EP2586053A4 - Customizable dispense system with smart controller - Google Patents

Customizable dispense system with smart controller Download PDF

Info

Publication number
EP2586053A4
EP2586053A4 EP11804086.4A EP11804086A EP2586053A4 EP 2586053 A4 EP2586053 A4 EP 2586053A4 EP 11804086 A EP11804086 A EP 11804086A EP 2586053 A4 EP2586053 A4 EP 2586053A4
Authority
EP
European Patent Office
Prior art keywords
dispense system
smart controller
customizable dispense
customizable
smart
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP11804086.4A
Other languages
German (de)
French (fr)
Other versions
EP2586053A2 (en
Inventor
James Cedrone
Iraj Gashgaee
Paul J. Magoon
Jennifer M. Braggin
George L. Gonnella
Johnathan Owen Vail
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris Inc
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of EP2586053A2 publication Critical patent/EP2586053A2/en
Publication of EP2586053A4 publication Critical patent/EP2586053A4/en
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/06—Pumps having fluid drive
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D83/00—Containers or packages with special means for dispensing contents
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/007—Installations or systems with two or more pumps or pump cylinders, wherein the flow-path through the stages can be changed, e.g. from series to parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/02—Stopping, starting, unloading or idling control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Reciprocating Pumps (AREA)
  • Fluid-Pressure Circuits (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Coating Apparatus (AREA)
EP11804086.4A 2010-06-28 2011-06-27 Customizable dispense system with smart controller Withdrawn EP2586053A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US35923910P 2010-06-28 2010-06-28
PCT/US2011/042018 WO2012006019A2 (en) 2010-06-28 2011-06-27 Customizable dispense system with smart controller

Publications (2)

Publication Number Publication Date
EP2586053A2 EP2586053A2 (en) 2013-05-01
EP2586053A4 true EP2586053A4 (en) 2018-05-02

Family

ID=45441718

Family Applications (1)

Application Number Title Priority Date Filing Date
EP11804086.4A Withdrawn EP2586053A4 (en) 2010-06-28 2011-06-27 Customizable dispense system with smart controller

Country Status (8)

Country Link
US (1) US20130101438A1 (en)
EP (1) EP2586053A4 (en)
JP (1) JP5883856B2 (en)
KR (1) KR101810719B1 (en)
CN (1) CN102959683B (en)
SG (1) SG186725A1 (en)
TW (2) TW201613018A (en)
WO (1) WO2012006019A2 (en)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9395049B2 (en) 2013-07-23 2016-07-19 Baker Hughes Incorporated Apparatus and methods for delivering a high volume of fluid into an underground well bore from a mobile pumping unit
WO2015080081A1 (en) * 2013-11-29 2015-06-04 リソテックジャパン株式会社 Chemical liquid supply mechanism and small-sized manufacturing device
US9937990B2 (en) * 2014-08-01 2018-04-10 Circor Pumps North America, Llc Intelligent sea water cooling system
US10247363B2 (en) 2015-02-12 2019-04-02 Entegris, Inc. Smart package
US10221856B2 (en) 2015-08-18 2019-03-05 Bj Services, Llc Pump system and method of starting pump
JP6736989B2 (en) * 2016-06-07 2020-08-05 東京エレクトロン株式会社 Treatment liquid supply device, equipment unit, treatment liquid supply method and storage medium
JP6942497B2 (en) * 2016-09-08 2021-09-29 東京エレクトロン株式会社 Processing liquid supply device
CN106241246B (en) * 2016-10-09 2018-07-10 长沙高汇环保科技有限公司 Article automatic distributing retracting device control method
GB201704763D0 (en) 2017-01-05 2017-05-10 Illumina Inc
US11054803B2 (en) 2018-07-13 2021-07-06 Delta Electronics, Inc. Motor drive, production system and method thereof with quality measuring and mechanism diagnosing functions using real and virtual system modules
CN110716509B (en) * 2018-07-13 2021-06-04 台达电子工业股份有限公司 Production system with quality measurement and mechanism diagnosis functions, driver and method thereof
CN110360089B (en) * 2019-05-17 2021-07-27 保定雷弗流体科技有限公司 Network-based speed-regulating peristaltic pump system and flow regulating method thereof
DE102019115009A1 (en) * 2019-06-04 2020-12-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Print head and method of making a print head
JP7274356B2 (en) * 2019-06-11 2023-05-16 東京エレクトロン株式会社 LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD AND STORAGE MEDIA

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6708068B1 (en) * 1999-07-28 2004-03-16 Yamaha Hatsudoki Kabushiki Kaisha Machine comprised of main module and intercommunicating replaceable modules
US6912443B2 (en) * 2000-03-10 2005-06-28 David W. Duemler Modular automated assembly system
US7029238B1 (en) * 1998-11-23 2006-04-18 Mykrolis Corporation Pump controller for precision pumping apparatus
US20070077156A1 (en) * 2005-07-13 2007-04-05 Orr Troy J Double diaphragm pump and related methods
US20070125797A1 (en) * 2005-12-02 2007-06-07 James Cedrone System and method for pressure compensation in a pump
US7259675B2 (en) * 2004-03-16 2007-08-21 Newage Industries, Inc. Process equipment tracking system

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3360951B2 (en) * 1994-08-11 2003-01-07 エービービー株式会社 Painting equipment
JPH10281069A (en) * 1997-04-03 1998-10-20 Iwaki:Kk Pump unit
JP3415061B2 (en) * 1999-04-05 2003-06-09 東芝機械株式会社 Drive control method and device for electric motor for driving hydraulic pump in injection molding machine
US20060272576A1 (en) * 2005-06-02 2006-12-07 Chain-Chi Huang Piping system structure of semiconductor equipment
CN102705213A (en) * 2005-12-02 2012-10-03 恩特格里公司 System and method for correcting for pressure variations using a motor
US7850431B2 (en) * 2005-12-02 2010-12-14 Entegris, Inc. System and method for control of fluid pressure
TWI402423B (en) * 2006-02-28 2013-07-21 Entegris Inc System and method for operation of a pump
US20080257912A1 (en) * 2007-04-17 2008-10-23 Bach David T Plug and play fluid dispensing technology
JP5085236B2 (en) * 2007-08-29 2012-11-28 株式会社川本製作所 Water supply device and water supply system using water supply device
JP4932665B2 (en) * 2007-10-16 2012-05-16 東京エレクトロン株式会社 Processing liquid supply unit, liquid processing apparatus, processing liquid supply method, and storage medium

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7029238B1 (en) * 1998-11-23 2006-04-18 Mykrolis Corporation Pump controller for precision pumping apparatus
US6708068B1 (en) * 1999-07-28 2004-03-16 Yamaha Hatsudoki Kabushiki Kaisha Machine comprised of main module and intercommunicating replaceable modules
US6912443B2 (en) * 2000-03-10 2005-06-28 David W. Duemler Modular automated assembly system
US7259675B2 (en) * 2004-03-16 2007-08-21 Newage Industries, Inc. Process equipment tracking system
US20070077156A1 (en) * 2005-07-13 2007-04-05 Orr Troy J Double diaphragm pump and related methods
US20070125797A1 (en) * 2005-12-02 2007-06-07 James Cedrone System and method for pressure compensation in a pump

Also Published As

Publication number Publication date
TW201613018A (en) 2016-04-01
JP2013539202A (en) 2013-10-17
KR20130133752A (en) 2013-12-09
JP5883856B2 (en) 2016-03-15
EP2586053A2 (en) 2013-05-01
WO2012006019A2 (en) 2012-01-12
KR101810719B1 (en) 2017-12-19
US20130101438A1 (en) 2013-04-25
CN102959683B (en) 2016-04-06
TWI545669B (en) 2016-08-11
TW201212143A (en) 2012-03-16
WO2012006019A3 (en) 2012-04-05
CN102959683A (en) 2013-03-06
SG186725A1 (en) 2013-02-28

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A4 Supplementary search report drawn up and despatched

Effective date: 20180403

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