WO2012006019A3 - Customizable dispense system with smart controller - Google Patents
Customizable dispense system with smart controller Download PDFInfo
- Publication number
- WO2012006019A3 WO2012006019A3 PCT/US2011/042018 US2011042018W WO2012006019A3 WO 2012006019 A3 WO2012006019 A3 WO 2012006019A3 US 2011042018 W US2011042018 W US 2011042018W WO 2012006019 A3 WO2012006019 A3 WO 2012006019A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- pump
- smart controller
- dispense system
- smart
- customizable dispense
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/06—Pumps having fluid drive
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D83/00—Containers or packages with special means for dispensing contents
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/007—Installations or systems with two or more pumps or pump cylinders, wherein the flow-path through the stages can be changed, e.g. from series to parallel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/02—Stopping, starting, unloading or idling control
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Reciprocating Pumps (AREA)
- Control Of Positive-Displacement Pumps (AREA)
- Fluid-Pressure Circuits (AREA)
- Coating Apparatus (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013518534A JP5883856B2 (en) | 2010-06-28 | 2011-06-27 | Customizable derivation system with smart controller |
SG2012092144A SG186725A1 (en) | 2010-06-28 | 2011-06-27 | Customizable dispense system with smart controller |
EP11804086.4A EP2586053A4 (en) | 2010-06-28 | 2011-06-27 | Customizable dispense system with smart controller |
US13/805,601 US20130101438A1 (en) | 2010-06-28 | 2011-06-27 | Customizable dispense system with smart controller |
CN201180032168.5A CN102959683B (en) | 2010-06-28 | 2011-06-27 | There is the Customizable dispense system of intelligent controller |
KR1020137002286A KR101810719B1 (en) | 2010-06-28 | 2011-06-27 | Customizable dispense system with smart controller |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US35923910P | 2010-06-28 | 2010-06-28 | |
US61/359,239 | 2010-06-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2012006019A2 WO2012006019A2 (en) | 2012-01-12 |
WO2012006019A3 true WO2012006019A3 (en) | 2012-04-05 |
Family
ID=45441718
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2011/042018 WO2012006019A2 (en) | 2010-06-28 | 2011-06-27 | Customizable dispense system with smart controller |
Country Status (8)
Country | Link |
---|---|
US (1) | US20130101438A1 (en) |
EP (1) | EP2586053A4 (en) |
JP (1) | JP5883856B2 (en) |
KR (1) | KR101810719B1 (en) |
CN (1) | CN102959683B (en) |
SG (1) | SG186725A1 (en) |
TW (2) | TW201613018A (en) |
WO (1) | WO2012006019A2 (en) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9395049B2 (en) | 2013-07-23 | 2016-07-19 | Baker Hughes Incorporated | Apparatus and methods for delivering a high volume of fluid into an underground well bore from a mobile pumping unit |
WO2015080081A1 (en) * | 2013-11-29 | 2015-06-04 | リソテックジャパン株式会社 | Chemical liquid supply mechanism and small-sized manufacturing device |
US9937990B2 (en) * | 2014-08-01 | 2018-04-10 | Circor Pumps North America, Llc | Intelligent sea water cooling system |
SG11201706560PA (en) * | 2015-02-12 | 2017-09-28 | Entegris Inc | Smart package |
US10221856B2 (en) | 2015-08-18 | 2019-03-05 | Bj Services, Llc | Pump system and method of starting pump |
JP6736989B2 (en) * | 2016-06-07 | 2020-08-05 | 東京エレクトロン株式会社 | Treatment liquid supply device, equipment unit, treatment liquid supply method and storage medium |
JP6942497B2 (en) * | 2016-09-08 | 2021-09-29 | 東京エレクトロン株式会社 | Processing liquid supply device |
CN106241246B (en) * | 2016-10-09 | 2018-07-10 | 长沙高汇环保科技有限公司 | Article automatic distributing retracting device control method |
GB201704763D0 (en) * | 2017-01-05 | 2017-05-10 | Illumina Inc | |
US11054803B2 (en) | 2018-07-13 | 2021-07-06 | Delta Electronics, Inc. | Motor drive, production system and method thereof with quality measuring and mechanism diagnosing functions using real and virtual system modules |
CN110716509B (en) * | 2018-07-13 | 2021-06-04 | 台达电子工业股份有限公司 | Production system with quality measurement and mechanism diagnosis functions, driver and method thereof |
CN110360089B (en) * | 2019-05-17 | 2021-07-27 | 保定雷弗流体科技有限公司 | Network-based speed-regulating peristaltic pump system and flow regulating method thereof |
DE102019115009A1 (en) * | 2019-06-04 | 2020-12-10 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Print head and method of making a print head |
JP7274356B2 (en) * | 2019-06-11 | 2023-05-16 | 東京エレクトロン株式会社 | LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD AND STORAGE MEDIA |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7029238B1 (en) * | 1998-11-23 | 2006-04-18 | Mykrolis Corporation | Pump controller for precision pumping apparatus |
US20060272576A1 (en) * | 2005-06-02 | 2006-12-07 | Chain-Chi Huang | Piping system structure of semiconductor equipment |
US7259675B2 (en) * | 2004-03-16 | 2007-08-21 | Newage Industries, Inc. | Process equipment tracking system |
JP2009099737A (en) * | 2007-10-16 | 2009-05-07 | Tokyo Electron Ltd | Processing liquid supply unit, liquid processing apparatus, processing liquid supply method, and storage medium |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3360951B2 (en) * | 1994-08-11 | 2003-01-07 | エービービー株式会社 | Painting equipment |
JPH10281069A (en) * | 1997-04-03 | 1998-10-20 | Iwaki:Kk | Pump unit |
JP3415061B2 (en) * | 1999-04-05 | 2003-06-09 | 東芝機械株式会社 | Drive control method and device for electric motor for driving hydraulic pump in injection molding machine |
JP2001038663A (en) * | 1999-07-28 | 2001-02-13 | Yamaha Motor Co Ltd | Machine control system |
US6912443B2 (en) * | 2000-03-10 | 2005-06-28 | David W. Duemler | Modular automated assembly system |
US7717682B2 (en) * | 2005-07-13 | 2010-05-18 | Purity Solutions Llc | Double diaphragm pump and related methods |
WO2007067358A2 (en) * | 2005-12-02 | 2007-06-14 | Entegris, Inc. | System and method for pressure compensation in a pump |
US7850431B2 (en) * | 2005-12-02 | 2010-12-14 | Entegris, Inc. | System and method for control of fluid pressure |
WO2007067359A2 (en) * | 2005-12-02 | 2007-06-14 | Entegris, Inc. | System and method for correcting for pressure variations using a motor |
TWI402423B (en) * | 2006-02-28 | 2013-07-21 | Entegris Inc | System and method for operation of a pump |
US20080257912A1 (en) * | 2007-04-17 | 2008-10-23 | Bach David T | Plug and play fluid dispensing technology |
JP5085236B2 (en) * | 2007-08-29 | 2012-11-28 | 株式会社川本製作所 | Water supply device and water supply system using water supply device |
-
2011
- 2011-06-27 EP EP11804086.4A patent/EP2586053A4/en not_active Withdrawn
- 2011-06-27 KR KR1020137002286A patent/KR101810719B1/en active IP Right Grant
- 2011-06-27 TW TW104143889A patent/TW201613018A/en unknown
- 2011-06-27 JP JP2013518534A patent/JP5883856B2/en active Active
- 2011-06-27 US US13/805,601 patent/US20130101438A1/en not_active Abandoned
- 2011-06-27 WO PCT/US2011/042018 patent/WO2012006019A2/en active Application Filing
- 2011-06-27 CN CN201180032168.5A patent/CN102959683B/en active Active
- 2011-06-27 TW TW100122495A patent/TWI545669B/en active
- 2011-06-27 SG SG2012092144A patent/SG186725A1/en unknown
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7029238B1 (en) * | 1998-11-23 | 2006-04-18 | Mykrolis Corporation | Pump controller for precision pumping apparatus |
US7259675B2 (en) * | 2004-03-16 | 2007-08-21 | Newage Industries, Inc. | Process equipment tracking system |
US20060272576A1 (en) * | 2005-06-02 | 2006-12-07 | Chain-Chi Huang | Piping system structure of semiconductor equipment |
JP2009099737A (en) * | 2007-10-16 | 2009-05-07 | Tokyo Electron Ltd | Processing liquid supply unit, liquid processing apparatus, processing liquid supply method, and storage medium |
Non-Patent Citations (1)
Title |
---|
See also references of EP2586053A4 * |
Also Published As
Publication number | Publication date |
---|---|
US20130101438A1 (en) | 2013-04-25 |
TW201212143A (en) | 2012-03-16 |
CN102959683A (en) | 2013-03-06 |
WO2012006019A2 (en) | 2012-01-12 |
KR101810719B1 (en) | 2017-12-19 |
TW201613018A (en) | 2016-04-01 |
JP5883856B2 (en) | 2016-03-15 |
CN102959683B (en) | 2016-04-06 |
KR20130133752A (en) | 2013-12-09 |
TWI545669B (en) | 2016-08-11 |
EP2586053A4 (en) | 2018-05-02 |
EP2586053A2 (en) | 2013-05-01 |
JP2013539202A (en) | 2013-10-17 |
SG186725A1 (en) | 2013-02-28 |
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