, it will be apparent to those skilled in the art that the specifics disclosed herein may be Various modifications and changes are possible in the context of the spirit and scope of the embodiments. Those skilled in the art will appreciate that the features and aspects disclosed herein can be implemented independently or in various combinations. The specification and figures, which are included in the accompanying drawings, are to be considered as illustrative and not limiting, and all such modifications are intended to be included within the scope of the invention. Therefore, the scope of the invention should be determined by the following claims and their legal equivalents.

100...多級泵100. . . Multistage pump

105...饋入級部分/饋入級105. . . Feeding level/feeding level

110...分配級部分/分配級110. . . Distribution level part/allocation level

112...壓力感測器112. . . Pressure sensor

120...過濾器120. . . filter

125...入口閥125. . . Inlet valve

130...隔離閥130. . . Isolation valve

135...障壁閥135. . . Barrier valve

140...淨化閥140. . . Purification valve

145...排放閥145. . . Drain valve

147...出口閥147. . . Outlet valve

150...饋入級泵/饋入泵150. . . Feed stage pump/feed pump

155...饋入腔室155. . . Feed into the chamber

160...饋入級隔膜160. . . Feed-in diaphragm

165...活塞165. . . piston

170...導螺桿170. . . Lead screw

175...步進馬達/饋入馬達175. . . Stepper motor/feeding motor

180...分配級泵/分配泵180. . . Distribution stage pump / distribution pump

185...分配腔室185. . . Distribution chamber

190...分配級隔膜190. . . Distribution diaphragm

192...活塞192. . . piston

195...導螺桿195. . . Lead screw

200...分配馬達200. . . Distribution motor

205...分配區塊205. . . Allocation block

210...入口210. . . Entrance

215...排放出口215. . . Emission outlet

220...分配出口220. . . Distribution exit

225...泵罩蓋/外殼罩蓋225. . . Pump cover / housing cover

227...活塞外殼227. . . Piston housing

230...閥板230. . . Valve plate

235...入口235. . . Entrance

240...入口240. . . Entrance

245...入口245. . . Entrance

250...入口250. . . Entrance

255...入口255. . . Entrance

260...供應管線260. . . Supply pipeline

263...歧管罩蓋263. . . Manifold cover

265...供應入口265. . . Supply entrance

270...真空入口270. . . Vacuum inlet

280...流體流動過道280. . . Fluid flow aisle

285...流動過道285. . . Mobile aisle

290...流動過道290. . . Mobile aisle

295...流動過道295. . . Mobile aisle

300...流動過道300. . . Mobile aisle

302...閥控制歧管302. . . Valve control manifold

305...流動過道305. . . Mobile aisle

318...配件318. . . Accessories

500...模組化架構500. . . Modular architecture

600...可客製化分配系統600. . . Customizable distribution system

601...饋入級601. . . Feeding level

602...分配級602. . . Distribution level

610...智慧型控制器610. . . Smart controller

620...軌道620. . . track

630...氣動饋入泵630. . . Pneumatic feed pump

635...電子調節器635. . . Electronic regulator

640...氣動分配泵640. . . Pneumatic distribution pump

645...電子調節器645. . . Electronic regulator

650...過濾器650. . . filter

700...可客製化分配系統700. . . Customizable distribution system

740...馬達驅動分配泵740. . . Motor driven distribution pump

800...可客製化分配系統800. . . Customizable distribution system

830...馬達驅動饋入泵830. . . Motor driven feed pump

900...可客製化分配系統900. . . Customizable distribution system

901...饋入級901. . . Feeding level

902...分配級902. . . Distribution level

930a...饋入泵930a. . . Feed pump

930b...饋入泵930b. . . Feed pump

935...電子調節器935. . . Electronic regulator

940a...分配泵940a. . . Distribution pump

940b...分配泵940b. . . Distribution pump

945...電子調節器945. . . Electronic regulator

950a...智慧型過濾器950a. . . Smart filter

950b...智慧型過濾器950b. . . Smart filter

952a...射頻識別(RFID)標籤952a. . . Radio frequency identification (RFID) tag

952b...射頻識別(RFID)標籤952b. . . Radio frequency identification (RFID) tag

961...印刷電路板(PCB) 961. . . Printed circuit board (PCB)

962...印刷電路板(PCB) 962. . . Printed circuit board (PCB)

970a...瓶970a. . . bottle

970b...瓶970b. . . bottle

1000...可客製化分配系統1000. . . Customizable distribution system

1100...填充及分配序列1100. . . Fill and assign sequence

1200...過濾序列1200. . . Filter sequence

1300...再循環淨化序列1300. . . Recycling purification sequence

1400...填充片段1400. . . Fillet

1500...排放片段1500. . . Emission fragment

1600...整合泵1600. . . Integrated pump

1601...流體1601. . . fluid

1602...流體1602. . . fluid

1610...流體板1610. . . Fluid plate

1611...前板1611. . . Ger

1612...端板1612. . . End plate

1621...隔膜1621. . . Diaphragm

1622...隔膜1622. . . Diaphragm

1700...整合泵1700. . . Integrated pump

1701...流體1701. . . fluid

1702...流體1702. . . fluid

1703...流體1703. . . fluid

1704...流體1704. . . fluid

1710...中心板1710. . . Center board

1711...前板1711. . . Ger

1712...端板1712. . . End plate

1721...流體板1721. . . Fluid plate

1722...流體板1722. . . Fluid plate

1800...整合泵1800. . . Integrated pump

1810...流體板1810. . . Fluid plate

1811...前板1811. . . Ger

1812...端板1812. . . End plate

1860...配件板1860. . . Accessory board

1885...流體配件1885. . . Fluid fitting

1895...氣動配件1895. . . Pneumatic accessories

1900...整合泵1900. . . Integrated pump

1910...流體板1910. . . Fluid plate

1911...閥板1911. . . Valve plate

1912...端板1912. . . End plate

1922...隔膜1922. . . Diaphragm

1950...壓力螺帽1950. . . Pressure nut

1960...配件板1960. . . Accessory board

1970...頂部支撐板1970. . . Top support plate

1980...o型環1980. . . O-ring

1985...流體配件1985. . . Fluid fitting

1990...緊固件1990. . . fastener

1995...氣動配件1995. . . Pneumatic accessories

4000...單級泵4000. . . Single stage pump

4005...分配區塊4005. . . Allocation block

4010...入口/外部淨化出口4010. . . Inlet/external purification outlet

4015...淨化/排放出口4015. . . Purification/discharge exit

4020...分配出口4020. . . Distribution exit

4025...泵罩蓋4025. . . Pump cover

4027...活塞外殼4027. . . Piston housing

4030...閥板4030. . . Valve plate

圖1描繪實例多級泵(「多級泵」)之圖解表示; Figure 1 depicts a graphical representation of an example multistage pump ("multistage pump");

圖2及圖3描繪實例多級泵之透視圖; 2 and 3 depict perspective views of an example multistage pump;

圖4描繪實例單級泵之透視圖; Figure 4 depicts a perspective view of an example single stage pump;

圖5描繪用於可客製化分配系統之模組化架構之一實例實施例之圖解表示; 5 depicts a graphical representation of an example embodiment of a modular architecture for a customizable dispensing system;

圖6描繪具有控制氣動饋入泵及氣動分配泵之智慧型控制器的可客製化分配系統之一實例實施例之圖解表示; 6 depicts a graphical representation of an example embodiment of a customizable dispensing system having a smart controller that controls a pneumatic feed pump and a pneumatic dispense pump;

圖7描繪具有控制氣動饋入泵及馬達分配泵之智慧型控制器的可客製化分配系統之一實例實施例之圖解表示; 7 depicts a graphical representation of an example embodiment of a customizable dispensing system having a smart controller that controls a pneumatic feed pump and a motor dispense pump;

圖8描繪具有控制馬達饋入泵及馬達分配泵之智慧型控制器的可客製化分配系統之一實例實施例之圖解表示; 8 depicts a graphical representation of an example embodiment of a customizable dispensing system having a smart controller that controls a motor feed pump and a motor dispense pump;

圖9描繪具有氣動至氣動組態之可客製化分配系統之一實例實施例之圖解表示; 9 depicts a graphical representation of an example embodiment of a customizable dispensing system having a pneumatic to pneumatic configuration;

圖10至圖15說明可客製化分配系統之一實例實施例之泵控制及序列操作; 10 through 15 illustrate pump control and sequence operations of an example embodiment of a customizable dispensing system;

圖16至圖17描繪整合泵之實例實施例之圖解表示; 16 through 17 depict graphical representations of example embodiments of integrated pumps;

圖18描繪整合泵之一實例實施例之透視俯視圖;及Figure 18 depicts a perspective top view of an example embodiment of an integrated pump;

圖19描繪整合泵之一實例實施例中之氣動泵之分解圖。 Figure 19 depicts an exploded view of the pneumatic pump in one example embodiment of an integrated pump.

601...饋入級601. . . Feeding level

602...分配級602. . . Distribution level

610...智慧型控制器610. . . Smart controller

620...軌道620. . . track

630...氣動饋入泵630. . . Pneumatic feed pump

635...電子調節器635. . . Electronic regulator

650...過濾器650. . . filter

700...可客製化分配系統700. . . Customizable distribution system

740...馬達驅動分配泵740. . . Motor driven distribution pump

Claims (14)

  1. 一種可客製化分配系統,其包含:一組饋入泵,其用於引導在半導體製造程序中所使用之化學品;一組分配泵,其用於分配該等化學品;及一智慧型控制器,其經組態以操作該組饋入泵及該組分配泵,其中該組饋入泵及該組分配泵包含一或多個整合泵,該一或多個整合泵中每一者包含實體地組合為一單元之兩個或兩個以上氣動泵,其中該單元中之該兩個或兩個以上氣動泵彼此獨立地操作,且其中該單元中之該兩個或兩個以上氣動泵係藉由該智慧型控制器獨立地控制。 A customizable dispensing system comprising: a set of feed pumps for directing chemicals used in a semiconductor manufacturing process; a set of dispensing pumps for dispensing the chemicals; and a smart type a controller configured to operate the set of feed pumps and the set of dispense pumps, wherein the set of feed pumps and the set of dispense pumps includes one or more integrated pumps, each of the one or more integrated pumps Containing two or more pneumatic pumps that are physically combined into one unit, wherein the two or more pneumatic pumps in the unit operate independently of each other, and wherein the two or more of the units are pneumatic The pump is independently controlled by the smart controller.
  2. 如請求項1之可客製化分配系統,其中該智慧型控制器經組態以在自與一第一泵之通信切換至與一第二泵之通信後隨即自動地辨識該第二泵且應用對應於該第二泵之一控制方案。 The customizable dispensing system of claim 1, wherein the smart controller is configured to automatically identify the second pump upon switching from communication with a first pump to communication with a second pump and The application corresponds to one of the second pump control schemes.
  3. 如請求項2之可客製化分配系統,其中該第一泵為一氣動泵且該第二泵為一馬達泵。 The customizable dispensing system of claim 2, wherein the first pump is a pneumatic pump and the second pump is a motor pump.
  4. 如請求項2之可客製化分配系統,其中該第一泵及該第二泵兩者皆為馬達泵。 The customizable dispensing system of claim 2, wherein the first pump and the second pump are both motor pumps.
  5. 如請求項2之可客製化分配系統,其中該第一泵及該第二泵兩者皆為氣動泵。 The customizable dispensing system of claim 2, wherein the first pump and the second pump are both pneumatic pumps.
  6. 如請求項1之可客製化分配系統,其中該智慧型控制器經進一步組態以在與一新連接泵建立介面連接後隨即自 動地辨識該新連接泵且應用對應於該新連接泵之一控制方案,其中該新連接泵為一馬達泵或一氣動泵。 The customizable dispensing system of claim 1, wherein the smart controller is further configured to establish an interface connection with a new connected pump The new connected pump is dynamically identified and applied to a control scheme corresponding to the new connected pump, wherein the newly connected pump is a motor pump or a pneumatic pump.
  7. 一種可客製化分配系統,其包含:一組饋入泵,其用於引導在半導體製造程序中所使用之化學品;一組分配泵,其用於分配該等化學品;一智慧型控制器,其經組態以操作該組饋入泵及該組分配泵,其中該組饋入泵及該組分配泵包含一或多個整合泵,該一或多個整合泵中每一者包含實體地組合為一單元之兩個或兩個以上氣動泵,其中該單元中之該兩個或兩個以上氣動泵彼此獨立地操作,其中該單元中之該兩個或兩個以上氣動泵係藉由該智慧型控制器獨立地控制,且其中該智慧型控制器經進一步組態以在與一新連接泵建立介面連接後隨即自動地辨識該新連接泵且應用對應於該新連接泵之一控制方案,其中該新連接泵為一馬達泵或一氣動泵。 A customizable dispensing system comprising: a set of feed pumps for directing chemicals used in a semiconductor manufacturing process; a set of dispensing pumps for dispensing the chemicals; a smart control And configured to operate the set of feed pumps and the set of dispense pumps, wherein the set of feed pumps and the set of dispense pumps comprise one or more integrated pumps, each of the one or more integrated pumps comprising Two or more pneumatic pumps physically combined into one unit, wherein the two or more pneumatic pumps in the unit operate independently of each other, wherein the two or more pneumatic pumping units in the unit Controlled independently by the smart controller, and wherein the smart controller is further configured to automatically identify the new connected pump and establish an application corresponding to the new connected pump after establishing an interface connection with a new connected pump A control scheme wherein the newly connected pump is a motor pump or a pneumatic pump.
  8. 如請求項7之可客製化分配系統,其中該智慧型控制器經進一步組態以在自與一第一泵之通信切換至與一第二泵之通信後隨即自動地辨識該第二泵且應用對應於該第二泵之一控制方案。 The customizable dispensing system of claim 7, wherein the smart controller is further configured to automatically identify the second pump upon switching from communication with a first pump to communication with a second pump And the application corresponds to one of the second pump control schemes.
  9. 如請求項8之可客製化分配系統,其中該第一泵為一氣動泵且該第二泵為一馬達泵。 A customizable dispensing system according to claim 8 wherein the first pump is a pneumatic pump and the second pump is a motor pump.
  10. 如請求項8之可客製化分配系統,其中該第一泵及該第二泵兩者皆為馬達泵。 The customizable dispensing system of claim 8, wherein the first pump and the second pump are both motor pumps.
  11. 如請求項8之可客製化分配系統,其中該第一泵及該第二泵兩者皆為氣動泵。 The customizable dispensing system of claim 8, wherein the first pump and the second pump are both pneumatic pumps.
  12. 如請求項8之可客製化分配系統,其中該切換係歸因於該第一泵之實體斷開及該第二泵之實體連接。 The customizable dispensing system of claim 8, wherein the switching is due to physical disconnection of the first pump and physical connection of the second pump.
  13. 如請求項8之可客製化分配系統,其中該切換係歸因於在該智慧型控制器處所接收之一指令。 The customizable distribution system of claim 8, wherein the switching is due to receiving an instruction at the smart controller.
  14. 一種過濾方法,其包含:在具有一饋入泵及一分配泵之一分配系統之一控制器處,判定自定位於該饋入泵與該分配泵之間的一過濾器之上游之流體的一上游壓力;將一饋入級流體壓力設定至該上游壓力;將一分配級流體壓力設定至一過濾壓力設定點;打開閥以允許該流體自一饋入側通過該過濾器而流動至一分配側,其中該饋入級流體壓力及該分配級流體壓力引起橫越該過濾器之一差壓,藉此使該流體自該饋入側通過該過濾器而移動至該分配側;及基於該分配側處之一流體壓力改變而判定一過濾結束。 A filtration method comprising: determining a fluid upstream of a filter positioned between the feed pump and the distribution pump at a controller having a feed pump and a distribution system of one of the distribution pumps An upstream pressure; a feed stage fluid pressure is set to the upstream pressure; a dispense stage fluid pressure is set to a filter pressure set point; the valve is opened to allow the fluid to flow through the filter from a feed side to the filter a dispensing side, wherein the feed stage fluid pressure and the dispense stage fluid pressure cause a differential pressure across the filter, thereby causing the fluid to move from the feed side through the filter to the dispensing side; and based on One of the fluid pressures at the distribution side changes to determine that a filtration is over.
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